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At least 145 records · Page 8

Materials Development for Auxiliary Components for Large Compact Mo/Au TES Arrays

We describe our current fabrication process for arrays of superconducting transition edge sensor microcalorimeters, which incorporates superconducting Mo/Au bilayers and micromachined silicon structures. We focus on materials and integration methods for array heatsinking with our bilayer and micromachining processes. The thin superconducting molybdenum bottom layer strongly influences the superconducting behavior and overall film characteristics of our molybdenum/gold transition-edge sensors (TES). Concurrent with our successful TES microcalorimeter array development, we have started to investigate the thin film properties of molybdenum monolayers within a given phase space of several important process parameters. The monolayers are sputtered or electron-beam deposited exclusively on LPCVD silicon nitride coated silicon wafers. In our current bilayer process, molybdenum is electron-beam deposited at high wafer temperatures in excess of 500 degrees C. Identifying process parameters that yield high quality bilayers at a significantly lower temperature will increase options for incorporating process-sensitive auxiliary array components (AAC) such as array heat sinking and electrical interconnects into our overall device process. We are currently developing two competing technical approaches for heat sinking large compact TES microcalorimeter arrays. Our efforts to improve array heat sinking and mitigate thermal cross-talk between pixels include copper backside deposition on completed device chips and copper-filled micro-trenches surface-machined into wafers. In addition, we fabricated prototypes of copper through-wafer microvias as a potential way to read out the arrays. We present an overview on the results of our molybdenum monolayer study and its implications concerning our device fabrication. We discuss the design, fabrication process, and recent test results of our AAC development.

Finkbeiner, F. m.↗

Germanium Lift-Off Masks for Thin Metal Film Patterning

A technique has been developed for patterning thin metallic films that are, in turn, used to fabricate microelectronics circuitry and thin-film sensors. The technique uses germanium thin films as lift-off masks. This requires development of a technique to strip or undercut the germanium chemically without affecting the deposited metal. Unlike in the case of conventional polymeric lift-off masks, the substrate can be exposed to very high temperatures during processing (sputter deposition). The reason why polymeric liftoff masks cannot be exposed to very high temperatures (greater than 100 C) is because (a) they can become cross linked, making lift-off very difficult if not impossible, and (b) they can outgas nitrogen and oxygen, which then can react with the metal being deposited. Consequently, this innovation is expected to find use in the fabrication of transition edge sensors and microwave kinetic inductance detectors, which use thin superconducting films deposited at high temperature as their sensing elements. Transition edge sensors, microwave kinetic inductance detectors, and their circuitry are comprised of superconducting thin films, for example Nb and TiN. Reactive ion etching can be used to pattern these films; however, reactive ion etching also damages the underlying substrate, which is unwanted in many instances. Polymeric lift-off techniques permit thin-film patterning without any substrate damage, but they are difficult to remove and the polymer can outgas during thin-film deposition. The outgassed material can then react with the film with the consequence of altered and non-reproducible materials properties, which, in turn, is deleterious for sensors and their circuitry. The purpose of this innovation was to fabricate a germanium lift-off mask to be used for patterning thin metal films.

Brown, Ari↗

Fabrication of Silicon Backshort Assembly for Waveguide-Coupled Superconducting Detectors

The Cosmology Large Angular Scale Surveyor (CLASS) is a ground-based instrument that will measure the polarization of the cosmic microwave background to search for gravitational waves from a posited epoch of inflation early in the universe s history. We are currently developing detectors that address the challenges of this measurement by combining the excellent beam-forming attributes of feedhorns with the low-noise performance of Transition-Edge sensors. These detectors utilize a planar orthomode transducer that maps the horizontal and vertical linear polarized components in a dual-mode waveguide to separate microstrip lines. On-chip filters define the bandpass in each channel, and the signals are terminated in resistors that are thermally coupled to the transition-edge sensors operating at 150 mK.

