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NASA NTRS2000

Growth of Carbon Nanostructure Materials Using Laser Vaporization

Since the potential applications of carbon nanotubes (CNT) was discovered in many fields, such as non-structure electronics, lightweight composite structure, and drug delivery, CNT has been grown by many techniques in which high yield single wall CNT has been produced by physical processes including arc vaporization and laser vaporization. In this presentation, the growth mechanism of the carbon nanostructure materials by laser vaporization is to be discussed. Carbon nanoparticles and nanotubes have been synthesized using pulsed laser vaporization on Si substrates in various temperatures and pressures. Two kinds of targets were used to grow the nanostructure materials. One was a pure graphite target and the other one contained Ni and Co catalysts. The growth temperatures were 600-1000 C and the pressures varied from several torr to 500 torr. Carbon nanoparticles were observed when a graphite target was used, although catalysts were deposited on substrates before growing carbon films. When the target contains catalysts, carbon nanotubes (CNT) are obtained. The CNT were characterized by scanning electron microscopy, x-ray diffraction, optical absorption and transmission, and Raman spectroscopy. The temperature-and pressure-dependencies of carbon nanotubes' growth rate and size were investigated.

Zhu, Shen↗
NASA NTRS1981

Vapor phase diamond growth technology

Ion beam deposition chambers used for carbon film generation were designed and constructed. Features of the developed equipment include: (1) carbon ion energies down to approx. 50 eV; (2) in suit surface monitoring with HEED; (3) provision for flooding the surface with ultraviolet radiation; (4) infrared laser heating of substrate; (5) residual gas monitoring; (6) provision for several source gases, including diborane for doping studies; and (7) growth from either hydrocarbon source gases or from carbon/argon arc sources. Various analytical techniques for characterization of from carbon/argon arc sources. Various analytical techniques for characterization of the ion deposited carbon films used to establish the nature of the chemical bonding and crystallographic structure of the films are discussed. These include: H2204/HN03 etch; resistance measurements; hardness tests; Fourier transform infrared spectroscopy; scanning auger microscopy; electron spectroscopy for chemical analysis; electron diffraction and energy dispersive X-ray analysis; electron energy loss spectroscopy; density measurements; secondary ion mass spectroscopy; high energy electron diffraction; and electron spin resonance. Results of the tests are summarized.

Angus, J. C.↗
NASA NTRS1995

Centroid Detector Assembly for the AXAF-I Alignment Test System

The High Resolution Mirror Assembly (HRMA) of the Advanced X-ray Astrophysics Facility (imaging) (AXAF-I) consists of four nested paraboloids and four nested hyperboloids, all of meter-class size, and all of which are to be assembled and aligned in a special 15 meter tower at Eastman Kodak Company in Rochester, NY. The goals of the alignment are (1) to make the images of the four telescopes coincident; (2) to remove coma from each image individually; and (3) to control and determine the final position of the composite focus. This will be accomplished by the HRMA Aligment Test System (HATS) which is essentially a scanning Hartmann test system. The scanning laser source and the focal plane of the HATS are part of the Centroid Detector Assembly (CDA) which also includes processing electronics and software. In this paper we discuss the design and the measured performance of the CDA.

Glenn, Paul↗
NASA NTRS2003

Case Studies of Fatigue Life Improvement Using Low Plasticity Burnishing in Gas Turbine Engine Applications

Surface enhancement technologies such as shot peening, laser shock peening (LSP), and low plasticity burnishing (LPB) can provide substantial fatigue life improvement. However, to be effective, the compressive residual stresses that increase fatigue strength must be retained in service. For successful integration into turbine design, the process must be affordable and compatible with the manufacturing environment. LPB provides thermally stable compression of comparable magnitude and even greater depth than other methods, and can be performed in conventional machine shop environments on CNC machine tools. LPB provides a means to extend the fatigue lives of both new and legacy aircraft engines and ground-based turbines. Improving fatigue performance by introducing deep stable layers of compressive residual stress avoids the generally cost prohibitive alternative of modifying either material or design. The X-ray diffraction based background studies of thermal and mechanical stability of surface enhancement techniques are briefly reviewed, demonstrating the importance of minimizing cold work. The LPB process, tooling, and control systems are described. An overview of current research programs conducted for engine OEMs and the military to apply LPB to a variety of engine and aging aircraft components are presented. Fatigue performance and residual stress data developed to date for several case studies are presented including: * The effect of LPB on the fatigue performance of the nickel based super alloy IN718, showing fatigue benefit of thermal stability at engine temperatures. * An order of magnitude improvement in damage tolerance of LPB processed Ti-6-4 fan blade leading edges. * Elimination of the fretting fatigue debit for Ti-6-4 with prior LPB. * Corrosion fatigue mitigation with LPB in Carpenter 450 steel. *Damage tolerance improvement in 17-4PH steel. Where appropriate, the performance of LPB is compared to conventional shot peening after exposure to engine operating temperatures.

