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DOE OSTI2024

Approaching Angstrom-Scale Resolution in Lithography Using Low-Molecular-Mass Resists (<500 Da)

Resists that enable high-throughput and high-resolution patterning are essential in driving the semiconductor technology forward. The ultimate patterning performance of a resist in lithography is limited because of the trade-off between resolution, line-width roughness, and sensitivity; improving one or two of these parameters typically leads to a loss in the third. As the patterned feature sizes approach angstrom scale, the trade-off between these three metrics becomes increasingly hard to resolve and calls for a fundamental rethinking of the resist chemistry. Low-molecular-mass monodispersed metal-containing resists of high atom economy can provide not only very high resolution but also very low line-width roughness without sacrificing sensitivity. Here we describe a modular metal-containing resist platform (molecular mass <500 Da) where a molecular resist consists of just two components: a metal and a radical initiator bonded to it. This simple system not only is amenable to high-resolution electron beam lithography (EBL) and extreme ultraviolet lithography (EUVL) but also unites them mechanistically, giving a consolidated perspective of molecular and chemical processes happening during exposure. Irradiation of the resist leads to the production of secondary electrons that generate radicals in the initiator bonded to metal. This brings about an intramolecular rearrangement and causes solubility switch in the exposed resist. We demonstrate record 1.9–2.0 nm isolated patterns and 7 nm half-pitch dense line-space features over a large area using EBL. With EUVL, 12 nm half-pitch line-space features are shown at a dose of 68 mJ/cm 2 . In both of these patterning techniques, the line-width roughness was found to be ≤2 nm, a record low value for any resist platform, also leading to a low-performance trade-off metric, Z factor, of 0.6 × 10 –8 mJ·nm 3 . With the ultimate resolution limited by instrumental factors, potential patterning at the level of a unit cell can be envisaged, making low-molecular-mass resists best poised for angstrom-scale lithography.

77 NANOSCIENCE AND NANOTECHNOLOGY↗

DOE OSTI2022

Quantum Simulations of Vibrational Strong Coupling via Path Integrals

A quantum simulation of vibrational strong coupling (VSC) in the collective regime via thermostated ring-polymer molecular dynamics (TRPMD) is reported. For a collection of liquid-phase water molecules resonantly coupled to a single lossless cavity mode, the simulation shows that as compared with a fully classical calculation, the inclusion of nuclear and photonic quantum effects does not lead to a change in the Rabi splitting but does broaden polaritonic line widths roughly by a factor of 2. Moreover, under thermal equilibrium, both quantum and classical simulations predict that the static dielectric constant of liquid water is largely unchanged inside vs outside the cavity. Furthermore, this result disagrees with a recent experiment demonstrating that the static dielectric constant of liquid water can be resonantly enhanced under VSC, suggesting either limitations of our approach or perhaps other experimental factors that have not yet been explored.

37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CH↗

DOE OSTI2026

Integrated Strategies for Overcoming Resolution Limits in Electron Beam Lithography of Chemically Amplified Resists

Electron beam lithography (EBL) of chemically amplified resists (CARs) faces fundamental challenges, including stochastic electron scattering and acid diffusion, that limit resolution and reproducibility. Using SU-8 as a model CAR, this study systematically investigated complementary strategies to address these challenges, combining multipass exposure, proximity effect correction (PEC) with midrange correction factors, base quencher incorporation, and post-exposure bake (PEB) suppression. Monte Carlo simulations and calibrated PEC modeling revealed that extending the point spread function to include a midrange scattering component significantly improved critical dimension (CD) control across varying pattern densities, correcting deviations that conventional two-term PEC failed to capture. Multipass exposure, particularly 4-pass writing with a 25% offset, redistributed the dose to average stochastic beam and scattering fluctuations, reducing line-width roughness by more than 50% and yielding more uniform nanoscale features. Photoacid confinement was investigated by adding urea as a base quencher, which successfully reduced acid diffusion but introduced substantial sensitivity penalties without improving ultimate resolution or Z-factor performance, underscoring the trade-offs of chemical versus physical confinement. Suppressing PEB most directly minimized acid diffusion, resulting in improved Z-factors and reproducible 30 nm half-pitch dense line/space patterns. Overall, these results demonstrated that PEC with midrange correction, multipass strategies, quencher additives, and PEB-free processing addresses different aspects of the EBL process window and that their integration provides a comprehensive framework for managing stochastic scattering, diffusion, and chemical amplification effects. This framework advances dense nanoscale patterning in CARs and establishes guiding principles for optimizing resist design and process strategies in high-resolution EBL and potentially other advanced lithographies, such as extreme ultraviolet (EUV) lithography.