Crowe, E.↗

The Impact of Crosstalk in the X-IFU Instrument on Athena Science Cases

In this paper we present a first assessment of the impact of various forms of instrumental crosstalk on the science performance of the X-ray Integral Field Unit (X-IFU) on the Athena X-ray mission. This assessment is made using the SIXTE end-to-end simulator in the context of one of the more technically challenging science cases for the XIFU instrument. Crosstalk considerations may influence or drive various aspects of the design of the array of high-count-rate Transition Edge Sensor (TES) detectors and its Frequency Domain Multiplexed (FDM) readout architecture. The Athena X-ray mission was selected as the second L-class mission in ESA's Cosmic Vision 2015–25 plan, with alaunch foreseen in 2028, to address the theme ''Hot and Energetic Universe"1. One of the two instruments on boardAthena is the X-ray Integral Field Unit2 (X-IFU) which is based on an array of ~3800 Transition Edge Sensors (TES's)operated at a temperature of ~90 mK. The science cases pose an interesting challenge for this instrument, as they requirea combination of high energy resolution (2.5 eV FWHM or better), high spatial resolution (5 arcsec or better) and highcount rate capability (several tens of counts per second per detector for point sources as bright as 10 mCrab).The performance at the single sensor level has been demonstrated3, but the operation of such detectors in an array, usingmultiplexed readout, brings additional challenges, both for the design of the array in which the sensors are placed and forthe readout of the sensors. The readout of the detector array will be based on Frequency Domain Multiplexing (FDM)4.In this system of detectors and readout, crosstalk can arise through various mechanisms: on the TES array, neighboringsensors can couple through thermal crosstalk. Detectors adjacent in carrier frequency may suffer from electrical crosstalkdue to the finite width of the bandpass filters, and shared sources of impedance in their signal lines. The signals from theindividual detectors are summed and then amplified by a pair of SQUID amplifiers before being sent to warm front-endelectronics. The transfer function of the SQUID amplifiers is non-linear, which will give rise to higher harmonics ofcarriers and intermodulation products when multiple signal pulses are simultaneously present in the SQUID. Under highcount rate conditions this is another source of crosstalk. The effect of all these crosstalk sources is that parasitic pulseswill appear in the record of a signal pulse which will create a stochastic offset of the measured energy and thus adegradation of the energy resolution.

SIXTE↗

The Focal Plane Assembly for the Athena X-Ray Integral Field Unit Instrument

This paper summarizes a preliminary design concept for the focal plane assembly of the X-ray Integral Field Unit on the Athena spacecraft, an imaging microcalorimeter that will enable high spectral resolution imaging and point-source spectroscopy. The instrument's sensor array will be a 3840-pixel transition edge sensor (TES) microcalorimeter array, with a frequency domain multiplexed SQUID readout system allowing this large-format sensor array to be operated within the thermal constraints of the instrument's cryogenic system. A second TES detector will be operated in close proximity to the sensor array to detect cosmic rays and secondary particles passing through the sensor array for off-line coincidence detection to identify and reject events caused by the in-orbit high-energy particle background. The detectors, operating at 55 mK, or less, will be thermally isolated from the instrument cryostat's 2 K stage, while shielding and filtering within the FPA will allow the instrument's sensitive sensor array to be operated in the expected environment during both on-ground testing and in-flight operation, including stray light from the cryostat environment, low-energy photons entering through the X-ray aperture, low-frequency magnetic fields, and high-frequency electric fields.

SQUID amplifier↗

Lynx x-ray microcalorimeter

Lynx is an x-ray telescope, one of four large satellite mission concepts currently being studied by NASA to be a flagship mission. One of Lynx’s three instruments is an imaging spectrometer called the Lynx x-ray microcalorimeter (LXM), an x-ray microcalorimeter behind an x-ray optic with an angular resolution of 0.5 arc sec and ∼2 sq. m of area at 1 keV. The LXM will provide unparalleled diagnostics of distant extended structures and, in particular, will allow the detailed study of the role of cosmic feedback in the evolution of the Universe. We discuss the baseline design of LXM and some parallel approaches for some of the key technologies. The baseline sensor technology uses transition-edge sensors, but we also consider an alternative approach using metallic magnetic calorimeters. We discuss the requirements for the instrument, the pixel layout, and the baseline readout design, which uses microwave superconducting quantum interference devices and high-electron mobility transistor amplifiers and the cryogenic cooling requirements and strategy for meeting these requirements. For each of these technologies, we discuss the current technology readiness level and our strategy for advancing them to be ready for flight. We also describe the current system design, including the block diagram, and our estimate for the mass, power, and data rate of the instrument.