Prevey, Paul S.↗
NASA NTRS1982

A solar flare X-ray polarimeter for the Space Shuttle

An instrument has recently been built and tested which is designed to measure the polarization of the hard (5-30 keV) X-ray emission from solar flares, and thereby to investigate the energy release mechanism and constrain flare models. In particular, these measurements will help to determine whether hard X-ray bursts are produced by nonthermal or by thermal electrons. The polarimeter makes use of the angular dependence of Thomson scattering from targets of metallic lithium. It has an energy resolution of a few keV, a time resolution of 5 s, and sufficient sensitivity to measure polarization levels (3 sigma) of a few percent in about 10 s for a moderate strength solar flare. The instrumental polarization has been directly measured and found to be within the design goal of approximately 1%. This polarimeter is scheduled to be flown as part of the OSS-1 pallet on an early Space Shuttle mission.

Lemen, J. R.↗
NASA NTRS1991

Fiber optic and laser sensors IX; Proceedings of the Meeting, Boston, MA, Sept. 3-5, 1991

The present volume on fiber-optic and laser sensors discusses industrial applications of fiber-optic sensors, fiber-optic temperature sensors, fiber-optic current sensors, fiber-optic pressure/displacement/vibration sensors, and generic fiber-optic systems. Attention is given to a fiber-sensor design for turbine engines, fiber-optic remote Fourier transform IR spectroscopy, near-IR fiber-optic temperature sensors, and an intensity-type fiber-optic electric current sensor. Topics addressed include fiber-optic magnetic field sensors based on the Faraday effect in new materials, diaphragm size and sensitivity for fiber-optic pressure sensors, a microbend pressure sensor for high-temperature environments, and linear position sensing by light exchange between two lossy waveguides. Also discussed are two-mode elliptical-core fiber sensors for measurement of strain and temperature, a fiber-optic interferometric X-ray dosimeter, fiber-optic interferometric sensors using multimode fibers, and optical fiber sensing of corona discharges.

Depaula, Ramon P.↗
NASA NTRS1999

Morphology and Structure of ZnO Films Synthesized by Off-Axis Sputtering Deposition

ZnO is a wide-band-gap oxide material that has many applications. A new potential application of ZnO material is for light emitting devices since its structure and electrical properties are similar to that of the GaN material (a blue laser candidate). It also is a good substrate for fabricating GaN-based devices. Off-axis sputtering technique has revealed great potential in synthesizing excellent oxide materials because the negative ion bombardment is greatly reduced when adatoms condense on substrates. The surface of films grown by off-axis sputtering will be much smoother than that produced in a regular sputtering configuration. A growth mechanism is studied by investigating the morphology and structure of ZnO films under different growth conditions and orientations. ZnO films are deposited on (0001) sapphire and quartz substrates by off- axis sputtering deposition at various oxygen/argon mixture ratios and pressures and at different temperatures. All films reveal highly textured structures on quartz substrates and epitaxial growth on sapphire substrates. Two off-axis configurations, vertical and horizontal orientations are conducted to study the process of film growth, surface morphology, and film structure. X-ray diffraction, scanning probe microscopy, and electrical measurements are used to characterize these films. Detailed results will be discussed in the presentation. Keywords: ZnO, Photonic material, Off-axis sputtering, Growth mechanism

