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At least 163 records · Page 9
All sourcesNASA NTRSDOE OSTI
NASA NTRS2000

Research Activities at Plasma Research Laboratory at NASA Ames Research Center

In order to meet NASA's requirements for the rapid development and validation of future generation electronic devices as well as associated materials and processes, enabling technologies are being developed at NASA-Ames Research Center using a multi-discipline approach. The first step is to understand the basic physics of the chemical reactions in the area of plasma reactors and processes. Low pressure glow discharges are indispensable in the fabrication of microelectronic circuits. These plasmas are used to deposit materials and also etch fine features in device fabrication. However, many plasma-based processes suffer from stability and reliability problems leading to a compromise in performance and a potentially increased cost for the semiconductor manufacturing industry. Although a great deal of laboratory-scale research has been performed on many of these processing plasmas, little is known about the gas-phase and surface chemical reactions that are critical in many etch and deposition processes, and how these reactions are influenced by the variation in operating conditions. Such a lack of understanding has hindered the development of process models that can aid in the scaling and improvement of plasma etch and deposition systems. Our present research involves the study of such plasmas. An inductively-coupled plasma (ICP) source in place of the standard upper electrode assembly of the Gaseous Electronics Conference (GEC) radio-frequency (RF) Reference Cell is used to investigate the discharge characteristics. This ICP source generates plasmas with higher electron densities and lower operating pressures than obtainable with the original parallel-plate version of the GEC Cell. This expanded operating regime is more relevant to new generations of industrial plasma systems being used by the microelectronics industry. The research goal is to develop an understanding of the physical phenomena involved in plasma processing and to measure much needed fundamental parameters, such as gas phase and surface reaction rates, species concentration, temperature, ion energy distribution, and electron number density.

Sharma, S. P.↗
NASA NTRS1979

Preparation of dielectric coating of variable dielectric constant by plasma polymerization

A plasma polymerization process for the deposition of a dielectric polymer coating on a substrate comprising disposing of the substrate in a closed reactor between two temperature controlled electrodes connected to a power supply is presented. A vacuum is maintained within the closed reactor, causing a monomer gas or gas mixture of a monomer and diluent to flow into the reactor, generating a plasma between the electrodes. The vacuum varies and controls the dielectric constant of the polymer coating being deposited by regulating the gas total and partial pressure, the electric field strength and frequency, and the current density.

Hudis, M.↗
NASA NTRS1975

SUMMA hot-ion plasma heating research at NASA Lewis Research Center

The SUMMA superconducting magnetic mirror facility and the associated hot-ion plasma research were described. SUMMA is characterized by intense magnetic fields and a large-diameter working bore (41 cm diameter) with room-temperature access. The goal of the plasma research program is to produce steady-state plasmas of fusion reactor densities and temperatures (but not confinement times). The program includes electrode development to produce a hot, dense, large-volume, steady-state plasma and diagnostics development to document the plasma properties. SUMMA and its hot-ion plasma are ideally suited to develop advanced plasma diagnostics methods. Two such methods whose requirements are well matched to SUMMA are: (1) heavy ion beam probing to measure plasma space potential; and (2) submillimeter wavelength laser Thomson scattering to measure local ion temperature.

Reinmann, J. J.↗
NASA NTRS1975

SUMMA hot-ion plasma heating research at NASA Lewis Research Center

This report describes the SUMMA superconducting magnetic mirror facility at the NASA Lewis Research Center and the hot-ion plasma research conducted therein. SUMMA is characterized by intense magnetic fields (designed for 8.6 T at the mirrors) and a large-diameter working bore (41 cm diameter) with room-temperature access. The goal of the plasma research program is to produce steady-state plasmas of fusion reactor densities and temperatures (but not confinement times). The program includes electrode development to produce a hot, dense, large-volume, steady-state plasma and diagnostics development to document the plasma properties. SUMMA and its hot-ion plasma are ideally suited to develop advanced plasma diagnostics methods. Two such methods whose requirements are well matched to SUMMA are: (1) heavy ion beam probing to measure plasma space potential, and (2) submillimeter wavelength laser Thomson scattering to measure local ion temperature. Two NASA University Grants were established to identify major requirements for developing these two diagnostic techniques in SUMMA.

