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14 records
All sourcesNASA NTRSDOE OSTI
DOE OSTI2024

Approaching Angstrom-Scale Resolution in Lithography Using Low-Molecular-Mass Resists (<500 Da)

Resists that enable high-throughput and high-resolution patterning are essential in driving the semiconductor technology forward. The ultimate patterning performance of a resist in lithography is limited because of the trade-off between resolution, line-width roughness, and sensitivity; improving one or two of these parameters typically leads to a loss in the third. As the patterned feature sizes approach angstrom scale, the trade-off between these three metrics becomes increasingly hard to resolve and calls for a fundamental rethinking of the resist chemistry. Low-molecular-mass monodispersed metal-containing resists of high atom economy can provide not only very high resolution but also very low line-width roughness without sacrificing sensitivity. Here we describe a modular metal-containing resist platform (molecular mass <500 Da) where a molecular resist consists of just two components: a metal and a radical initiator bonded to it. This simple system not only is amenable to high-resolution electron beam lithography (EBL) and extreme ultraviolet lithography (EUVL) but also unites them mechanistically, giving a consolidated perspective of molecular and chemical processes happening during exposure. Irradiation of the resist leads to the production of secondary electrons that generate radicals in the initiator bonded to metal. This brings about an intramolecular rearrangement and causes solubility switch in the exposed resist. We demonstrate record 1.9–2.0 nm isolated patterns and 7 nm half-pitch dense line-space features over a large area using EBL. With EUVL, 12 nm half-pitch line-space features are shown at a dose of 68 mJ/cm 2 . In both of these patterning techniques, the line-width roughness was found to be ≤2 nm, a record low value for any resist platform, also leading to a low-performance trade-off metric, Z factor, of 0.6 × 10 –8 mJ·nm 3 . With the ultimate resolution limited by instrumental factors, potential patterning at the level of a unit cell can be envisaged, making low-molecular-mass resists best poised for angstrom-scale lithography.

77 NANOSCIENCE AND NANOTECHNOLOGY↗
DOE OSTI2022

Quantum Simulations of Vibrational Strong Coupling via Path Integrals

A quantum simulation of vibrational strong coupling (VSC) in the collective regime via thermostated ring-polymer molecular dynamics (TRPMD) is reported. For a collection of liquid-phase water molecules resonantly coupled to a single lossless cavity mode, the simulation shows that as compared with a fully classical calculation, the inclusion of nuclear and photonic quantum effects does not lead to a change in the Rabi splitting but does broaden polaritonic line widths roughly by a factor of 2. Moreover, under thermal equilibrium, both quantum and classical simulations predict that the static dielectric constant of liquid water is largely unchanged inside vs outside the cavity. Furthermore, this result disagrees with a recent experiment demonstrating that the static dielectric constant of liquid water can be resonantly enhanced under VSC, suggesting either limitations of our approach or perhaps other experimental factors that have not yet been explored.

37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CH↗
DOE OSTI2026

Integrated Strategies for Overcoming Resolution Limits in Electron Beam Lithography of Chemically Amplified Resists

Electron beam lithography (EBL) of chemically amplified resists (CARs) faces fundamental challenges, including stochastic electron scattering and acid diffusion, that limit resolution and reproducibility. Using SU-8 as a model CAR, this study systematically investigated complementary strategies to address these challenges, combining multipass exposure, proximity effect correction (PEC) with midrange correction factors, base quencher incorporation, and post-exposure bake (PEB) suppression. Monte Carlo simulations and calibrated PEC modeling revealed that extending the point spread function to include a midrange scattering component significantly improved critical dimension (CD) control across varying pattern densities, correcting deviations that conventional two-term PEC failed to capture. Multipass exposure, particularly 4-pass writing with a 25% offset, redistributed the dose to average stochastic beam and scattering fluctuations, reducing line-width roughness by more than 50% and yielding more uniform nanoscale features. Photoacid confinement was investigated by adding urea as a base quencher, which successfully reduced acid diffusion but introduced substantial sensitivity penalties without improving ultimate resolution or Z-factor performance, underscoring the trade-offs of chemical versus physical confinement. Suppressing PEB most directly minimized acid diffusion, resulting in improved Z-factors and reproducible 30 nm half-pitch dense line/space patterns. Overall, these results demonstrated that PEC with midrange correction, multipass strategies, quencher additives, and PEB-free processing addresses different aspects of the EBL process window and that their integration provides a comprehensive framework for managing stochastic scattering, diffusion, and chemical amplification effects. This framework advances dense nanoscale patterning in CARs and establishes guiding principles for optimizing resist design and process strategies in high-resolution EBL and potentially other advanced lithographies, such as extreme ultraviolet (EUV) lithography.

