Search NASA⌕ Search

SEARCH · Search NASA

Results for “programming tools”

Search indexed NASA NTRS and DOE OSTI research on propulsion, heat transfer, battery materials and energy systems. Follow report and document links to the original sources.

Quote a phrase for an exact phrase match. Source license links do not imply unrestricted reuse.

At least 1,693 records · Page 94
All sourcesNASA NTRSDOE OSTI
DOE OSTI2022

Snowmass2021 Computational Frontier White Paper: Cosmological Simulations and Modeling

Powerful new observational facilities will come online over the next decade, enabling a number of discovery opportunities in the "Cosmic Frontier", which targets understanding of the physics of the early universe, dark matter and dark energy, and cosmological probes of fundamental physics, such as neutrino masses and modifications of Einstein gravity. Synergies between different experiments will be leveraged to present new classes of cosmic probes as well as to minimize systematic biases present in individual surveys. Success of this observational program requires actively pairing it with a well-matched state-of-the-art simulation and modeling effort. Next-generation cosmological modeling will increasingly focus on physically rich simulations able to model outputs of sky surveys spanning multiple wavebands. These simulations will have unprecedented resolution, volume coverage, and must deliver guaranteed high-fidelity results for individual surveys as well as for the cross-correlations across different surveys. The needed advances are as follows: (1) Development of scientifically rich and broadly-scoped simulations, which capture the relevant physics and correlations between probes (2) Accurate translation of simulation results into realistic image or spectral data to be directly compared with observations (3) Improved emulators and/or data-driven methods serving as surrogates for expensive simulations, constructed from a finite set of full-physics simulations (4) Detailed and transparent verification and validation programs for both simulations and analysis tools. (Abridged)

46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND ↗
DOE OSTI2011

Baryon resonances in electromagnetic meson production

An overview is given of the exploration of baryon properties in meson photo- and electroproduction at Jefferson Lab. These processes provide ample information relevant to the study of electromagnetic couplings of baryon resonances and to the search for states, yet to be discovered. The CLAS detector, combined with the use of energy-tagged polarized photons and polarized electrons, as well as polarized targets, and the measurement of recoil polarization, provide the tool for a comprehensive nucleon resonance program. The status of this program, prospects for the coming years and plans for the Jefferson Lab 12 GeV upgrade are described.

Burkert, Volker↗
DOE OSTI2012

Contribution to modeling of the reflooding of a severely damaged reactor core using PRELUDE experimental results

In case of accident at a nuclear power plant, water sources may not be available for a long period of time and the core heats up due to the residual power. The reflooding (injection of water into core) may be applied if the availability of safety injection is recovered during accident. If the injection becomes available only in the late phase of accident, water will enter a core configuration that will differ significantly from original rod-bundle geometry. Any attempt to inject water after significant core degradation can lead to further fragmentation of core material. The fragmentation of fuel rods may result in the formation of a 'debris bed'. The typical particle size in a debris bed might reach few millimeters (characteristic length-scale: 1 to 5 mm), i.e., a high permeability porous medium. The French 'Institut de Radioprotection et de Surete Nucleaire' is developing experimental programs (PEARL and PRELUDE) and simulation tools (ICARE-CATHARE and ASTEC) to study and optimize the severe accident management strategy and to assess the probabilities to stop the progress of in-vessel core degradation. It is shown that the quench front exhibits either a ID behaviour or a 2D one, depending on injection rate or bed characteristics. The PRELUDE experiment covers a rather large range of variation of parameters, for which the developed model appears to be quite predictive. (authors)

22 GENERAL STUDIES OF NUCLEAR REACTORS↗
DOE OSTI2017

Geographic Information Systems as an Opportunity for Public Engagement in Environmental Data Analysis for Nuclear Waste Management - 17505

For half a century, scientists across government agencies, industry, academia and other research organizations have been using geographic information system (GIS) tools to display data collected for a wide variety of programs. Recent technology advances have made it possible for the public to also use GIS tools to display data. Meanwhile, around the world, volunteers are increasingly participating in citizen science activities that involve collecting environmental observations and measurements. Considering themes of broad interest to which citizen science and GIS tools could be applied, integrated nuclear waste management represents a potential opportunity for public engagement in environmental data analysis. In the United States, the Department of Energy's (DOE's) goal is to develop solutions for the long-term, sustainable management of the nation's spent nuclear fuel (SNF) and high-level radioactive waste (HLW) from commercial electricity generation, as well as national defense activities. The DOE has been exploring options for an integrated waste management system to transport, store, and dispose of SNF and HLW. To support its efforts, DOE has been exploring ways to seek broad input from the public. Literature was reviewed to assess recent advances in GIS technology and citizen science that could contribute to public engagement in waste management planning. Results identified a variety of promising tools and applications that are readily accessible online, including QGIS and the U.S. Environmental Protection Agency's (EPA's) Real Time Geo-spatial Data Viewer (RETIGO). For example, interested members of the public could illustrate air quality, water quality, and other environmental data in GIS plots to visually represent local conditions over time. This paper highlights potential opportunities for those interested in citizen science and GIS tools as part of exploring options for public engagement in planning for an integrated waste management system. (authors)

