Search NASA⌕ Search

SEARCH · Search NASA

Results for “Plasma materials processing”

Search indexed NASA NTRS and DOE OSTI research on propulsion, heat transfer, battery materials and energy systems. Follow report and document links to the original sources.

Quote a phrase for an exact phrase match. Source license links do not imply unrestricted reuse.

At least 145 records · Page 8

Residual stress in plasma-sprayed ceramic turbine tip and gas-path seal specimens

The residual stresses in a ceramic sheet material used for turbine blade tip gas path seals, were estimated. These stresses result from the plasma spraying process which leaves the surface of the sheet in tension. To determine the properties of plasma sprayed ZrO2-Y2O3 sheet material, its load deflection characteristics were measured. Estimates of the mechanical properties for sheet materials were found to differ from those reported for plasma sprayed bulk materials. Previously announced in STAR as N83-28380

Hendricks, R. C.↗

The Effects of Plasma Pre-Cracking on Drilling of Hard Rocks: A Single Insert Cutting Experiment

Abstract This paper studies the effects of plasma-induced cracks on rock cutting to support the concept of a plasma-integrated drag bit for accelerated geothermal drilling through hard rocks. For this, a single polycrystalline diamond compact (PDC) drilling technique is used in cutting granite to compare thrust and cutting forces between plasma-treated and untreated rock samples. The cracks are produced using underwater plasma at 80 J per pulse. This energy level does not produce visible damage to the rock. The cutting tests are conducted at a cutting speed of 12.7 m/min and four feed rates of 0.127, 0.201, 0.267, and 0.414 mm/s to represent actual drilling scenarios. The results show a general trend of reduction in both thrust and cutting forces for these feed rates, but the magnitude of reduction highly depends on the feed rate. The maximum force reduction of around 50% is found at the 0.267 mm/s feed rate with statistical significance. Cases with a higher force reduction are also found to have rougher surface topography, which indicates more excessive fracturing and, thus, a cracks-accelerated material removal process. This study provides initial evidence of using underwater plasma to increase the downhole drilling rate of hard rocks.

Engineering↗

Diamond encapsulated silicon optical fibers synthesized by chemical vapor deposition

Semiconductor optical fibers encapsulated in a protective diamond coating can theoretically lead to immense power handling capabilities and infrared functionality. Here, silicon optical fibers are grown using high pressure chemical vapor deposition before being coated by 50 μm–300 μm of diamond by microwave plasma-assisted chemical vapor deposition. This coating extends conformally around the fiber cross section with diamond crystallites in the film on the order of several micrometers. Complete coating of high-quality diamond around the fiber is indicated by scanning electron microscopy and Raman measurements. The encapsulated silicon fibers are durable enough to survive the diamond deposition process, as demonstrated by their ability to guide infrared light.

36 MATERIALS SCIENCE↗

Radio Frequency Plasma Synthesis of Boron Nitride Nanotubes (BNNTs) for Structural Applications

Boron nitride nanotubes (BNNTs) are more thermally and chemically compatible with metal- and ceramic-matrix composites than carbon nanotubes (CNTs). The lack of an abundant supply of defect-free, high-aspect-ratio BNNTs has hindered development as reinforcing agents in structural materials. Recent activities at the National Research Council - Canada (NRC-C) and the University of California - Berkeley (UC-B) have resulted in bulk synthesis of few-walled, small diameter BNNTs. Both processes employ induction plasma technology to create boron vapor and highly reactive nitrogen species at temperatures in excess of 8000 K. Subsequent recombination under controlled cooling conditions results in the formation of BNNTs at a rate of 20 g/hr and 35 g/hr, respectively. The end product tends to consist of tangled masses of fibril-, sheet-, and cotton candy-like materials, which accumulate within the processing equipment. The radio frequency plasma spray (RFPS) facility at NASA Langley (LaRC), developed for metallic materials deposition, has been re-tooled for in-situ synthesis of BNNTs. The NRC-C and UC-B facilities comprise a 60 kW RF torch, a reactor with a stove pipe geometry, and a filtration system. In contrast, the LaRC facility has a 100 kW torch mounted atop an expansive reaction chamber coupled with a cyclone separator. The intent is to take advantage of both the extra power and the equipment configuration to simultaneously produce and gather BNNTs in a macroscopic form amenable to structural material applications.

