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Results for “Plasma materials processing”

Search indexed NASA NTRS and DOE OSTI research on propulsion, heat transfer, battery materials and energy systems. Follow report and document links to the original sources.

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At least 19 records
All sourcesNASA NTRSDOE OSTI
NASA NTRS1996

Absolute Inelastic Differential Electron Scattering Cross Sections for He, Xe, N2, and CO at Near Threshold Impact Energies for 90(deg) Scattering Angle

There is a great deal of need for accurate differential cross sections (DCSs) associated with electron impact excitation of various atomic and molecular species. These cross sections are needed for modeling of various plasma systems (ranging from lasers and material processing plasmas to planetary and astrophysical plasmas) and for guiding development of theoretical and computational schemes.

DCS beam scattering beam-beam scattering↗
NASA NTRSDate not supplied

Development of ASCENT Propellant Thrusters and Propulsion Systems

Since the 1960s, hydrazine technology has dominated the market of propulsion technology by providing reliable performance on a wide variety of spacecraft. Efforts to replace hydrazine with a higher-performance and safer alternative have engaged numerous emerging technologies in the industry to mature. ASCENT propellant, also known as AF-M315E, is an example of one such green propellant. Initially developed to provide a safer handling environment than hydrazine, ASCENT offers higher overall performance than a hydrazine equivalent by creating more heat during ignition. The next generation of propulsion technology, based on ASCENT propellant, produces a higher impulse and energy density, expanding the realm of applicable missions from LEO to GEO and beyond. Building on a strong background in small satellite technology and expertise in thermal and oxidation resistant materials, Plasma Processes began several thruster programs for variety of small satellite applications using ASCENT-based technology. Plasma Processes’ background expertise in thermal and oxidation resistant materials provides the necessary foundation to create ASCENT-based technology hardware.

Green Propellant↗
NASA NTRS1998

Plasma-assisted microwave processing of materials

A microwave plasma assisted method and system for heating and joining materials. The invention uses a microwave induced plasma to controllably preheat workpiece materials that are poorly microwave absorbing. The plasma preheats the workpiece to a temperature that improves the materials' ability to absorb microwave energy. The plasma is extinguished and microwave energy is able to volumetrically heat the workpiece. Localized heating of good microwave absorbing materials is done by shielding certain parts of the workpiece and igniting the plasma in the areas not shielded. Microwave induced plasma is also used to induce self-propagating high temperature synthesis (SHS) process for the joining of materials. Preferably, a microwave induced plasma preheats the material and then microwave energy ignites the center of the material, thereby causing a high temperature spherical wave front from the center outward.

Barmatz, Martin↗
NASA NTRS1999

Diagnostic for Plasma Enhanced Chemical Vapor Deposition and Etch Systems

In order to meet NASA's requirements for the rapid development and validation of future generation electronic devices as well as associated materials and processes, enabling technologies ion the processing of semiconductor materials arising from understanding etch chemistries are being developed through a research collaboration between Stanford University and NASA-Ames Research Center, Although a great deal of laboratory-scale research has been performed on many of materials processing plasmas, little is known about the gas-phase and surface chemical reactions that are critical in many etch and deposition processes, and how these reactions are influenced by the variation in operating conditions. In addition, many plasma-based processes suffer from stability and reliability problems leading to a compromise in performance and a potentially increased cost for the semiconductor manufacturing industry. Such a lack of understanding has hindered the development of process models that can aid in the scaling and improvement of plasma etch and deposition systems. The research described involves the study of plasmas used in semiconductor processes. An inductively coupled plasma (ICP) source in place of the standard upper electrode assembly of the Gaseous Electronics Conference (GEC) radio-frequency (RF) Reference Cell is used to investigate the discharge characteristics and chemistries. This ICP source generates plasmas with higher electron densities (approximately 10(exp 12)/cu cm) and lower operating pressures (approximately 7 mTorr) than obtainable with the original parallel-plate version of the GEC Cell. This expanded operating regime is more relevant to new generations of industrial plasma systems being used by the microelectronics industry. The motivation for this study is to develop an understanding of the physical phenomena involved in plasma processing and to measure much needed fundamental parameters, such as gas-phase and surface reaction rates. species concentration, temperature, ion energy distribution, and electron number density. A wide variety of diagnostic techniques are under development through this consortium grant to measure these parameters. including molecular beam mass spectrometry (MBMS). Fourier transform infrared (FTIR) spectroscopy, broadband ultraviolet (UV) absorption spectroscopy, a compensated Langmuir probe. Additional diagnostics. Such as microwave interferometry and microwave absorption for measurements of plasma density and radical concentrations are also planned.

