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Search indexed NASA NTRS and DOE OSTI research on propulsion, heat transfer, battery materials and energy systems. Follow report and document links to the original sources.

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At least 145 records · Page 8

Probing the high-density nuclear symmetry energy with the Ξ – / Ξ 0 ratio in heavy-ion collisions at s N N ≈ 3 GeV

Recent beam energy scan experiments at the BNL Relativistic Heavy Ion Collider by the STAR Collaboration found that hadronic interactions dominate the collective flow and the proton cumulant ratios are driven by baryon number conservation in a region of high baryon density in √ s NN = 3 GeV Au + Au reactions, indicating that the dense medium formed in such collisions is likely hadronic matter. Within an updated a relativistic transport model with momentum dependent isoscalar and isovector single-nucleon mean-field potentials corresponding to different symmetry energies at suprasaturation densities, the n/p, π – /π + , $K$ $^{0}_{s}$/K + , Σ – /Σ + , and Ξ – /Ξ 0 ratios are studied for central Au + Au collisions at √ s NN = 3 GeV, where the maximum central density reaches about (3.6–4.0) ρ 0 . The doubly strange Ξ – /Ξ 0 ratio is found to have the strongest sensitivity to the variation of high-density nuclear symmetry energy. Furthermore, the Ξ – /Ξ 0 ratio in relativistic heavy-ion reactions at √ s NN~3 GeV may help probe sensitively the poorly known symmetry energy of dense neutron-rich matter critically important for understanding various properties of neutron stars.

73 NUCLEAR PHYSICS AND RADIATION PHYSICS↗

Study of Hydrogen Fuel Cell Technology for Freight Rail Propulsion and Review of Relevant Industry Standards.

Alternatives to conventional diesel electric propulsion are currently of interest to rail operators. In the U.S., smaller railroads have implemented natural gas and other railroads are exploring hydrogen technology as a cleaner alternative to diesel. Diesel, battery, hydrogen fuel cell, or track electrification all have trade-offs for operations, economics, safety, and public acceptability. A framework to compare different technologies for specific applications is useful to optimize the desired results. Standards from the Association of American Railroads (AAR) and other industry best practices were reviewed for applicability with hydrogen fuel cell technology. Some technical gaps relate to the physical properties of hydrogen, such as embrittlement of metals, invisible flames, and low liquid temperatures. A reassessment of material selection, leak/flame detection, and thermal insulation methods is required. Hydrogen is less dense and diffuses more easily than natural gas, and liquid hydrogen is colder than liquefied natural gas. Different densities between natural gas and hydrogen require modifications to tank designs and flow rates. Leaked hydrogen will rise rather than pool on the ground like diesel, requiring a modification to the location of hydrogen tanks on rolling stock. Finally, the vibration and shock experienced in the rail environment is higher than light-duty vehicles and stationary applications for which current fuel cell technology has been developed, requiring a modification in tank design requirements and testing.

08 HYDROGEN↗

High‐Energy‐Density Chelated Chromium Flow Battery Electrolyte at Neutral pH

Abstract High‐concentration operation of redox flow batteries (RFBs) is essential for increasing their energy‐storage capacity, but non‐acidic electrolytes struggle to achieve the high concentrations of metal ions dissolved in acid, limiting the development of energy‐dense neutral pH electrolytes. We report neutral pH RFB operation of chromium 1,3‐propylenediaminetetraacetate (CrPDTA) at concentrations of 1.2 M at room temperature and 1.6 M at 40 °C, demonstrating 60% higher negolyte capacity, up to 42.9 Ah L −1 , than previously reported for non‐additive‐utilizing solutions of this promising material. With extended full cell cycling, we demonstrate the importance of buffer selection and pH when using the Fumasep E‐620(K) membrane. Finally, we expand the pH operation range of CrPDTA to pH 7, which when cycled at 100 mA cm −2 against a ferrocyanide posolyte demonstrated excellent coulombic efficiencies >99.7% and energy efficiencies >87%, while operating at almost 700 mV more negative than the thermodynamic hydrogen evolution window.

