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At least 1,603 records · Page 89

Optimization of edge bead removal (EBR) process to enhance defect reduction in optical lithography

Defect reduction remains a critical objective in the integrated circuit manufacturing process, particularly within the highly re-entrant lithography modules where minimizing defects is crucial. Defects at the wafer edge can contaminate lithography modules and downstream processing equipment, leading to redistribution onto the wafer surface and adversely affecting overall device yield. A persistent challenge in the resist coating process is the formation of resist edge beads, driven by the strong Van der Waals attraction of excess photoresist (PR) to itself and the underlying substrate. The edge bead removal (EBR) process is a standard cleaning step designed to eliminate these edge beads and prevent potential contamination. Here, in this study, we identify the sources of EBR induced defects and additional EBR process encroachment toward edge patterning during the EBR cleaning process. This study provides a comprehensive study aimed at optimizing the EBR cleaning process to effectively eliminate EBR-induced defects, thereby enhancing overall device yield. Specifically, we identify three primary defects induced by the EBR cleaning process: rainbow-type, finger-shaped, and teardrop-type defects. Our experimental study reveals that in addition to EBR rinse time, PR cast time is crucial parameters contributing to the formation of these defects. By properly optimizing the PR cast time and EBR rinse time, we were able to remove nearly 100 % of dense clusters of defects that were easily visible even at low magnification optical microscopy throughout the wafer edge. We observed that shorter PR casting times shows edge defects caused by inefficient EBR process because of insufficient time for PR to fully settle causing superfluous PR to continue flowing toward wafer edge during EBR clearing step, leading to partial removal of PR at the wafer edge and the formation of rainbow defects. Proper optimization of both PR casting time and EBR chemistries dispense time is essential to resolve these defects, ensuring efficient EBR cleaning process and improved overall device yield.

42 ENGINEERING↗

SU-E-I-58: Experiences in Setting Up An Online Fluoroscopy Tracking System in a Large Healthcare System

Purpose: Transitioning from a paper based to an online system for tracking fluoroscopic case information required by state regulation and to conform to NCRP patient dose tracking suggestions. Methods: State regulations require documentation of operator, equipment, and some metric of tube output for fluoroscopy exams. This information was previously collected in paper logs, which was cumbersome and inefficient for the large number of fluoroscopic units across multiple locations within the system. The “tech notes” feature within Siemens’ Syngo workflow RIS was utilized to create an entry form for technologists to input case information, which was sent to a third party vendor for archiving and display though an online web based portal. Results: Over 55k cases were logged in the first year of implementation, with approximately 6,500 cases per month once fully online. A system was built for area managers to oversee and correct data, which has increased the accuracy of inputted values. A high-dose report was built to automatically send notifications when patients exceed trigger levels. In addition to meeting regulatory requirements, the new system allows for larger scale QC in fluoroscopic cases by allowing comparison of data from specific procedures, locations, equipment, and operators so that instances that fall outside of reference levels can be identified for further evaluation. The system has also drastically improved identification of operators without documented equipment specific training. Conclusion: The transition to online fluoroscopy logs has improved efficiency in meeting state regulatory requirements as well as allowed for identification of particular procedures, equipment, and operators in need of additional attention in order to optimize patient and personnel doses, while high dose alerts improve patient care and follow up. Future efforts are focused on incorporating case information from outside of radiology, as well as on automating processes for increased efficiencies.

60 APPLIED LIFE SCIENCES↗

Software Defined Architectures for Data Analytics

Data analytics applications increasingly are complex workflows composed of phases with very different program behaviors (e.g., graph algorithms and machine learning, algorithms operating on sparse an dense data structures, etc). To reach the levels of efficiency required to process these workflows in real time, upcoming architectures will need to leverage even more workload specialization. If, at one end, we may find even more heterogenous processors composed by a myriad of specialized processing elements, at the other end we may see novel reconfigurable architectures, composed of sets of functional units and memories interconnected with (re)configurable on-chip networks, able to adapt dynamically to adapt the workload characteristics. Field Programmable Gate Arrays are more and more used for accelerating various workloads and, in particular, inferencing in machine learning, providing higher efficiency than other solutions. However, their fine grained nature still leads to issues for the design software and still makes dynamic reconfiguration impractical. Future, more coarse-grained architectures could offer the features to execute diverse workloads at high efficiency while providing better reconfiguration mechanisms for dynamic adaptability. Nevertheless, we argue that the challenges for reconfigurable computing remain in the software. In this position paper, we describe a possible toolchain for reconfigurable architectures targeted at data analytics.