Cappelli, Mark A.↗
NASA NTRS1994

Plasma heating for containerless and microgravity materials processing

A method for plasma heating of levitated samples to be used in containerless microgravity processing is disclosed. A sample is levitated by electrostatic, electromagnetic, aerodynamic, or acoustic systems, as is appropriate for the physical properties of the particular sample. The sample is heated by a plasma torch at atmospheric pressure. A ground plate is provided to help direct the plasma towards the sample. In addition, Helmholtz coils are provided to produce a magnetic field that can be used to spiral the plasma around the sample. The plasma heating system is oriented such that it does not interfere with the levitation system.

Leung, Emily W.↗
NASA NTRS1998

Plasma Processing of Metallic and Semiconductor Thin Films in the Fisk Plasma Source

The use of plasmas to process materials has become widespread throughout the semiconductor industry. Plasmas are used to modify the morphology and chemistry of surfaces. We report on initial plasma processing experiments using the Fisk Plasma Source. Metallic and semiconductor thin films deposited on a silicon substrate have been exposed to argon plasmas. Results of microscopy and chemical analyses of processed materials are presented.

Lampkin, Gregory↗
NASA NTRS2003

The Organic Component of Interstellar Dust

The distribution, chemical structure, and formation of organic matter in the interstellar medium are important to our understanding of the overall evolution of dust. The exchange of dust between the dense and diffuse interstellar medium, and the effects of processing on dust within dense clouds will affect the inventory of material available for incorporation into newly forming star and planetary systems. Observational ground-based studies have confirmed the widespread distribution of the 3.4 pm absorption band attributed to aliphatic hydrocarbons in the diffuse interstellar medium of our own galaxy, and in the dusty spectra of a few nearby galaxies, while space based observations from IS0 probed the signatures of corresponding mid-infrared features. Laboratory experiments which utilize both thermal processes and energetic processing by high energy photons and cosmic rays, produce candidate materials which offer close matches to the observed diffuse interstellar medium and extragalactic hydrocarbon absorption features. Through an analysis of the 4000 to 1000 cm (2.5 to 10 micrometers) region of the spectrum of diffuse interstellar medium (DISM) dust compared with the spectra of thirteen chemical entities produced in the laboratory which serve as analogs to the interstellar material, significant constraints have been placed on the applicability of proposed candidate materials to explain the interstellar features. The results indicate that the organic refractory material in the diffuse interstellar medium is predominantly hydrocarbon in nature, possessing little nitrogen or oxygen, with the carbon distributed between the aromatic and aliphatic forms. Long alkane chains H3C-(CH2),- with n much greater than 4 or 5 are not major constituents of this material. Comparisons to laboratory analogs indicate the DISM organic material resembles plasma processed pure hydrocarbon residues much more so than energetically processed ice residues. This result is consistent with a birthsite for the carrier of the 3.4 micrometers band in the outflow region of evolved carbon stars. Comparisons of dust from our own galaxy with that of distant galaxies suggests that the organic component of interstellar dust is widespread and may be an important universal reservoir of prebiotic organic carbon.

Pendleton, Yvonne↗
NASA NTRS1982

Space platforms and meteorological applications

The use of Shuttle launched and tended space platforms (SP) for research and earth observations in LEO are examined. SPs will accommodate instruments for extended time periods, requiring a Shuttle visit for maintenance and package exchange once every six months. Designs have included off-the-shelf hardware to reduce cost, and comprise instruments for studies of cosmic rays, solar physics, materials processing, space plasma physics, and environmental observations. Solar cell power arrays are detailed, along with thermal control, data management, and attitude control subsystems. Meteorological applications are discussed in terms of the Lower Atmospheric Research Satellite (LARS), for research into coupling of radiative, chemical, and dynamical processes, interactions between the earth's surface, boundary layer, and troposphere, and dynamic and energetic relationships between lower atmospheric processes. Flight configurations and add-on concepts for the SP to lead to a manned space station are indicated.

Mitchell, K. L.↗
NASA NTRS1984

The National Symposium and Workshop on Optical Platforms, Huntsville, AL, June 12-14, 1984, Proceedings

The present conference is concerned with space-based observatories (including future systems), interplanetary observation platforms, Space Station optical utilization, orbital earth viewing systems, and Spacelab's use as an observations platform. Attention is given to the pointing system for the Space Telescope, the Advanced X-ray Astrophysics Facility, the conceptual definition of the Space IR Telescope Facility's spacecraft, satellite servicing in light of the Solar Maximum Repair Mission, a large deployable reflector telescope concept, moon-based astronomical observatories, Space Station-based remote sensing of the earth, optical systems is geosynchronous orbit, multispectral linear array detector technology, Spacelab-based space plasma and materials processing investigations, and space construction technology for large space observatories. Also discussed are military optical platforms for sea, land and air stationing.