Simon R. Bandler↗

An Ultrasensitive Hot-Electron Bolometer for Low-Background SMM Applications

We are developing a hot-electron superconducting transition-edge sensor (TES) that is capable of counting THz photons and operates at T = 0.3K. The main driver for this work is moderate resolution spectroscopy (R approx. 1000) on the future space telescopes with cryogenically cooled (approx. 4 K) mirrors. The detectors for these telescopes must be background-limited with a noise equivalent power (NEP) approx. 10(exp -19)-10(exp -20) W/Hz(sup 1/2) over the range v = 0.3-10 THz. Above about 1 THz, the background photon arrival rate is expected to be approx. 10-100/s), and photon counting detectors may be preferable to an integrating type. We fabricated superconducting Ti nanosensors with a volume of approx. 3x10(exp -3) cubic microns on planar substrate and have measured the thermal conductance G to the thermal bath. A very low G = 4x10(exp -14) W/K, measured at 0.3 K, is due to the weak electron-phonon coupling in the material and the thermal isolation provided by superconducting Nb contacts. This low G corresponds to NEP(0.3K) = 3x10(exp -19) W/Hz(sup 1/2). This Hot-Electron Direct Detector (HEDD) is expected to have a sufficient energy resolution for detecting individual photons with v > 0.3 THz at 0.3 K. With the sensor time constant of a few microseconds, the dynamic range is approx. 50 dB.

bolometers↗

Advanced ACTPol Multichroic Polarimeter Array Fabrication Process for 150 mm Wafers

Advanced ACTPol (AdvACT) is a third-generation cosmic microwave background receiver to be deployed in 2016 on the Atacama Cosmology Telescope (ACT). Spanning five frequency bands from 25 to 280 GHz and having just over 5600 transition-edge sensor (TES) bolometers, this receiver will exhibit increased sensitivity and mapping speed compared to previously fielded ACT instruments. This paper presents the fabrication processes developed by NIST to scale to large arrays of feedhorn-coupled multichroic AlMn-based TES polarimeters on 150-mm diameter wafers. In addition to describing the streamlined fabrication process which enables high yields of densely packed detectors across larger wafers, we report the details of process improvements for sensor (AlMn) and insulator (SiN(sub x)) materials and microwave structures, and the resulting performance improvements.

Atacama Cosmology Telescope(ACT)↗

Distributed Antenna-Coupled TES for FIR Detectors Arrays

We describe a new architecture for a superconducting detector for the submillimeter and far-infrared. This detector uses a distributed hot-electron transition edge sensor (TES) to collect the power from a focal-plane-filling slot antenna array. The sensors lay directly across the slots of the antenna and match the antenna impedance of about 30 ohms. Each pixel contains many sensors that are wired in parallel as a single distributed TES, which results in a low impedance that readily matches to a multiplexed SQUID readout These detectors are inherently polarization sensitive, with very low cross-polarization response, but can also be configured to sum both polarizations. The dual-polarization design can have a bandwidth of 50The use of electron-phonon decoupling eliminates the need for micro-machining, making the focal plane much easier to fabricate than with absorber-coupled, mechanically isolated pixels. We discuss applications of these detectors and a hybridization scheme compatible with arrays of tens of thousands of pixels.

antenna↗

Scalable Background-Limited Polarization-Sensitive Detectors for mm-wave Applications

We report on the status and development of polarization-sensitive detectors for millimeter-wave applications. The detectors are fabricated on single-crystal silicon, which functions as a low-loss dielectric substrate for the microwave circuitry as well as the supporting membrane for the Transition-Edge Sensor (TES) bolometers. The orthomode transducer (OMT) is realized as a symmetric structure and on-chip filters are employed to define the detection bandwidth. A hybridized integrated enclosure reduces the high-frequency THz mode set that can couple to the TES bolometers. An implementation of the detector architecture at Q-band achieves 90% efficiency in each polarization. The design is scalable in both frequency coverage, 30-300 GHz, and in number of detectors with uniform characteristics. Hence, the detectors are desirable for ground-based or space-borne instruments that require large arrays of efficient background-limited cryogenic detectors.