12 MANAGEMENT OF RADIOACTIVE AND NON-RADIOACTIVE W↗
DOE OSTI2016

A Paradigm Shift continued: An Application of Structured Decision Making for Sustainable Waste Management - 16486

Structured decision making presents an opportunity for DOE and others engaged in solving complex environmental and waste management problems to find solutions that are stakeholder engaged and cost effective. This approach represents a paradigm shift that was introduced in a series of papers and a panel session at the WM2015 Symposium. The advantages of structured decision making over less formal approaches to decision making include technical defensibility, traceability and transparency. Structured decision making also overcomes the limitations of misapplication of conservatism in modeling, addresses stakeholder concerns and competing objectives directly, and provides a formal method through which internal and external stakeholders are encouraged to collectively and carefully consider all relevant attributes of solving complex problems. The first requirement of this paradigm shift is a realization and recognition that the problems faced are inherently decision problems, and that there is a formal theory of decision analysis that can, and should, be used to support finding the best solutions. Structured decision making is, very simply, formalized common sense. The formalities include: framing the problem; identification of objectives and measures for valuing those objectives; costs or values associated with those objectives; management options or alternatives for taking action that are tied directly to the objectives; and, science-based models to evaluate the options. Decision analysis is used to evaluate objectives and choose management options by balancing probability and consequence. The science-based models are built probabilistically based on expectation and uncertainty, and costs and value judgments are used to fulfill addressing stakeholder concerns. Consequently, this approach avoids misplaced conservatism in science-based modeling and properly places values in the objectives component of a decision model. This approach honestly addresses uncertainty and value judgments and balances these competing components to find the most effective decision. A software framework program called Guided Interactive Statistical Decision Tools (GiSdT - pronounced 'gist') is used to support an application of this paradigm shift towards structured decision making. In this application objectives and management options for a waste disposal problem at the Los Alamos National Laboratory are identified, and features, events and processes are described and defined to form the basis of a conceptual site model. This establishes the decision model structure. Objectives are addressed through the three pillars of sustainability - economic, environmental, and social - and also address regulatory concerns or constraints. Management options include removal of waste to another location and engineering designs for leaving waste in place. Using structured decision making, the relationship between objectives, management options, and the conceptual site model is made clear, and leads to a comprehensive, defensible, transparent and traceable approach to effective decision making. (authors)

12 MANAGEMENT OF RADIOACTIVE AND NON-RADIOACTIVE W↗
DOE OSTI2016

Multiscale Modeling of Accident Tolerant Fuels under the NEAMS ATF Program

The U.S. Department of Energy's Nuclear Energy Advanced Modeling and Simulation (NEAMS) program has been developing computational analysis tools for nuclear fuel simulation. These codes include BISON and Marmot for investigation of fuel behavior at the continuum and microstructural scales, respectively. In 2014, NEAMS introduced what it calls High Impact Problems (HIPs) into its development plan. These HIPs are intended to make significant advancements in a particular area of nuclear power research in a short period of time (3 years or less). NEAMS has chosen an accident tolerant fuel (ATF) project, which emphasizes utilizing BISON and Marmot to model proposed materials, as its first HIP. Since the events that occurred at the Fukushima-Daiichi nuclear power plant in 2011, the U.S. Department of Energy's Office of Nuclear Energy accelerated research in nuclear fuel concepts with enhanced accident tolerance as part of its Fuel Cycle Research and Development (FCRD) Advanced Fuels Campaign (AFC). Accident tolerant fuels are expected to perform at least as well as conventional fuel during normal conditions and provide significantly increased response time in the event of an accident. Given the many unknowns associated with proposed ATF concepts, the research and development being undertaken by AFC in this area is a challenge, particularly considering the desire to have a lead test rod or assembly in a commercial plant by 2022. With the AFC as its primary stakeholder, the NEAMS ATF HIP is developing material models (using a multi-scale approach) for multiple candidate materials. Through a variety of analyses employing these models, the ATF HIP is providing insight and support to the AFC as it strives to understand these materials and prioritize further development. Use of computational tools such as BISON and Marmot are a vital component of the AFC's strategy since experimental data will not be available broadly and quickly enough to understand the proposed materials fully by the time the AFC must make further development decisions. This summary reviews the overall approach of the NEAMS ATF HIP. First, we give an overview of the current materials chosen for investigation. We also review the overall multi-scale approach to model development. We briefly review the work underway at multiple national laboratories to develop mechanistic engineering scale models based on lower length scale insight. Note that coordinated work is also underway at multiple universities, but those efforts are not detailed here. The NEAMS ATF HIP is assisting the AFC in assessing two accident tolerant materials, uranium silicide fuel and FeCrAl cladding. A multi-scale material model development approach is being undertaken to formulate the models necessary to investigate the materials over a range of normal and off-normal scenarios. This approach includes molecular dynamics, density functional theory, mesoscale modeling, and engineering scale modeling. Sensitivity studies are underway to understand the most critical scenarios and material model input parameters. The information generated is being given to the AFC for their use in selecting promising ATF concepts. (authors)

