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At least 19 records

Microactuator production via high aspect ratio, high edge acuity metal fabrication technology

LIGA is a procession sequence which uses x-ray lithography on photoresist layers of several hundred micrometers to produce very high edge acuity photopolymer molds. These plastic molds can be converted to metal molds via electroplating of many different metals and alloys. The end results are high edge acuity metal parts with large structural heights. The LIGA process as originally described by W. Ehrfeld can be extended by adding a surface micromachining phase to produce precision metal parts which can be assembled to form three-dimensional micromechanisms. This process, SLIGA, has been used to fabricate a dynamometer on a chip. The instrument has been fully implemented and will be applied to tribology issues, speed-torque characterization of planar magnetic micromotors and a new family of sensors.

Guckel, H.↗

Fast prototyping of high-aspect ratio, high-resolution x-ray masks by gas-assisted focused ion beam

The capacity of chemically-assisted focused ion beam (fib) etching systems to undertake direct and highly anisotropic erosion of thin and thick gold (or other high atomic number [Z])coatings on x-ray mask membranes/substrates provides new levels of precision, flexibility, simplification and rapidity in the manufacture of mask absorber patterns, allowing the fast prototyping of high aspect ratio, high-resolution masks for deep x-ray lithography.

fast prototyping of high-aspect ratio high-resolut↗

High-aspect-ratio wings

High-aspect-ratio aircraft include most transport aircraft such as commercial and military transports, business aircraft, and cargo aircraft. Generally, these types of aircraft are designed to cruise over a narrow range of lift coefficients and Mach numbers in the performance of their mission. Emphasis is therefore placed on the cruise performance of transport aircraft and every effort is made to obtain accurate wind-tunnel data to use as a basis for prediction of full-scale cruise performance. However, off-cruise performance is also important and methods were developed for extrapolating wind-tunnel data on buffet and flutter at transonic speed. Transport-type aircraft were tested extensively in various wind tunnels around the world and many different test techniques were developed to simulate higher Reynolds numbers. Methods developed for one tunnel may not be applicable to another tunnel because of differences in size, Reynolds number capability, running time, and test objectives. Many of the methods of boundary-layer control developed in two-dimensional airfoil testing can be applied in tests of transport configurations, but sometimes the three-dimensional flow fields that develop on tranpsort aircraft can make application of the two-dimensional methods difficult or impossible. The discussion is intended to be a representative, but not exhaustive, survey of the various methods of high Reynolds number simulation in the testing of high-aspect-ratio aircraft.

Peterson, John B., Jr.↗

Cause and Cure - Deterioration in Accuracy of CFD Simulations with Use of High-Aspect-Ratio Triangular/Tetrahedral Grids

Traditionally high-aspect ratio triangular/tetrahedral meshes are avoided by CFD researchers in the vicinity of a solid wall, as it is known to reduce the accuracy of gradient computations in those regions. Although for certain complex geometries, the use of high-aspect ratio triangular/tetrahedral elements in the vicinity of a solid wall can be replaced by quadrilateral/prismatic elements, ability to use triangular/tetrahedral elements in such regions without any degradation in accuracy can be beneficial from a mesh generation point of view. The benefits also carry over to numerical frameworks such as the space-time conservation element and solution element (CESE), where simplex elements are the mandatory building blocks. With the requirement of the CESE method in mind, a rigorous mathematical framework that clearly identifies the reason behind the difficulties in use of such high-aspect ratio simplex elements is formulated using two different approaches and presented here. Drawing insights from the analysis, a potential solution to avoid that pitfall is also provided as part of this work. Furthermore, through the use of numerical simulations of practical viscous problems involving high-Reynolds number flows, how the gradient evaluation procedures of the CESE framework can be effectively used to produce accurate and stable results on such high-aspect ratio simplex meshes is also showcased.