Zhu, Shen↗
NASA NTRS1999

Fabrication of Pop-up Detector Arrays on Si Wafers

High sensitivity is a basic requirement for a new generation of thermal detectors. To meet the requirement, close-packed, two-dimensional silicon detector arrays have been developed in NASA Goddard Space Flight Center. The goal of the task is to fabricate detector arrays configured with thermal detectors such as infrared bolometers and x-ray calorimeters to use in space fliGht missions. This paper focuses on the fabrication and the mechanical testing of detector arrays in a 0.2 mm pixel size, the smallest pop-up detectors being developed so far. These array structures, nicknamed "PUDS" for "Pop-Up Detectors", are fabricated on I pm thick, single-crystal, silicon membranes. Their designs have been refined so we can utilize the flexibility of thin silicon films by actually folding the silicon membranes to 90 degrees in order to obtain close-packed two-dimensional arrays. The PUD elements consist of a detector platform and two legs for mechanical support while also serving as electrical and thermal paths. Torsion bars and cantilevers connecting the detector platform to the legs provide additional flexures for strain relief. Using micro-electromechanical structure (MEMS) fabrication techniques, including photolithography, anisotropic chemical etching, reactive-ion etching, and laser dicing, we have fabricated PLTD detector arrays of fourteen designs with a variation of four parameters including cantilever length, torsion bar length and width, and leg length. Folding tests were conducted to test mechanical stress distribution for the array structures. We obtained folding yields and selected optimum design parameters to reach minimal stress levels. Computer simulation was also employed to verify mechanical behaviors of PUDs in the folding process. In addition, scanning electron microscopy was utilized to examine the flatness of detectors and the alignment of detector pixels in arrays. The fabrication of thermistors and heaters on the pop-up detectors is under way, preparing us for the next step of the experiment, the thermal test.

Li, Mary J.↗
NASA NTRS1999

Orientation Effects in ZnO Films Using Off-Axis Sputtering Deposition

ZnO is a wide-band-gap oxide material and has been used in numerous applications. It is also a good substrate for fabricating GaN-based (a blue laser candidate) devices. Off-axis sputtering technique is one of the best techniques in synthesizing oxide materials because negative ion bombardment and particle kinetic energy is greatly reduced when adatoms condense on substrates. Since the sputtered material from the target arrive on the substrate surface at a 90 deg. configuration, which differs from the normal sputtering geometry, it is expected that the film uniformity and composition distributions will be affected. However, the details of these properties and mechanisms have not been well studied. ZnO films are synthesized on (0001) sapphire and quartz substrates by off-axis sputtering deposition in various oxygen/argon mixture ratios and pressures at different temperatures. Substrates and sputtering sources are placed at three different orientations that are orthogonal to each other. The normal direction of a substrate is parallel to the gravity vector and the other is perpendicular to it. Film thickness profiles at different growth orientations are determined using a profimeter. All films grown at high temperatures have highly textured structures on quartz substrates and epitaxially grow on sapphire substrates. Because of this process, the film surface is very smooth. X-ray diffraction, scanning probe microscopy, and Fourier transfer infrared spectroscopy, and electrical measurements will be used to characterize these films. Detailed results will be discussed in the presentation.

Zhu, Shen↗
NASA NTRS2000

Holographic Optical Data Storage

Although the basic idea may be traced back to the earlier X-ray diffraction studies of Sir W. L. Bragg, the holographic method as we know it was invented by D. Gabor in 1948 as a two-step lensless imaging technique to enhance the resolution of electron microscopy, for which he received the 1971 Nobel Prize in physics. The distinctive feature of holography is the recording of the object phase variations that carry the depth information, which is lost in conventional photography where only the intensity (= squared amplitude) distribution of an object is captured. Since all photosensitive media necessarily respond to the intensity incident upon them, an ingenious way had to be found to convert object phase into intensity variations, and Gabor achieved this by introducing a coherent reference wave along with the object wave during exposure. Gabor's in-line recording scheme, however, required the object in question to be largely transmissive, and could provide only marginal image quality due to unwanted terms simultaneously reconstructed along with the desired wavefront. Further handicapped by the lack of a strong coherent light source, optical holography thus seemed fated to remain just another scientific curiosity, until the field was revolutionized in the early 1960s by some major breakthroughs: the proposition and demonstration of the laser principle, the introduction of off-axis holography, and the invention of volume holography. Consequently, the remainder of that decade saw an exponential growth in research on theory, practice, and applications of holography. Today, holography not only boasts a wide variety of scientific and technical applications (e.g., holographic interferometry for strain, vibration, and flow analysis, microscopy and high-resolution imagery, imaging through distorting media, optical interconnects, holographic optical elements, optical neural networks, three-dimensional displays, data storage, etc.), but has become a prominent am advertising, and security medium as well. The evolution of holographic optical memories has followed a path not altogether different from holography itself, with several cycles of alternating interest over the past four decades. P. J. van Heerden is widely credited for being the first to elucidate the principles behind holographic data storage in a 1963 paper, predicting bit storage densities on the order of 1/lambda(sup 3) with source wavelength lambda - a fantastic capacity of nearly 1 TB/cu cm for visible light! The science and engineering of such a storage paradigm was heavily pursued thereafter, resulting in many novel hologram multiplexing techniques for dense data storage, as well as important advances in holographic recording materials. Ultimately, however, the lack of such enabling technologies as compact laser sources and high performance optical data I/O devices dampened the hopes for the development of a commercial product. After a period of relative dormancy, successful applications of holography in other arenas sparked a renewed interest in holographic data storage in the late 1980s and the early 1990s. Currently, with most of the critical optoelectronic device technologies in place and the quest for an ideal holographic recording medium intensified, holography is once again considered as one of several future data storage paradigms that may answer our constantly growing need for higher-capacity and faster-access memories.

