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Investigation of the hydrochlorination of SiCL4

Reaction kinetic measurements on the hydrochlorination of SiCl4 and metallurgical grade (m.g.) silicon metal were made at a wide range of experimental variables. The effect of pressure on the reaction rate was studied at 25 psig, 100 psig, 150 psig and 200 psig, respectively. Results of these experiments show a large pressure effect on the hydrochlorination reaction. As expected, higher pressures produce a higher equilibrium SiHC13 conversion, since the hydrochlorination reaction results in a net volume contraction as product SiHC1 is formed. However, the reaction rate, namely, the rate at which the hydrochlorination reaction reaches its equilibrium SiHC13 conversion, was found to be much faster at low pressures.

Mui, J. Y. P.↗

Investigation of the Hydrochlorination of SiCl4

The hydrochlorination of silicon tetrachloride with hydrogen and metallurgical grade (m.g.) silicon metal, 3 SiCl4 + 2 H2 + Si yields 4 SiHCl3 was shown to be an efficient process to produce trichlorosilane. A research and development program was carried out to study the hydrochlorination reaction over a wide range of reaction conditions. Equilibrium constant and reaction kinetics measurements were made to provide the basis for a theoretical study on the hydrochlorination process. Thermodynamic properties of the hydrochlorination reaction were also measured. The effects of temperature, pressure, and concentration on the equilibrium constant, K sub p, were studied.

Mui, J. Y. P.↗

Flat-plate solar array project. Task 1: Silicon material. Investigation of the hydrochlorination of SiC14

A two inch diameter stainless steel reactor was designed and built to operate at pressures up to 500 psig for the experimental studies on the hydrochlorination of SiCl4 and metallurgical grade (m.g.) silicon metal to SiHCl3. In order to clearly see the effect of pressure, the experiments were carried out at low reactor pressures of 73 psig and 150 psig, respectively. A large pressure effect on the hydrochlorination reaction was observed between the results of the low pressure experiments and the results of the high pressure experiments. In general, higher pressure produces a higher conversion of SiHCl3, but at a lower reaction rate. The effect of temperature on the reaction rate was studied at 73 psig. Higher reaction temperature gave a higher conversion and a higher reaction rate. Samples of the materials used to construct the hydrochlorination reactor were prepared for corrosion tests.

Mui, J. Y. P.↗

Investigation of the hydrochlorination of SiCl4

A research and development program on the hydrochlorination of silicon tetrachloride and metallurgical grade (m.g.) silicon metal to trichlorosilane was carried out as scheduled. Effects of pressure and temperature on this reaction are reported. The presence of HCl in the reaction product mixture was successfully analyzed. Approximately 0.1% to 0.5% HCl based on total chlorosilanes were produced by the hydrochlorination reaction. Experiments on the corrosion study were carried out to evaluate a variety of metals and alloys as the material of construction for the hydrochlorination reactor. Material includes carbon steel, nickel, copper, Alloy 400 (Monel), stainless steel (Type 304), Incoloy 800H and Hastelloy B-2. The corrosion test was carried out at reaction temperature of 500 C, pressure of 300 psig and H2/SiCl4 feed ratio of 2.0 for a total of 87 hours. Results of the corrosion test show that all the test samples achieved a weigh gain.

Mui, J. Y. P.↗

Investigation of the hydrochlorination of SiCl4

A basic, experimental study on the hydrochlorination of silicon tetrachloride and metallurgical grade silicon with hydrogen gas to form trichlorosilane was carried out to greatly expand the range of reaction conditions. The equilibrium constant, K sub p, for the hydrochlorination reaction was measured as a function of temperature, pressure and concentration. The variation of the equilibrium constant as a function of temperature provided the measurement on the heat of reaction, delta H, by the Second Law Method. The value of delta H was measured to give 10.6 Kcal/mole. The equilibrium constant was also studied as a function of concentration. In agreement with the theory, the equilibrium constant remained constant with respect to the varying H2/SiCl4 feed ratios. On the other hand, the effect of pressure on the equilibrium constant was found to be more complex.

Mui, J. Y. P.↗

Investigation of the hydrochlorination of SiCl4

The hyrochlorination of SiC14 and m.g. silicon metal to produce SiHC13, was investigated. Reaction kinetic measurements were carried out to collect additional rate data at 525 C and 550 C. A theoretical study was carried out to provide a kinetic model and a rate equation for the hydrochlorination reaction. Results of this preliminary study show that the rate of formation of SiHC13 follows a pseudo first order kinetics. The rate constants were measured at three temperatures, 550 C, 500 C and 450 C, respectively. The activation energy was determined from the Arrhenius plot to give a value of 13.2 Kcal/mole. The design of a quartz reactor to measure reaction rates and equilibrium conversion of SiHC13 at reaction temperature up to 650 C was completed.

Mui, J. Y. P.↗

Investigation of the hydrogenation of SiCl4

A laboratory scale pressure reactor was constructed to study the 3 SiCl + 2H2 + Si yields 4 SiHCl3 reaction at pressures up to 500 psig. Reaction kinetic measurements were carried out as a function of reactor pressure, reaction temperature and H2/SiCl4 feed ratio. Based on the reaction kinetic data, the hydroclorination of SiCl4 and m.g. silicon metal is found to be an efficient process to produce SiHCl3 in good conversions and in high yields. Copper is an effective catalyst. Results of the corrosion study show that conventional nickel chromium alloys are suitable material of construction for the hydrochlorination reactor. The hydrochlorination reaction is relatively insensitive to external process parameters such as silicon particle size distribution and the impurities in the m.g. silicon metal.

Mui, J. Y. P.↗

Flat-plate collector research area: Silicon material task

Silane decomposition in a fluidized-bed reactor (FBR) process development unit (PDU) to make semiconductor-grade Si is reviewed. The PDU was modified by installation of a new heating system to provide the required temperature profile and better control, and testing was resumed. A process for making trichlorosilane by the hydrochlorination of metallurgical-grade Si and silicon tetrachloride is reported. Fabrication and installation of the test system employing a new 2-in.-dia reactor was completed. A process that converts trichlorosilane to dichlorosilane (DCS), which is reduced by hydrogen to make Si by a chemical vapor deposition step in a Siemens-type reactor is described. Testing of the DCS PDU integraled with Si deposition reactors continued. Experiments in a 2-in.-dia reactor to define the operating window and to investigate the Si deposition kinetics were completed.

Lutwack, R.↗

Low-cost solar array progress and plans

It is pointed out that significant redirection has occurred in the U.S. Department of Energy (DOE) Photovoltaics Program, and thus in the Flat-Plate Solar Array Project (FSA), since the 3rd European Communities Conference. The Silicon Materials Task has now the objective to sponsor theoretical and experimental research on silicon material refinement technology suitable for photovoltaic flat-plate solar arrays. With respect to the hydrochlorination reaction, a process proof of concept was completed through definition of reaction kinetics, catalyst, and reaction characteristics. In connection with the dichlorosilane chemical vapor desposition process, a preliminary design was completed of an experimental process system development unit with a capacity of 100 to 200 MT/yr of Si.Attention is also given to the silicon-sheet formation research area, environmental isolation research, the cell and module formation task, the engineering sciences area, and the module performance and failure analysis area.

Callaghan, W. T.↗