11 NUCLEAR FUEL CYCLE AND FUEL MATERIALS↗
DOE OSTI2022

Multi-Physics Coupled Seismic Safety Analysis of Molten-Salt Reactors

Pool-type Molten Salt Reactors (MSRs) are a promising advanced nuclear reactor concept relying on passive physical behavior to provide increased safety characteristics. The high heat capacity, high boiling point, unpressurized liquid salt contains the nuclear fuel and as it passes through the vessel achieves criticality and produces nuclear power. The salt then carries away the heat produced along with the delayed neutron precursors towards heat exchangers and primary pumps before entering the core. This forms a highly coupled multiphysics problem between neutronics and fluid flow, which makes modeling these reactors challenging. The safety/licensing case heavily relies on modeling and simulation to prove their safety, and significant effort has been expanded by the Nuclear Energy Advanced Modeling and Simulation (NEAMS) program to develop the appropriate simulation tools. Their safety/licensing will require a thorough analysis of their behavior during earthquake-based transients. Earthquakes are a transient condition commonly experienced in many regions, and are safely survived by dozens of reactors every year. Nonetheless, significant conservatisms were introduced with limited predictive modeling and simulation available. The first-of-a-kind capability developed by this research will allow for engineers to analyze ranges of design-basis and beyond-design basis accident scenarios to assess the integrity of the reactor vessel and surrounding system, possibly allowing for limiting the costly conservatisms in the design. This projects uses MASTODON, Griffin, and Pronghorn in the NEAMS ecosystem to model the coupled multiphysics problem posed by an earthquake in a molten salt reactor. It marches through a number of number of coupling schemes, from uncoupled simulations to tightly two-way coupled simulations. The appropriate level of coupling for these simulations will then be determined based on the accuracy in the quantities of interest (QoI) and computational effort involved in each scheme. The QoIs chosen for this paper include the mass flow rate across the heat exchanger (for Pronghorn simulations), power output of the reactor (for Griffin simulations), and the maximum Von Mises stress (for MASTODON simulations). This summary paper reports on the current progress of this project, with 2D tightly coupled multiphysics results.

22 GENERAL STUDIES OF NUCLEAR REACTORS↗
DOE OSTI2022

Coupling coarse mesh CFD with fine mesh CFD for modeling for Molten Salt Reactors in the Virtual Test Bed VTB

The Nuclear Energy Advanced Modeling and Simulation (NEAMS) program aims at developing a simulation tool kit to accelerate the development and deployment of nuclear power technologies. NEAMS multiphysics tools have been designed to provide numerical simulation support for the design and licensing of GEN IV reactors. Pronghorn is NEAMS’s coarse-mesh computational fluid dynamics (CFD) tool, which is designed to run 3D core transients in GEN IV reactors at a reduced computational cost. To increase their accuracy, coarse-mesh CFD simulations require calibrated closure coefficients. One way of computing these coefficients is via the Nek5000, NEAMS’s high-fidelity CFD tool. This article discusses our current research lines in informing Pronghorn closure coefficients via Nek5000 to enable multiphysics simulations of the core cavity of the molten-salt fast reactor. We present an application in which Pronghorn mixing length turbulent viscosity has been calibrated from Nek5000 simulations. The resulting Pronghorn thermal-hydraulics model is then coupled to Griffin, the NEAMS neutron transport solver, to solve for the steady-state configuration of the molten-salt fast reactor.