36 MATERIALS SCIENCE↗

DOE OSTI2025

Effect of pattern transfer process on roughness of block copolymer patterns from directed self-assembly

Block copolymer-directed self-assembly (DSA) remains promising for improving pattern quality and reducing the stochastic variations that challenge high numerical aperture extreme ultraviolet lithography. Equally critical is refining pattern transfer methods for accurately transferring the rectified DSA features to the underlying substrate. We compare two atomic layer deposition (ALD)-based techniques: sequential infiltration synthesis (SIS) and dry liftoff, applied to polystyrene-block-poly(methyl methacrylate) (PS-b-PMMA) DSA patterns. Both methods utilize aluminum oxide hard masks, with one synthesized through infiltration into the PMMA domains and the other through conformal ALD coating. High-resolution scanning electron micrographs were analyzed to measure line edge, width, and placement roughness for both the line (PMMA) and space (PS) features. Although both methods yielded similar overall 3σ rms roughness, they differed significantly in the frequency-dependent power spectral density (PSD) profiles. SIS reduced line placement roughness at length scales associated with the polymer pitch, but increased space width roughness at low frequencies, whereas dry liftoff mimicked the frequency content of the original guiding pattern. This study underscores the importance of PSD evaluation in selecting optimal pattern transfer strategies for specific applications.

Block copolymers↗

NASA NTRS1987

Detection of interstellar CH in the far-infrared

The first astronomical detection of CH in the far-infrared has been made. A ground state of rotational transition was observed in absorption against the far-infrared continuum peak of Sgr B2. The lines are resolved at a velocity resolution of 62 km/s, have a line width of roughly 250 km/s, and a line center optical depth of about 0.29. The inferred total column density of CH in the ground state along the line of sight is roughly 1.6 x 10 to the 15th/sq cm. Comparison of the far-infrared profiles to the 3 GHz emission lines confirms that the ground-state Lambda-doublet levels are inverted and gives an accurate estimate of the excitation temperature. The excitation temperature of the 3264 MHz line varies from cloud to cloud along the line of sight, the levels being most inverted in the Sgr B2 molecular cloud. The large intensity of the 3264 MHz line in this cloud relative to other clouds along the line of sight may thus be primarily an excitation effect.

Stacey, Gordon J.↗

DOE OSTI2026

Engineering Assembly Kinetics and Line Roughness in Solvent Vapor-Annealed Block Copolymer/Homopolymer Blends

Block copolymer (BCP) directed self-assembly (DSA) is a promising route to enhance lithography resolution by multiplying nanopattern density and reducing feature roughness. Eliminating kinetically trapped self-assembly defects requires fast self-assembly. However, acceleration strategies like solvent vapor annealing or homopolymer blending broaden domain interfaces, implying a trade-off in increased feature roughness. In this work, we experimentally investigate this apparent dilemma between self-assembly kinetics and line roughness for solvent vapor-annealed thin films of a lamellar poly(styrene-block-2-vinylpyridine) (PS-b-P2VP) BCP blended with PS and P2VP homopolymers. Binary blends with PS or P2VP homopolymers and ternary blends incorporating both in equal weight fractions were solvent vapor annealed using acetone, a near-neutral solvent for PS and P2VP, followed by P2VP-selective vapor-phase infiltration with alumina (AlOx) and polymer etching. Binary blends with P2VP exhibit a modest kinetic enhancement but also higher line-edge and -width roughness due to the increased frequency of P2VP protrusions and bridge defects in the alumina line patterns. In contrast, binary blends with PS self-assemble noticeably faster, while domain asymmetry from the added PS homopolymer reduces roughness by curbing the number of alumina protrusions and bridge defects. Ternary blends maintain DSA line patterns across a wider composition window and, at higher homopolymer loadings, reduce roughness at length scales near the lamellar period, consistent with a reduced impact of intradomain compositional fluctuations. These findings provide important insights for codesigning blend compositions and process flows to achieve high-resolution, defect free patterns with minimal roughness through BCP DSA.

