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Results for “PLASMA ELECTRODE”

Search indexed NASA NTRS and DOE OSTI research on propulsion, heat transfer, battery materials and energy systems. Follow report and document links to the original sources.

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At least 163 records · Page 9
All sourcesNASA NTRSDOE OSTI
DOE OSTI2016

“Virtual IED sensor” at an rf-biased electrode in low-pressure plasma

Energy distribution and the flux of the ions coming on a surface are considered as the key-parameters in anisotropic plasma etching. Since direct ion energy distribution (IED) measurements at the treated surface during plasma processing are often hardly possible, there is an opportunity for virtual ones. This work is devoted to the possibility of such indirect IED and ion flux measurements at an rf-biased electrode in low-pressure rf plasma by using a “virtual IED sensor” which represents “in-situ” IED calculations on the absolute scale in accordance with a plasma sheath model containing a set of measurable external parameters. The “virtual IED sensor” should also involve some external calibration procedure. Applicability and accuracy of the “virtual IED sensor” are validated for a dual-frequency reactive ion etching (RIE) inductively coupled plasma (ICP) reactor with a capacitively coupled rf-biased electrode. The validation is carried out for heavy (Ar) and light (H{sub 2}) gases under different discharge conditions (different ICP powers, rf-bias frequencies, and voltages). An EQP mass-spectrometer and an rf-compensated Langmuir probe (LP) are used to characterize plasma, while an rf-compensated retarded field energy analyzer (RFEA) is applied to measure IED and ion flux at the rf-biased electrode. Besides, the pulsed selfbias method is used as an external calibration procedure for ion flux estimating at the rf-biased electrode. It is shown that pulsed selfbias method allows calibrating the IED absolute scale quite accurately. It is also shown that the “virtual IED sensor” based on the simplest collisionless sheath model allows reproducing well enough the experimental IEDs at the pressures when the sheath thickness s is less than the ion mean free path λ{sub i} (s < λ{sub i}). At higher pressure (when s > λ{sub i}), the difference between calculated and experimental IEDs due to ion collisions in the sheath is observed in the low energy range. The effect of electron impact ionization in the sheath on the origin and intensity of low-energy peaks in IED is discussed compared to ion charge-exchange collisions. Obviously, the extrapolation of the “virtual IED sensor” approach to higher pressures requires developing some other sheath models, taking into account both ion and electron collisions and probably including even a model of the whole plasma volume instead of plasma sheath one.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗
DOE OSTI2015

A study on improvement of discharge characteristic by using a transformer in a capacitively coupled plasma

In a plasma discharge system, the power loss at powered line, matching network, and other transmission line can affect the discharge characteristics such as the power transfer efficiency, voltage and current at powered electrode, and plasma density. In this paper, we propose a method to reduce power loss by using a step down transformer mounted between the matching network and the powered electrode in a capacitively coupled argon plasma. This step down transformer decreases the power loss by reducing the current flowing through the matching network and transmission line. As a result, the power transfer efficiency was increased about 5%–10% by using a step down transformer. However, the plasma density was dramatically increased compared to no transformer. This can be understood by the increase in ohmic heating and the decrease in dc-self bias. By simply mounting a transformer, improvement of discharge efficiency can be achieved in capacitively coupled plasmas.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗
DOE OSTI2015

Boundary conditions at the walls with thermionic electron emission in two temperature modeling of “thermal” plasmas

In this paper, we propose new boundary conditions for the electric potential, the electron energy equation, and the energy equation for heavy particles (ions and neutrals) at the hot walls with thermionic electron emission for two-temperature thermal arc models. The derived boundary conditions assume that the walls are made from refractory metals and, consequently, the erosion of the wall is small and can be neglected. In these boundary conditions, the plasma sheath formed at the electrode is viewed as the interface between the plasma and the wall. The derived boundary conditions allow the calculation of the heat flux to the walls from the plasma. This allows the calculation of the thermionic electron current that makes the model of electrode-plasma interaction self-consistent.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗
DOE OSTI2012

Abatement of CF{sub 4} and CHF{sub 3} byproducts using low-pressure plasmas generated by annular-shaped electrodes

Three different driving schemes are tested for a plasma reactor designed to abate the greenhouse gases emitted by the semiconductor industry. The reactor and electrodes all have a concentric annular shape, which allows them to be easily connected to pre-existing pipelines without any disturbance to the exhaust stream. The destruction and removal efficiencies are measured for CF{sub 4} by varying the O{sub 2}/CF{sub 4} ratio and pressure. The influences of adding O{sub 2} and H{sub 2}O to the byproducts of the CHF{sub 3} abatement process are investigated by analyzing the spectra resulting from Fourier transform infrared spectroscopy measurements. Based on the experimental results we suggest an appropriate combination of driving scheme and reactant gas species for efficient and economical abatement of a mixture of CHF{sub 3} and CF{sub 4}. Then, the optimal flow rate of the reactant gas is presented. Finally, the reduction rates for global warming emissions are estimated to demonstrate the feasibility of using our device for abatement of greenhouse gases emitted by the semiconductor industry.