FPGA, Dataflow, Reconfigurable Architectures, Soft↗

Remote Sensing Time Series Product Tool

The TSPT (Time Series Product Tool) software was custom-designed for NASA to rapidly create and display single-band and band-combination time series, such as NDVI (Normalized Difference Vegetation Index) images, for wide-area crop surveillance and for other time-critical applications. The TSPT, developed in MATLAB, allows users to create and display various MODIS (Moderate Resolution Imaging Spectroradiometer) or simulated VIIRS (Visible/Infrared Imager Radiometer Suite) products as single images, as time series plots at a selected location, or as temporally processed image videos. Manually creating these types of products is extremely labor intensive; however, the TSPT development tool makes the process simplified and efficient. MODIS is ideal for monitoring large crop areas because of its wide swath (2330 km), its relatively small ground sample distance (250 m), and its high temporal revisit time (twice daily). Furthermore, because MODIS imagery is acquired daily, rapid changes in vegetative health can potentially be detected. The new TSPT technology provides users with the ability to temporally process high-revisit-rate satellite imagery, such as that acquired from MODIS and from its successor, the VIIRS. The TSPT features the important capability of fusing data from both MODIS instruments onboard the Terra and Aqua satellites, which drastically improves cloud statistics. With the TSPT, MODIS metadata is used to find and optionally remove bad and suspect data. Noise removal and temporal processing techniques allow users to create low-noise time series plots and image videos and to select settings and thresholds that tailor particular output products. The TSPT GUI (graphical user interface) provides an interactive environment for crafting what-if scenarios by enabling a user to repeat product generation using different settings and thresholds. The TSPT Application Programming Interface provides more fine-tuned control of product generation, allowing experienced programmers to bypass the GUI and to create more user-specific output products, such as comparison time plots or images. This type of time series analysis tool for remotely sensed imagery could be the basis of a large-area vegetation surveillance system. The TSPT has been used to generate NDVI time series over growing seasons in California and Argentina and for hurricane events, such as Hurricane Katrina.

Predos, Don↗

Selecting Adsorbents to Separate Diverse Near-Azeotropic Chemicals

Industrial separations of near-azeotropic chemicals, species with very similar boiling points, are energy- and capital-intensive. Adsorption-based processes can energy-efficiently separate near-azeotropic mixtures provided suitable adsorbent materials can be found. Among the full diversity of industry-relevant molecules, millions of these mixtures exist, meaning that discovery of mixture-specific adsorbents by direct experiment is infeasible. We show that vast numbers of adsorbents and adsorbing molecules can be explored in a powerful way by coupling atomistic simulations with machine learning. This concept is demonstrated by describing the adsorption of ~54000 industry-relevant chemicals in an experimentally derived set of thousands of metal–organic framework materials. Here, our results identify thousands of near-azeotropic mixtures that can be efficiently separated using adsorption and open possibilities for creating adsorption processes for complex mixtures with many components.

37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CH↗

Near-Zero Emissions Oxy-Combustion Flue Gas Purification Task 2: SOx/Nox/Hg Removal for High Sulfur Coal

The goal of this project is to develop a near-zero emissions flue gas purification technology for existing PC (pulverized coal) power plants that are retrofitted with oxy-combustion technology. The objective of Task 2 of this project was to evaluate an alternative method of SOx, NOx and Hg removal from flue gas produced by burning high sulfur coal in oxy-combustion power plants. The goal of the program was not only to investigate a new method of flue gas purification but also to produce useful acid byproduct streams as an alternative to using a traditional FGD and SCR for flue gas processing. During the project two main constraints were identified that limit the ability of the process to achieve project goals. 1) Due to boiler island corrosion issues >60% of the sulfur must be removed in the boiler island with the use of an FGD. 2) A suitable method could not be found to remove NOx from the concentrated sulfuric acid product, which limits sale-ability of the acid, as well as the NOx removal efficiency of the process. Given the complexity and safety issues inherent in the cycle it is concluded that the acid product would not be directly saleable and, in this case, other flue gas purification schemes are better suited for SOx/NOx/Hg control when burning high sulfur coal, e.g. this project's Task 3 process or a traditional FGD and SCR.

