Search NASA⌕ Search

SEARCH · Search NASA

Results for “Ultraviolet patterning”

Search indexed NASA NTRS and DOE OSTI research on propulsion, heat transfer, battery materials and energy systems. Follow report and document links to the original sources.

Quote a phrase for an exact phrase match. Source license links do not imply unrestricted reuse.

At least 145 records · Page 8
All sourcesNASA NTRSDOE OSTI
DOE OSTI2024

Characterization of latent image of electron beam resist via critical-dimension resonant soft X-ray scattering

Metrology plays a crucial role in semiconductor manufacturing by providing accurate and precise measurement and characterization of critical parameters. With the development of high-resolution extreme ultraviolet lithography (EUVL) processes, critical dimensions are shrinking to sub-10 nm. Resist materials encounter the challenge of providing heightened sensitivity and a handle on exacerbating stochastic variations. A comprehensive understanding of the chemical profile of the latent image is pivotal for mitigating stochastic effects and optimizing pattern quality. However, the subtle differences in chemistry between the exposed and unexposed regions of the resists make it extremely challenging to characterize the latent images with sub-nanometer precision. Here, we develop the metrology with critical-dimension resonant soft X-ray scattering (CD-RSoXS) to probe the chemical profiles of latent images stored in resist after exposure. The combination of absorption spectroscopy and enhanced scattering contrast makes it possible to characterize the subtle structural and chemical variations in the latent image. Moreover, the results of the measurements are compared with the simulations with a finite element method–based Maxwell solver to extract a detailed profile of the latent and developed images. We demonstrate that the CD-RSoXS technique can provide valuable insights into the high spatial resolution and local chemical sensitivity simultaneously, which is crucial to understanding the resolution limits and stochastic effects in EUVL processes.

36 MATERIALS SCIENCE↗
NASA NTRS1974

A photometric study of Saturn and its rings

A 72-in. telescope and a polarimeter of the Wollaston type with a focal-plane scanning mechanism were used in the investigations reported. On a few occasions observations were made with a 42-in. reflector. The polarization data obtained are presented as vectors superimposed on a drawing of the planet. It is concluded that in the ultraviolet and close to opposition the vectors are consistently radial and decrease to nearly zero near the center of the disk. The polarization is essentially the same at all limbs. It is pointed out that under good seeing conditions Saturn presents a consistent though somewhat complicated, photometric pattern.

Hall, J. S.↗
NASA NTRS1978

Magnetic loops, downflows, and convection in the solar corona

Optical and extreme-ultraviolet observations of solar loop structures show that flows of cool plasma from condensations near the loop apex are a common property of loops associated with radiations whose maximum temperature is greater than approximately 7000 K and less than approximately 3,000,000 K. It is suggested that the mass balance of these structures indicates reconnection by means of plasma motion across field lines under rather general circumstances (not only after flares). It is shown that the cool material has lower gas pressure than the surrounding coronal medium. The density structure of the bright extreme ultraviolet loops suggests that downflows of cool gas result from isobaric condensation of plasma that is either out of thermal equilibrium with the local energy deposition rate into the corona, or is thermally unstable. The evidence is thought to indicate that magnetic fields act to induce a pattern of forced convection.

Foukal, P.↗
NASA NTRS1986

Interstellar absorption lines in the spectrum of sigma Sco using Copernicus observations

Since the launch of Copernicus in 1972, studies have been made of the depletion of gas-phase elements onto dust grains. A few stars have been studied in detail, resulting in a standard depletion pattern which has since been used for comparison. Recent developments, however, have suggested that this standard pattern may need to be re-examined. Some weak, semi-forbidden lines were detected recently which may be able to resolve some of the ambiguities. Studies of single elements have shown that depletion of carbon and oxgyen are much smaller than previously determined. The high resolution ultraviolet spectral scans of sigma Sco were originally made in 1973, but have only recently been analyzed. All these stars are bright and moderately reddened. All four stars will be analyzed in detail, but sigma Sco is the first one completed. The data has broad coverage of ions, making these stars excellent candidates for determination of accurate depletions. A profile-fitting analysis was used rather than curves-of-growth in order to determine separate abundances and depletions in components separated by several km/sec.