CESE Method↗

Cause and Cure - Deterioration in Accuracy of CFD Simulations With Use of High-Aspect-Ratio Triangular Tetrahedral Grids

Traditionally high-aspect ratio triangular/tetrahedral meshes are avoided by CFD re-searchers in the vicinity of a solid wall, as it is known to reduce the accuracy of gradient computations in those regions and also cause numerical instability. Although for certain complex geometries, the use of high-aspect ratio triangular/tetrahedral elements in the vicinity of a solid wall can be replaced by quadrilateral/prismatic elements, ability to use triangular/tetrahedral elements in such regions without any degradation in accuracy can be beneficial from a mesh generation point of view. The benefits also carry over to numerical frameworks such as the space-time conservation element and solution element (CESE), where triangular/tetrahedral elements are the mandatory building blocks. With the requirement of the CESE method in mind, a rigorous mathematical framework that clearly identities the reason behind the difficulties in use of such high-aspect ratio triangular/tetrahedral elements is presented here. As will be shown, it turns out that the degree of accuracy deterioration of gradient computation involving a triangular element is hinged on the value of its shape factor Gamma def = sq sin Alpha1 + sq sin Alpha2 + sq sin Alpha3, where Alpha1; Alpha2 and Alpha3 are the internal angles of the element. In fact, it is shown that the degree of accuracy deterioration increases monotonically as the value of Gamma decreases monotonically from its maximal value 9/4 (attained by an equilateral triangle only) to a value much less than 1 (associated with a highly obtuse triangle). By taking advantage of the fact that a high-aspect ratio triangle is not necessarily highly obtuse, and in fact it can have a shape factor whose value is close to the maximal value 9/4, a potential solution to avoid accuracy deterioration of gradient computation associated with a high-aspect ratio triangular grid is given. Also a brief discussion on the extension of the current mathematical framework to the tetrahedral-grid case along with some of the practical results of this extension is also provided. Furthermore, through the use of numerical simulations of practical viscous problems involving high-Reynolds number flows, the effectiveness of the gradient evaluation procedures within the CESE framework (that have their basis on the analysis presented here) to produce accurate and stable results on such high-aspect ratio meshes is also showcased.

CESE Method↗

Noise of Embedded High Aspect Ratio Nozzles

A family of high aspect ratio nozzles were designed to provide a parametric database of canonical embedded propulsion concepts. Nozzle throat geometries with aspect ratios of 2:1, 4:1, and 8:1 were chosen, all with convergent nozzle areas. The transition from the typical round duct to the rectangular nozzle was designed very carefully to produce a flow at the nozzle exit that was uniform and free from swirl. Once the basic rectangular nozzles were designed, external features common to embedded propulsion systems were added: extended lower lip (a.k.a. bevel, aft deck), differing sidewalls, and chevrons. For the latter detailed Reynolds-averaged Navier-Stokes (RANS) computational fluid dynamics (CFD) simulations were made to predict the thrust performance and to optimize parameters such as bevel length, and chevron penetration and azimuthal curvature. Seventeen of these nozzles were fabricated at a scale providing a 2.13 inch diameter equivalent area throat." ! The seventeen nozzles were tested for far-field noise and a few data were presented here on the effect of aspect ratio, bevel length, and chevron count and penetration. The sound field of the 2:1 aspect ratio rectangular jet was very nearly axisymmetric, but the 4:1 and 8:1 were not, the noise on their minor axes being louder than the major axes. Adding bevel length increased the noise of these nozzles, especially on their minor axes, both toward the long and short sides of the beveled nozzle. Chevrons were only added to the 2:1 rectangular jet. Adding 4 chevrons per wide side produced some decrease at aft angles, but increased the high frequency noise at right angles to the jet flow. This trend increased with increasing chevron penetration. Doubling the number of chevrons while maintaining their penetration decreased these effects. Empirical models of the parametric effect of these nozzles were constructed and quantify the trends stated above." Because it is the objective of the Supersonics Project that future design work be done more by physics-based computations and less by experiments, several codes under development were evaluated against these test cases. Preliminary results show that the RANS-based code JeNo predicts the spectral directivity of the low aspect ratio jets well, but has no capability to predict the non-axisymmetry. An effort to address this limitations, used in the RANS-based code of Leib and Goldstein, overpredicted the impact of aspect ratio. The broadband shock noise code RISN, also limited to axisymmetric assumptions, did a good job of predicting the spectral directivity of underexpanded 2:1 cold jet case but was not as successful on high aspect ratio jets, particularly when they are hot. All results are preliminary because the underlying CFD has not been validated yet. An effort using a Large Eddy Simulation code by Stanford University predicted noise that agreed with experiments to within a few dB.