Millimeter-Wave Detectors↗

Optically induced quantum transitions in direct probed mesoscopic NbSe 2 for prototypical bolometers

Superconducting transition-edge sensors (TES) have emerged as fascinating devices to detect broadband electromagnetic radiation with low thermal noise. The advent of metallic transition metal dichalcogenides, such as NbSe 2 , has also created an impetus to understand their low-temperature properties, including superconductivity. Interestingly, NbSe 2 -based sensor within the TES framework remains unexplored. In this work, direct-probed superconducting NbSe 2 absorbers led to a proof-of-concept demonstration for the transduction of incoming light to heat, where a thermodynamic superconducting phase transition in NbSe 2 was evident to switch it to the normal-state, when biased below its superconducting transition temperature. A wavelength-dependent response of its optical absorption properties was observed, based on the incident optical excitation source used. Furthermore, extensive optical characterization studies were conducted using Raman spectroscopy, where the in-plane and out-of-plane thermal conductivity was empirically determined. Our results open new possibilities for the use of NbSe 2 in superconducting radiation detectors, including in a TES framework

47 OTHER INSTRUMENTATION↗

Status of the Micro-X Sounding Rocket X-Ray Spectrometer

Micro-X is a sounding rocket borne X-ray telescope that utilizes transition edge sensors to perform imaging spectroscopy with a high level of energy resolution. Its 2.1m focal length X-ray optic has an effective area of 300 sq cm, a field of view of 11.8 arcmin, and a bandpass of 0.12.5 keV. The detector array has 128 pixels and an intrinsic energy resolution of 4.5 eV FWHM. The integration of the system has progressed with functional tests of the detectors and electronics complete, and performance characterization of the detectors is underway. We present an update of ongoing progress in preparation for the upcoming launch of the instrument.

X-ray astronomy↗

Record Low NEP in the Hot-Electron Titanium Nanobolometers

We are developing hot-electron superconducting transition-edge sensors (TES) capable of counting THz photons and operating at T = 0.3K. We fabricated superconducting Ti nanosensors with Nb contacts with a volume of approx. 3x10(exp -3) cu microns on planar Si substrate and have measured the thermal conductance due to the weak electron-phonon coupling in the material G = 4x10(exp -14) W/K at 0.3 K. The corresponding phonon-noise NEP = 3x10(exp -19) W/Hz(sup 1/2). Detection of single optical photons (1550nm and 670nm wavelength) has been demonstrated for larger devices and yielded the thermal time constants of 30 microsec at 145 mK and of 25 microsec at 190 mK. This Hot-Electron Direct Detector (HEDD) is expected to have a sufficient energy resolution for detecting individual photons with (nu) > 1 THz where NEP approx. 3x10(exp -20) W/Hz(sup 1/2) is needed for spectroscopy in space.

transition edge sensors↗

In Situ Performance of the Low Frequency Array for Advanced ACTPol

The Advanced Atacama Cosmology Telescope Polarimeter (AdvACT) is an upgrade for the Atacama Cosmology Telescope using Transition Edge Sensor (TES) detector arrays to measure cosmic microwave background (CMB) temperature and polarization anisotropies in multiple frequencies. The low frequency (LF) array was deployed early 2020. It consists of 292 TES bolometers observing in two bands centered at 27 GHz and 39 GHz. At these frequencies, it is sensitive to synchrotron radiation from our galaxy as well as to the CMB, and complements the AdvACT arrays operating at 90, 150 and 230 GHz. We present the initial LF array on-site characterization, including the time constant, optical efficiency and array sensitivity.