Reinmann, J. J.↗
NASA NTRS1999

Diagnostic for Plasma Enhanced Chemical Vapor Deposition and Etch Systems

In order to meet NASA's requirements for the rapid development and validation of future generation electronic devices as well as associated materials and processes, enabling technologies ion the processing of semiconductor materials arising from understanding etch chemistries are being developed through a research collaboration between Stanford University and NASA-Ames Research Center, Although a great deal of laboratory-scale research has been performed on many of materials processing plasmas, little is known about the gas-phase and surface chemical reactions that are critical in many etch and deposition processes, and how these reactions are influenced by the variation in operating conditions. In addition, many plasma-based processes suffer from stability and reliability problems leading to a compromise in performance and a potentially increased cost for the semiconductor manufacturing industry. Such a lack of understanding has hindered the development of process models that can aid in the scaling and improvement of plasma etch and deposition systems. The research described involves the study of plasmas used in semiconductor processes. An inductively coupled plasma (ICP) source in place of the standard upper electrode assembly of the Gaseous Electronics Conference (GEC) radio-frequency (RF) Reference Cell is used to investigate the discharge characteristics and chemistries. This ICP source generates plasmas with higher electron densities (approximately 10(exp 12)/cu cm) and lower operating pressures (approximately 7 mTorr) than obtainable with the original parallel-plate version of the GEC Cell. This expanded operating regime is more relevant to new generations of industrial plasma systems being used by the microelectronics industry. The motivation for this study is to develop an understanding of the physical phenomena involved in plasma processing and to measure much needed fundamental parameters, such as gas-phase and surface reaction rates. species concentration, temperature, ion energy distribution, and electron number density. A wide variety of diagnostic techniques are under development through this consortium grant to measure these parameters. including molecular beam mass spectrometry (MBMS). Fourier transform infrared (FTIR) spectroscopy, broadband ultraviolet (UV) absorption spectroscopy, a compensated Langmuir probe. Additional diagnostics. Such as microwave interferometry and microwave absorption for measurements of plasma density and radical concentrations are also planned.

Cappelli, Mark A.↗
NASA NTRSDate not supplied

High Altitude Re-entry Plasma Emulation Experiment (HARPEE)

A table-top apparatus has recently been constructed at the NASA Glenn Research Center to investigate potential solutions for the radio-frequency communication blackout problem -- experienced by landing modules during high-speed atmospheric entry. This customized plasma chamber was designed to emulate Earth-based atmospheric entry plasmas with electron densities in the range of 10^16 m^-3 to 10^19 m^-3. The system makes use of a 40-kHz, perforated coaxial electrode pair to generate a disk-shaped, static plasma with an approximate diameter and thickness of 405 mm and 100 mm, respectively. A translatable Langmuir probe was employed to characterize the radial profile of electron temperature and density as a function the 40-kHz power (< 1 kW) and dry-nitrogen flow rate (< 160 SCCM).

plasma↗
NASA NTRS1994

Plasma arc welding torch having means for vortexing plasma gas exiting the welding torch

A plasma arc welding torch is described wherein a plasma gas is directed through the body of the welding torch and out of the body across the tip of the welding electrode disposed at the forward end of the body. The plasma gas is provided with a vortexing motion prior to exiting the body by a vortex motion imparting member which is mounted in an orifice housing member and carried in the forward portion of the torch body. The orifice housing member is provided with an orifice of an predetermined diameter through which the electric arc and the plasma gas exits.

Rybicki, Daniel J.↗
NASA NTRS1971

Development and initial operating characteristics of the 20 megawatt linear plasma accelerator facility

A 20-megawatt linear plasma accelerator facility, a steady flow, Faraday-type plasma accelerator facility for high velocity aerodynamic testing, was constructed, developed, and brought to an operational status. The accelerator has a 63.5-mm-square and 0.5-meter-long channel and utilizes nitrogen-seeded with 2 % mole fraction of cesium vapor. Modification of the original accelerator design characteristics and the improvements necessary to make the arc heater a suitable plasma source are described. The measured accelerator electrode current distribution and the electrode-wall potential distributions are given. The computed and the measured values are in good agreement. Measured pitot pressure indicates that an accelerator exit velocity of 9.2 km/sec, is obtained with 30 of the 36 electrode pairs powered and corresponds to a velocity increase to about 2 1/4 times the computed entrance velocity. The computed stagnation enthalpy at the accelerator exit is 92 MJ/kg, and the mass density corresponds to an altitude of about 58 km. The 92 MJ/kg stagnation enthalpy corresponds to a kinetic energy content at low temperature equivalent to a velocity of 13.6 km/sec.