37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CH↗

NASA NTRS1996

X-Ray Spectrum of a Narrow Line Quasi-Stellar Object

This AO-3 observation of a new narrow-line QSO was motivated by our extensive study of the unclassified X-ray sources from the ROSAT/IRAS survey of Boller et al. IRAS 2018.1-2244 was observed to have Balmer lines and forbidden lines of roughly equal width. There are possibly weak broad wings on the H-alpha line. One of the questions to be addressed by hard X-ray spectroscopy is whether or not these wings are to be interpreted as scattered or weakly transmitted flux from a hidden broad-line region. The optical spectrum of this QSO also has very weak permitted Fe II lines, possibly indicative of a hidden broad line region. A new wrinkle on the concept of the narrow-line QSO is the gradual realization that luminous objects with very strong but narrow Fe II lines are showing up preferentially in soft X-ray surveys. The AO-1 objective was to detect the Geminga Pulsar and to interpret its 2-10 keV spectrum and pulse profile in terms of its X-ray emission spectra. Also, the AO-1 observed the Seyfert galaxy NGC 3516 to obtain a high signal-to-noise ratio spectrum. We expected NGC 3516 to be one of the best candidates for a successful demonstration of the details of the warm-absorber model.

Halpern, Jules P.↗

NASA NTRS1993

Magnetohydrodynamic wave propagation in one-dimensional nonhomogeneous, self-gravitating clouds

We study the propagation of magnetohydrodynamic (MHD) waves through nonhomogeneous, selfgravitating, magnetic media representative of molecular cloud environments and focus on the issues of cloud support and line profiles. Since the general treatment of this topic is burdened by a complex mathematical formalism, we consider simplifying geometries which yield analytical solutions in the linear wave limit. In particular, we study both magnetoacoustic and Alfven wave propagation along the density gradient in a one-imensional slab. Of specific relevance to molecular clouds, we find that the back reaction of the Alfven waves can provide a pressure along the direction of the magnetic field lines; this pressure can help support a density enhancement against gravitational collapse. Furthermore, we find that the velocity amplitudes of these waves increase as the density decreases, in rough agreement with observational estimates of line width versus density relations.

Fatuzzo, Marco↗

NASA NTRS1993

High-resolution X-ray spectroscopy of the supernova remnant N132D

A joint nonequilibrium ionization analysis of spectral data from the Einstein Observatory of the SNR N132D in the LMC is presented on the basis of data from the Focal Plane Crystal Spectrometer (FPCS) and the Solid State Spectrometer (SSS), and lower spectral resolution data from the IPC and the Monitor Proportional Counter (MPC). The FPCS detected individual emission lines of O VII, O VIII, Ne IX, Ne X, Fe XVII, and possibly Fe XX. Measured line widths for the oxygen lines suggest Doppler broadening that is roughly consistent with optically measured expansion velocities of 2250 km/s. At the SSS/IPC temperature, FPCS flux ratios constrain the O/Fe abundance to be at least 1.9 times its solar value and the O/Ne abundance to be 0.2-1.0 times its solar value. Models for remnants with progenitor masses of 20 and 25 solar masses are completely consistent with the data, while remnants with progenitor masses of 13 and 15 solar masses can be made consistent if the progenitors are required to eject a large fraction of their iron cores.

Hwang, Una↗

NASA NTRS1993

Detection of CO emission from massive molecular clouds in the inner disk of M31

Faint emission in the CO(1-0) and CO(2-1) spectral lines at mm wavelengths has been discovered from dark dust clouds in the inner disk of M31. These dust clouds are located in regions of the galaxy where there is little evidence of star-forming activity. The CO emission from these clouds is resolved, and comes from roughly the same area covered by the dust clouds. The line profile widths and cloud sizes imply cloud masses typical for giant molecular clouds (GMCs) in the Galaxy, but the observed surface brightnesses are only a few tenths of a K, and the typical CO(1-0) luminosities are a factor of about 10 smaller than those of Galactic GMCs of the same size and velocity line width. The CO(2-1)/CO(1-0) line ratios are very low, suggesting subthermal excitation, and precluding use of this ratio alone to determine the kinetic temperature. However, there are indications that the kinetic temperatures are significantly lower than the values of 10-30 K typical for Galactic GMCs, and may be close to the 2.7 K cosmic background.

Allen, Ronald J.↗

NASA NTRS1994

High-velocity plasma in the transition region of AU Microscopii: Evidence for magnetic reconnection and saturated heating during quiescent and flaring conditions

We analyze high-resolution HST spectra of the dMOe flare star AU Mic, including the profiles of the C IV 1548.2 A, 1550.8 A and Si IV 1393.8 A, 1402.8 A lines obtained with the G160M grating of the Goddard High-Resolution Spectrograph. The quiescent profiles of the C IV and Si IV lines are broad, and not simple Gaussians in shape. Flux in the C IV and Si IV lines, for example, can be measured reliably out to about +/- 200 km/s from line center. Each of the C IV and Si IV profiles can be fitted accurately by two Gaussians (one narrow and the other broad) centered on nearly the same wavelength, with the narrower component accounting for roughly 60% ofthe total integrated flux. The narrow components have similar line widths to those observed in solar active and quiet regions. The broad Gaussian components of the AU Mic line profiles are reminiscent of the broad C IV profiles observed in solar transition region explosive events, which are thought to be associated with emerging magnetic flux regions where field reconnection occurs.

