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We have fabricated 63-element linear arrays of micromachined thermopile infrared detectors on silicon substrates. Each detector consists of a suspended silicon nitride membrane with 11 thermocouples of sputtered Bi-Te and Bi-Sb-Te films.
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The purpose of this present work is to improve thermopile 2-D arrays substantially by combining Bi-Te and Bi-Sb-Te thermoelectric materials with a unique pixel structure and low-noise readout circuitry.
Future planetary missions call for thermal detectors with high sensitivity over a wide range of temperature or wavelength. Conventional approaches based upon photon detectors are limited to a narrow and material-selective range of wavelength, and they often require cryogenic cooling for measurements of far-infrared (FIR) radiation or very low-temperature objects, which result in a significant increase in the system’s size, weight, and power (SWaP). While thermal detectors based upon thermopiles are uncooled and sensitive to a wide range of wavelengths including FIR radiation, their sensitivity, limited by the material’s thermoelectric response and heat losses, is an order of magnitude lower than photon detectors. To address the sensitivity requirements for future planetary science missions that target very cold objects such as ice giant planets, icy regoliths, planetary satellites, and primitive bodies, we introduce a high-sensitive broadband thermopile concept using holey silicon – a thin membrane of silicon with a microfabricated arrangement of pores that can be optimized to minimize heat losses and enable breakthrough thermoelectric performance. In this paper, we present our analytical model for the holey silicon-based thermopile, its performance expectations, and its performance comparisons with the state-of-the-art thermopile technology. We will investigate the roles of thermal conductance in holey silicon-based thermopile performance, the impact of thermal conduction and thermal radiation at different temperature limits, and the performance trade-off between the responsivity and noises.
Sustained and enhanced land imaging is crucial for providing high-quality science data on change in land use, forest health, environment, and climate. Future thermal land imaging instruments operating in the 10-12 micron band will provide essential information for furthering our hydrologic understanding at scales of human influence, and producing field-scale moisture information through accurate retrievals of evapotranspiration (ET). To address the need for cost-effective future thermal land imaging missions we are developing novel uncooled doped-silicon thermopile detectors, an extension of a detector design concept originally developed at NASA-Goddard for planetary science applications. These doped-Si thermopile detectors have the potential to offer superior performance in terms of sensitivity, speed, and customization, when compared to current commercial-off-the-shelf uncooled detector technologies. Because cryocooler technology does not need to be fielded on the instrument, these and other uncooled detectors offer the benefit of greatly reduced instrument cost, mass, and power at the expense of some acceptable loss in detector sensitivity. We present the motivation for an uncooled thermal imaging instrument, our doped-Si thermopile detector concept, and performance expectations and comparisons. We also provide an update on the current status of this detector technology development.
Linear arrays with up to 63 micromachined thermopile infrared detectors on silicon substrates have been constructed and tested. Each detector consists of a suspended silicon nitride membrane with 11 thermocouples of sputtered Bi-Te and Bi-Sb-Te thermoelectric elements films. At room temperature and under vacuum these detectors exhibit response times of 99 ms, zero frequency D* values of 1.4 x 10(exp 9) cmHz(exp 1/2)/W and responsivity values of 1100 V/W when viewing a 1000 K blackbody source. The only measured source of noise above 20 mHz is Johnson noise from the detector resistance. These results represent the best performance reported to date for an array of thermopile detectors. The arrays are well suited for uncooled dispersive point spectrometers. In another embodiment, also with Bi-Te and Bi-Sb-Te thermoelectric materials on micromachined silicon nitride membranes, detector arrays have been produced with D* values as high as 2.2 x 10(exp 9) cm Hz(exp 1/2)/W for 83 ms response times.