Carter, A. F.↗
NASA NTRS1980

Ultraviolet laser excitation source

A new intense ultraviolet light source has been developed from an array of hypocycloidal pinch (HCP) devices. The basic unit of the array is constructed with three disk electrodes and is capable of producing dense plasmas at temperatures up to 10,000,000 K. Very high input power levels to the array are possible without significantly shortening its useful life, in strong contrast with conventional xenon flashlamps. The new light source, when operated with Ar and Xe gas mixtures at high pressures (approximately 5 x 10 to the 4th Pa), produced a light output of over 100 MW in the near-UV spectral range and successfully pumped an iodine photodissociation laser at 1.315 microns. A xenon recombination laser at 2.027 microns was also pumped in the HCP array.

Lee, J. H.↗
NASA NTRS1994

Laser-Induced Fluorescence Helps Diagnose Plasma Processes

Technique developed to provide in situ monitoring of rates of ion sputter erosion of accelerator electrodes in ion thrusters also used for ground-based applications to monitor, calibrate, and otherwise diagnose plasma processes in fabrication of electronic and optical devices. Involves use of laser-induced-fluorescence measurements, which provide information on rates of ion etching, inferred rates of sputter deposition, and concentrations of contaminants.

Beattie, J. R.↗
NASA NTRS2018

Acceleration Modes and Transitions in Pulsed Plasma Accelerators

Pulsed plasma accelerators typically operate by storing energy in a capacitor bank and then discharging this energy through a gas, ionizing and accelerating it through the Lorentz body force. Two plasma accelerator types employing this general scheme have typically been studied: the gas-fed pulsed plasma thruster and the quasi-steady magnetoplasmadynamic (MPD) accelerator. The gas-fed pulsed plasma accelerator is generally represented as a completely transient device discharging in approximately 1-10 microseconds. When the capacitor bank is discharged through the gas, a current sheet forms at the breech of the thruster and propagates forward under a j (current density) by B (magnetic field) body force, entraining propellant it encounters. This process is sometimes referred to as detonation-mode acceleration because the current sheet representation approximates that of a strong shock propagating through the gas. Acceleration of the initial current sheet ceases when either the current sheet reaches the end of the device and is ejected or when the current in the circuit reverses, striking a new current sheet at the breech and depriving the initial sheet of additional acceleration. In the quasi-steady MPD accelerator, the pulse is lengthened to approximately 1 millisecond or longer and maintained at an approximately constant level during discharge. The time over which the transient phenomena experienced during startup typically occur is short relative to the overall discharge time, which is now long enough for the plasma to assume a relatively steady-state configuration. The ionized gas flows through a stationary current channel in a manner that is sometimes referred to as the deflagration-mode of operation. The plasma experiences electromagnetic acceleration as it flows through the current channel towards the exit of the device. A device that had a short pulse length but appeared to operate in a plasma acceleration regime different from the gas-fed pulsed plasma accelerators was developed by Cheng, et al. The Coaxial High ENerGy (CHENG) thruster operated on the 10-microseconds timescales of pulsed plasma thrusters, but claimed high thrust density, high efficiency and low electrode erosion rates, which are more consistent with the deflagration mode of acceleration. Separate work on gas-fed pulsed plasma thrusters (PPTs) by Ziemer, et al. identified two separate regimes of performance. The regime at higher mass bits (termed Mode I in that work) possessed relatively constant thrust efficiency (ratio of jet kinetic energy to input electrical energy) as a function of mass bit. In the second regime at very low mass bits (termed Mode II), the efficiency increased with decreasing mass bit. Work by Poehlmann et al. and by Sitaraman and Raja sought to understand the performance of the CHENG thruster and the Mode I / Mode II performance in PPTs by modeling the acceleration using the Hugoniot Relation, with the detonation and deflagration modes representing two distinct sets of solutions to the relevant conservation laws. These works studied the proposal that, depending upon the values of the various controllable parameters, the accelerator would operate in either the detonation or deflagration mode. In the present work, we propose a variation on the explanation for the differences in performance between the various pulsed plasma accelerators. Instead of treating the accelerator as if it were only operating in one mode or the other during a pulse, we model the initial stage of the discharge in all cases as an accelerating current sheet (detonation mode). If the current sheet reaches the exit of the accelerator before the discharge is completed, the acceleration mode transitions to the deflagration mode type found in the quasi-steady MPD thrusters. This modeling method is used to demonstrate that standard gas-fed pulsed plasma accelerators, the CHENG thruster, and the quasi-steady MPD accelerator are variations of the same device, with the overall acceleration of the plasma depending upon the behavior of the plasma discharge during initial transient phase and the relative lengths of the detonation and deflagration modes of operation.