Bridges, James E.↗

Void-free Copper Electrodeposition in High Aspect Ratio, Full Wafer Thickness Through-Silicon Vias with Endpoint Detection

High density interconnects are required for increased input/output for microelectronics applications, incentivizing the development of Cu electrochemical deposition (ECD) processes for high aspect ratio through-silicon vias (TSVs). This work outlines Cu ECD processes for 62.5 μ m diameter TSVs, etched into a 625 μ m thick silicon substrate, a 10:1 aspect ratio. Cu ECD in high aspect ratio features relies on a delicate balance of electrolyte composition, solution replenishment, and applied voltage. Implementing a CuSO 4 -H 2 SO 4 electrolyte, which contains suppressor and a low chloride concentration, allows for a tunable relationship between applied voltage and localized deposition in the vias. A stepped potential waveform was applied to move the Cu growth front from the bottom of the via to the top. Sample characterization was performed through mechanical cross-sections and X-ray computed tomography (CT) scans. The CT scans revealed small seam voids in the Cu electrodeposit, and process parameters were tuned accordingly to produce void-free Cu features. During the voltage-controlled experiments, measured current data showed a characteristic current minimum, which was identified as an endpoint detection method for Cu deposition in these vias. We believe this is the first report of this novel endpoint detection method for TSV filling.

42 ENGINEERING↗

Thermosolutal convection in high-aspect-ratio enclosures

Convection in high-aspect-ratio rectangular enclosures with combined horizontal temperature and concentration gradients is studied experimentally. An electrochemical system is employed to impose the concentration gradients. The solutal buoyancy force either opposes or augments the thermal buoyancy force. Due to a large difference between the thermal and solutal diffusion rates the flow possesses double-diffusive characteristics. Various complex flow patterns are observed with different experimental conditions.

Wang, L. W.↗

Thermosolutal convection in high-aspect-ratio enclosures

Convection in high-aspect-ratio rectangular enclosures with combined horizontal temperature and concentration gradients is studied experimentally. An electrochemical system is employed to impose the concentration gradients. The solutal buoyancy force either opposes or augments the thermal buoyancy force. Due to a large difference between the thermal and solutal diffusion rates the flow possesses double-diffusive characteristics. Various complex flow patterns are observed with different experimental conditions.

Wang, L. W.↗

Approaches to high aspect ratio triangulations

In aerospace computational fluid dynamics calculations, high aspect ratio, or stretched, triangulations are necessary to adequately resolve the features of a viscous flow around bodies. In this paper, we explore alternatives to the Delaunay triangulation which can be used to generate high aspect ratio triangulations of point sets. The method is based on a variation of the lifting map concept which derives Delaunay triangulations from convex hull calculations.

Posenau, M.-A.↗

Algorithms for high aspect ratio oriented triangulations

Grid generation plays an integral part in the solution of computational fluid dynamics problems for aerodynamics applications. A major difficulty with standard structured grid generation, which produces quadrilateral (or hexahedral) elements with implicit connectivity, has been the requirement for a great deal of human intervention in developing grids around complex configurations. This has led to investigations into unstructured grids with explicit connectivities, which are primarily composed of triangular (or tetrahedral) elements, although other subdivisions of convex cells may be used. The existence of large gradients in the solution of aerodynamic problems may be exploited to reduce the computational effort by using high aspect ratio elements in high gradient regions. However, the heuristic approaches currently in use do not adequately address this need for high aspect ratio unstructured grids. High aspect ratio triangulations very often produce the large angles that are to be avoided. Point generation techniques based on contour or front generation are judged to be the most promising in terms of being able to handle complicated multiple body objects, with this technique lending itself well to adaptivity. The eventual goal encompasses several phases: first, a partitioning phase, in which the Voronoi diagram of a set of points and line segments (the input set) will be generated to partition the input domain; second, a contour generation phase in which body-conforming contours are used to subdivide the partition further as well as introduce the foundation for aspect ratio control, and; third, a Steiner triangulation phase in which points are added to the partition to enable triangulation while controlling angle bounds and aspect ratio. This provides a combination of the advancing front/contour techniques and refinement. By using a front, aspect ratio can be better controlled. By using refinement, bounds on angles can be maintained, while attempting to minimize the number of Steiner points.