01 COAL, LIGNITE, AND PEAT↗

Development of a Novel Gas Pressurized Stripping Process-Based Technology for CO₂ Capture from Post-Combustion Flue Gases

A novel Gas Pressurized Stripping (GPS) post-combustion carbon capture (PCC) process has been developed by Carbon Capture Scientific, LLC, CONSOL Energy Inc., Nexant Inc., and Western Kentucky University in this bench-scale project. The GPS-based process presents a unique approach that uses a gas pressurized technology for CO₂ stripping at an elevated pressure to overcome the energy use and other disadvantages associated with the benchmark monoethanolamine (MEA) process. The project was aimed at performing laboratory- and bench-scale experiments to prove its technical feasibility and generate process engineering and scale-up data, and conducting a techno-economic analysis (TEA) to demonstrate its energy use and cost competitiveness over the MEA process. To meet project goals and objectives, a combination of experimental work, process simulation, and technical and economic analysis studies were applied. The project conducted individual unit lab-scale tests for major process components, including a first absorption column, a GPS column, a second absorption column, and a flasher. Computer simulations were carried out to study the GPS column behavior under different operating conditions, to optimize the column design and operation, and to optimize the GPS process for an existing and a new power plant. The vapor-liquid equilibrium data under high loading and high temperature for the selected amines were also measured. The thermal and oxidative stability of the selected solvents were also tested experimentally and presented. A bench-scale column-based unit capable of achieving at least 90% CO₂ capture from a nominal 500 SLPM coal-derived flue gas slipstream was designed and built. This integrated, continuous, skid-mounted GPS system was tested using real flue gas from a coal-fired boiler at the National Carbon Capture Center (NCCC). The technical challenges of the GPS technology in stability, corrosion, and foaming of selected solvents, and environmental, health and safety risks have been addressed through experimental tests, consultation with vendors and engineering analysis. Multiple rounds of TEA were performed to improve the GPS-based PCC process design and operation, and to compare the energy use and cost performance of a nominal 550-MWe supercritical pulverized coal (PC) plant among the DOE/NETL report Case 11 (the PC plant without CO₂ capture), the DOE/NETL report Case 12 (the PC plant with benchmark MEA-based PCC), and the PC plant using GPS-based PCC. The results reveal that the net power produced in the PC plant with GPS-based PCC is 647 MWe, greater than that of the Case 12 (550 MWe). The 20-year LCOE for the PC plant with GPS-based PCC is 97.4 mills/kWh, or 152% of that of the Case 11, which is also 23% less than that of the Case 12. These results demonstrate that the GPS-based PCC process is energy-efficient and cost-effective compared with the benchmark MEA process.

Chen, Shiaoguo↗

Let’s Stick Together: Interplay of Moisture, Particle Size, and Anatomical Fraction in the Flowability of Corn Stover Crumbles

Handling of agricultural waste biomass feedstocks (such as corn stover) is a persistent challenge in the production of biofuels and chemicals at integrated biorefineries. Inconsistent flowability and high feedstock variability creates equipment downtime and processing challenges. This work investigates the influence of anatomical fractionation and moisture content on the bulk solids handling behavior of corn stover crumbles. A combination of rotational shear testing, tribological measurements, and surface and sorption characterization techniques (inverse gas chromatography (IGC), dynamic vapor sorption (DVS), and electron microscopy) were used to evaluate the contributions of particle composition, size, and surface properties to flow behavior. Shear and frictional testing revealed that moisture content has the greatest effect on flowability, significantly increasing unconfined yield strength (ƒ c ) and reducing the flow function coefficient (F F C), regardless of anatomical fraction. While differences in surface energy were observed between fractions, particularly in polar contributions (γ AB ), these did not correspond to meaningful differences in flow behavior. Coarser 6 mm particles exhibited poorer flow performance than 4 mm crumbles, likely due to broader particle size distributions and increased particle interlocking. Taken together, these results suggest that anatomical fractionation provides minimal benefit from a bulk handling perspective. Moisture content and particle size heterogeneity dominate handling behavior, reinforcing the utility of unfractionated corn stover in processing environments. These insights can inform the design of more efficient and reliable feedstock processing systems for agricultural biomass in integrated biorefineries.