Hales, Stephen J.↗

Low-temperature etching of silicon oxide and silicon nitride with hydrogen fluoride

Etching of high aspect ratio features into alternating SiO 2 and SiN layers is an enabling technology for the manufacturing of 3D NAND flash memories. In this paper, we study a low-temperature or cryo plasma etch process, which utilizes HF gas together with other gas additives. Compared with a low-temperature process that uses separate fluorine and hydrogen gases, the etching rate of the SiO 2 /SiN stack doubles. Both materials etch faster with this so-called second generation cryo etch process. Pure HF plasma enhances the SiN etching rate, while SiO 2 requires an additional fluorine source such as PF 3 to etch meaningfully. Further, the insertion of H 2 O plasma steps into the second generation cryo etch process boosts the SiN etching rate by a factor of 2.4, while SiO 2 etches only 1.3 times faster. We observe a rate enhancing effect of H 2 O coadsorption in thermal etching experiments of SiN with HF. Ammonium fluorosilicate (AFS) plays a salient role in etching of SiN with HF with and without plasma. AFS appears weakened in the presence of H 2 O. Density functional theory calculations confirm the reduction of the bonding energy when NH 4 F in AFS is replaced by H 2 O.

37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CH↗

Autonomous hybrid optimization of a SiO 2 plasma etching mechanism

Computational modeling of plasma etching processes at the feature scale relevant to the fabrication of nanometer semiconductor devices is critically dependent on the reaction mechanism representing the physical processes occurring between plasma produced reactant fluxes and the surface, reaction probabilities, yields, rate coefficients, and threshold energies that characterize these processes. The increasing complexity of the structures being fabricated, new materials, and novel gas mixtures increase the complexity of the reaction mechanism used in feature scale models and increase the difficulty in developing the fundamental data required for the mechanism. This challenge is further exacerbated by the fact that acquiring these fundamental data through more complex computational models or experiments is often limited by cost, technical complexity, or inadequate models. In this paper, we discuss a method to automate the selection of fundamental data in a reduced reaction mechanism for feature scale plasma etching of SiO 2 using a fluorocarbon gas mixture by matching predictions of etch profiles to experimental data using a gradient descent (GD)/Nelder–Mead (NM) method hybrid optimization scheme. These methods produce a reaction mechanism that replicates the experimental training data as well as experimental data using related but different etch processes.

36 MATERIALS SCIENCE↗

Slot-Antenna/Permanent-Magnet Device for Generating Plasma

A device that includes a rectangular-waveguide/slot-antenna structure and permanent magnets has been devised as a means of generating a substantially uniform plasma over a relatively large area, using relatively low input power and a low gas flow rate. The device utilizes electron cyclotron resonance (ECR) excited by microwave power to efficiently generate plasma in a manner that is completely electrodeless in the sense that, in principle, there is no electrical contact between the plasma and the antenna. Plasmas generated by devices like this one are suitable for use as sources of ions and/or electrons for diverse material-processing applications (e.g., etching or deposition) and for ion thrusters. The absence of plasma/electrode contact essentially prevents plasma-induced erosion of the antenna, thereby also helping to minimize contamination of the plasma and of objects exposed to the plasma. Consequently, the operational lifetime of the rectangular-waveguide/ slot-antenna structure is long and the lifetime of the plasma source is limited by the lifetime of the associated charged-particle-extraction grid (if used) or the lifetime of the microwave power source. The device includes a series of matched radiating slot pairs that are distributed along the length of a plasma-source discharge chamber (see figure). This arrangement enables the production of plasma in a distributed fashion, thereby giving rise to a uniform plasma profile. A uniform plasma profile is necessary for uniformity in any electron- or ion-extraction electrostatic optics. The slotted configuration of the waveguide/ antenna structure makes the device scalable to larger areas and higher powers. All that is needed for scaling up is the attachment of additional matched radiating slots along the length of the discharge chamber. If it is desired to make the power per slot remain constant in scaling up, then the input microwave power must be increased accordingly. Unlike in prior ECR microwave plasma-generating devices, there is no need for an insulating window on the antenna. Such windows are sources of contamination and gradually become ineffective as they become coated with erosion products over time. These characteristics relegate prior ECR microwave plasma-generating devices to non-ion beam, non-deposition plasma applications. In contrast, the lack of need for an insulating window in the present device makes it possible to use the device in both ion-beam (including deposition) and electron-beam applications. The device is designed so that ECR takes place above each slot and the gradient of the magnetic field at each slot is enough to prevent backflow of plasma.