Allen, M. M.↗
NASA NTRS1993

Fluorescence observations of LDEF exposed materials as an indicator of induced material reactions

Observations and measurements of induced changes in the fluorescent emission of materials exposed to the space environment on the Long Duration Exposure Facility (LDEF) have revealed systematic patterns of material-dependent behavior. These results have been supplemented by inspection of similar materials exposed on previous Space Shuttle Missions and in laboratory testing. The space environmental factors affecting the fluorescence of exposed materials have been found to include (but are not necessarily limited to) solar ultraviolet (UV) radiation, atomic oxygen (AO), thermal vacuum exposure, and synergistic combinations of these factors. Observed changes in material fluorescent behavior include stimulation, quenching, and spectral band shifts of emission. For example, the intrinsic yellow fluorescence of zinc oxide pigmented thermal control coatings undergoes quenching as a result of exposure, while coloration is stimulated in the fluorescent emission of several polyurethane coating materials. The changes in fluorescent behavior of these materials are shown to be a revealing indicator of induced material reactions as a result of space environmental exposure.

Linton, Roger C.↗
NASA NTRS1996

A New Method of Deriving Time-Averaged Tropospheric Column Ozone over the Tropics Using Total Ozone Mapping Spectrometer (TOMS) Radiances: Intercomparison and Analysis Using TRACE A Data

Error analysis of archived total 03 from total ozone mapping spectrometer (TOMS) (version 6) presented. Daily total 03 maps for the tropics, from the period October 6-21, 1992, are derived from TOMS radiances following correction for these errors. These daily maps, averaged together, show a wavelike feature, which is observed in all latitude bands, underlying sharp peaks which occur at different longitudes depending on the latitude. The wave pattern is used to derive both time-averaged stratospheric and tropospheric 03 fields. The nature of the wave pattern (stratospheric or tropospheric) cannot be determined with certainty due to missing data (no Pacific sondes, no lower stratospheric Stratospheric Aerosol and Gas Experiment (SAGE) ozone for 18 months after the Mt. Pinatubo eruption) and significant uncertainties in the corroborative satellite record in the lower stratosphere (solar backscattered ultraviolet (SBUV), microwave limb sounder (MLS)). However, the time- averaged tropospheric ozone field, based on the assumption that the wave feature is stratospheric, agrees within 10% with ultraviolet differential absorption laser Transport and Atmospheric Chemistry near the Equator-Atlantic) (TRACE A) 03 measurements from the DC-8 and with ozonesonde measurements over Brazzaville, Congo, Ascension Island, and Natal, Brazil, for the period October 6-21, 1992. The derived background (nonpolluted) Indian Ocean tropospheric ozone amount, 26 Dobson units (DU), agrees with the cleanest African ozonesonde profiles for September-October 1992. The assumption of a totally tropospheric wave (flat stratosphere) gives 38 DU above the western Indian Ocean and 15-40% disagreements with the sondes. Tropospheric column 03 is high from South America to Africa, owing to interaction of dynamics with biomass burning emissions. Comparison with fire distributions from advanced very high resolution radiometer (AVHHR) during October 1992 suggests that tropospheric 03 produced from biomass burning in South America and Africa dominates the 03 budget in the tropical southern hemisphere during the study period.

Kim, J. H.↗
DOE OSTI2021

Hotel Room Computational Fluid Dynamics to Investigate Airborne Pathogen Dispersal Patterns

A hotel room unit consisting of a bedroom and bathroom was modelled using computational fluid dynamics (CFD) to investigate airborne pathogen dispersal patterns. The full-scale model includes a ‘typical’ hotel room configuration, furniture, and vents. The air sources and sinks include a bathroom vent, a heating, ventilation, and cooling (HVAC) unit located in the bedroom, and a ½” gap at the bottom of the entry door. In addition, the entry door and window can be opened or closed, as desired. Three key configuration simulations were conducted: 1) both the bathroom vent and HVAC were on, 2) only the HVAC was on, and 3) only the bathroom vent was on. If the HVAC air is from a fresh, clean source, or passes through a high-efficiency filter/UV device, then the first configuration is the safest, as contaminated air is highly reduced. The second configuration is also safe, but does not benefit from the outsourcing of potentially-infected air, such as contaminated air flowing through an ineffective filter. The third configuration should be avoided, as the bathroom vent causes air to flow from the hallway, which can be of dubious origin. The CFD simulations also showed that recirculation and swirling regions tend to accumulate the largest concentrations of heavier airborne particles, pathogens, dust, etc. These regions are associated with the largest turbulence kinetic energy (TKE) , and tend to occur in areas with flow recirculation and corners. Therefore, TKE presents a reasonable metric to guide the strategic location of pathogen mitigation devices. The simulations show complex flow patterns with distinct upper and lower flow regions, swirling flow, and significant levels of turbulent mixing. These simulations provide intriguing insights that can be applied to help mitigate pathogen aerosol dispersal, generate building design guidelines, as well as provide insights for the strategic placement of mitigation devices, such as ultraviolet (UV) light, supplemental fans, and filters.