09 BIOMASS FUELS↗

Satellite measurements of nitric oxide in the polar region

Ultraviolet measurements of the (1, 0) gamma band of nitric oxide in fluorescence by a satellite at high latitudes show nitric oxide concentrations which are highly variable in both time and space. The average nitric oxide concentration is 3 to 4 times higher at high latitudes than at midlatitudes. If auroral activity is responsible for the larger nitric oxide densities and if the reaction N(2D) + O2 is the source of NO, then auroral processes must be more efficient in the production of N(2D) atoms than dayglow processes.

Rusch, D. W.↗

Measuring the impact of computer resource quality on the software development process and product

The availability and quality of computer resources during the software development process was speculated to have measurable, significant impact on the efficiency of the development process and the quality of the resulting product. Environment components such as the types of tools, machine responsiveness, and quantity of direct access storage may play a major role in the effort to produce the product and in its subsequent quality as measured by factors such as reliability and ease of maintenance. During the past six years, the NASA Goddard Space Flight Center has conducted experiments with software projects in an attempt to better understand the impact of software development methodologies, environments, and general technologies on the software process and product. Data was extracted and examined from nearly 50 software development projects. All were related to support of satellite flight dynamics ground-based computations. The relationship between computer resources and the software development process and product as exemplified by the subject NASA data was examined. Based upon the results, a number of computer resource-related implications are provided.

Mcgarry, Frank↗

Regional-Scale Modeling at NASA Goddard Space Flight Center

Over the past decade, the Goddard Mesoscale Modeling and Dynamics Group has used a popular regional scale model, MM5, to study precipitation processes. Our group is making contributions to the MM5 by incorporating the following physical and numerical packages: improved Goddard cloud processes, a land processes model (Parameterization for Land-Atmosphere-Cloud Exchange - PLACE), efficient but sophisticated radiative processes, conservation of hydrometeor mass (water budget), four-dimensional data assimilation for rainfall, and better computational methods for trace gas transport. At NASA Goddard, the MM5 has been used to study: (1) the impact of initial conditions, assimilation of satellite-derived rainfall, and cumulus parameterizations on rapidly intensifying oceanic cyclones, hurricanes and typhoons, (2) the dynamic and thermodynamic processes associated with the development of narrow cold frontal rainbands, (3) regional climate and water cycles, (4) the impact of vertical transport by clouds and lightning on trace gas distributiodproduction associated with South and North American mesoscale convective systems, (5) the development of a westerly wind burst (WWB) that occurred during the TOGA COARE and the diurnal variation of precipitation in the tropics, (6) a Florida sea breeze convective event and a Mid-US flood event using a sophisticated land surface model, (7) the influence of soil heterogeneity on land surface energy balance in the southwest GCIP region, (8) explicit simulations (with 1.33 to 4 km horizontal resolution) of hurricanes Bob (1991) and Bonnie (1998), (9) a heavy precipitation event over Taiwan, and (10) to make real time forecasts for a major NASA field program. In this paper, the modifications and simulated cases will be described and discussed.

Tao, W.-K.↗

Real-Time Imaging of Ground Cover: Relationships with Radiation Capture, Canopy Photosynthesis, and Daily Growth Rate

