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Rapid thermal processing of Czochralski silicon substrates: Defects, denuded zones, and minority carrier lifetime

Rapid thermal processing (RTP) of Czochralski (Cz) silicon substrates is discussed with its attendant effects on defects, denuded zones, and minority carrier lifetime. Preferential chemical etching and X-ray topography was used to delineate defects which were subsequently correlated with minority carrier lifetime; determined by a pulse metallo-organic decompositon (MOD) test device. The X-ray delineation of grown-in defects was enhanced by a lithium decoration procedure. Results, thus far, show excellent correlation between process-induced defects.

Rozgonyi, G. S.↗

Precipitation of silicon from splat-cooled Al-Si alloys

Splat cooled Al-Si solid solutions with 1 to 11 at.% Si were prepared and their precipitation kinetics were studied by transmission electron microscopy. The time required for appearance of particles visible at a magnification of 35,000 times was determined at temperatures between 248 K and 573 K. The resulting Arrhenius plots yielded activation energies ranging from 55 to 40 plus or minus 2kJ/mol over the composition range. Precipitate densities were higher and denuded zones of 100 to 150 nm were narrower than in comparable solid quenched samples. The activation energies are explained in terms of excess point defect concentrations.

Matyja, H.↗

Carburization and heat treatment to cause carbide precipitation in gamma/gamma prime-delta eutectic alloys

In an attempt to improve their longitudinal shear strength, several directionally solidified eutectic alloy compositions with minor element modifications were pact, carburized, and heat treated to provide selective carbide precipitation at the cell and grain boundaries. The directionally solidified Ni-17.8 Nb-6Cr-2.5Al-3Ta (weight percent) alloy was selected for the shear strength evaluation because it showed the shallowest delta-denuded zone at the carburized surface. The carburization-carbide precipitation treatment, however, did not appear to improve the longitudinal shear strength of the alloy.

Tewari, S. N.↗

Oxygen and carbon impurities and related defects in silicon

Oxygen and carbon are the predominant impurities in Czochralski-grown silicon. The incorporation of oxygen and carbon during crystal growth is reviewed and device effects are discussed. Methods for controlling oxygen and carbon incorporation during crystal growth are discussed and results supporting a segregation coefficient of k=0.5 for oxygen are presented. The nucleation and precipitation behavior of oxygen is complex. Temperature and doping level effects which add insight into the role of point defects in the nucleation process are highlighted. In general, precipitation is found to be retarded in N+ and P+ silicon. The types and quantities of defects resulting from the oxygen precipitates is of interest as they are technologically useful in the process called intrinsic gettering. A comparison is made between the available defect sites and the quantities of metallic impurities present in a typical wafer which need to be gettered. Finally, a discussion of the denuded-zone, intrinsic-gettered (DZ-IG) structure on device properties is presented.

Pearce, C. W.↗

Microstructure and mechanical properties of a single crystal NiAl alloy with Zr or Hf rich G-phase precipitates

The possibility of producing NiAl reinforced with the G-phase (Ni16X6Si7), where X is Zr or Hf, has been investigated. The microstructure of these NiAl alloys have been characterized in the as-cast and annealed conditions. The G-phases are present as fine cuboidal precipitates (10 to 40 nm) and have lattice parameters almost four times that of NiAl. They are coherent with the matrix and fairly resistant to coarsening during annealing heat treatments. Segregation and nonuniform precipitate distribution observed in as-cast materials were eliminated by homogenization at temperatures near 1600 K. Slow cooling from these temperatures resulted in large plate shaped precipitates, denuded zones, and a loss of coherency in some of the large particles. Faster cooling produced a homogeneous fine distribution of cuboidal G-phase particles in the matrix. Preliminary mechanical properties for the Zr-doped alloy are presented and compared to binary single crystal NiAl. The presence of these precipitates appears to have an important strengthening effect at temperatures not less than 1000 K compared to binary NiAl single crystals.

Locci, I. E.↗

Microstructural and Creep Properties of Boron- and Zirconium-Containing Cobalt-Based Superalloys