Superconducting detectors↗

Optical Efficiency and R(T,I) Measurements of ACTPol TESes Using Time Domain Multiplexing Electronics

We present new data on feedhorn-coupled transition-edge sensor devices fabricated for the second-generation receiver (ACTPol) for the Atacama cosmology telescope (ACT). First, we describe optical efficiency measurements of the latest ACTPol detector wafer, which has a 86±15% average optical efficiency. Next, we discuss measurements of the TES resistance as a function of temperature and bias current ( R(T,I) ) using the ACTPol time-domain multiplexing electronics. Qualitative agreement between R(T,I) data at low bias current and the two-fluid model prediction is shown. Using the two-fluid model and low bias current R(T,I) data, α and β at our operating bias current are calculated.

Atacama cosmology telescope (ACT)↗

TES-Based X-Ray Microcalorimeter Performances Under AC Bias and FDM for Athena

Athena is a European X-ray observatory, scheduled for launch in 2028. Athena will employ a high-resolution imaging spectrometer called X-ray integral field unit (X-IFU), consisting of an array of 4000 transition edge sensor (TES) microcalorimeter pixels. For the readout of X-IFU, we are developing frequency domain multiplexing, which is the baseline readout system. In this paper, we report on the performance of a TES X-ray calorimeter array fabricated at Goddard Space Flight Center (GSFC) at MHz frequencies for the baseline of X-IFU detector. During single-pixel AC bias characterization, we measured X-ray energy resolutions (at 6 keV) of about 2.9 eV at both 2.3 and 3.7 MHz. Furthermore, in the multiplexing mode, we measured X-ray energy resolutions of about 2.9 eV at 1.3 and 1.7 MHz.

Transition edge sensors X-ray microcalorimeter Fre↗

Mitigation of Finite Bandwidth Effects in Time-Division-Multiplexed SQUID Readout of TES Arrays

Time division multiplexing (TDM) is being developed as the readout technology of the X-ray integral field unit (X-IFU), a 3,168-pixel X-ray transition-edge sensor (TES) imaging spectrometer that is part of the European Space Agency's Athena satellite mission. Recent improvements in the low X-ray event count rate performance of TDM have been driven by increases in multiplexer bandwidth and the mitigation of settling transients. These methods and design changes have improved the 32-row multiplexed resolution of a NASA LPA 2.5a array from an initial (2.73 ± 0.03) eV to (1.97 ± 0.01) eV resolution at 5.9 keV. We discuss these recent advances in TDM readout, which have been implemented in an 8-column × 32-row spectrometer that will be deployed at the Lawrence Livermore National Laboratory electron beam ion trap (EBIT) facility, and present a model that will inform the design of future systems.

Transition-edge sensors↗

High-Density Superconducting Cables for Advanced ACTPol

Advanced ACTPol (AdvACT) is an upcoming Atacama Cosmology Telescope (ACT) receiver upgrade, scheduled to deploy in 2016, that will allow measure- ment of the cosmic microwave background polarization and temperature to the highest precision yet with ACT. The AdvACT increase in sensitivity is partly provided by an increase in the number of transition-edge sensors (TESes) per array by up to a factor of two over the current ACTPol receiver detector arrays. The high-density AdvACT TES arrays require 70 μ m pitch superconducting flexible cables (flex) to connect the detec- tor wafer to the first-stage readout electronics. Here, we present the flex fabrication process and test results. For the flex wiring layer, we use a 400-nm-thick sputtered alu- minum film. In the center of the cable, the wiring is supported by a polyimide substrate, which smoothly transitions to a bare (uncoated with polyimide) silicon substrate at the ends of the cable for a robust wedge wire-bonding interface. Tests on the first batch of flex made for the first AdvACT array show that the flex will meet the requirements for AdvACT, with a superconducting critical current above 1 mA at 500 mK, resilience to mechanical and cryogenic stress, and a room temperature yield of 97%.

transition-edge sensors (TESes)↗