A wafer transfer technology for MEMS adaptive optics
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Adaptive optics systems require the combination of several advanced technologies such as precision optics, wavefront sensors, deformable mirrors, and lasers with high-speed control systems. The deformable mirror with a continuous membrane is a key component of these systems. This paper describes a new technique for transferring an entire wafer-level silicon membrane from one substrate to another. This technology is developed for the fabrication of a compact deformable mirror with a continuous facet. A 1 (mu)m thick silicon membrane, 100 mm in diameter, has been successfully transferred without using adhesives or polymers (i.e. wax, epoxy, or photoresist). Smaller or larger diameter membranes can also be transferred using this technique. The fabricated actuator membrane with an electrode gap of 1.5 (mu)m shows a vertical deflection of 0.37 (mu)m at 55 V.
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This slide presentation reviews a method for planet finding using microelectromechanical systems (MEMS) Adaptive Optics (AO). The use of a deformable mirror (DM) is described as a part of the instrument that was designed with a nulling interferometer. The strategy that is used is described in detail.
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A novel Microelectromechanical Systems (MEMS) deformable mirror technology for large, lightweight, segmented space telescopes is being proposed.
We report progress on a nulling coronagraph intended for direct imaging of extrasolar planets. White light is suppressed in an interferometer, and phase errors are measured by a second interferometer. A 1020-pixel MEMS deformable mirror in the first interferometer adjusts the path length across the pupil. A feedback control system reduces deflections of the deformable mirror to order of 1 nm rms.
Current state-of-the-art commercial sensors and actuators do not meet many of NASA s next generation spacecraft and instrument needs. Nor do they satisfy the DoD needs for satellite missions, especially micro/nano satellite missions. In an effort to develop advanced optical devices and instruments that meet mission requirements, NASA Langley recently completed construction of a new cleanroom housing equipment capable of fabricating high performance active optic and adaptive optic technologies including deformable mirrors, reconfigurable lenses (both refractive and diffractive), spectrometers, spectro-polarimeters, tunable filters and many other active optic devices. In addition to performance, these advanced optic technologies offer advantages in speed, size, weight, power consumption, and radiation tolerance. The active optic devices described in this paper rely on birefringent liquid crystal materials to alter either the phase or the polarization of the incoming light. Design considerations and performance evaluation results for various NASA applications are presented. Applications presented will include large space telescopes, optical communications, spacecraft windows, coronagraphs, and star trackers. Keywords: Photonics, Adaptive Optics, Tunable Filters, MEMs., MOEMs, Coronagraph, Star Tracker
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Large-stroke micromachined deformable mirror technology can boost the imaging performance of an otherwise non-rigid, lower-quality telescope structure. The proposed deformable mirror concept in this paper combines a microfabricated large-stroke piezoelectric actuator with a reflective membrane transferred in its entirety from a separate wafer.
This paper describes a proof-of-concept inchworm actuator designed to provide nanometer resolution, high stiffness, large output force, long travel range, and compactness for ultraprecision positioning applications in space.
By combining the high sensitivity of space telescopes with revolutionary imaging technologies consisting primarily of adaptive optics, the Terrestrial Planet Finder is slated to have imaging power 100 times greater than the Hubble Space Telescope. To this end, Boston Micromachines Corporation, of Cambridge, Massachusetts, received Small Business Innovation Research (SBIR) contracts from the Jet Propulsion Laboratory for space-based adaptive optical technology. The work resulted in a microelectromechanical systems (MEMS) deformable mirror (DM) called the Kilo-DM. The company now offers a full line of MEMS DMs, which are being used in observatories across the world, in laser communication, and microscopy.
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The goal of this research is to develop inchworm motor systems capable of simultaneously providing nanometer resolution, high stiffness, large output force, long travel range, and compactness for ultraprecision positioning applications in space.
Topics covered include: Laser Truss Sensor for Segmented Telescope Phasing; Qualifications of Bonding Process of Temperature Sensors to Deep-Space Missions; Optical Sensors for Monitoring Gamma and Neutron Radiation; Compliant Tactile Sensors; Cytometer on a Chip; Measuring Input Thresholds on an Existing Board; Scanning and Defocusing Properties of Microstrip Reflectarray Antennas; Cable Tester Box; Programmable Oscillator; Fault-Tolerant, Radiation-Hard DSP; Sub-Shot Noise Power Source for Microelectronics; Asynchronous Message Service Reference Implementation; Zero-Copy Objects System; Delay and Disruption Tolerant Networking MACHETE Model; Contact Graph Routing; Parallel Eclipse Project Checkout; Technique for Configuring an Actively Cooled Thermal Shield in a Flight System; Use of Additives to Improve Performance of Methyl Butyrate-Based Lithium-Ion Electrolytes; Li-Ion Cells Employing Electrolytes with Methyl Propionate and Ethyl Butyrate Co-Solvents; Improved Devices for Collecting Sweat for Chemical Analysis; Tissue Photolithography; Method for Impeding Degradation of Porous Silicon Structures; External Cooling Coupled to Reduced Extremity Pressure Device; A Zero-Gravity Cup for Drinking Beverages in Microgravity; Co-Flow Hollow Cathode Technology; Programmable Aperture with MEMS Microshutter Arrays; Polished Panel Optical Receiver for Simultaneous RF/Optical Telemetry with Large DSN Antennas; Adaptive System Modeling for Spacecraft Simulation; Lidar-Based Navigation Algorithm for Safe Lunar Landing; Tracking Object Existence From an Autonomous Patrol Vehicle; Rad-Hard, Miniaturized, Scalable, High-Voltage Switching Module for Power Applications; and Architecture for a 1-GHz Digital RADAR.