Improved Position Sensor for Feedback Control of Levitation
An improved optoelectronic apparatus has been developed to provide the position feedback needed for controlling the levitation subsystem of a containerless-processing system. As explained, the advantage of this apparatus over prior optoelectronic apparatuses that have served this purpose stems from the use of an incandescent lamp, instead of a laser, to illuminate the levitated object. In containerless processing, a small object to be processed is levitated (e.g., by use of a microwave, low-frequency electromagnetic, electrostatic, or acoustic field) so that it is not in contact with the wall of the processing chamber or with any other solid object during processing. In the case of electrostatic or low-frequency electromagnetic levitation, real-time measurement of the displacement of the levitated object from its nominal levitation position along the vertical axis (and, in some cases, along one or two horizontal axes) is needed for feedback control of the levitating field.