36 MATERIALS SCIENCE↗
DOE OSTI2025

Effect of pattern transfer process on roughness of block copolymer patterns from directed self-assembly

Block copolymer-directed self-assembly (DSA) remains promising for improving pattern quality and reducing the stochastic variations that challenge high numerical aperture extreme ultraviolet lithography. Equally critical is refining pattern transfer methods for accurately transferring the rectified DSA features to the underlying substrate. We compare two atomic layer deposition (ALD)-based techniques: sequential infiltration synthesis (SIS) and dry liftoff, applied to polystyrene-block-poly(methyl methacrylate) (PS-b-PMMA) DSA patterns. Both methods utilize aluminum oxide hard masks, with one synthesized through infiltration into the PMMA domains and the other through conformal ALD coating. High-resolution scanning electron micrographs were analyzed to measure line edge, width, and placement roughness for both the line (PMMA) and space (PS) features. Although both methods yielded similar overall 3σ rms roughness, they differed significantly in the frequency-dependent power spectral density (PSD) profiles. SIS reduced line placement roughness at length scales associated with the polymer pitch, but increased space width roughness at low frequencies, whereas dry liftoff mimicked the frequency content of the original guiding pattern. This study underscores the importance of PSD evaluation in selecting optimal pattern transfer strategies for specific applications.

Block copolymers↗
DOE OSTI2026

Engineering Assembly Kinetics and Line Roughness in Solvent Vapor-Annealed Block Copolymer/Homopolymer Blends

Block copolymer (BCP) directed self-assembly (DSA) is a promising route to enhance lithography resolution by multiplying nanopattern density and reducing feature roughness. Eliminating kinetically trapped self-assembly defects requires fast self-assembly. However, acceleration strategies like solvent vapor annealing or homopolymer blending broaden domain interfaces, implying a trade-off in increased feature roughness. In this work, we experimentally investigate this apparent dilemma between self-assembly kinetics and line roughness for solvent vapor-annealed thin films of a lamellar poly(styrene-block-2-vinylpyridine) (PS-b-P2VP) BCP blended with PS and P2VP homopolymers. Binary blends with PS or P2VP homopolymers and ternary blends incorporating both in equal weight fractions were solvent vapor annealed using acetone, a near-neutral solvent for PS and P2VP, followed by P2VP-selective vapor-phase infiltration with alumina (AlOx) and polymer etching. Binary blends with P2VP exhibit a modest kinetic enhancement but also higher line-edge and -width roughness due to the increased frequency of P2VP protrusions and bridge defects in the alumina line patterns. In contrast, binary blends with PS self-assemble noticeably faster, while domain asymmetry from the added PS homopolymer reduces roughness by curbing the number of alumina protrusions and bridge defects. Ternary blends maintain DSA line patterns across a wider composition window and, at higher homopolymer loadings, reduce roughness at length scales near the lamellar period, consistent with a reduced impact of intradomain compositional fluctuations. These findings provide important insights for codesigning blend compositions and process flows to achieve high-resolution, defect free patterns with minimal roughness through BCP DSA.