Chemistry↗

Implementation and evaluation of multi-dual mode counter-current chromatography in the CUP Modeler software

Counter-current chromatography (CCC) is a separation technique that utilizes immiscible solvent pairs as stationary and mobile phases, which imparts numerous benefits compared to solid-liquid chromatography including the ability to treat either the more-dense or less-dense solvent layer as the mobile phase. Multi-dual mode (MDM) is a CCC elution mode capable of improving the separation of closely eluting compounds by alternating upper- and lower-layer solvent flows in opposing directions within the same separation. While some effort has been made to model MDM, implementation of these models in experimental design has yet to be widely adopted. Accordingly, we further developed our previously published cell utilized partitioning (CUP) model to include MDM predictions with CCC and packaged the full suite of CUP modeling capabilities into a user-friendly, open-source tool called the CUP Modeler. The mathematical model for MDM CCC was derived and validated with experimental separation of ethyl guaiacol (EG) and ethyl phenol (EP), two compounds that co-elute in our previously demonstrated reductive catalytic fractionation (RCF) lignin monomer isolation method. The developed MDM model provided insights into the effect of multiple operating parameters - including stationary phase retention, flow rate, column efficiency, feed concentration ratio, selectivity factor, and solute distribution ratios - on the separation yields, productivity, and purities. Our model agreed with prevailing understanding of MDM but also revealed new insights including that the ideal distribution ratios for co-eluting solutes to be separated by MDM is between 1.1 and 1.5, with the lower value ideally close to 1.25. Overall, this work provides fundamental insights for MDM process design and enables broader adoption of general liquid-liquid chromatography with a new, open-source user-friendly interface.

37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CH↗

Modeling the microplastic distribution along the Delaware River Estuary: Accumulation patterns and hydrodynamic influences

Microplastic pollution is an escalating environmental concern, particularly in densely populated estuary regions, where it poses significant threats to aquatic life and human health. The dispersion patterns of microplastic particles along estuaries are influenced and complicated by multiple environmental factors such as river flow, tidal mixing, salt intrusion, and estuarine circulation. This study examines the accumulation and dispersion patterns by modeling three typical classes of microplastics in the Delaware River Estuary: synthetic fibers, sinking plastic films, and rising plastic pellets. Our findings reveal specific areas with high microplastic accumulation for each type. Notably, the upper estuary regions exhibit significant retention of rising microplastics, associated with a region with reduced along-thalweg velocities downstream of Trenton, NJ and upstream of Philadelphia, PA. Conversely, synthetic fibers and sinking plastic films accumulate in the flow convergence zone near the bottom salinity front, typically downstream of Philadelphia. All of the microplastic accumulation hot spot locations are controlled by the balance of river discharge and salinity intrusions. During the dry season, microplastic accumulation hot spots shift upstream in the estuary, whereas in the wet season, the strong river discharge pushes them downstream. Furthermore, on the other hand, tidal mixing, settling, and resuspension processes strongly impact the spreading of microplastics along the river.

Delaware River Estuary↗

Downwind dispersion of CO 2 from a major subsea blowout in shallow offshore waters

Growing interest in offshore geologic carbon sequestration (GCS) motivates risk assessment of large-scale subsea CO 2 well blowouts or pipeline ruptures. For major leaks of CO 2 from wells or pipelines, significant fluxes of CO 2 may occur from the sea surface depending on water depth. In the context of risk assessment of human health and safety, we have used previously simulated coupled well-reservoir and water column model results as a source term for dense gas dispersion of CO 2 above the sea surface. The models are linked together by one-way coupling, that is, output of one model is used as input to the next model. These first-of-their-kind coupled flow results are applicable to assessing the hazard of CO 2 to people at and downwind of the sea surface location of emission. Hazard is quantified by plotting the downwind dispersion length (DDL), which we define in the study as the distances from the emission source to the point at which the emitted CO 2 has been diluted to 5% and 1.5% in air by volume. Here results suggest that large-scale blowouts in shallow water (10 m) may cause hazardous CO 2 plumes extending on the order of several hundred meters downwind. Details of the modeling show DDL has a maximum for windspeed (at an elevation of 10 m) of approximately 5 m/s, with smaller DDL for both weaker and stronger winds. This is explained by the fact that wind favors transport but also causes dispersion; therefore there is a certain wind speed that maximizes DDL.