Timucin, Dogan A.↗
NASA NTRS1973

Some correlations between measurements by the Apollo gamma-ray spectrometer and other lunar observations

Observations by the Apollo 15 and 16 gamma-ray spectrometers are compared with those of a number of other experiments, both compositional and noncompositional. A general correspondence with topography is seen. The Van de Graaff area is a unique farside region with respect to observations by the laser altimeter, the subsatellite magnetometer, and the gamma-ray spectrometer. X-ray and alpha particle orbital measurements show a broad general agreement with gamma-ray data, although results from additional elements in the gamma-ray spectrum are needed to extend the comparison with X-ray data. A comparison of Th concentrations with those found at various landing sites shows generally good agreement, with the orbital values tending to be somewhat higher.

Trombka, J. I.↗
NASA NTRS1976

X-ray emission from high temperature plasmas

The physical processes occurring in plasma focus devices were studied. These devices produce dense high temperature plasmas, which emit X rays of hundreds of KeV energy and one to ten billion neutrons per pulse. The processes in the devices seem related to solar flare phenomena, and would also be of interest for controlled thermonuclear fusion applications. The high intensity, short duration bursts of X rays and neutrons could also possibly be used for pumping nuclear lasers.

Harries, W. L.↗
NASA NTRS1993

The correlation of alkalis and aluminum during high-temperature volatilization of albite and nepheline

Our previous study of high-temperature evaporation of mafic targets has shown a systematic enrichment of newly-formed condensates in silicon and alkalis and depletion in refractory elements (Al, Ca, Ti). This effect, which is consistent with the volatility of the elements, was also tested for several experiments with acidic targets. In one case it was the impact evaporation of granite targets using a light-gas gun facility. Analyses of the condensate which was collected during the impact show that it was enriched in Al and Na so that the composition of the condensate became close to nepheline. In the work of Nagahara, an incongruent evaporation of alkali feldspars under stationary conditions has been also proposed. These discoveries required a more detailed study of high-temperaure evaporation of monomineralic Al-silicate targets. In these experiments, we have used samples of oligoclase and of nepheline. Vaporization of samples was performed in a hermetic cell filled with helium at normal temperature and pressure using a powerful Nd-laser focused on the sample. Laser pulses had the following parameters: luminous energy approximately 600 J, duration approximately 10(exp -3) s, density of luminosity was approximately 5 x 10(exp 6) W/sq cm, the temperature of vaporization is about 3000-4000 K. About 4 cm from the sample, a nickel foil was placed on which the condensate was collected. Films of condensate were analyzed using X-Ray Photo-Electron spectrometer ES-2401. The measurement of internal chemical composition and of the charging state of elements through the whole depth of the condensed films was made layer by layer with argon-ion etching of 200 A of the film per step. Results of this study are given. The bottom layers of condensed film correspond to the front parts of the evaporated cloud or to condensation at the beginning of the evaporative process and surface layers to condensation at the end of the process.

