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Results for “Edge bead”

Search indexed NASA NTRS and DOE OSTI research on propulsion, heat transfer, battery materials and energy systems. Follow report and document links to the original sources.

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3 records
All sourcesNASA NTRSDOE OSTI
DOE OSTI2025

Optimization of edge bead removal (EBR) process to enhance defect reduction in optical lithography

Defect reduction remains a critical objective in the integrated circuit manufacturing process, particularly within the highly re-entrant lithography modules where minimizing defects is crucial. Defects at the wafer edge can contaminate lithography modules and downstream processing equipment, leading to redistribution onto the wafer surface and adversely affecting overall device yield. A persistent challenge in the resist coating process is the formation of resist edge beads, driven by the strong Van der Waals attraction of excess photoresist (PR) to itself and the underlying substrate. The edge bead removal (EBR) process is a standard cleaning step designed to eliminate these edge beads and prevent potential contamination. Here, in this study, we identify the sources of EBR induced defects and additional EBR process encroachment toward edge patterning during the EBR cleaning process. This study provides a comprehensive study aimed at optimizing the EBR cleaning process to effectively eliminate EBR-induced defects, thereby enhancing overall device yield. Specifically, we identify three primary defects induced by the EBR cleaning process: rainbow-type, finger-shaped, and teardrop-type defects. Our experimental study reveals that in addition to EBR rinse time, PR cast time is crucial parameters contributing to the formation of these defects. By properly optimizing the PR cast time and EBR rinse time, we were able to remove nearly 100 % of dense clusters of defects that were easily visible even at low magnification optical microscopy throughout the wafer edge. We observed that shorter PR casting times shows edge defects caused by inefficient EBR process because of insufficient time for PR to fully settle causing superfluous PR to continue flowing toward wafer edge during EBR clearing step, leading to partial removal of PR at the wafer edge and the formation of rainbow defects. Proper optimization of both PR casting time and EBR chemistries dispense time is essential to resolve these defects, ensuring efficient EBR cleaning process and improved overall device yield.

42 ENGINEERING↗
DOE OSTI2024

Parameter development and characterization of laser powder directed energy deposition of Nb – Alloy C103 for thin wall geometries

This work focuses on the parameter development and microstructural characterization of Nb-based alloy C103 for thin wall structures produced via laser powder – directed energy deposition (LP – DED). Laser power and scanning speeds were varied as part of a design of experiments to identify adequate print parameters. Combinations were evaluated for relative density, porosity, and geometrical accuracy. A combination of a laser power of 1420 W and scanning speed of 14 mm/s resulted in a relative density >99%, exhibited a consistent weld bead profile and was used for further microstructural evaluation. A mix of optical and scanning electron microscopy (SEM) revealed small, slightly elongated grains along the edges and large epitaxial grains in the central region along the Build – Transverse view. Scanning electron microscopy (SEM) and energy dispersive spectroscopy (EDS) analysis revealed Hf rich columnar cells in the center that transition into an evenly spaced cellular structure towards the edges of the built sample. Electron backscatter diffraction (EBSD) scans show a sharp [001] texture when looking at the cross section of the sample along the build direction. The Build – Scan view revealed a zig – zag pattern that follows the back – and – forth deposition strategy that was used. Finally, microhardness measurements were taken in the as – built (AB) and stress relieved (SR) conditions to baseline preliminary mechanical properties. The AB condition exhibited a large amount of scatter in the data and averages up to 11% larger than the SR condition. The reduction in scatter upon applying the SR cycle are indicative of a large concertation of dislocations present in the AB condition.

36 MATERIALS SCIENCE↗
DOE OSTI2024

``Beads on a String" Star Formation Tied to one of the most Powerful AGN Outbursts Observed in a Cool Core Galaxy Cluster

With two central galaxies engaged in a major merger and a remarkable chain of 19 young stellar superclusters wound around them in projection, the galaxy cluster SDSS J1531+3414 ($z=0.335$) offers an excellent laboratory to study the interplay between mergers, AGN feedback, and star formation. New Chandra X-ray imaging reveals rapidly cooling hot ($T\sim 10^6$ K) intracluster gas, with two "wings" forming a concave density discontinuity near the edge of the cool core. LOFAR $144$ MHz observations uncover diffuse radio emission strikingly aligned with the "wings," suggesting that the "wings" are actually the opening to a giant X-ray supercavity. The steep radio emission is likely an ancient relic of one of the most energetic AGN outbursts observed, with $4pV > 10^{61}$ erg. To the north of the supercavity, GMOS detects warm ($T\sim 10^4$ K) ionized gas that enshrouds the stellar superclusters but is redshifted up to $+ 800$ km s$^{-1}$ with respect to the southern central galaxy. ALMA detects a similarly redshifted $\sim 10^{10}$ M$_\odot$ reservoir of cold ($T\sim 10^2$ K) molecular gas, but it is offset from the young stars by $\sim 1{-}3$ kpc. We propose that the multiphase gas originated from low-entropy gas entrained by the X-ray supercavity, attribute the offset between the young stars and the molecular gas to turbulent intracluster gas motions, and suggest that tidal interactions stimulated the "beads on a string" star formation morphology.

79 ASTRONOMY AND ASTROPHYSICS↗