54 ENVIRONMENTAL SCIENCES↗

Modeling ammonia-fueled co-flow dual-channel protonic-ceramic fuel cells

This paper reports the model development for a dual-channel protonic-ceramic fuel cell (PCFC) operating on ammonia fuel. The model considers the coupled interactions of several physical and chemical processes, including three-dimensional heat conduction within the bipolar plates and the membrane-electrode assembly (MEA), one-dimensional flow within the fuel and air channels, detailed heterogeneous catalytic reactions within the porous composite anode structure, Butler–Volmer representation of the charge-transfer chemistry, and Nernst–Planck transport of three charged defects (protons, oxygen vacancies, and small polarons) within the dense electrolyte membrane. The membrane-electrode assembly is composed of a Ni-BCZYYb (BaCe 0.7 Zr 0.1 Y 0.1 Yb 0.1 O 3-δ ) anode, a BCZYYb electrolyte membrane, and a BCFZY (BaCo 0.4 Fe 0.4 Zr 0.1 Y 0.1 O 3-δ ) cathode. Chemical and physical parameters for the MEA model are established using previously published button-cell data. One aspect of the study is to investigate the partial ammonia decomposition upstream of the fuel cell. Such fuel cracking increases the H 2 content of the fuel entering the PCFC, which may have benefits. However, endothermic ammonia pyrolysis within the composite anode structure assists with thermal control of the cell. The dual-channel model can be considered as the unit cell of a full fuel-cell stack.

25 ENERGY STORAGE↗

Collaborative investigation of the internal flow and near-nozzle flow of an eight-hole gasoline injector (Engine Combustion Network Spray G)

The internal details of fuel injectors have a profound impact on the emissions from gasoline direct injection engines. However, the impact of injector design features is not currently understood, due to the difficulty in observing and modeling internal injector flows. Gasoline direct injection flows involve moving geometry, flash boiling, and high levels of turbulent two-phase mixing. In order to better simulate these injectors, five different modeling approaches have been employed to study the engine combustion network Spray G injector. Here these simulation results have been compared to experimental measurements obtained, among other techniques, with X-ray diagnostics, allowing the predictions to be evaluated and critiqued. The ability of the models to predict mass flow rate through the injector is confirmed, but other features of the predictions vary in their accuracy. The prediction of plume width and fuel mass distribution varies widely, with volume-of-fluid tending to overly concentrate the fuel. All the simulations, however, seem to struggle with predicting fuel dispersion and by inference, jet velocity. This shortcoming of the predictions suggests a need to improve Eulerian modeling of dense fuel jets.

ECN↗

Carbon flow through energycane agroecosystems established post-intensive agriculture

As part of an integrated energy and climate system, biomass production for bioenergy based on the tropical perennial C4 grass energycane can both offset fossil fuels and store soil carbon (C). We measured energycane yields, root biomass, soil C pools, and soil C stocks in a 4 year field trial and modeled C flow from plants to soils in the surface layer of no-till energycane planted after more than a century of intensive sugarcane agriculture. Aboveground yields ranged from 16.7 to 19.0 Mg C/ha over the 4 year trial. Although total C stocks did not significantly differ in the surface layer (approx. 0–20 cm) during the study, C in free and occluded light fractions decreased, whereas C in the mineral-rich dense fraction increased over 4 years. Belowground system inputs, estimated from measurements and informed by convergence in the final soil fraction model, were set to 2.5 Mg C ha -1 year -1 . With this input value, we estimated that surface soils retained photosynthetically fixed C predominantly within the mineral-associated organic matter pool for a mean and median transit time of 177 and 110 years, respectively. Although we did not model C flow to deep soil layers (approx. 0–100 cm), observed C accumulation (11.4 Mg C ha -1 year -1 ) and root growth down to 120 cm suggest that soil processes and resulting C sequestration at the surface are likely to persist deeper into the soil profile. Energycane, as a strong candidate for climate change mitigation and land degradation remediation, showed high biomass yields and allocation of resources to roots, with sequestered soil C expected to persist for over a century.

09 BIOMASS FUELS↗

Hypersonic Jets of Detonation Products in the Hydrodynamic Collapse of Macroscopic Voids

Localizing the energetic output from detonation waves has been a long-standing challenge in applied detonation physics. Here, energy localization is achieved via machined millimeter scale voids in pressed samples of PBX 9501, an HMX (1,3,5,7-Tetranitro-1,3,5,7-tetrazocane)-based plastic bonded explosive. A main mechanism of energy localization in these systems, the formation of hydrodynamic jets of dense product gases, is characterized experimentally using a semicylindrical geometry in witness plate impact experiments and streak imaging of the jet propagating into the air. The distance at which the jet is optimally developed is identified and the supersonic flow structure in the vicinity of this feature is explored using hydrocode simulations. This analysis found that most of the kinetic energy of the hydrodynamic jet arises from pressure gradients induced by geometrically mediated squeeze flow lateral to the direction of detonation propagation. This work presents a new development in the control of energetic output from detonation waves and applications to detonation wave shaping are discussed.