22 GENERAL STUDIES OF NUCLEAR REACTORS↗
NASA NTRS2013

NASA Tech Briefs, September 2013

Topics include: ISS Ammonia Leak Detection Through X-Ray Fluorescence; A System for Measuring the Sway of the Vehicle Assembly Building; Fast, High-Precision Readout Circuit for Detector Arrays; Victim Simulator for Victim Detection Radar; Hydrometeor Size Distribution Measurements by Imaging the Attenuation of a Laser Spot; Quasi-Linear Circuit; High-Speed, High-Resolution Time-to-Digital Conversion; Li-Ion Battery and Supercapacitor Hybrid Design for Long Extravehicular Activities; Ultrasonic Low-Friction Containment Plate for Thermal and Ultrasonic Stir Weld Processes; High-Powered, Ultrasonically Assisted Thermal Stir Welding; Next-Generation MKIII Lightweight HUT/Hatch Assembly; Centrifugal Sieve for Gravity-Level-Independent Size; Segregation of Granular Materials; Ion Exchange Technology Development in Support of the Urine Processor Assembly; Nickel-Graphite Composite Compliant Interface and/or Hot Shoe Material; UltraSail CubeSat Solar Sail Flight Experiment; Mechanism for Deploying a Long, Thin-Film Antenna From a Rover; Counterflow Regolith Heat Exchanger; Acquisition and Retaining Granular Samples via a Rotating Coring Bit; Very-Low-Cost, Rugged Vacuum System; Medicine Delivery Device With Integrated Sterilization and Detection; FRET-Aptamer Assays for Bone Marker Assessment, C-Telopeptide, Creatinine, and Vitamin D; Multimode Directional Coupler for Utilization of Harmonic Frequencies from TWTAs; Dual-Polarization, Multi-Frequency Antenna Array for use with Hurricane Imaging Radiometer; Complementary Barrier Infrared Detector (CBIRD) Contact Methods; Autonomous Control of Space Nuclear Reactors; High-Power, High-Speed Electro-Optic Pockels Cell Modulator; Covariance Analysis Tool (G-CAT) for Computing Ascent, Descent, and Landing Errors; Enigma Version 12; Micrometeoroid and Orbital Debris (MMOD) Shield Ballistic Limit Analysis Program; Spitzer Telemetry Processing System; Planetary Protection Bioburden Analysis Program; Wing Leading Edge RCC Rapid Response Damage Prediction Tool (IMPACT2); ISSM: Ice Sheet System Model; Automated Loads Analysis System (ATLAS); Integrated Main Propulsion System Performance Reconstruction Process/Models. Phoenix Telemetry Processor; Contact Graph Routing Enhancements Developed in ION for DTN; GFEChutes Lo-Fi; Advanced Strategic and Tactical Relay Request Management for the Mars Relay Operations Service; Software for Generating Troposphere Corrections for InSAR Using GPS and Weather Model Data; Ionospheric Specifications for SAR Interferometry (ISSI); Implementation of a Wavefront-Sensing Algorithm; Sally Ride EarthKAM - Automated Image Geo-Referencing Using Google Earth Web Plug-In; Trade Space Specification Tool (TSST) for Rapid Mission Architecture (Version 1.2); Acoustic Emission Analysis Applet (AEAA) Software; Memory-Efficient Onboard Rock Segmentation; Advanced Multimission Operations System (ATMO); Robot Sequencing and Visualization Program (RSVP); Automating Hyperspectral Data for Rapid Response in Volcanic Emergencies; Raster-Based Approach to Solar Pressure Modeling; Space Images for NASA JPL Android Version; Kinect Engineering with Learning (KEWL); Spacecraft 3D Augmented Reality Mobile App; MPST Software: grl_pef_check; Real-Time Multimission Event Notification System for Mars Relay; SIM_EXPLORE: Software for Directed Exploration of Complex Systems; Mobile Timekeeping Application Built on Reverse-Engineered JPL Infrastructure; Advanced Query and Data Mining Capabilities for MaROS; Jettison Engineering Trajectory Tool; MPST Software: grl_suppdoc; PredGuid+A: Orion Entry Guidance Modified for Aerocapture; Planning Coverage Campaigns for Mission Design and Analysis: CLASP for DESDynl; and Space Place Prime.