37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CH↗
DOE OSTI2020

The SDSS/APOGEE catalogue of HgMn stars

ABSTRACT We report on H-band spectra of chemically peculiar Mercury–Manganese (HgMn) stars obtained via the SDSS/APOGEE survey. As opposed to other varieties of chemically peculiar stars such as classical Ap/Bp stars, HgMn stars lack strong magnetic fields and are defined by extreme overabundances of Mn, Hg, and other heavy elements. A satisfactory explanation for the abundance patterns remains to be determined, but low rotational velocity is a requirement and involvement in binary/multiple systems may be as well. The APOGEE HgMn sample currently consists of 269 stars that were identified among the telluric standard stars as those whose metallic absorption content is limited to or dominated by the H-band Mn ii lines. Due to the fainter magnitudes probed by the APOGEE survey as compared to past studies, only 9/269 stars in the sample were previously known as HgMn types. The 260 newly identified HgMn stars represents a more than doubling of the known sample. At least 32 per cent of the APOGEE sample are found to be binary or multiple systems, and from multi-epoch spectroscopy, we were able to determine orbital solutions for at least one component in 32 binaries. Many of the multilined systems include chemically peculiar companions, with noteworthy examples being the HgMn+Ap/Bp binary HD 5429, the HgMn+HgMn binary HD 298641, and the HgMn+Bp Mn + Am triple system HD 231263. As a further peculiarity, roughly half of the sample produces narrow emission in the C i 16895 Å line, with widths and radial velocities that match those of the Mn ii lines.

Chojnowski, S. Drew↗
DOE OSTI2022

Turbulent broadening of electron heat-flux width in electromagnetic gyrokinetic simulations of a helical scrape-off layer model

Here, we demonstrate that cross field transport in the scrape-off layer (SOL) can be moderately increased by electromagnetic effects in high-beta regimes, resulting in broadening of the electron heat-flux width on the endplates. This conclusion is taken from full- f electromagnetic gyrokinetic simulations of a helical SOL model that roughly approximates the SOL of the National Spherical Torus Experiment. The simulations have been performed with the Gkeyll code, which recently became the first code to demonstrate the capability to simulate electromagnetic gyrokinetic turbulence on open magnetic field lines with sheath boundary conditions. We scan the source rate and thus β, so that the normalized pressure gradient (the MHD ballooning parameter $α ∝ ∂β/∂r ∝ β/Lρ$) is scanned over an experimentally relevant range, α = 0.3 - 1.5. While there is little change in the pressure gradient scale length L p near the midplane as beta is increased, a 10% increase in cross field transport near the midplane results in an increase in the electron heat-flux width λ q and a 25% reduction of the peak electron heat flux to the endplates.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗
DOE OSTI2020

Effect of Anisotropic Confinement on Electronic Structure and Dynamics of Band Edge Excitons in Inorganic Perovskite Nanowires

Inorganic lead halide perovskite nanostructures show promise as the active layers in photovoltaics, light emitting diodes, and other optoelectronic devices. They are robust in the presence of oxygen and water, and the electronic structure and dynamics of these nanostructures can be tuned through quantum confinement. Here we create aligned bundles of CsPbBr3 nanowires with widths resulting in quantum confinement of the electronic wave functions and subject them to ultrafast microscopy. We directly image rapid one-dimensional exciton diffusion along the nanowires, and we measure an exciton trap density of roughly one per nanowire. Using transient absorption microscopy, we observe a polarization-dependent splitting of the band edge exciton line, and from the polarized fluorescence of nanowires in solution, we determine that the exciton transition dipole moments are anisotropic in strength. Furthermore, our observations are consistent with a model in which splitting is driven by shape anisotropy in conjunction with long-range exchange.

37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CH↗
DOE OSTI2020

Outflow from Outer-arm Starburst in a Grazing Collision between Galaxies

Gemini NIFS K-band spectra and Atacama Large Millimeter/submillimeter Array {sup 12}CO J=1→0, HCO{sup +}, and 100 GHz continuum observations are used to study a bright starburst clump on an outer arm of the interacting galaxy NGC 2207. This clump emits 23% of the total 24 μm flux of the galaxy pair and has an optically opaque dust cone extending out of its 170 pc core. The measured CO accounts for the dark cone extinction if almost all the gas and dust there are in front of the star clusters. An associated approaching CO outflow has v {sub z} ~ 16 km s{sup -1}, an estimated molecular mass 8 × 10{sup 6} M {sub ⊙}, and rises to heights ~0.9 kpc. A receding CO outflow on the far side with v {sub z} ~ 28 km s{sup -1} is less extensive. The observed star formation in the core over 10 Myr can supply the dark cone kinetic energy of roughly 2 × 10{sup 52} erg via supernovae and stellar winds. Other signs of intense activity are a variable radio continuum, suggesting an embedded supernova or other outburst; X-ray emission possibly from an X-ray binary or intermediate-mass black hole, depending on the extinction; and Brγ and He i lines with 82 km s{sup -1} line widths and fluxes consistent with excitation by embedded O-type stars. According to previous models, the retrograde encounter suffered by NGC 2207 caused the loss of angular momentum. This compressed its outer disk. We suggest that the resulting inward crashing stream hit a massive H i clump on the preexisting spiral arm and triggered the observed starburst.