The effects of micro-additions of boron and zirconium on grain-boundary (GB) structure and strength inpolycrystalline γ(f.c.c.) plus γ’(L12) strengthened Co-9.5Al-7.5W-X at. % alloys (X=0-Ternary, 0.05B, 0.01B,0.05Zr, and 0.005B-0.05Zr at. %) are studied. Creep tests performed at 850 °C demonstrate that GB strength and cohesion limit the creep resistance and ductility of the ternary B- and Zr-free alloy due to intergranular fracture. Alloys with 0.05B and 0.005B-0.05Zr both exhibit improved creep strength due to enhanced GB cohesion,compared to the baseline ternary Co-9.5Al-7.5W alloy, but alloys containing 0.01B or 0.05Zr additions displayed no benefit. Atom-probe tomography (APT) is utilized to measure GB segregation, where B and Zr are demonstrated to segregate at GBs. A Gibbsian interfacial excess of 5.57 ± 1.04 atoms nm(exp) -2 was found for B at aGB in the 0.01B alloy and 2.88 ± 0.81 and 2.40 ± 0.84 atoms nm2 for B and Zr, respectively, for the 0.005B-0.05Zr alloy. The GBs in the highest B-containing (0.05B) alloy exhibit micrometer-sized boride precipitates with adjacent precipitate denuded-zones (PDZs), whereas secondary precipitation at the GBs is absent in theother four alloys. The 0.05B alloy has the smallest room temperature yield strength, by 6%, which is attributedto the PDZs, but it exhibits the largest increase in creep strength (with an ~2.5 order of magnitude decrease inthe minimum strain rate for a given stress at 850 °C) over the baseline Co-9.5Al-7.5W alloy.

Creep↗

Southern Alaska as an Example of the Long-Term Consequences of Mountain Building Under the Influence of Glaciers

Southern Alaska is a continent-scale region of ongoing crustal deformation within the Pacific-North American plate boundary zone. Glaciers and glacial erosion have dictated patterns of denudation in the orogen over the last approx. 5 My. The orogen comprises three discrete topographic domains from south to north, respectively: (1) the Chugach/St. Elias Range; (2) the Wrangell Mountains; and (3) the eastern Alaska Range. Although present deformation is distributed across the orogen, much of the shortening and uplift are concentrated in the Chugach/St. Elias Range. A systematic increase in topographic wavelength of the range from east to west reflects east-to-west increases in the width of a shallowly-dipping segment of the plate interface, separation of major upper plate structures, and a decrease in the obliquity of plate motion relative to the plate boundary. Mean elevation decays exponentially from approx. 2500 m to approx. 1100 m from east to west, respectively. Topographic control on the present and past distribution of glaciers is indicated by close correspondence along the range between mean elevation and the modern equilibrium line altitude of glaciers (ELA) and differences in the modern ELA, mean annual precipitation and temperature across the range between the windward, southern and leeward, northern flanks. Net, range- scale erosion is the sum of: (1) primary bedrock erosion by glaciers and (2) erosion in areas of the landscape that are ice-marginal and are deglaciated at glacial minima. Oscillations between glacial and interglacial climates controls ice height and distribution, which, in turn, modulates the locus and mode of erosion in the landscape. Mean topography and the mean position of the ELA are coupled because of the competition between rock uplift, which tends to raise the ELA, and enhanced orographic precipitation accompanying mountain building, which tends to lower the ELA. Mean topography is controlled both by the 60 deg latitude and maritime setting of active deformation and by the feedback between shortening and uplift, glacial erosion, and orographic effects on climate accompanying mountain building.

Meigs, Andrew↗

Late Cenozoic flexural deformation of the middle U.S. Atlantic passive margin

Despite the century-long recognition of regional epeirogeny along the middle Atlantic passive margin, relatively few studies have focused on understanding postrift uplift mechanisms. Here, we demonstrate that epeirogenic uplift of the central Appalachian Piedmont and subsidence of the Salisbury Embayment represent first-order, flexural isostatic processes driven by continental denudation and offshore deposition. Our results show that regional epeirogenic processes, present on all Atlantic-type passive margins, are best resolved by specific stratigraphic and geomorphic relationships, rather than topography. A simple one-dimensional geodynamic model, constrained by well-dated Baltimore Canyon trough, Coastal Plain, and lower Susquehanna River (piedmont) stratigraphy, simulates flexural deforamtion of the U.S. Atlantic margin. The model represents the passive margin lithosphree as a uniformly thick elastic plate, without horizontal compressive stresses, that deforms flexurally under the stress of strike-averaged, vertically applied line loads. Model results illustrate a complex interaction among margin stratigraphy and geomorphology, the isostatic repsonse to denudational and depositional processes, and the modulating influence of exogenic forces such as eustasy. The current elevation, with respect to modern sea level, of fluvial terraces and correlateive Coastal Plain deposits or unconformities is successfully predicted through the synthesis of paleotopography, eustatic change, and margin flexure. Results suggest that the middle U.S. Atlantic margin landward of East Coast Magnetic Anomaly is underlain by lithoshpere with an average elastic thickness of 40 km (flexural rigidity, D = 4 X 10(exp 23) N m), the margin experience an average, long-term denudation rate of approximately 10m/m.y., and the Piedmont has been flexurally upwaped between 35 and 130 meters in the last 15 m.y. Long term isostatic continental uplift resulting rom denudation and basin subsidence resulting rom sediment loading are accomodated primately by a convex-up flexural hinge, physiographically represented by the Fall Zone. Our results elucidate an inherent danger in using topography alone to constrain late-stage passive margin deformation mechanisms. Only through careful synthesis of field stratigraphic and geomorphic elements such as fluvial terraces, Coastal Plain deposits, and offshore stratigraphy can age control be extended from the offshore depositional setting to the erosionally dominated continent. This sudy demonstrates that despite a relatively subdued topography, the middle U.S. Atlantic margin experiences progressive flexural isostatic deformation similar to that proposed for high-relief margins characterized by great escarpments. Thus margin topographic diversity remains a function of other factors, such as lithospheric composition and/or structure, supracrustal stratigraphy and structure, degree of drainage integration, drainage divide migration and climate.