Polzin, Kurt A.↗
NASA NTRS1987

A long life plasma switch for space applications

The use of a novel plasma switch based on the inverse-pinch mechanism can reduce local current density over spacecraft power system electrodes, thereby minimizing damage to the insulator. The current density involved is 2 orders of magnitude smaller than that of the z-pinched current in a spark-gap switch; local heating is therefore about 4 orders of magnitude less than that to the electrodes of the spark-gap switch. Over 2000 tests of the plasma switch have been conducted for a forward current of more than 1 MA and up to 20 kV holdoff voltage.

Choi, Sang H.↗
NASA NTRS1986

Contribution to the study of the electric arc: Erosion of metallic electrodes

A procedure is described for determining the extent of arc electrode erosion (excluding erosion due to transfer of material) from measurements of emitted spectral beam intensity. The relation between emission intensity and plasma temperature is ascertained. Experimental study of several combinations of monometallic electrodes shows that the method is suitable for determining cathode erosion, although the anode metal affects the extent of erosion. Combinations of electrodes which lead to low erosion of silver are reported.

Castro, A.↗
NASA NTRSDate not supplied

Hall Magnetohydrodynamic Power Generation and Drag Augmentation Using A Coaxial-Electrode Configuration During Hypersonic Entry

For interplanetary missions, a spacecraft must reduce its relative velocity from orbital speeds of multiple kilometers per second to zero in order to safely land on the surface of a planetary body. During this phase known as planetary reentry, the spacecraft undergoes high speed above Mach 5 up to Mach 30. This hyper-sonic flight regime imposes a strong bow shock in front of the vehicle that imparts extreme aerodynamic and thermal effects. In addition, during portions of this regime, a plasma is formed in the post-shock flow-field around the vehicle due to these high temperatures. Interaction between an applied magnetic field with this electrically conductive fluid, or magnetohydrodynamic (MHD) interaction, can be utilized to convert kinetic energy from the flow into storable electrical energy. Onboard MHD energy generation can benefit the spacecraft by increasing the power of active thermal control components and vehicle control systems during reentry. MHD interaction also exerts a Lorentz body force on the plasma flow that can be manipulated to act as an additional drag force through the vehicle body. MHD drag augmentation can benefit the spacecraft with an additional control mechanism that operates without moving parts. This can be utilized at higher altitudes and subsequently reduce convective heat transfer to the vehicle. MHD interaction with plasma flow suggests that both power generation and drag augmentation can be integrated together in one design. Modern numerical studies have only demonstrated the viability and potential of MHD energy generation and drag modulation separately for implementation into future spacecraft designs [1] [2] [3]. Steeves et. al. presented one possible generator design specifically for reentry vehicles that utilized a modular panel with two embedded electromagnets and two extruding electrodes for air plasma to flow between. Fujino et. al. presented results that indicated increased total drag with a permanent magnet embedded in the blunt body of the Orbital Reentry Experiment (OREX) trajectory. Furthermore, experimental investigations of these two MHD applications have been limited and separate due to the difficult technical nature of experimental de-sign and analysis. For MHD energy generation, there have been two designs which used a cylindrical fore-body with two embedded permanent magnets and two outward facing curved electrodes for tangency to an artificially ionized plasma that flowed along the body length [4] [5]. The first design was studied using an air microwave (MW) ionized supersonic plasma wind tunnel and the second design used radio frequency (RF) ionization of Argon, but both physically demonstrated the feasibility of MHD energy generation in reentry plasma conditions. For MHD drag modulation, one study involved a small-scale cylindrical blunt body embedded with permanent magnets immersed in plasma flow in an arcjet tunnel [6], and another utilized a spherical permanent magnet enclosed with a spherical forebody that was evaluated in a shock expansion tunnel [7]. Both experimental studies provided physical evidence of drag augmentation due to MHD interactions. Therefore, because of the multi-faceted effects of MHD along with both applications having been deemed feasible and beneficial during reentry, this indicates that a coupled power generation and drag modulation design could be achievable. The axi-symmetric nature of blunt bodies for reentry suggests that a spherical set of two ring electrodes near the nose along the body axis. Based on first principles, flow along the walls of the spherical body can then produce MHD interactions between the electrodes. As a result, two currents are generated: a Hall current that produces power and a primary inductive current that augments the drag force. The goal of this work is to provide a simulated design of a coaxial-electrode con-figuration for power generation and drag modulation for experimental testing.