54 ENVIRONMENTAL SCIENCES↗
DOE OSTI2020

Controlled Reduction of Graphene Oxide Using Sulfuric Acid

Sulfuric acid under different concentrations and with the addition of SO 3 (fuming sulfuric acid) was studied as a reducing agent for the production of reduced graphene oxide (RGO). Three concentrations of sulfuric acid (1.5, 5, and 12 M), as well as 12 M with 30% SO 3 , were used. The reduction of graphene oxide increased with H 2 SO 4 concentration as observed by Fourier-transformed infrared spectroscopy and X-ray photoelectron spectroscopy. It was observed that GO lost primarily epoxide functional groups from 40.4 to 9.7% and obtaining 69.8% carbon when using 12 M H 2 SO 4 , without leaving sulfur doping. Additionally, the appearance of hexagonal domain structures observed in transmission electron microscopy and analyzed by selected area electron diffraction patterns confirmed the improvement in graphitization. Although the addition of SO 3 in H 2 SO 4 improved the GO reduction with 74% carbon, as measured by XPS, the use of SO 3 introduced sulfur doping of 1.3%. RGO produced with sulfuric acid was compared with a sample obtained via ultraviolet (UV) irradiation, a very common reduction route, by observing that the RGO produced with sulfuric acid had a higher C/O ratio than the material reduced by UV irradiation. This work showed that sulfuric acid can be used as a single-step reducing agent for RGO without sulfur contamination.

37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CH↗
NASA NTRS1997

Effects of Convection During the Photodeposition of Polydiacetylene Thin Films

In this work, we describe a preliminary investigation of buoyancy-driven heat transfer during the growth of thin films from solution following exposure to ultraviolet (UV) light. Irradiation of the growth cell occurs at various directions relative to gravitational acceleration. Through numerical computations, the steady-state flow and temperature profiles are simulated during the course of light exposure. Light-induced polymerization accompanies a heat transfer process through a fairly complicated recirculating flow pattern. A scaling analysis shows that buoyancy-driven velocities only reduce by a factor of 10 for gravity levels as low as 10(exp -2)g(sub 0). Paley et al. observe what appears to be gravitationally sensitive particle development and inclusion in thin films using a photodeposition process. From this study it is clear that production of homogeneous thin films would have to occur in the environment of a complicated flow pattern of recirculation with a nonuniform temperature distribution. Indeed, even when irradiation occurs from the top of the cell, the most stable stratified cell orientation, defects remain in our films due to the persistence of buoyancy-driven convection. To achieve homogeneity, minimal scattering centers, and possible molecular order, photodeposition of polymer films by UV light exposure must proceed in a reduced-convection environment. Fluid mechanics simulations are useful for establishing gravitational sensitivity to this recently discovered process (patent # 5,451,433) for preparing thin films having quite promising nonlinear optical characteristics.

Frazier, D. O.↗
NASA NTRS1997

Effects of Convection during the Photodeposition of Polydiacetylene Thin Films

In this work, we describe a preliminary investigation of buoyancy-driven heat transfer during the growth of thin films from solution following exposure to ultraviolet (UV) light. Irradiation of the growth cell occurs at various directions relative to gravitational acceleration. Through numerical computations, the steady-state flow and temperature profiles are simulated during the course of light exposure. Light-induced polymerization accompanies a heat transfer process through a fairly complicated recirculating flow pattern. A scaling analysis shows that buoyancy-driven velocities only reduce by a factor of 10 for gravity levels as low as 10(exp -2) g(sub 0). Paley et al. observe what appears to be gravitationally sensitive particle development and inclusion in thin films using a photodeposition process. From this study, it is clear that production of homogeneous thin films would have to occur in the environment of a complicated flow pattern of recirculation with a nonuniform temperature distribution. Indeed, even when irradiation occurs from the top of the cell, the most stable stratified cell orientation, defects remain in our films due to the persistence of buoyancy-driven convection. To achieve homogeneity, minimal scattering centers, and possible molecular order, photodeposition of polymer films by UV light exposure must proceed in a reduced-convection environment. Fluid mechanics simulations are useful for establishing gravitational sensitivity to this recently discovered process (patent # 5,451,433) for preparing thin films having quite promising nonlinear optical characteristics.