Dikov, Yu. P.↗
NASA NTRS1995

A study of the superconducting properties of YBa2Cu(9-x)Nb(x)O(y) thin films

Effect of Niobium substitution at the copper site in YBa2Cu3O(7-x) was studied in thin film form. The films were deposited by laser ablation technique using the targets of the YBa2Cu(3-x)Nb(x)O(y) where x = 0.0, 0.025, 0.05, 0.1, 0.2, 0.4, 0.8 and 1.0 under identical deposition conditions on SrTiO3 (100) substrates. Films were characterized by XRD, resistivity, I-V and J(sub c) measurements. Films made from x = 0.025 and 0.05 concentrations of Nb substituted targets showed relatively improved superconducting properties compared to that of undoped films. the best J(sub c) realized for x - 0.025 Nb concentration was 1.8 x 10(exp 6) A/sq cm and for 0.05 Nb concentration it was 3.2 x 10(exp 6) A/sq cm at 77 K. However, degradation of the superconducting properties, with the increase of x is greater than or equal to 0.1 Nb concentration and drastic suppression and complete loss of superconductivity was noticed for x is greater than or equal to 0.4. The growth of impurity phase YBa2NbO6 for x = 0.1 and above of Nb concentration was noted from XRD (X-Ray Diffraction) patterns. However, the site occupancy of Nb could not be confirmed from these studies.

Srinivas, S.↗
NASA NTRS1999

Growth of Homoepitaxial ZnO Semiconducting Films

As a high temperature semiconductor, ZnO has been used for many applications such as wave-guide, solar cells, and surface acoustic wave devices. Since the ZnO material has an energy gap of 3.3 eV at room temperature and an excitonic binding energy (60 meV) that is possible to make excitonic lasering at room temperature a recent surge of interest is to synthesize ZnO films for electro-optical devices. These applications require films with a smooth surface, good crystal quality, and low defect density. Homoepitaxial films have been studied in terms of morphology, crystal structure, and electrical and optical properties. ZnO single crystals are grown by the hydrothermal method. Substrates are mechanically polished and annealed in air for four hours before deposited films. The annealing temperature-dependence of ZnO substrates is studied. Films are synthesized by the off-axis reactive sputtering deposition. The films have very smooth surface with a roughness </= 5 nm on a 5 micrometers x 5 micrometers area. The full width at half maximum of film theta rocking curves measured by the x-ray diffraction is slightly larger than the crystal substrate. The film quality is determined by measuring the film resistivity, the Hall mobility, carrier densities and the energy band gap. The properties of ZnO films grown of (0001) ZnO and (0001) sapphire substrates will be also compared and discussed in the presentation.

Zhu, Shen↗
NASA NTRS1997

Collaboration on SEP Missions to the Moon and Small Bodies

In response to the Discovery announcement of opportunity a team consisting of TRW Lewis Research Center, JPL and UCLA with scientific co-investigators from government and University laboratories have proposed to fly the first planetary solar electric propulsion (SEP) mission. Diana is designed to carry an X-ray and gamma ray spectrometer, and imaging spectrometer, a framing camera, a laser altimer an ion spectrometer and a magnetometer. In order to obtain lunar gravity data from the far side of the moon a relay satellite is placed into high polar orbit about the moon to relay the Doppler-shifted telemetry to Earth. Diana will spend two months in a 700 km polar orbit obtaining mineralogical data from a full spectral map of the lunar surface, and then spend a year in a 100 km (or below) polar orbit mapping the lunar elemental composition, its topography, gravity field, ions from its atmosphere and its permanent and induced magnetic fields. After the low altitude mapping phase the ion thrusters propel the spacecraft out of the lunar sphere of influence and onto a heloioscentric trajectory to rendezvous with dormant comet Wilson-Harrington. The ground truth provided by the returned lunar samples to validate the remote sensing instruments for lunar studies will also serve to validate the Wilson-Harrington observations since the same instruments will be used at both bodies.