E. Leong↗
NASA NTRS2003

Developing Antimatter Containment Technology: Modeling Charged Particle Oscillations in a Penning-Malmberg Trap

The NASA MSFC Propulsion Research Center (PRC) is conducting a research activity examining the storage of low energy antiprotons. The High Performance Antiproton Trap (HiPAT) is an electromagnetic system (Penning-Malmberg design) consisting of a 4 Tesla superconductor, a high voltage confinement electrode system, and an ultra high vacuum test section; designed with an ultimate goal of maintaining charged particles with a half-life of 18 days. Currently, this system is being experimentally evaluated using normal matter ions which are cheap to produce and relatively easy to handle and provide a good indication of overall trap behavior, with the exception of assessing annihilation losses. Computational particle-in-cell plasma modeling using the XOOPIC code is supplementing the experiments. Differing electrode voltage configurations are employed to contain charged particles, typically using flat, modified flat and harmonic potential wells. Ion cloud oscillation frequencies are obtained experimentally by amplification of signals induced on the electrodes by the particle motions. XOOPIC simulations show that for given electrode voltage configurations, the calculated charged particle oscillation frequencies are close to experimental measurements. As a two-dimensional axisymmetric code, XOOPIC cannot model azimuthal plasma variations, such as those induced by radio-frequency (RF) modulation of the central quadrupole electrode in experiments designed to enhance ion cloud containment. However, XOOPIC can model analytically varying electric potential boundary conditions and particle velocity initial conditions. Application of these conditions produces ion cloud axial and radial oscillation frequency modes of interest in achieving the goal of optimizing HiPAT for reliable containment of antiprotons.

Chakrabarti, S.↗
NASA NTRS1994

Coaxial microwave electrothermal thruster performance in hydrogen

The microwave electro thermal thruster (MET) is an electric propulsion concept that offers the promise of high performance combined with a long lifetime. A unique feature of this electric propulsion concept is its ability to create a microwave plasma discharge separated or floating away from any electrodes or enclosing walls. This allows propellant temperatures that are higher than those in resistojets and reduces electrode and wall erosion. It has been demonstrated that microwave energy is coupled into discharges very efficiently at high input power levels. As a result of these advantages, the MET concept has been identified as a future high power electric propulsion possibility. Recently, two additional improvements have been made to the coaxial MET. The first was concerned with improving the microwave matching. Previous experiments were conducted with 10-30 percent reflected power when incident power was in excess of 600 W(exp 6). Power was reflected back to the generator because the impedance of the MET did not match the 50 ohm impedance of the microwave circuit. To solve this problem, a double stub tuning system has been inserted between the MET and the microwave power supply. The addition of the double stub tuners reduces the reflected power below 1 percent. The other improvement has prepared the coaxial MET for hydrogen experiments. To operate with hydrogen, the vacuum window which separates the coaxial line from the discharge chamber has been changed from teflon to boron nitride. All the microwave energy delivered to the plasma discharge passes through this vacuum window. This material change had caused problems in the past because of the increased microwave reflection coefficients associated with the electrical properties of boron nitride. However, by making the boron nitride window electrically one-half of a wavelength long, power reflection in the window has been eliminated. This technical note summarizes the experimental performance of the improved coaxial MET when operating in nitrogen, helium, and hydrogen gases.

Richardson, W.↗