42 ENGINEERING↗

Rheology of bi-disperse dense fiber suspensions

While significant progress has been made in the modeling and simulation of uniform fiber suspensions, no existing model has been validated for industrially-relevant concentrated suspensions containing fibers of multiple aspect ratios. In the present work, we investigate bi-disperse suspensions with two fiber populations in varying aspect ratios in a steady shear flow using direct numerical simulations. Moreover, we measure the suspension viscosity by creating a controlled length bidispersity for nylon fibers suspended in a Newtonian fluid. Here the results showed good agreement between the experimentally measured and numerically predicted viscosity for bi-disperse suspensions. The ratio between the aspect ratio of large to small fibers (size ratio) and the volume fraction of large fibers (composition) in bi-disperse systems strongly affected the rheological behavior of the suspension. The increment of relative viscosity associated with size ratio and composition can be explained by the decrease in the maximum flowable limit or jamming volume fraction. Moreover, the relative viscosity of bi-disperse suspensions collapses, when plotted against the reduced volume fraction, demonstrating the controlling influence of the jamming fraction in bi-disperse fiber suspensions.

42 ENGINEERING↗

Restoring Historic Forest Disturbance Frequency Would Partially Mitigate Droughts in the Central Sierra Nevada Mountains

Forest thinning and prescribed fire are expected to improve the climate resilience and water security of forests in the western U.S., but few studies have directly modeled the hydrological effects of multi-decadal landscape-scale forest disturbance. By updating a distributed process-based hydrological model (DHSVM) with vegetation maps from a distributed forest ecosystem model (LANDIS-II), we simulate the water resource impacts of forest management scenarios targeting partial or full restoration of the pre-colonial disturbance return interval in the central Sierra Nevada mountains. In a fully restored disturbance regime that includes fire, thinning, and insect mortality, reservoir inflow increases by 4%–9% total and 8%–14% in dry years. At sub-watershed scales (10–100 km2), thinning dense forests can increase streamflow by >20% in dry years. In a thinner forest, increased understory transpiration compensates for decreased overstory transpiration. Consequentially, 73% of streamflow gains are attributable to decreased overstory rain and snow interception loss. Thinner forests can increase headwater peak flows, but reservoir-scale peak flows are almost exclusively influenced by climate. Uncertainty in future precipitation causes high uncertainty in future water yield, but the additional water yield attributable to forest disturbance is about five times less sensitive to annual precipitation uncertainty. This partial decoupling of the streamflow disturbance response from annual precipitation makes disturbance especially valuable for water supply during dry years. Our study can increase confidence in the water resource benefits of restoring historic forest disturbance frequencies in the central Sierra Nevada mountains, and our modeling framework is widely applicable to other forested mountain landscapes.

Boardman, Eli N. [University of Nevada, Reno, NV (↗

Portable Soft X-Ray Diagnostics for Transformative Fusion-Energy Concepts (Final Scientific/Technical Report)

A time-gated extreme-ultraviolet spectrometer was fielded on a transformative fusion-energy device, FuZE-Q at Zap Energy, Inc. (ZEI), a sheared-flow-stabilized z-pinch. Plasma emission spectra were collected in the 5–40 nm wavelength (30–250 eV) range. This was the first time a direct-vacuum-coupled, high-voltage, deposition-sensitive diagnostic was fielded on this type of dense-plasma fusion device. To overcome the special challenges of such a coupling, a unique, highly effective implementation was developed, with fast (10-ns risetime) pulsed high-voltage electronics and a multi-stage differential pumping system. This enabled the UNR spectrometer to collect three independently timed spectra per FuZE-Q shot while also protecting sensitive internal components. Analysis of line emission identified oxygen (N-, C-, B-, Be-, Li-, and He-like O), peaking in intensity shortly after maximum current (>500 kA). Spectral databases and collisional-radiative modeling have been used to identify impurities and estimate edge-plasma temperatures.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Design and Modeling of an Open-Source Baseline Floating Marine Turbine: Preprint