Pazzaglia, Frank J.↗

The growth of continents and some consequences since 1.5 Ga

The budget of Earth's oceanic sediment masses was discussed in terms of crustal growth and recycling. Based on estimates of the volume of oceanic sediments and the average age of oceanic crust, a continental denudation rate of 1.65 cu km/yr was computed. This crudely balances estimated crustal production rates of about 1 cu km/yr, but the efficiency of sediment loss via subduction, for example, must be considered. It was argued, on the basis of earthquake focal solutions, imagery of subduction zones, and plate kinematic reconstructions that little, if any, sediment was lost in this way. This yields a present day crustal growth rate of about 1 cu km/yr. The volume of continents to 1.5 Ga ago was discussed, assuming constant continental thickness and freeboard, and a constant hydrosphere volume. It was concluded that ocean ridge length was a factor of about 1.75 greater 1.5 Ga ago, but a major uncertainty is the average spreading rate in the past.

Howell, David G.↗

Timber type separability in Southeastern United States on LANDSAT-1 MSS data

A quantitative, computer-aided study was made on the spectral separability of timber types and condition classes in the Southeastern United States, using LANDSAT-1 multispectral scanner data. It was concluded that LANDSAT-1 could be used effectively to discriminate the gross forest features of softwood, hardwood, and regeneration. The only significant detectable age difference would be between an established forest versus a young (or denuded) forest. The red or near infrared bands would be better for discrimination; phenological early and late spring data would be better than winter. And a temporal analysis would be superior to single-season analysis. Lastly, two spectral bands would be most cost effective for computer analysis. The study site was Sam Houston National Forest of East Texas, a typical forest in the Flatwoods Zone, Southern Region, U. S. Forest Service.

Kan, E. P.↗

Testing Spatial Correlation of Subduction Interplate Coupling and Forearc Morpho-Tectonics

Subduction zones that are capable of generating great (Mw greater than 8) earthquakes appear to have a common assemblage of forearc morphologic elements. Although details vary, each have (from the trench landward), an accretionary prism, outer arc high, outer forearc basin, an inner forean: basin, and volcanic arc. This pattern is common in spite of great variation in forearc architecture. Because interseismic strain is known to be associated with a locked seismogenic plate interface, we infer that this common forearc morphology is related, in an unknown way, to the process of interseismic Strain accumulation and release in great earthquakes. To date, however, no clear relationship between the subduction process and the common elements of upper plate form has emerged. Whereas certain elements of the system, i.e. the outer arc high, are reasonably well- understood in a structural context, there is little understanding of the structural or topographic evolution of the other key elements like the inner arc and inner forearc basin, particularly with respect to the coupled zone of earthquake generation. This project developed a model of the seismologic, topographic, and uplift/denudation linkages between forearc topography and the subduction system by: 1) comparing geophysical, geodetic, and topographic data from subduction margins that generate large earthquakes; 2) using existing GPS, seismicity, and other data to model the relationship between seismic cycles involving a locked interface and upper-plate topographic development; and 3) using new GPS data and a range-scale topographic, uplift, and denudation analysis of the presently aseismic Cascadia margin to constrain topographic/plate coupling relationships at this poorly understood margin.

Goldfinger, Chris↗

Tertiary structure and thermal history of the Harquahala and Buckskin Mountains, west central Arizona - Implications for denudation by a major detachment fault system

A regional geometrical model for the Whipple-Buckskin-Bullard detachment system (referred to as the Whipple detachment system) is developed. Mineral separates from samples collected in the Harquahala and Buckskin mountains, which lie in the footwall of the Whipple detachment system, are analyzed by the Ar-40/Ar-39 age spectrum technique to determine the cooling history of the mountain range and the age of the metamorphism. Based on the cooling history of the mountains and the bedrock geology of the Harquahala Mountains, the initial geometry of the Whipple detachment system is reconstructed. Next, estimates of slip on the detachment fault and extension within the upper plate terrane are used to determine the regional pattern of extension. The data on the cooling history, structural geometry, and extension pattern are combined into a geometrical model which reconciles the geological data, according to which the breakaway zones represented by the Harquahala Mountains were unroofed by movement on the gently to moderately dipping segment of a great normal fault system as it cut through the upper crust.

Richard, Stephen M.↗