54 ENVIRONMENTAL SCIENCES↗
NASA NTRS1977

Neutron monitoring and electrode calorimetry experiments in the HIP-1 Hot Ion Plasma

Results are presented for two diagnostic procedures on HIP-1: neutron diagnostics to determine where neutrons originated within the plasma discharge chamber and electrode calorimetry to measure the steady-state power absorbed by the two anodes and cathodes. Results are also reported for a hot-ion plasma formed with a continuous-cathode rod, one that spans the full length of the test section, in place of the two hollow cathodes. The outboard neutron source strength increased relative to that at the midplane when (1) the cathode tips were moved farther outboard, (2) the anode diameters were increased, and (3) one of the anodes was removed. The distribution of neutron sources within the plasma discharge chamber was insensitive to the division of current between the two cathodes. For the continuous cathode, increasing the discharge current increased the midplane neutron source strength relative to the outboard source strength. Each cathode absorbed from 12 to 15 percent of the input power regardless of the division of current between the cathodes. The anodes absorbed from 20 to 40 percent of the input power. The division of power absorption between the anodes varied with plasma operating conditions and electrode placement.

Reinmann, J. J.↗
DOE OSTI2022

Multi-electrode/multi-modal atmospheric pressure glow discharge plasma ionization device

Apparatus include an atmospheric pressure glow discharge (APGD) analyte electrode defining an analyte discharge axis into an APGD volume, and a plurality of APGD counter electrodes having respective electrical discharge ends directed to the APGD volume, wherein the APGD analyte electrode and the APGD counter electrodes are configured to produce an APGD plasma in the APGD volume with a voltage difference between the APGD analyte electrode and one or more of the AGPD counter electrodes. An electrode can be integrated into an ion inlet. Apparatus can be configured to perform auto-ignition and/or provide multi-modal operation through selectively powering electrodes. Electrode holder devices are disclosed. Related methods are disclosed.

Koppenaal, David W.↗
DOE OSTI2024

Fluoro‐Ethylene‐Carbonate Plays a Double‐Edged Role on the Stability of Si Anode‐Based Rechargeable Batteries During Cycling and Calendar Aging

Abstract The energy storage density of Li‐ion batteries can be improved by replacing graphite anodes with high‐capacity Si‐based materials, though instabilities have limited their implementation. Performance degradation mechanisms that occur in Si anodes can be divided into cycling stability (capacity retention after repeated battery cycles) and calendar aging (shelf life). While cycling instabilities and improvement strategies have been researched intensively, there is little known about the underlying mechanisms that cause calendar aging. In this work, multiple electron microscope techniques are used to explore the mechanism that governs calendar aging from the sub‐nanometer‐to‐electrode scale. Plasma focused ion beam tomography is used to create 3D reconstructions of calendar aged electrodes and revealed the growth of a LiF‐rich layer at the interface between the copper current collector and the silicon material, which can lead to delamination and increased interfacial impendence. The LiF layer appeared to derive from the fluoro‐ethylene‐carbonate electrolyte additive, which is commonly used to improve cycling stability in Si‐based systems. The results reveal that additives necessary to improve cycling stability can cause performance degradation over the long‐term during calendar aging. The results show that high performing, stable systems require careful design to simultaneously mitigate both cycling and calendar aging instabilities.

25 ENERGY STORAGE↗
DOE OSTI2013

Method of plasma etching GA-based compound semiconductors

A method of plasma etching Ga-based compound semiconductors includes providing a process chamber and a source electrode adjacent thereto. The chamber contains a Ga-based compound semiconductor sample in contact with a platen which is electrically connected to a first power supply, and the source electrode is electrically connected to a second power supply. SiCl.sub.4 and Ar gases are flowed into the chamber. RF power is supplied to the platen at a first power level, and RF power is supplied to the source electrode. A plasma is generated. Then, RF power is supplied to the platen at a second power level lower than the first power level and no greater than about 30 W. Regions of a surface of the sample adjacent to one or more masked portions of the surface are etched at a rate of no more than about 25 nm/min to create a substantially smooth etched surface.