Source record↗
NASA NTRS2005

Inspection of the Math Model Tools for On-Orbit Assessment of Impact Damage Report

In Spring of 2005, the NASA Engineering Safety Center (NESC) was engaged by the Space Shuttle Program (SSP) to peer review the suite of analytical tools being developed to support the determination of impact and damage tolerance of the Orbiter Thermal Protection Systems (TPS). The NESC formed an independent review team with the core disciplines of materials, flight sciences, structures, mechanical analysis and thermal analysis. The Math Model Tools reviewed included damage prediction and stress analysis, aeroheating analysis, and thermal analysis tools. Some tools are physics-based and other tools are empirically-derived. Each tool was created for a specific use and timeframe, including certification, real-time pre-launch assessments, and real-time on-orbit assessments. The tools are used together in an integrated strategy for assessing the ramifications of impact damage to tile and RCC. The NESC teams conducted a peer review of the engineering data package for each Math Model Tool. This report contains the summary of the team observations and recommendations from these reviews.

Harris, Charles E.↗
NASA NTRS2007

Inspection of the Math Model Tools for On-Orbit Assessment of Impact Damage Report

In Spring of 2005, the NASA Engineering Safety Center (NESC) was engaged by the Space Shuttle Program (SSP) to peer review the suite of analytical tools being developed to support the determination of impact and damage tolerance of the Orbiter Thermal Protection Systems (TPS). The NESC formed an independent review team with the core disciplines of materials, flight sciences, structures, mechanical analysis and thermal analysis. The Math Model Tools reviewed included damage prediction and stress analysis, aeroheating analysis, and thermal analysis tools. Some tools are physics-based and other tools are empirically-derived. Each tool was created for a specific use and timeframe, including certification, real-time pre-launch assessments. In addition, the tools are used together in an integrated strategy for assessing the ramifications of impact damage to tile and RCC. The NESC teams conducted a peer review of the engineering data package for each Math Model Tool. This report contains the summary of the team observations and recommendations from these reviews.

Harris, Charles E.↗
DOE OSTI2022

Towards Digital and Performance-Based Supervisory HVAC Control Delivery

Upgrading supervisory HVAC control in commercial buildings is one of the most attractive decarbonization tools at our disposal. Modern controls are software programs and can in theory be deployed at scale and with a low up-front carbon "pulse". In practice, however, control delivery is a disjointed and inefficient process, dominated by manual handoffs of imprecise English language documents. A particularly high barrier exists between control implementation and building energy modeling (BEM) which results in control sequences typically not being tested for correctness or performance before implementation. Together with industry partners, DOE and the national labs are developing an ecosystem of tools and standards that can support fully digital performance-based control delivery workflows. This paper describes this ecosystem, which consists of three mutually supportive efforts. Semantic models of buildings and their systems enable automatic configuration and installation of control software. Platform-neutral control descriptions separate control algorithms from control platforms and enable the creation of libraries of reference control implementations. Dynamic whole-building energy-control simulation that can execute physically realistic control sequences makes it possible to test and evaluate the performance of control sequences and then directly compile them for installation and execution in control systems. In addition to digitizing and streamlining project-level control delivery, these standards and related software support benchmarking of control algorithms, both rule-based and optimization-based, and help to both advance the state of the art and to implement ratings and programs that encourage the adoption of high-performance control.

building controls↗
DOE OSTI2025

Open-source simulation program for extreme ultraviolet and soft x-ray sources based on high-harmonic generation

Light sources based on high-harmonic generation (HHG) underpin ultrafast spectroscopy experiments across a large range of photon energies, spanning from the extreme ultraviolet to the soft x-ray. To this day, their design, implementation, and improvement presens unique challenges, but can be aided by numerical tools. Here we present a new simulation program designed for this purpose, which takes both macroscopic and microscopic aspects of high-harmonic generation into account and is therefore applicable across the broad range of parameters which HHG based light sources are today utilized. The program is validated by comparison with published experimental results and by calculating harmonic emission in four common experimental configurations.

Femtosecond lasers↗
NASA NTRS2016

The Business Change Initiative: A Novel Approach to Improved Cost and Schedule Management

Goddard Space Flight Center's Flight Projects Directorate employed a Business Change Initiative (BCI) to infuse a series of activities coordinated to drive improved cost and schedule performance across Goddard's missions. This sustaining change framework provides a platform to manage and implement cost and schedule control techniques throughout the project portfolio. The BCI concluded in December 2014, deploying over 100 cost and schedule management changes including best practices, tools, methods, training, and knowledge sharing. The new business approach has driven the portfolio to improved programmatic performance. The last eight launched GSFC missions have optimized cost, schedule, and technical performance on a sustained basis to deliver on time and within budget, returning funds in many cases. While not every future mission will boast such strong performance, improved cost and schedule tools, management practices, and ongoing comprehensive evaluations of program planning and control methods to refine and implement best practices will continue to provide a framework for sustained performance. This paper will describe the tools, techniques, and processes developed during the BCI and the utilization of collaborative content management tools to disseminate project planning and control techniques to ensure continuous collaboration and optimization of cost and schedule management in the future.