Marine energy resources such as river, tidal, and ocean currents can provide abundant, predictable, and clean power to both densely populated and remote communities globally. However, marine turbine technologies are still in an early stage of development. Recently, features have been added to the National Renewable Energy Laboratory's open-source wind turbine modeling tool OpenFAST to support the simulation of axial-flow marine turbines. These new features enable marine energy developers to predict the performance and safety of their turbines and allow researchers and students to advance the field through the exploration of novel designs. Developing and demonstrating the new capabilities of OpenFAST for marine turbines requires a baseline design that can be used as an example and test case. There are limited open-source turbine models suitable for this purpose. One existing baseline design is the Reference Model 1 (RM1), a fixed-bottom, dual-rotor marine turbine that was published in 2014 as part of the Department of Energy's Water Power Reference Model Project. To test and demonstrate OpenFAST's ability to model floating marine turbines, several modifications were made to the RM1. A floating platform and mooring system were designed to support a single RM1 rotor in a wide range of possible current and wave conditions. The system and model are intended to be a stable reference case and starting point for research efforts. The platform features all cylindrical members and familiar design elements from the offshore wind industry; the mooring system uses simple catenary chains. While not optimized for the lowest platform cost, the design is understandable and robust and can serve as a baseline for floating marine turbine technologies. This is a useful starting point for studies to explore new technologies or design methodologies. Additionally, the floating RM1 design enables cross-collaboration among industry, academia, and national lab researchers and serves as an educational platform for newcomers to marine energy. This short paper presents the specifications of the turbine, including its floating support structure and mooring system. The rationale behind the selection of certain design parameters is described. To enable adoption of this baseline case for research and educational efforts, an OpenFAST model of the full system has been made publicly available at https://github.com/OpenFAST/r-test/tree/main/glue-codes/openfast/MHK_RM1_Floating.

floating↗

Mechanistic Study of Controlled Zinc Electrodeposition Behaviors Facilitated by Nanoscale Electrolyte Additives at the Electrode Interface

Nanoparticle organic hybrid materials (NOHMs) are liquid-like materials composed of an inorganic core to which a polymeric canopy is ionically tethered. NOHMs have unique properties including negligible vapor pressure, high oxidative thermal stability, and the ability to bind to reactive species of interest due to the tunability of their polymeric canopy. This makes them promising multifunctional materials for a wide range of energy and environmental technologies, including electrolyte additives for electrochemical energy storage (e.g., flow batteries) and the electrochemical conversion of CO 2 to chemicals and fuels. Due to their unique transport behaviors in fluid systems, an understanding of the near-electrode surface behavior of NOHMs in electrolyte solutions and their effect on electrochemical reactions is still lacking. In this work, the complexation of zinc (Zn) by NOHMs with an ionically tethered polyetheramine canopy (HPE) (NOHM-I-HPE) was studied using attenuated total reflectance Fourier transform infrared and Carbon-13 nuclear magnetic resonance spectroscopy. Additionally, various electrochemical techniques were employed to discern the role of NOHM-I-HPE during zinc electrodeposition, and the results were compared to those of the electrochemical system containing untethered HPE polymers. Our findings confirmed that NOHM-I-HPE and HPE reversibly complex zinc in the aqueous electrolyte. NOHM-I-HPE and HPE were found to block some of the electrode active sites, reducing the overall current density during electrodeposition, while facilitating the formation of smooth zinc deposits, as revealed by surface imaging and diffraction techniques. Observed variations in the current density responses and the degree of passivation created by the NOHM-I-HPE and HPE adsorbed on the electrode surface revealed that their different packing behaviors at the electrode–electrolyte interface influence the zinc deposition mechanism. The presence of the nanoparticle and ordering offered by the NOHMs as well as the structured conformation of the polymeric canopy allowed the formation of void spaces and free volumes for enhanced transport behaviors. Furthermore, these findings provided insights into how structured electrolyte additives such as NOHMs can allow for advancements in electrolyte design for controlled deposition of metal species from energy-dense electrolytes or for other electrochemical reactions.