Cumulative absorbed radiation is highly correlated with crop biomass and yield. In this chapter we describe the use of a digital camera and commercial imaging software for estimating daily radiation capture, canopy photosynthesis, and relative growth rate. Digital images were used to determine percentage of ground cover of lettuce (Lactuca sativa L.) communities grown at five temperatures. Plants were grown in a steady-state, 10-chamber CO2 gas exchange system, which was used to measure canopy photosynthesis and daily carbon gain. Daily measurements of percentage of ground cover were highly correlated with daily measurements of both absorbed radiation (r(sup 2) = 0.99) and daily carbon gain (r(sup 2) = 0.99). Differences among temperature treatments indicated that these relationships were influenced by leaf angle, leaf area index, and chlorophyll content. An analysis of the daily images also provided good estimates of relative growth rates, which were verified by gas exchange measurements of daily carbon gain. In a separate study we found that images taken at hourly intervals were effective for monitoring real-time growth. Our data suggests that hourly images can be used for early detection of plant stress. Applications, limitations, and potential errors are discussed. We have long known that crop yield is determined by the efficiency of four component processes: (i) radiation capture, (ii) quantum yield, (iii) carbon use efficiency, and (iv) carbon partitioning efficiency (Charles-Edwards, 1982; Penning de Vries & van Laar, 1982; Thornley, 1976). More than one-half century ago, Watson (1947, 1952) showed that variation in radiation capture accounted for almost all of the variation in yield between sites in temperate regions, because the three other components are relatively constant when the crop is not severely stressed. More recently, Monteith (1977) reviewed the literature on the close correlation between radiation capture and yield. Bugbee and Monje (1992) demonstrated the close relationship between absorbed radiation and yield in an optimal environment.

Klassen, S. P.↗

Efficient Hydrogen Delivery for Microbial Electrosynthesis via 3D-Printed Cathodes

The efficient delivery of electrochemically in situ produced H 2 can be a key advantage of microbial electrosynthesis over traditional gas fermentation. However, the technical details of how to supply large amounts of electric current per volume in a biocompatible manner remain unresolved. Here, we explored for the first time the flexibility of complex 3D-printed custom electrodes to fine tune H 2 delivery during microbial electrosynthesis. Using a model system for H 2 -mediated electromethanogenesis comprised of 3D fabricated carbon aerogel cathodes plated with nickel-molybdenum and Methanococcus maripaludis, we showed that novel 3D-printed cathodes facilitated sustained and efficient electromethanogenesis from electricity and CO 2 at an unprecedented volumetric production rate of 2.2 L CH4 /L catholyte /day and at a coulombic efficiency of 99%. Importantly, our experiments revealed that the efficiency of this process strongly depends on the current density. At identical total current supplied, larger surface area cathodes enabled higher methane production and minimized escape of H 2 . Specifically, low current density (<1 mA/cm 2 ) enabled by high surface area cathodes was found to be critical for fast start-up times of the microbial culture, stable steady state performance, and high coulombic efficiencies. Our data demonstrate that 3D-printing of electrodes presents a promising design tool to mitigate effects of bubble formation and local pH gradients within the boundary layer and, thus, resolve key critical limitations for in situ electron delivery in microbial electrosynthesis.

03 NATURAL GAS↗

The Production of Low Ash Coals Using the Hydrophobic-Hydrophilic Separation Process with Novel Developments

Froth flotation is a common mineral processing method in coal preparation. This process becomes less efficient, however, as particle size is reduced, and ultrafine particles are often discarded prior to froth flotation, contributing to a substantial amount of coal waste in impoundments. Because of the land-use and risk of an impoundment failure, these impoundments pose an environmental liability. To address ultrafine coal rejection, researchers at Virginia Tech developed the hydrophobic-hydrophilic separation (HHS) process. Unlike in froth flotation, HHS uses an organic solvent to separate and dewater hydrophobic particles from hydrophilic minerals. Past work on the HHS process yielded promising results. In particular, the HHS process has produced a low-ash (<2%) and low moisture (<8%) product, which is a viable feed stock for carbon products. In this work, an investigation of the effects of auxiliary processes on the HHS process was conducted. The auxiliary processes included grinding, pre-concentration, and reagent conditioning. This work also contains an investigation on the interaction between two primary unit operations in the HHS process: oil agglomeration and de-emulsification. Lastly, to make the HHS process more viable for commercial scale-up, a novel unit operation was developed and tested that performs comparably to the current HHS process.