Frazier, D. O.↗
NASA NTRS2001

Cross-Correlation Analysis of UV Profile Variations and Nonradial Pulsations in Be Stars

This study is an investigation of the role of photospheric nonradial pulsations in the mass loss processes of Be stars. Some 18 Be stars were the focus of intensive, multi-wavelength campaigns between 1985 and 1996 with the NASA/ESA International Ultraviolet Explorer Satellite (IUE) . The campaigns were designed to monitor variations in the UV flux and stellar wind lines with near simultaneous, high signal-to-noise, optical spectroscopy of photospheric lines. The high quality, ground-based spectra were required to record the subtle, blue-to-red moving bump patterns in spectral line profiles that result from nonradial pulsations. We found that the same fine variations in the UV photospheric lines can be extracted from noisy IUE spectra by cross-correlating each target spectrum with a narrow-lined standard spectrum. Time series analyses of the cross-correlation functions then reveal the periodic signals, amplitudes, phases, and modal identifications of the pulsations. Our goals are to compare such results from UV and optical time series in order to model the stellar photospheric temperature and velocity fluctuations, and to search for correlated UV wind line variations to determine whether there is a connection between pulsation and mass loss.

Gies, Douglas R.↗
NASA NTRS2022

Seasonal Variation of Thermospheric Composition Observed by NASA GOLD

We examine characteristics of the seasonal variation of thermospheric composition using column number density ratio ∑O/N(2) observed by the NASA Global Observations of Limb and Disk (GOLD) mission from low-mid to mid-high latitudes. We also use ∑O/N(2) derived from the Global Ultraviolet Imager (GUVI) limb measurements onboard the Thermosphere Ionosphere Mesosphere Energetics and Dynamics (TIMED) satellite and estimated by the NRLMSISE-00 empirical model to aid our investigation. We found that the ∑O/N(2) seasonal variation is hemispherically asymmetric: in the southern hemisphere, it exhibits the well-known annual and semiannual pattern, with highs near the equinoxes, and primary and secondary lows near the solstices. In the northern hemisphere, it is dominated by an annual variation, with a minor semiannual component with the highs shifting toward the wintertime. We also found that the durations of the December and June solstice seasons in terms of ∑O/N(2) are highly variable with longitude. Our hypothesis is that ion-neutral collisional heating in the equatorial ionization anomaly region, ion drag, and auroral Joule heating play substantial roles in this longitudinal dependency. Finally, the rate of change in ∑O/N(2) from one solstice season to the other is dependent on latitude, with more dramatic changes at higher latitudes.

thermosphere↗
NASA NTRS2020

The Advanced Spectral Library (ASTRAL): Abundance Analysis of the Chemically Peculiar Star HR 465

This paper presents the results of the spectrum analysis of the B-type magnetic chemically peculiar star HR 465. HR 465 shows unusual abundance patterns that vary with a period of 21.5 yr. Our observations are recorded at ϕ = 0.45, 0.68, and 0.85 of the spectroscopic period, where ϕ = 0 represents the phase of maximum flux in the photometric y-band. Synthetic spectra, computed using an LTE atmosphere model, are fit to high-resolution ultraviolet Hubble Space Telescope (ϕ = 0.45) spectra obtained as part of the Advanced Spectral Library Project: Hot Stars program. The ultraviolet data are supplemented by high-resolution optical spectra (ϕ = 0.68 and 0.85) recorded at the Nordic Optical Telescope with the SOFIN spectrograph. The optical data are used as a complement to the high line-density ultraviolet spectrum to derive accurate abundances for elements without spectral lines in the ultraviolet and to improve the abundance phase coverage for many atoms/ions. This analysis presents abundance results for more than 70 atoms/ions and confirms parts of the abundance characteristics previously reported where elements with high mass numbers show significant abundance enhancements compared with solar values while some of the lighter elements show abundance deficiencies. In addition, our measured abundances are consistent with the periodic variability for chromium and rare-earth elements. Our results are compared with earlier investigations of this peculiar object to constrain stellar abundance and diffusion.