Linsky, Jeffrey L.↗

NASA NTRS1993

The nature of faint emission-line galaxies

One of the results of faint galaxy redshift surveys is the increased fraction of galaxies which have strong emission-line spectra. These faint surveys find that roughly 50 percent of the galaxies have an equivalent width of (OII), W sub 3727, greater than 20 A while this fraction is less than 20 percent in the DARS survey. This has been interpreted as evidence for strong evolution in the galaxy population at redshifts less than 0.5. In order to further investigate the properties of the galaxies in faint redshift surveys, two important factors must be addressed. The first is the observed correlation between color, luminosity, and W sub 3727. There is a correlation between color and the strength of emission lines, bluer galaxies having stronger emission features, as evident for Markarian galaxies and for galaxies in Kennicutt's spectrophotometric atlas. This correlation also applies galaxies in faint redshift surveys. In addition, low luminosity galaxies have a larger average W sub 3727 (and bluer colors) than higher luminosity galaxies. This is illustrated for Kennicutt's low z late-type galaxies, for the Durham Faint Surveys, and for galaxies in SA68. The second factor which must be incorporated into any interpretation of the faint emission galaxies is the different luminosity functions for galaxies depending on color. This is usually modeled by varying M* for different color classes (or morphological types); however, the shape of the luminosity function is different for galaxies with different colors. Low luminosity, blue galaxies have a much larger number density than low luminosity, red galaxies. Furthermore, the low luminosity end of the blue galaxy luminosity function is not well fit by a Schechter function. These two factors have been included in a very simple, no-evolution, model for the galaxy population. This model uses the luminosity functions from Shanks (1990) and spectral energy distributions (SED's) from Bruzual (1988). W sub 3727 is predicted using the correlation (including dispersion) with color.

Smetanka, John J.↗

NASA NTRS1977

The origin of the broad line emission from Seyfert galaxies

Mass loss from an accretion disk around a supermassive (of the order of 100 million solar masses) black hole is proposed as the origin of the broad permitted lines of Seyfert galaxies and QSOs. The material is expelled by ionizing radiation emitted near the center of the disk and striking it at a radius of approximately 10 to the 16.5 power cm. The escaping gas initially has a density of about 1 trillion per cu cm, high enough for radiation pressure to accelerate the gas to high radial velocities. The model leads to line emission from tiny dense filaments moving at about 10,000 km/s in a region roughly 10 to the 17th power cm across. This agrees with the observed broad line widths, variability time scales, and the absence of broad forbidden-line emission.

Shields, G. A.↗

DOE OSTI2020

The SDSS/APOGEE catalogue of HgMn stars

ABSTRACT We report on H-band spectra of chemically peculiar Mercury–Manganese (HgMn) stars obtained via the SDSS/APOGEE survey. As opposed to other varieties of chemically peculiar stars such as classical Ap/Bp stars, HgMn stars lack strong magnetic fields and are defined by extreme overabundances of Mn, Hg, and other heavy elements. A satisfactory explanation for the abundance patterns remains to be determined, but low rotational velocity is a requirement and involvement in binary/multiple systems may be as well. The APOGEE HgMn sample currently consists of 269 stars that were identified among the telluric standard stars as those whose metallic absorption content is limited to or dominated by the H-band Mn ii lines. Due to the fainter magnitudes probed by the APOGEE survey as compared to past studies, only 9/269 stars in the sample were previously known as HgMn types. The 260 newly identified HgMn stars represents a more than doubling of the known sample. At least 32 per cent of the APOGEE sample are found to be binary or multiple systems, and from multi-epoch spectroscopy, we were able to determine orbital solutions for at least one component in 32 binaries. Many of the multilined systems include chemically peculiar companions, with noteworthy examples being the HgMn+Ap/Bp binary HD 5429, the HgMn+HgMn binary HD 298641, and the HgMn+Bp Mn + Am triple system HD 231263. As a further peculiarity, roughly half of the sample produces narrow emission in the C i 16895 Å line, with widths and radial velocities that match those of the Mn ii lines.