Pieters, C. M.↗
NASA NTRS1999

Strategies and Technologies for In Situ Mineralogical Investigations on Mars

Surface landers on Mars (Viking and Pathfinder) have not revealed satisfying answers to the mineralogy and lithology of the planet's surface. In part, this results from their prime directives: Viking focused on exobiology, Pathfinder focused on technology demonstration. The analytical instruments on board the landers made admirable attempts to extract the mineralogy and geology of Mars, as did countless modeling efforts after the missions. Here we suggest a framework for elucidating martian, or any other planetary geology, through an approach that defines (a) type of information required, (b) explorational strategy harmonious with acquisition of these data, (c) interpretation approach to the data, (d) compatible mission architecture, (e) instrumentation for interrogating rocks and soil. (a) Data required: The composition of a planet is ordered at scales ranging from molecules to minerals to rocks, and from geological units to provinces to planetary-scale systems. The largest ordering that in situ compositional instruments can attempt to interrogate is rock type "aggregate" information. This is what the geologist attempts to identify first. From this, mineralogy can be either directly seen or inferred. From mineralogy can be determined elemental abundances and perhaps the state of the compounds as being crystalline or amorphous. Knowledge of rock type and mineralogy is critical for elucidating geologic process. Mars landers acquired extremely valuable elemental data, but attempted to move from elements to aggregates, but this can only be done by making many assumptions and sometimes giant leaps of faith. Data we believe essential are elements, minerals, degree of ordering of compounds, and the aggregate or rock type that these materials compose. (b) Explorational strategy: A lander should function as a surrogate geologist. Of the total landscape, a geologist sees much, but gives detailed attention to an infinitesimally small amount of what is seen. To acquire samples worth detailed scrutiny, as many samples as possible need examining at a cursory or reconnaissance level. A representative, statistically-meaningful sample number cannot be overemphasized. This maxim still applies to geological exploration of our own planet of which we have abundant knowledge. Analysis of many samples mandates low-power consumption per sample. (c) Data interpretation: No single instrument can analyze the full spectrum of the x-axis. An instrument is optimized for detecting certain material characteristics and must therefore affix itself to some point on the x-axis. Any conclusions drawn about data to the left or right of the instrument's position on this axis must necessarily be derived by inference. Hence, it seems logical to include on a mission, instruments that are not closely spaced in their x-axis-position, and if only two analytical methods are used, as shown, they should start at opposite ends of the axis and work towards the center. As examples, we depict a high-resolution camera to evaluate rock type ("aggregate" state) and mineralogy, and an x-ray diffractometer-fluorescence spectrometer (XRD-XRF) to determine elements, minerals, and the degree of order of materials. (d) Mission architecture: No instrument or suite of instruments can be relied upon to always give truly unequivocal analyses. The suite of instruments should therefore permit conclusions of one instrument to be checked against those of another through closed analytical loops. These "loops" can be structured by a combination of orbital imagery, descent imagery, broad-band site viewing/analysis, and data that cover both x and y axes. For example, the detection of a basaltic-looking rock with a microscope should be checked against the elements detected, the appearance of the rock as a lava flow from descent imagery, and so forth. (e) Instrumentation: To satisfy the above criteria, it is necessary to: (i) See the rock or soil with high resolution + magnification, (ii) Examine many samples, (iii) Consume little power per analysis, (iv) Determine elemental species, (v) Determine mineralogy directly (not inferentially) and the degree of ordering of compounds, (vi) Start analyzing from both ends of the x-axis. Every geologist wants to see the hand sample first, and apply a hand lens to its surface. This has not been the starting point for missions to Mars. Thus, our technology satisfies all these criteria . This XRD-XRF-Optical instrument currently being developed, analyses rock or soil surfaces without the need for sample acquisition or preparation; this satisfies the power criterion, and enables many analyses. The device acquires direct mineralogy and determines elemental species. The embedded endoscopic camera satisfies the critical criterion of close inspection of samples; the fiber optic cable can also be used for IR, LTV, or laser sample analysis. Additional information is contained in the original (Figures).

Marshall, J. R.↗
NASA NTRS1999

Growth of Homoepitaxial ZnO Semiconducting Films

As a high temperature wide-band-gap (3.3 eV at room temperature) semiconductor, ZnO has been used for many applications such as wave-guides, solar cells, and surface acoustic wave devices, Since ZnO has a 60 meV excitonic binding energy that makes it possible to produce excitonic lasing at room temperature, a recent surge of interest is to synthesize ZnO films for UV/blue/green laser diodes. These applications require films with a smooth surface, good crystal quality, and low defect density. Thus, homoepitaxial film growth is the best choice. Homoepitaxial films have been studied in terms of morphology, crystal structure, and electrical and optical properties. ZnO single crystal substrates grown by the hydrothermal method are mechanically polished and annealed in air for four hours before the films are deposited. The annealing temperature-dependence on ZnO substrate morphology and electrical properties is investigated. Films are synthesized by off-axis reactive sputtering deposition. This produces films that have very smooth surfaces with roughness less than or equal to 5 nm on a 5 microns x 5 microns area. The full width at half maximum of film theta rocking curves measured by the x-ray diffraction is slightly larger than that of the crystal substrate. Films are also characterized by measuring resistivity, optical transmittance, and photoluminescence. The properties of ZnO films grown on (0001) ZnO and (0001) sapphire substrates will also be compared and discussed.

Zhu, Shen↗