25 ENERGY STORAGE↗

Integration of seismic-pressure-petrophysics inversion of continuous active-seismic monitoring data for monitoring and quantifying CO 2 plume (Final Report)

The overall objective of this project is to develop and validate an integrated package of joint seismic-pressure-petrophysics inversion (jSPPI) of continuous active-source seismic monitoring dataset capable of providing real-time monitoring of CO 2 plume during geologic carbon sequestration (GCS). The three specific developments include: (a) the methodologies for fast seismic full waveform inversion of continuous active source seismic monitoring, (CASSM) datasets for simultaneously estimating velocity and attenuation, and with data assimilation; (b) joint Bayesian petrophysical inversion of seismic models and pressure data for providing and updating CO 2 saturation models; (c) the methods using multiple datasets including (Crainfield and Frio-II borehole) synthetic, laboratory, and field CASSM datasets. The outcomes of jSPPI include (a) a workflow for processing CASSM data, (b) Bayesian inversion algorithms using CASSM data and pressure response data, and (c) integration with data assimilation algorithms for continuously updating site-specific models used for prediction and reservoir management. The validation of joint FWI will be conducted using synthetic models based on the Cranfield and Frio experiments as well as field CASSM datasets collected as part of the Frio-II pilot injection. To quantify and map the mass and distribution of CO 2 (saturation), we will jointly invert velocity and attenuation measurements from the FWI with a Bayesian approach using a rock physics model for attenuation (e.g., White’s attenuation model with two selected patch sizes (White, 1976; Dutta and Seriff, 1979)). The Bayesian inversion will be applied to each time step in the CASSM survey in an updating scheme, which integrates with an ensemble of reservoir simulations at each step. A more complete experimental validation dataset will be collected as part of a mesoscale (2-3 m) gas-CO 2 injection experiment utilizing a higher frequency version of the CASSM system developed for laboratory studies; the integrated inversion will be demonstrated using this dataset which will provide both a dense geometry as well as more precise secondary confirmation measurements (e.g. saturation) typically not available in the field. The resulting real-time map of CO 2 saturation is able to provide a deeper scientific understanding of the complex, time-varying dynamics of subsurface fluid flow migration path as well as the rapid detection of CO 2 leakage hazards.

25 ENERGY STORAGE↗

Collective effects and pattern formation for directional locking of disks moving through obstacle arrays

We examine directional locking effects in an assembly of disks driven through a square array of obstacles as the angle of drive rotates from 0° to 90°. For increasing disk densities, the system exhibits a series of different dynamic patterns along certain locking directions, including one-dimensional or multiple-row chain phases and density-modulated phases. For nonlocking driving directions, the disks form disordered patterns or clusters. Here, when the obstacles are small or far apart, a large number of locking phases appear; however, as the number of disks increases, the number of possible locking phases drops due to the increasing frequency of collisions between the disks and obstacles. For dense arrays or large obstacles, we find an increased clogging effect in which immobile and moving disks coexist.

97 MATHEMATICS AND COMPUTING↗

Optimization of edge bead removal (EBR) process to enhance defect reduction in optical lithography

Defect reduction remains a critical objective in the integrated circuit manufacturing process, particularly within the highly re-entrant lithography modules where minimizing defects is crucial. Defects at the wafer edge can contaminate lithography modules and downstream processing equipment, leading to redistribution onto the wafer surface and adversely affecting overall device yield. A persistent challenge in the resist coating process is the formation of resist edge beads, driven by the strong Van der Waals attraction of excess photoresist (PR) to itself and the underlying substrate. The edge bead removal (EBR) process is a standard cleaning step designed to eliminate these edge beads and prevent potential contamination. Here, in this study, we identify the sources of EBR induced defects and additional EBR process encroachment toward edge patterning during the EBR cleaning process. This study provides a comprehensive study aimed at optimizing the EBR cleaning process to effectively eliminate EBR-induced defects, thereby enhancing overall device yield. Specifically, we identify three primary defects induced by the EBR cleaning process: rainbow-type, finger-shaped, and teardrop-type defects. Our experimental study reveals that in addition to EBR rinse time, PR cast time is crucial parameters contributing to the formation of these defects. By properly optimizing the PR cast time and EBR rinse time, we were able to remove nearly 100 % of dense clusters of defects that were easily visible even at low magnification optical microscopy throughout the wafer edge. We observed that shorter PR casting times shows edge defects caused by inefficient EBR process because of insufficient time for PR to fully settle causing superfluous PR to continue flowing toward wafer edge during EBR clearing step, leading to partial removal of PR at the wafer edge and the formation of rainbow defects. Proper optimization of both PR casting time and EBR chemistries dispense time is essential to resolve these defects, ensuring efficient EBR cleaning process and improved overall device yield.

42 ENGINEERING↗