Chojnowski, S. Drew↗

NASA NTRS1991

Recent star formation in the interacting galaxy system NGC 520

New optical spectroscopy, near-infrared spectroscopy, and mid-infrared imaging of the interacting system NGC 520 are presented. The data show that the heavily obscured primary nucleus has a current star-forming rate about 35 times the typical rate for a late-type galaxy nucleus, which may account for most of the large far-infrared luminosity of NGC 520. The secondary nucleus has little current star formation but has recently undergone a mild starburst. Optical colors and absorption line equivalent widths suggest that the extranuclear regions in both galaxies have experienced enhanced star formation roughly at the same time as the secondary nucleus, though at a lesser intensity. The extent of the extranuclear burst is large; at least half of the projected surface area of the two disks took part to varying degrees in the episode. Determining the exact age and strength of the recent star-formation episode in NGC 520 is uncertain. The best estimate for the initiation time of about few x 10 exp 8 yrs ago is consistent with the system-wide starburst being caused by the galaxy collision.

Stanford, S. A.↗

NASA NTRS1995

Spectroscopy of candidate young globular clusters in NGC 1275

We present spectra of the brightest member of the population of compact blue objects discovered in the peculiar galaxy NGC 1275 by Holtzman et al. (1992) using Hubble Space Telescope images. These spectra show strong Balmer absorption lines like those observed in A-type stars, as expected if the object is a young globular cluster. The age estimated from the strength of the Balmer lines is about 0.5 Gyr, although ages ranging from 0.1 Gyr to 0.9 Gyr cannot be confidently excluded given current models of stellar populations. If these estimated ages are adopted for the young cluster population of NGC 1275 as a whole, the fading predicted by stellar populations models gives a luminosity function which is consistent with that of the Galactic globular cluster system convolved with the observational selection function for the NGC 1275 system. We also use the equivalent widths of the Mg b and Fe 5270 features to constrain the metallicity of the young cluster. Combining these absorption-line widths with the age estimates from the Balmer lines and stellar population models, we find a metallicity of roughly solar, based on the Mg b index, and somewhat higher for the Fe 5270 index. The radial velocity of the absorption lines of the cluster spectrum is offset from the emission lines of the galaxy spectrum at the same position by - 130 km/s, providing further evidence for the identification of the object as a global cluster and opening up the future possibility of studying the kinematics of young cluster systems. The discovery of objects with the characteristics of young globular clusters in NGC 1275, which shows evidence of a recent interaction or merger, supports the hypothesis that galaxy interactions and mergers are favorable sites for the formation of globular clusters.

Zepf, Stephen E.↗

NASA NTRS1987

The ultraviolet and optical emission-line spectrum of III Zw 77

The high-ionization Seyfert I galaxy III Zw 77 has been simultaneously observed over the satellite ultraviolet to near-IR spectral regions. As in other AGN, the continuous energy distribution shows a roughly power-law decline across much of the optical region and a flatter-than-unity spectral index in the near-UV. The equivalent widths of the Balmer lines and Ly-alpha are very similar to those found in other AGN. The UV-to-optical emission-line spectrum for narrow lines is fairly similar to those deduced for Seyfert 2 galaxies. A surprising result is the detection of the semiforbidden O III 1661, 1666 A doublet with an intensity indicating high temperatures more suggestive of shock heating than photoionization equilibrium. An interpretation in terms of a multicomponent photoionized structure is proposed in which dense regions produce the UV lines and the lower density regions produce the optical lines.

Ferland, Gary J.↗

NASA NTRS1998

Thermal Water Vapor Emission from Shocked Regions in Orion

Using the Long Wavelength Spectrometer on board the Infrared Space Observatory, we have observed thermal water vapor emission from a roughly circular field of view approximately 75" in diameter centered on the Orion BN-KL region. The Fabry-Perot line strengths, line widths, and spectral line shifts observed in eight transitions between 71 and 125 micron show good agreement with models of thermal emission arising from a molecular cloud subjected to a magnetohydrodynamic C-type shock. Both the breadth and the relative strengths of the observed lines argue for emission from a shock rather than from warm quiescent gas in the Orion core. Although one of the eight transitions appears anomalously strong and may be subject to the effects of radiative pumping, the other seven indicate an H2O/H2 abundance ratio on the order of 5 x 10(exp -4) and a corresponding gas-phase oxygen-to-hydrogen abundance ratio on the order of 4 x 10(exp -4). Given current estimates of the interstellar, gas-phase, oxygen and carbon abundances in the solar vicinity, this value is consistent with theoretical shock models that predict the conversion into water of all the gas-phase oxygen that is not bound as CO. The overall cooling provided by rotational transitions of H2O in this region appears to be comparable to the cooling through rotational lines of CO but is an order of magnitude lower than cooling through H2 emission. However, the model that best fits our observations shows cooling by H2O and CO dominant in that portion of the postshock region where temperatures are below approximately 800 K and neither vibrational nor rotational radiative cooling by H2 is appreciable.

Harwitt, Martin↗