Wyman, C. L.↗
NASA NTRS1995

From LDEF to a national Space Environment and Effects (SEE) program: A natural progression

As the LDEF program draws to a close, it leaves in place the fundamental building blocks for a Space Environment and Effects (SEE) program. Results from LDEF data analyses and investigations now form a substantial core of knowledge on the long term effects of the space environment on materials, system and structures. In addition, these investigations form the basic structure of a critically-needed SEE archive and database system. An agency-wide effort is required to capture all elements of a SEE program to provide a more comprehensive and focused approach to understanding the space environment, determining the best techniques for both flight and ground-based experimentation, updating the models which predict both the environments and those effects on subsystems and spacecraft, and, finally, ensuring that this multitudinous information is properly maintained, and inserted into spacecraft design programs. Many parts and pieces of a SEE program already exist at various locations to fulfill specific needs. The primary purpose of this program, under the direction of the Office of Advanced Concepts and Technology (OACT) in NASA Headquarters, is to take advantage of these parts; apply synergisms where possible; identify and when possible fill-in gaps; coordinate and advocate a comprehensive SEE program. The SEE program must coordinate and support the efforts of well-established technical communities wherein the bulk of the work will continue to be done. The SEE program will consist of a NASA-led SEE Steering Committee, consisting of government and industry users, with the responsibility for coordination between technology developers and NASA customers; and Technical Working Groups with primary responsibility for program technical content in response to user needs. The Technical Working Groups are as follows: Materials and Processes; Plasma and Fields; Ionizing Radiation; Meteoroids and Orbital Debris; Neutral External Contamination; Thermosphere, Thermal, and Solar Conditions; Electromagnetic Effects; Integrated Assessments and Databases. Specific technology development tasks will be solicited through a NASA Research Announcement to be released in May of 1994. The areas in which tasks are solicited include: (1) engineering environment definitions, (2) environments and effects design guidelines, (3) environments and effects assessment models and databases, and (4) flight/ground simulation/technology assessment data.

Bowles, David E.↗
NASA NTRS1999

Overview on NASA's Advanced Electric Propulsion Concepts Activities

Advanced electric propulsion research activities are currently underway that seek to addresses feasibility issues of a wide range of advanced concepts, and may result in the development of technologies that will enable exciting new missions within our solar system and beyond. Each research activity is described in terms of the present focus and potential future applications. Topics include micro-electric thrusters, electrodynamic tethers, high power plasma thrusters and related applications in materials processing, variable specific impulse plasma thrusters, pulsed inductive thrusters, computational techniques for thruster modeling, and advanced electric propulsion missions and systems studies.

Frisbee, Robert H.↗
NASA NTRS2006

A Survey of Plasmas and Their Applications

Plasmas are everywhere and relevant to everyone. We bath in a sea of photons, quanta of electromagnetic radiation, whose sources (natural and artificial) are dominantly plasma-based (stars, fluorescent lights, arc lamps.. .). Plasma surface modification and materials processing contribute increasingly to a wide array of modern artifacts; e.g., tiny plasma discharge elements constitute the pixel arrays of plasma televisions and plasma processing provides roughly one-third of the steps to produce semiconductors, essential elements of our networking and computing infrastructure. Finally, plasmas are central to many cutting edge technologies with high potential (compact high-energy particle accelerators; plasma-enhanced waste processors; high tolerance surface preparation and multifuel preprocessors for transportation systems; fusion for energy production).