Posenau, Mary-Anne K.↗

Comparison of High Aspect Ratio Cooling Channel Designs for a Rocket Combustion Chamber

An analytical investigation on the effect of high aspect ratio (height/width) cooling channels, considering different coolant channel designs, on hot-gas-side wall temperature and coolant pressure drop for a liquid hydrogen cooled rocket combustion chamber, was performed. Coolant channel design elements considered were: length of combustion chamber in which high aspect ratio cooling was applied, number of coolant channels, and coolant channel shape. Seven coolant channel designs were investigated using a coupling of the Rocket Thermal Evaluation code and the Two-Dimensional Kinetics code. Initially, each coolant channel design was developed, without consideration for fabrication, to reduce the hot-gas-side wall temperature from a given conventional cooling channel baseline. These designs produced hot-gas-side wall temperature reductions up to 22 percent, with coolant pressure drop increases as low as 7.5 percent from the baseline. Fabrication constraints for milled channels were applied to the seven designs. These produced hot-gas-side wall temperature reductions of up to 20 percent, with coolant pressure drop increases as low as 2 percent. Using high aspect ratio cooling channels for the entire length of the combustion chamber had no additional benefit on hot-gas-side wall temperature over using high aspect ratio cooling channels only in the throat region, but increased coolant pressure drop 33 percent. Independent of coolant channel shape, high aspect ratio cooling was able to reduce the hot-gas-side wall temperature by at least 8 percent, with as low as a 2 percent increase in coolant pressure drop. The design with the highest overall benefit to hot-gas-side wall temperature and minimal coolant pressure drop cooling can now be done in relatively short periods of time with multiple iterations.

Wadel, Mary F.↗

Comparison of High Aspect Ratio Cooling Channel Designs for a Rocket Combustion Chamber with Development of an Optimized Design

An analytical investigation on the effect of high aspect ratio (height/width) cooling channels, considering different coolant channel designs, on hot-gas-side wall temperature and coolant pressure drop for a liquid hydrogen cooled rocket combustion chamber, was performed. Coolant channel design elements considered were: length of combustion chamber in which high aspect ratio cooling was applied, number of coolant channels, and coolant channel shape. Seven coolant channel designs were investigated using a coupling of the Rocket Thermal Evaluation code and the Two-Dimensional Kinetics code. Initially, each coolant channel design was developed, without consideration for fabrication, to reduce the hot-gas-side wall temperature from a given conventional cooling channel baseline. These designs produced hot-gas-side wall temperature reductions up to 22 percent, with coolant pressure drop increases as low as 7.5 percent from the baseline. Fabrication constraints for milled channels were applied to the seven designs. These produced hot-gas-side wall temperature reductions of up to 20 percent, with coolant pressure drop increases as low as 2 percent. Using high aspect ratio cooling channels for the entire length of the combustion chamber had no additional benefit on hot-gas-side wall temperature over using high aspect ratio cooling channels only in the throat region, but increased coolant pressure drop 33 percent. Independent of coolant channel shape, high aspect ratio cooling was able to reduce the hot-gas-side wall temperature by at least 8 percent, with as low as a 2 percent increase in coolant pressure drop. ne design with the highest overall benefit to hot-gas-side wall temperature and minimal coolant pressure drop increase was the design which used bifurcated cooling channels and high aspect ratio cooling in the throat region. An optimized bifurcated high aspect ratio cooling channel design was developed which reduced the hot-gas-side wall temperature by 18 percent and reduced the coolant pressure drop by 4 percent. Reductions of coolant mass flow rate of up to 50 percent were possible before the hot-gas-side wall temperature reached that of the baseline. These mass flow rate reductions produced coolant pressure drops of up to 57 percent.

Wadel, Mary F.↗

Deep Reactive Ion Etching (DRIE) of High Aspect Ratio SiC Microstructures using a Time-Multiplexed Etch-Passivate Process

High aspect ratio silicon carbide (SiC) microstructures are needed for microengines and other harsh environment micro-electro-mechanical systems (MEMS). Previously, deep reactive ion etching (DRIE) of low aspect ratio (AR less than or = 1) deep (greater than 100 micron) trenches in SiC has been reported. However, existing DRIE processes for SiC are not well-suited for definition of high aspect ratio features because such simple etch-only processes provide insufficient control over sidewall roughness and slope. Therefore, we have investigated the use of a time-multiplexed etch-passivate (TMEP) process, which alternates etching with polymer passivation of the etch sidewalls. An optimized TMEP process was used to etch high aspect ratio (AR greater than 5) deep (less than 100 micron) trenches in 6H-SiC. Power MEMS structures (micro turbine blades) in 6H-SiC were also fabricated.