Foster, John E.↗

Fabrication of High Temperature Cermet Materials for Nuclear Thermal Propulsion

Processing techniques are being developed to fabricate refractory metal and ceramic cermet materials for Nuclear Thermal Propulsion (NTP). Significant advances have been made in the area of high-temperature cermet fuel processing since RoverNERVA. Cermet materials offer several advantages such as retention of fission products and fuels, thermal shock resistance, hydrogen compatibility, high conductivity, and high strength. Recent NASA h d e d research has demonstrated the net shape fabrication of W-Re-HfC and other refractory metal and ceramic components that are similar to UN/W-Re cermet fuels. This effort is focused on basic research and characterization to identify the most promising compositions and processing techniques. A particular emphasis is being placed on low cost processes to fabricate near net shape parts of practical size. Several processing methods including Vacuum Plasma Spray (VPS) and conventional PM processes are being evaluated to fabricate material property samples and components. Surrogate W-Re/ZrN cermet fuel materials are being used to develop processing techniques for both coated and uncoated ceramic particles. After process optimization, depleted uranium-based cermets will be fabricated and tested to evaluate mechanical, thermal, and hot H2 erosion properties. This paper provides details on the current results of the project.

Hickman, Robert↗

Plasma-driven solution electrolysis

Plasmas interacting with liquids enable the generation of a highly reactive interfacial liquid layer due to a variety of processes driven by plasma-produced electrons, ions, photons, and radicals. These processes show promise to enable selective, efficient, and green chemical transformations and new material synthesis approaches. While many differences are to be expected between conventional electrolysis and plasma–liquid interactions, plasma–liquid interactions can be viewed, to a first approximation, as replacing a metal electrode in an electrolytic cell with a gas phase plasma. For this reason, we refer to this method as plasma-driven solution electrochemistry (PDSE). In this Perspective, we address two fundamental questions that should be answered to enable researchers to make transformational advances in PDSE: How far from equilibrium can plasma-induced solution processes be driven? and What are the fundamental differences between PDSE and other more traditional electrochemical processes? Different aspects of both questions are discussed in five sub-questions for which we review the current state-of-the art and we provide a motivation and research vision.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Effect of Plasma Sheaths on Earth Re-entry MHD Processes

The first study of the full coupling between the aerothermodynamics, the magnetohydrodynamics, and the plasma sheaths within earth entry flows is here per-formed. The problem tackled herein is representative of a force-generating MHD patch located between the plenum and the frustum of a capsule entering the earth’s atmosphere at Mach 34. The reactions are obtained from a modified 11-species Park chemical solver. The physical model fully couples the drift-diffusion model for the sheaths to the multispecies Navier-Stokes equations for the plasma flow. The Hall and ion slip effects are taken into consideration within the plasma flow and within the sheaths. The effect of the electrode material on the MHD process is studied. Using thoriated tungsten instead of graphite leads to a four-fold increase in the Lorentz forces and also leads to significantly reduced heat fluxes on the cathode. This is attributed to the much higher electrical conductivity of the thoriated tungsten sheath reducing by orders of magnitude the plasma electrical resistance near the surfaces.

Bernard Parent↗

Pointing stabilization of a 1 Hz high-power laser via machine learning

Abstract High-power lasers are vital for particle acceleration, imaging, fusion and materials processing, requiring precise control and high-energy delivery. Laser plasma accelerators (LPAs) demand laser positional stability at focus to ensure consistent electron beams in applications such as X-ray free-electron lasers and high-energy colliders. Achieving this stability is especially challenging for the low-repetition-rate lasers in current LPAs. We present a machine learning method that predicts and corrects laser pointing instabilities in real-time using a high-frequency pilot beam. By preemptively adjusting a correction mirror, this approach overcomes traditional feedback limits. Demonstrated on the BELLA petawatt laser operating at the terawatt level (30 mJ amplification), our method achieved root mean square pointing stabilization of 0.34 and 0.59 $\unicode{x3bc} \mathrm{rad}$ in the x and y directions, reducing jitter by 65% and 47%, respectively. This is the first successful application of predictive control for shot-to-shot stabilization in low-repetition-rate laser systems, paving the way for full-energy petawatt lasers and transformative advances across science, industry and security.