Schedule↗
NASA NTRS1993

NASA access mechanism: Graphical user interface information retrieval system

Access to online information sources of aerospace, scientific, and engineering data, a mission focus for NASA's Scientific and Technical Information Program, has always been limited to factors such as telecommunications, query language syntax, lack of standardization in the information, and the lack of adequate tools to assist in searching. Today, the NASA STI Program's NASA Access Mechanism (NAM) prototype offers a solution to these problems by providing the user with a set of tools that provide a graphical interface to remote, heterogeneous, and distributed information in a manner adaptable to both casual and expert users. Additionally, the NAM provides access to many Internet-based services such as Electronic Mail, the Wide Area Information Servers system, Peer Locating tools, and electronic bulletin boards.

Hunter, Judy↗
NASA NTRS1993

NASA Access Mechanism - Graphical user interface information retrieval system

Access to online information sources of aerospace, scientific, and engineering data, a mission focus for NASA's Scientific and Technical Information Program, has always been limited by factors such as telecommunications, query language syntax, lack of standardization in the information, and the lack of adequate tools to assist in searching. Today, the NASA STI Program's NASA Access Mechanism (NAM) prototype offers a solution to these problems by providing the user with a set of tools that provide a graphical interface to remote, heterogeneous, and distributed information in a manner adaptable to both casual and expert users. Additionally, the NAM provides access to many Internet-based services such as Electronic Mail, the Wide Area Information Servers system, Peer Locating tools, and electronic bulletin boards.

Hunter, Judy F.↗
DOE OSTI2018

FY17 LLNL LDRD Annual Report

The LDRD Program achieves continual improvement through internal and external reviews of Program management, execution, and oversight of each LDRD project. In accordance with DOE Order 226.1B of the prime contract between NNSA and Lawrence Livermore National Security, LLC, a contractor-assurance system is in place at the Laboratory; the LDRD office uses this system and tools provided to support improvements in LDRD Program performance. The FY17 portfolio was carefully structured to promote the Program’s vigorous strategic vision and the long-term goals of DOE, NNSA, and Livermore.

99 GENERAL AND MISCELLANEOUS↗
DOE OSTI2012

Advanced Epi Tools for Gallium Nitride Light Emitting Diode Devices

Over the course of this program, Applied Materials, Inc., with generous support from the United States Department of Energy, developed a world-class three chamber III-Nitride epi cluster tool for low-cost, high volume GaN growth for the solid state lighting industry. One of the major achievements of the program was to design, build, and demonstrate the world’s largest wafer capacity HVPE chamber suitable for repeatable high volume III-Nitride template and device manufacturing. Applied Materials’ experience in developing deposition chambers for the silicon chip industry over many decades resulted in many orders of magnitude reductions in the price of transistors. That experience and understanding was used in developing this GaN epi deposition tool. The multi-chamber approach, which continues to be unique in the ability of the each chamber to deposit a section of the full device structure, unlike other cluster tools, allows for extreme flexibility in the manufacturing process. This robust architecture is suitable for not just the LED industry, but GaN power devices as well, both horizontal and vertical designs. The new HVPE technology developed allows GaN to be grown at a rate unheard of with MOCVD, up to 20x the typical MOCVD rates of 3{micro}m per hour, with bulk crystal quality better than the highest-quality commercial GaN films grown by MOCVD at a much cheaper overall cost. This is a unique development as the HVPE process has been known for decades, but never successfully commercially developed for high volume manufacturing. This research shows the potential of the first commercial-grade HVPE chamber, an elusive goal for III-V researchers and those wanting to capitalize on the promise of HVPE. Additionally, in the course of this program, Applied Materials built two MOCVD chambers, in addition to the HVPE chamber, and a robot that moves wafers between them. The MOCVD chambers demonstrated industry-leading wavelength yield for GaN based LED wafers and industry-leading uptime enabled in part by a novel in-situ cleaning process developed in this program.

36 MATERIALS SCIENCE↗