Evans, Laura J.↗

Investigation of Dive Brakes and a Dive-Recovery Flap on a High-Aspect-Ratio Wing in the Langley 8-Foot High-Speed Tunnel

The results of tests made to determine the aerodynamic characteristics of a solid brake, a slotted brake, and a dive-recovery flap mounted on a high aspect ratio wing at high Mach numbers are presented. The data were obtained in the Langley 8-foot high-speed tunnel for corrected Mach numbers up to 0.940. The results have been analyzed with regard to the suitability of dive-control devices for a proposed high-speed airplane in limiting the airplane terminal Mach number by the use of dive brakes and in achieving favorable dive-recovery characteristics by the use of a dive-recovery flap. The analysis of the results indicated that the slotted brake would limit the proposed airplane terminal Mach number to values below 0.880 for altitudes up to 35,000 feet and a wing loading of 80 pounds per square foot and the dive-recovery flap would produce trim changes required for controlled pull-outs at 25,000 feet for a Mach number range from 0.800 to 0.900. Basic changes in spanwise loading are presented to aid in the evaluation of the wing strength requirements.

Mattson, Axel T.↗

Plasma Focused Ion Beam Milling of High-Aspect-Ratio Holes in Diamond

Plasma focused ion beam (PFIB) technology has a great potential for applications requiring rapid micro-machining of high-aspect-ratio features. Here, we use 30-keV Ar, Xe, and O 2 ion beams to study PFIB milling of high-aspect-ratio circular holes in polycrystalline diamond. Our results show that Xe and O 2 ion beams have the highest milling efficiency for low-aspect-ratio and high-aspect-ratio hole milling, respectively. Each ion beam species produces holes with its characteristic shape and wall surface morphology. In conclusion, based on these results, we demonstrate a “hybrid” hole milled in a two-step process with Xe and O 2 ion beams with the geometry and wall morphology attractive for the attachment of a fuel fill tube to the inertial confinement fusion capsule.

ICF targets↗

An experimental investigation of high-aspect-ratio cooling passages

An experimental investigation was conducted to evaluate the effectiveness of using high-aspect-ratio cooling passenges to improve the life and reduce the colant pressure drop in high-pressure rocket thrust chambers. A plug-nozzle rocket-engine test apparatus was used to test two cylindrical chambers with low-aspect-ratio cooling passages and one with high-aspect-ratio cooling passages. The chambers were cyclically tested and data were taken over a wide range of coolant mass flows. The results showed that for the same coolant pressure drop, the hot-gas-side wall temperature of the high-aspect-ratio chamber was 30 percent lower than the baseline low-aspect-ratio chamber, resulting in no fatigue damage to the wall. The coolant pressure drop for the high-aspect-ratio chamber was reduced in increments to one-half that of the baseline chamber, by reducing the coolant mass flow, and still resulted in a reduction in the hot-gas-side wall temperature when compared to the low-aspect-ratio chambers.

Carlile, Julie A.↗

An experimental investigation of high-aspect-ratio cooling passages

An experimental investigation was conducted to evaluate the effectiveness of using high-aspect-ratio cooling passages to improve the life and reduce the coolant pressure drop in high-pressure rocket thrust chambers. A plug-nozzle rocket-engine test apparatus was used to test two cylindrical chambers with low-aspect-ratio cooling passages and one with high-aspect-ratio cooling passages. The chambers were cyclically tested and data were taken over a wide range of coolant mass flows. The results showed that for the same coolant pressure drop, the hot-gas-side wall temperature of the high-aspect-ratio chamber was 30 percent lower than the baseline low-aspect-ratio chamber, resulting in no fatigue damage to the wall. The coolant pressure drop for the high-aspect-ratio chamber was reduced in increments to one-half that of the baseline chamber, by reducing the coolant mass flow, and still resulted in a reduction in the hot-gas-side wall temperature when compared to the low-aspect-ratio chambers.

Carlile, Julie A.↗