Amodio, Alessio↗

The development of a high-capacity instrument module heat transport system, appendixes

Data sheets provide temperature requirements for 82 individual instruments that are under development or planned for grouping on a space platform or pallet. The scientific objectives of these instrument packages are related to solar physics, space plasma physics, astronomy, high energy astrophysics, resources observations, environmental observations, materials processing, and life sciences. System specifications are given for a high capacity instrument module heat transport system to be used with future payloads.

Source record↗

Science in orbit: The shuttle and spacelab experience, 1981-1986

Significant achievements across all scientific disciplines and missions for the first six years of Shuttle flights are presented. Topics covered include science on the Space Shuttle and Spacelab, living and working in space, studying materials and processes in microgravity, observing the sun and earth, space plasma physics, atmospheric science, astronony and astrophysics, and testing new technology in space. Future research aboard the Shuttle/Spacelab is also briefly mentioned.

Source record↗

Cable Discharge System for fundamental detonator studies

Sandia National Laboratories has recently completed the modification and installation of a cable discharge system (CDS) which will be used to study the physics of exploding bridgewire (EBW) detonators and exploding foil initiators (EFI or slapper). Of primary interest are the burst characteristics of these devices when subjected to the constant current pulse delivered by this system. The burst process involves the heating of the bridge material to a conductive plasma and is essential in describing the electrical properties of the bridgewire foil for use in diagnostics or computer models. The CDS described herein is capable of delivering up to an 8000 A pulse of 3 micron duration. Experiments conducted with the CDS to characterize the EBW and EFI burst behavior are also described. In addition, the CDS simultaneous VISAR capability permits updating the EFI electrical Gurney analysis parameters used in our computer simulation codes. Examples of CDS generated data for a typical EFI and EBW detonator are provided.

Peevy, Gregg R.↗

Aerospace Applications of Non-Equilibrium Plasma

Nonequilibrium plasma/non-thermal plasma/cold plasmas are being used in a wide range of new applications in aeronautics, active flow control, heat transfer reduction, plasma-assisted ignition and combustion, noise suppression, and power generation. Industrial applications may be found in pollution control, materials surface treatment, and water purification. In order for these plasma processes to become practical, efficient means of ionization are necessary. A primary challenge for these applications is to create a desired non-equilibrium plasma in air by preventing the discharge from transitioning into an arc. Of particular interest is the impact on simulations and experimental data with and without detailed consideration of non-equilibrium effects, and the consequences of neglecting non-equilibrium. This presentation will provide an assessment of the presence and influence of non-equilibrium phenomena for various aerospace needs and applications. Specific examples to be considered will include the forward energy deposition of laser-induced non-equilibrium plasmoids for sonic boom mitigation, weakly ionized flows obtained from pulsed nanosecond discharges for an annular Hall type MHD generator duct for turbojet energy bypass, and fundamental mechanisms affecting the design and operation of novel plasma-assisted reactive systems in dielectric liquids (water purification, in-pipe modification of fuels, etc.).

Nonequilibrium Plasma↗

Foundations of machine learning for low-temperature plasmas: methods and case studies

Abstract Machine learning (ML) and artificial intelligence have proven to be an invaluable tool in tackling a vast array of scientific, engineering, and societal problems. The main drivers behind the recent proliferation of ML in practically all aspects of science and technology can be attributed to: (a) improved data acquisition and inexpensive data storage; (b) exponential growth in computing power; and (c) availability of open-source software and resources that have made the use of state-of-the-art ML algorithms widely accessible. The impact of ML on the field of low-temperature plasmas (LTPs) could be particularly significant in the emerging applications that involve plasma treatment of complex interfaces in areas ranging from the manufacture of microelectronics and processing of quantum materials, to the LTP-driven electrification of the chemical industry, and to medicine and biotechnology. This is primarily due to the complex and poorly-understood nature of the plasma-surface interactions in these applications that pose unique challenges to the modeling, diagnostics, and predictive control of LTPs. As the use of ML is becoming more prevalent, it is increasingly paramount for the LTP community to be able to critically analyze and assess the concepts and techniques behind data-driven approaches. To this end, the goal of this paper is to provide a tutorial overview of some of the widely-used ML methods that can be useful, amongst others, for discovering and correlating patterns in the data that may be otherwise impractical to decipher by human intuition alone, for learning multivariable nonlinear data-driven prediction models that are capable of describing the complex behavior of plasma interacting with interfaces, and for guiding the design of experiments to explore the parameter space of plasma-assisted processes in a systematic and resource-efficient manner. We illustrate the utility of various supervised, unsupervised and active learning methods using LTP datasets consisting of commonly-available, information-rich measurements (e.g. optical emission spectra, current–voltage characteristics, scanning electron microscope images, infrared surface temperature measurements, Fourier transform infrared spectra). All the ML demonstrations presented in this paper are carried out using open-source software; the datasets and codes are made publicly available. The FAIR guiding principles for scientific data management and stewardship can accelerate the adoption and development of ML in the LTP community.

