Fabrication of light-weighted Si/SiC lidar mirrors
Small models of lightweight Si/SiC lidar mirrors have been fabricated via a scalable and cost-effective chemical vapor deposition (CVD) process. These mirrors are about 7.5 cm in diameter and consist of a Si-cladded SiC faceplate and lightweight structure made of SiC. The lightweight structure consists of an outer hexagonal cell with six triangular inner cells. The mirrors were polished to a figure better than 1/5 of a wave and a finish of better than 5A rms. The CVD route to fabrication of mirrors is fast and has the potential to yield several mirrors in a few weeks time from a signel reactor.