Krister E. Nielsen↗
DOE OSTI2022

Infrared nanospectroscopy characterization of metal oxide photoresists

Implementation of extreme ultraviolet (EUV) lithography in high-volume semiconductor manufacturing requires a reliable and scalable EUV resist platform. A mechanistic understanding of the pros and cons of different EUV resist materials is critically important. However, most material characterization methods with nanometer resolution use an x-ray photon or electron beam as the probe, which often cause damage to the photoresist film during measurement. Here, we illustrated the use of non-destructive infrared nanospectroscopy [or nano-Fourier-Transform infrared spectroscopy (nano-FTIR)] to obtain spatially resolved composition information in patterned photoresist films. Further, clear evidence of exposure-induced chemical modification was observed at a spatial resolution down to 40 nm, well below the diffraction limit of infrared light. With improvements, such a nano-FTIR technique with nanoscale spatial resolution, chemical sensitivity, and minimal radiation damage can be a promising candidate for the fundamental study of material properties relevant to EUV lithography.

36 MATERIALS SCIENCE↗
NASA NTRS1984

Variability of the ultraviolet spectrum of BL Lacertae objects

Attention is given to repeated observations of the two nearby BL Lac objects, Mrk 421 and PKS 0521-36, comparing the temporal behavior of their continuum in the 1300-3000 A range with that observed in intrinsically bright BL Lac objects and in Seyfert galaxies. Also discussed are the emission lines in the UV and optical spectrum of PKS 0521-36. It is suggested that the difference in variability pattern between BL Lac objects and Seyfert galaxies may be due to differences in the properties of the nonthermal continuum related to differences in accretion regimes, although it is more probably due to the presence of different continuum components in Seyfert galaxies. In BL Lac objects, the UV spectrum is likely to be synchrotron radiation from an optically thin source.

Ulrich, M. H.↗
NASA NTRS1994

Atomic oxygen durability evaluation of the flexible batten for the photovoltaic array mast on Space Station

A test program was conducted at the National Aeronautics and Space Administration's Lewis Research Center (LeRC) to evaluate the long term low Earth orbital (LEO) atomic oxygen (AO) durability of a flexible (fiberglass-epoxy composite) batten. The flexible batten is a component used to provide structural rigidity in the photovoltaic array mast on Space Station. The mast is used to support and articulate the photovoltaic array, therefore, the flexible batten must be preloaded for the 15 year lifetime of an array blanket. Development hardware and composite materials were evaluated in ground testing facilities for AO durability and dynamic retraction-deployment cyclic loading representative of expected full life in-space application. The CV1144 silicone (AO protective) coating was determined to provide adequate protection against AO degradation of the composite material and provided fiber containment, thus the structural integrity of the flexible batten was maintained. Both silicone coated and uncoated flexible battens maintained load carrying capabilities. Results of the testing did indicate that the CV1144 silicone protective coating was oxidized by AO reactions to form a brittle glassy (SiO2) skin that formed cracking patterns on all sides of the coated samples. The cracking was observed in samples that were mechanically stressed as well as samples in non-stressed conditions. The oxidized silicon was observed to randomly spall in small localized areas, on the flexible battens that underwent retraction-deployment cycling. Some darkening of the silicon, attributed to vacuum ultraviolet (VUV) radiation, was observed.

Stidham, Curtis R.↗
NASA NTRS1994

A sounding rocket program in extreme and far ultraviolet interferometry

A self-compensating, all reflection interferometric (SCARI) spectrometer was developed that can provide high resolution measurements of spectral features at any wavelength. Several mechanical components were developed that aid the instrument's performance at the short wavelength range. Examples include an optical bench and modular removable precision mechanisms for alignment. Upon alignment and lock down of the interferometer with the latter, the device is removed to minimize weight. A ray-trace code was developed to simulate the instrument's performance. Interference patterns were obtained at the shortest wavelength: the hydrogen Lyman alpha (1216 A). A laboratory instrument was developed that will be flown aboard a Black Brant sounding rocket to study the very local interstellar medium.

Chakrabarti, S.↗
NASA NTRS1992

Patterns of discoloration and oxidation by direct and scattered fluxes on LDEF, including oxygen on silicon

A number of interesting discoloration patterns are clearly evident on MOOO2-1 which resides on the three faces of the Long Duration Exposure Facility (LDEF). Most interesting is the pattern of blue oxidation on polished single crystal silicon apparently produced by scattered or direct ram oxygen atoms along the earth face. A complete explanation for the patterns has not yet been obtained. All honeycomb outgassing holes have a small discoloration ring around them that varies in color. The shadow cast by a suspended wire on the earth face surface is not easily explained by either solar photons or by ram flux. The shadows and the dark/light regions cannot be explained consistently by the process of solar ultraviolet paint-darkening modulated by ram flux oxygen bleaching of the paint.

Frederickson, A. R.↗