01 COAL, LIGNITE, AND PEAT↗

Developing an integrated hub location and revenue management model considering multi-classes of customers in the airline industry

The hub location and revenue management problems are two interesting research fields in the transportation and network design studies. The hub location model designs the transportation network structure and the revenue management model allocates the network’s capacity for customer classes based on their sensitivity to prices. In this paper, we consider the integrated hub location and revenue management problem in the airline industry to maximize the revenue of transportation network and minimize hub installation costs. p hubs have been chosen from a set of n nodes and connected to a central node based on star–star network design. The capacity of the installed links between the hubs and the central node and the hubs and non-hub nodes is limited. This limited capacity has been allocated to the stochastic demands of customer classes using the revenue management approach. A two-stage stochastic model has been derived to determine the locations of hubs and protection levels in the ticket sale process, and an efficient modification of genetic algorithm has been proposed for the large-scale problems. Numerical experiments have been carried out to assess the effectiveness of the proposed algorithm.

97 MATHEMATICS AND COMPUTING↗

Ultrafast Exciton Dissociation at the 2D-WS 2 Monolayer/Perovskite Interface

For an excitonic photovoltaic (PV) device to perform efficiently, photogenerated excitons in the charge donor need to be dissociated through charge transfer (CT) to the acceptor rapidly after their photogeneration and remain separated for a longer time to allow the collection of charges. To improve the efficiency of these steps, several combinations of materials have been examined. Due to their excellent optical properties, two-dimensional transition-metal dichalcogenides (2D-TMDs) have recently been explored. Another promising class of materials to platform efficient PVs is organic–inorganic perovskites. Here, we report on the ultrafast exciton dissociation through electron transfer from a 2D tungsten disulfide (WS 2 ) monolayer to a thin layer of methylammonium lead iodide (CH 3 NH 3 PbI 3 ) perovskites. Photoluminescence measurements showed that when the 2D-WS 2 monolayer was covered with perovskites, its emission completely quenched, suggesting that the CT process is highly efficient. Despite that pump–probe spectroscopy measurements were carried out with a ~45 fs temporal resolution, the CT dynamics were not captured. A comparison of the ultrafast dynamics of the two band-edge excitons of the charge donor (2D-WS 2 ) suggested that electron transfer is the dominant pathway of CT. Furthermore, these pump–probe measurements indicated that a small fraction of transferred electrons remained in the perovskites up to almost 2 ns. These findings may open a new horizon for understanding the dissociation of photogenerated excitons in 2D-TMDs through hybridization with another class of nanomaterials.

37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CH↗

Spectroscopic Investigation of Catalyst Inks and Thin Films Toward the Development of Ionomer Quality Control

As the production of polymer electrolyte fuel cells expands, novel quality control methods must be invented or adapted in order to support expected rates of production. Ensuring the quality of deposited catalyst layers is an essential step in the fuel cell manufacturing process, as the efficiency of a fuel cell is reliant on the catalyst layer being uniform at both the target platinum loading and the target ionomer content. Implementing a quality control method that is sensitive to these aspects is imperative, as wasting precious metals and other catalyst materials is expensive, and represents a potential barrier to entry into the field for manufacturers experimenting with novel deposition processes. In this work, we analyzed catalyst inks to determine if their ionomer content could be quantized spectroscopically. Attenuated total reflection (ATR) Fourier transform infrared spectroscopic technique was investigated producing a signal proportional to the ionomer content. ATR spectroscopy was able to quantitatively differentiate samples in which the ionomer to carbon mass ratio (I/C) varied between 0.9 and 3.0. The I/C ratio was correlated to the measured ATR signal near the CF 2 vibrational bands located between 1100 cm −1 and 1400 cm −1 . The experimental results obtained constitute a step toward the development of novel quality control methodologies for catalyst inks utilized by the fuel cell industry.

30 DIRECT ENERGY CONVERSION↗

Representation and Integration of Scientific Information

The objective of this Joint Research Interchange with NASA-Ames was to investigate how the Tsimmis technology could be used to represent and integrate scientific information. The main goal of the Tsimmis project is to allow a decision maker to find information of interest from such sources, fuse it, and process it (e.g., summarize it, visualize it, discover trends). Another important goal is the easy incorporation of new sources, as well the ability to deal with sources whose structure or services evolve. During the Interchange we had research meetings approximately every month or two. The funds provided by NASA supported work that lead to the following two papers: Fusion Queries over Internet Databases; Efficient Query Subscription Processing in a Multicast Environment.

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