47 OTHER INSTRUMENTATION↗
DOE OSTI2015

Role of ambient dielectric in propagation of Ar atmospheric pressure nonequilibrium plasma jets

A single-electrode atmospheric pressure nonequilibrium plasma jet surrounded with different ambient dielectrics is investigated driven by AC power supply. Another three ambient dielectrics, distilled water, ethanol, and carbon tetrachloride, are adopted to compare with air. By examining electrical and optical characteristics, it was found that the molecular polarity of ambient dielectrics had its significant effect on the propagation of atmospheric pressure nonequilibrium plasma jets. When the polarization of molecules was enhanced, the discharge current and the bullet velocity were also increased. For nonpolar dielectric of carbon tetrachloride, this was mainly resulted from the electron polarization in the built-in electric field. For polar dielectrics of ethanol and distilled water, in addition to the electron polarization, orientation polarization was the main cause for the further increase in discharge current and bullet velocity.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗
DOE OSTI2015

Fine structure of modal focusing effect in a three dimensional plasma-sheath-lens formed by disk electrodes

Modal and discrete focusing effects associated with three-dimensional plasma-sheath-lenses show promising potential for applications in ion beam extraction, mass spectrometry, plasma diagnostics and for basic studies of plasma sheath. The ion focusing properties can be adjusted by controlling the geometrical structure of the plasma-sheath-lens and plasma parameters. The positive and negative ion kinetics within the plasma-sheath-lens are investigated both experimentally and theoretically and a modal focusing ring is identified on the surface of disk electrodes. The focusing ring is very sensitive to the sheath thickness and can be used to monitor very small changes in plasma parameters. Three dimensional simulations are found to be in very good agreement with experiments.

71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSIC↗
DOE OSTI2025

Study of the Design and Characteristics of a Modified Pulsed Plasma Thruster with Graphite and Tungsten Trigger Electrodes

The paper presents experimental results for a modified pulsed plasma thruster (PPT) with solid propellant, using a coaxial anode–cathode design. Graphite from pencil leads served as propellant, and a tungsten trigger electrode was tested to reduce carbonization effects. Experiments were performed in a vacuum chamber at 0.001 Pa, employing diagnostics such as discharge current/voltage recording, power measurement, ballistic pendulum, time-of-flight (TOF) method, and a Faraday cup. Current and voltage waveforms matched an oscillatory RLC circuit with variable plasma channel resistance. Key discharge parameters were measured, including current pulse duration/amplitude and plasma channel formation/decay dynamics. Impulse bit values, obtained with a ballistic pendulum, reached up to 8.5 μN·s. Increasing trigger capacitor capacitance reduced thrust due to unstable “pre-plasma” formation and partial pre-discharge energy loss. Using TOF and Faraday cup diagnostics, plasma front velocity, ion current amplitude, current density, and ion concentration were determined. Tungsten electrodes produced lower charged particle concentrations than graphite but offered better adhesion resistance, minimal carbonization, and stable long-term performance. The findings support optimizing trigger electrode materials and PPT operating modes to extend lifetime and stabilize thrust output.

Faraday cup↗
DOE OSTI2024

Enhancements of electric field and afterglow of non-equilibrium plasma by Pb(ZrxTi1−x)O3 ferroelectric electrode

Abstract Manipulating surface charge, electric field, and plasma afterglow in a non-equilibrium plasma is critical to control plasma-surface interaction for plasma catalysis and manufacturing. Here, we show enhancements of surface charge, electric field during breakdown, and afterglow by ferroelectric barrier discharge. The results show that the ferroelectrics manifest spontaneous electric polarization to increase the surface charge by two orders of magnitude compared to discharge with an alumina barrier. Time-resolved in-situ electric field measurements reveal that the fast polarization of ferroelectrics enhances the electric field during the breakdown in streamer discharge and doubles the electric field compared to the dielectric barrier discharge. Moreover, due to the existence of surface charge, the ferroelectric electrode extends the afterglow time and makes discharge sustained longer when alternating the external electric field polarity. The present results show that ferroelectric barrier discharge offers a promising technique to tune plasma properties for efficient plasma catalysis and electrified manufacturing.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗
DOE OSTI2012

X-band microwave generation caused by plasma-sheath instability

It is well known that oscillations at the electron plasma frequency may appear due to instability of the plasma sheath near a positively biased electrode immersed in plasma. This instability is caused by transit-time effects when electrons, collected by this electrode, pass through the sheath. Such oscillations appear as low-power short spikes due to additional ionization of a neutral gas in the electrode vicinity. Herein we present first results obtained when the additional ionization was eliminated. We succeeded in prolonging the oscillations during the whole time a positive bias was applied to the electrode. These oscillations could be obtained at much higher frequency than previously reported (tens of GHz compared to few hundreds of MHz) and power of tens of mW. These results in combination with presented theoretical estimations may be useful, e.g., for plasma diagnostics.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