79 ASTRONOMY AND ASTROPHYSICS↗
DOE OSTI2022

BASS. XXIV. The BASS DR2 Spectroscopic Line Measurements and AGN Demographics

We present the second catalog and data release of optical spectral line measurements and active galactic nucleus (AGN) demographics of the BAT AGN Spectroscopic Survey, which focuses on the Swift-BAT hard X-ray detected AGNs. We use spectra from dedicated campaigns and publicly available archives to investigate spectral properties of most of the AGNs listed in the 70 month Swift-BAT all-sky catalog; specifically, 743 of the 746 unbeamed and unlensed AGNs (99.6%). We find a good correspondence between the optical emission line widths and the hydrogen column density distributions using the X-ray spectra, with a clear dichotomy of AGN types for N H = 10 22 cm –2 . Based on optical emission-line diagnostics, we show that 48%–75% of BAT AGNs are classified as Seyfert, depending on the choice of emission lines used in the diagnostics. The fraction of objects with upper limits on line emission varies from 6% to 20%. Roughly 4% of the BAT AGNs have lines too weak to be placed on the most commonly used diagnostic diagram, [O iii ]λ5007/Hβ versus [N ii ]λ6584/Hα, despite the high signal-to-noise ratio of their spectra. This value increases to 35% in the [O iii ]λ5007/[O ii ]λ3727 diagram, owing to difficulties in line detection. Compared to optically selected narrow-line AGNs in the Sloan Digital Sky Survey, the BAT narrow-line AGNs have a higher rate of reddening/extinction, with Hα/Hβ > 5 (~36%), indicating that hard X-ray selection more effectively detects obscured AGNs from the underlying AGN population. Finally, we present a subpopulation of AGNs that feature complex broad lines (34%, 250/743) or double-peaked narrow emission lines (2%, 17/743).

79 ASTRONOMY AND ASTROPHYSICS↗
DOE OSTI2024

Amplified Spontaneous Emission from Electron–Hole Quantum Droplets in Colloidal CdSe Nanoplatelets

Two-dimensional cadmium selenide nanoplatelets (NPLs) exhibit large absorption cross sections and homogeneously broadened band-edge transitions that offer utility in wide-ranging optoelectronic applications. Here, we examine the temperature-dependence of amplified spontaneous emission (ASE) in 4- and 5-monolayer thick NPLs and show that the threshold for close-packed (neat) films decreases with decreasing temperature by a factor of 2-10 relative to ambient temperature owing to extrinsic (trapping) and intrinsic (phonon-derived line width) factors. Interestingly, for pump intensities that exceed the ASE threshold, we find development of intense emission to lower energy in particular provided that the film temperature is <= 200 K. For NPLs diluted in an inert polymer, both biexcitonic ASE and low-energy emission are suppressed, suggesting that described neat-film observables rely upon high chromophore density and rapid, collective processes. Transient emission spectra reveal ultrafast red-shifting with the time of the lower energy emission. Taken together, these findings indicate a previously unreported process of amplified stimulated emission from polyexciton states that is consistent with quantum droplets and constitutes a form of exciton condensate. For studied samples, quantum droplets form provided that roughly 17 meV or less of thermal energy is available, which we hypothesize relates to polyexciton binding energy. Polyexciton ASE can produce pump-fluence-tunable red-shifted ASE even 120 meV lower in energy than biexciton ASE. Finally, our findings convey the importance of biexciton and polyexciton populations in nanoplatelets and show that quantum droplets can exhibit light amplification at significantly lower photon energies than biexcitonic ASE.