Physics↗

Automation of Nanoparticle Synthesis Processes in a Plasma Environment Using LabVIEW

This work presents an automated control system for the synthesis of nanomaterials by plasma-enhanced chemical vapor deposition (PECVD), implemented using the LabVIEW software environment. The main objective of the study is to develop an integrated hardware-software platform that enables sequential control of the key stages of the PECVD process, including vacuum chamber preparation, pressure monitoring, working gas supply, plasma ignition, power matching, cyclic nanomaterial growth, and optical monitoring of nanoparticles in the plasma environment. The use of LabVIEW made it possible to integrate actuator control, experimental parameter acquisition, and realtime process visualization within a single automated system. The automated cycle begins with evacuation of the reaction chamber to a predefined base pressure. Transition to the next stage is permitted only after the specified pressure threshold has been reached, ensuring reproducible initial conditions for each experiment. The program then controls the supply of the working gas through mass flow controllers (MFCs). In this work, two gas-flow control modes were considered: analog control using a 0-5 V voltage signal and digital communication via RS-232 interface. It was shown that the analog approach requires accurate scaling of the control voltage, since applying 5 V corresponds to full-scale opening of the controller and results in the maximum gas flow. In contrast, the RS232 interface enables the gas flow rate to be specified directly in sccm, improving the accuracy, flexibility, and convenience of gas-environment control. After pressure stabilization, LabVIEW initiates RF plasma ignition and executes the RF matching algorithm aimed at minimizing reflected power and improving the stability of the plasma process. A separate software module implements the cyclic nanomaterial growth mode, in which the plasma-on time, plasma duration, and total number of synthesis cycles are predefined. This approach makes it possible to control material accumulation on the substrate and to correlate the process parameters with the morphological characteristics of the resulting nanostructures. The final module of the system is designed for optical monitoring of the nanoparticle cloud density in dusty plasma. For this purpose, the change in the intensity of laser radiation passing through the plasma region is recorded using a photodetector and a Keithley 2401 measuring unit connected to LabVIEW via RS-232 interface. The difference between the initial and modified optical signal intensity is used as a diagnostic parameter characterizing the formation and temporal evolution of nanoparticles. The developed system demonstrates that LabVIEW can be effectively applied not only for the automation of individual instruments, but also for the implementation of a complete digital control cycle for PECVD-based nanomaterial synthesis.

PECVD↗

The Effects of Substrate Material and Thermal Processing Atmosphere on the Strength of PS304: A High Temperature Solid Lubricant Coating

PS304, a plasma spray deposited solid lubricant coating developed for high temperature sliding contacts was deposited on nine different substrate metals, heat treated at 650C in either air or argon and subsequently tested for strength using a commercially available pull-off adhesion test. Some samples were examined metallographically to help elucidate and explain the results. As deposited coatings exhibit pull-off strengths typically between 16 and 20 MPa with failure occuring (cohesively) within the coating. Heat treatment in argon at 650 C results in a slight increase in coating (cohesive) strength of about 30 percent to 21 to 27 MPa. Heat treatment in air at 650 C results in a dramatic increase in strength to over 30 MPa, exceeding the strength of the epoxy used in the pull test. Cross section metallographic analyses show that no microstructural coating changes occur following the argon heat treatments, however, exposure to air at 650C gives rise to the formation of a second chromium-rich phase precipitate within the PS304 NiCr constituent which provides a strengthening effect and a slight (approximately 5 percent) coating thickness increase. Subsequent heat treatments do not result in any further coating changes. Based upon these studies, PS304 is a suitable coating for use on a wide variety of high temperature substrates and must be heat treated following deposition to enhance strength and ensure dimensional stability.

DellaCorte, Christopher↗