37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CH↗
DOE OSTI2026

The DECam MAGIC Survey: Uncovering the Tidal Tails of the Crater II Dwarf Galaxy

Crater II (CraII), a large and low-density dwarf spheroidal galaxy, has unusual observed properties that are difficult to reproduce in cold dark matter simulations. Ongoing tidal disruption may help explain the discrepancies, as evidenced by the recent discovery of tidal tails. Here we present metallicity-sensitive narrowband photometry of the Ca II H and K lines from the Dark Energy Camera, covering 128 deg$^{2}$ across the center and identified tidal tails of CraII as part of the Mapping the Ancient Galaxy in CaHK survey. Our combined photometric metallicity, color–magnitude, proper motion, and parallax selections identify 162 CraII candidates. Of these, 37 candidates are located in the tidal tails, which extend at least 7° (∼95 kpc) from the center of CraII, suggesting it has lost ≳25% of its initial stellar mass. We confirm low contamination rates with dedicated control fields and highlight the extremely low surface brightness stellar features that can be uncovered with CaHK data, as faint as ∼36 mag arcsec$^{−2}$. We also make the first detection of a metallicity gradient (−0.34 ± 0.17 dex deg$^{−1}$) in the center of the galaxy and infer a stream width of w ∼ 0.°8, roughly 50% larger than the CraII half-light radius. The detection of candidates in the most distant CraII pointings from its center implies that the tidal tails extend beyond our footprint. We compare the CraII stream to N-body models with “cored” and “cuspy” dark matter halo progenitors, determining that CraII’s density profile is still ambiguous and warrants further modeling.

Atzberger, Kaia R. [Virginia U., Astron. Dept.] (O↗
DOE OSTI2025

The R -Process Alliance: Exploring the cosmic scatter among ten r -process sites with stellar abundances

Context. The astrophysical origin of the rapid neutron-capture process (r-process), responsible for producing roughly half of the elements heavier than iron, remains uncertain. Detailed chemical signatures from the oldest, most metal-poor stars, which act as fossil records of the earliest nucleosynthesis events, can be used to identify the dominant r-process sites. Aims. We present a homogeneous chemical abundance analysis of ten r-process element-enhanced stars. These old and metal-poor stars are strongly enriched in r-process elements with minimal contamination from other nucleosynthetic sources. By focusing on this chemically pure sample, we aim to investigate intrinsic variations in the r-process abundance patterns and explore their implications for the nature and potential diversity of r-process sites. Methods. We performed a detailed chemical abundance analysis of high-resolution, high-signal-to-noise spectra. For each star, we inspected over 1400 individual absorption lines using a combination of equivalent width measurements and spectral synthesis. The analysis was conducted under the assumption of 1D local thermodynamic equilibrium and employing the MOOG radiative transfer code. Results. We derived abundances for 54 chemical species, including 29 neutron-capture (n-capture) elements, covering the full mass range of the r-process abundance pattern. A kinematic analysis reveals that stars likely originated from ten kinematically distinct systems. Based on this assumption, we used the sample to probe the maximum variation expected from ten independent r-process nucleosynthesis events and computed the intrinsic dispersion of each element relative to Zr and Eu for the light and heavy r-process elements, respectively. This exercise resulted in a remarkably low cosmic scatter across the ten r-process sites enriching these stars; for the rare earth and third peak elements, for example, we find σ [La/Eu] = 0.08 and σ [Os/Eu] = 0.11 dex, while the scatter between light and heavy elements, σ [Zr/Eu] , is slightly higher at 0.18 dex. Conclusions. The elemental abundance patterns across the ten independent r-process sites show remarkably small cosmic dispersions. This minimal dispersion suggests a high degree of uniformity in r-process yields across diverse astrophysical environments.

Astronomy and AstroPhysics↗
DOE OSTI2024

Vortex in superconducting thin-film strips of arbitrary width

We report the currents and field distributions of a vortex in a thin superconducting strip of a width W are considered. It is shown that unlike infinite films where the vortex field crosses the film only in one direction (say, from the half-space under the film to the half-space above it), in strips (as well as in finite size film samples of any shape) the field lines go back to the lower half-space not only out of the sample but also through certain strip parts. The strip patches where the magnetic lines 'dive' back to the space under the strip are situated mostly near the strip edges, at the strip and out of it. The magnetic flux through the strip associated with the vortex is shown to be less than the flux quantum and depends on the vortex position. The suppression of the vortex flux is strong in narrow strips with W $\ll$ Λ = 2λ 2 /d where λ is the bulk London penetration depth and d is the film thickness. The vortex energy scales roughly with W/Λ and depends on vortex position.

75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND↗