Eastman, Timothy E.↗
NASA NTRS2006

Cosmic Ray Mantle Visibility on Kuiper Belt Objects

Optically red objects constitute the dynamically cold, old component of the Classical Kuiper Belt (40 - 47 AU) with heliocentric orbits of low eccentricity and inclination. The red colors likely arise from primordial mixed ices processed by irradiation to meters in surface depth over the past four billion years, since the time of giant planet migration and Kuiper Belt stirring, at relatively moderate dosages of 60 gigarads provided by galactic cosmic ray protons and heavier ions. The red cosmic ray mantle is uniformly visible on the cold classical objects beneath a minimally thin eroded layer of more neutrally colored material arising from cumulative effects of heliospheric particle irradiation. The radiation fluxes are lowest in the middle heliospheric region containing the Classical Kuiper Belt and increase from there both towards and away from the Sun. Despite increasing irradiation at various times of solar system history from increases in solar and interstellar ion fluxes, the red object region has apparently never reached sufficiently high dosage levels to neutralize in color the red mantle material. Erosion processes, including plasma sputtering and micrometeroid impacts, act continuously to reduce thickness of the upper neutral crust and expose the cosmic ray mantle. A deeper layer at tens of meters and more may consist of relatively unprocessed ices that can erupt to the surface by larger impacts or cryovolcanism and account for brighter surfaces of larger objects such as 2003 UB313. Surface colors among the Kuiper Belt and other icy objects of the outer solar system are then a function, assuming uniform primordial composition, of relative thickness for the three layers and of the resurfacing age dependent on the orbital and impact history of each object.

Cooper, John F.↗
NASA NTRS2000

Magnetic Flux Compression Concept for Nuclear Pulse Propulsion and Power

The desire for fast, efficient interplanetary transport requires propulsion systems having short acceleration times and very high specific impulse attributes. Unfortunately, most highly efficient propulsion systems which are within the capabilities of present day technologies are either very heavy or yield very low impulse such that the acceleration time to final velocity is too long to be of lasting interest, One exception, the nuclear thermal thruster, could achieve the desired acceleration but it would require inordinately large mass ratios to reach the range of desired final velocities. An alternative approach, among several competing concepts that are beyond our modern technical capabilities, is a pulsed thermonuclear device utilizing microfusion detonations. In this paper, we examine the feasibility of an innovative magnetic flux compression concept for utilizing microfusion detonations, assuming that such low yield nuclear bursts can be realized in practice. In this concept, a magnetic field is compressed between an expanding detonation driven diamagnetic plasma and a stationary structure formed from a high temperature superconductor (HTSC). In general, we are interested in accomplishing two important functions: (1) collimation of a hot diamagnetic plasma for direct thrust production; and (2) pulse power generation for dense plasma ignition. For the purposes of this research, it is assumed that rnicrofusion detonation technology may become available within a few decades, and that this approach could capitalize on recent advances in inertial confinement fusion ICF) technologies including magnetized target concepts and antimatter initiated nuclear detonations. The charged particle expansion velocity in these detonations can be on the order of 10 (exp 6)- 10 (exp 7) meters per second, and, if effectively collimated by a magnetic nozzle, can yield the Isp and the acceleration levels needed for practical interplanetary spaceflight. The ability to ignite pure fusion micro-bursts with reasonable levels of input energy is an equally challenging scientific problem. It remains to be seen, however, whether an effective ignition driver can be developed which meets the requirements for practical spaceflight application (namely high power density, compactness, low weight, and low cost). In this paper, system level performance and design issues are examined including generator performance, magnetic flux compression processes, magnetic diffusion processes, high temperature superconductor (HTSC) material properties, plasmadynamic processes, detonation plasma expansion processes, magnetohydrodynamic instabilities, magnetic nozzle performance, and thrust production performance. Representative generator performance calculations based on a simplified skin layer formulation are presented as well as the results of exploratory small-scale laboratory experiments on magnetic flux diffusion in HTSC materials. In addition, planned follow-on scientific feasibility experiments are described which utilize high explosive detonations and high energy gas discharges to simulate the plasma conditions associated with thermonuclear micro-detonations.

Litchford, Ronald J.↗
NASA NTRS1985

Properties of coated and modified surfaces

The ability to create surface and near-surface properties distinct from the bulk properties of a material by means of coating or surface modification techniques is an important new field of development for engineering materials, encompassing ion implantation, plasma processing, reactive deposition methods, ion beam deposition and modification, molecular beam epitaxy, and fast quench thermal processing. Attention is given to specific areas of process control which illustrate (1) the use of process development to control material properties, (2) the importance of surface modification and coating to the tribology and ion-surface interactions of semiconductor film growth, and (3) recent findings in surface science which exemplify potential applications of ion-surface interactions that generate novel material qualities.

Mattox, D. M.↗
NASA NTRS1982

Ion-beam-induced topography and surface diffusion

It is pointed out that the development of surface topography along with enhanced surface and bulk diffusion processes accompanying ion bombardment have generated growing interest among users of ion beams and plasmas for thin film or material processing. Interest in these processes stems both from attempts to generate topographic changes for specific studies or applications and from the need to suppress or control undesirable changes. The present investigation provides a summary of the current status of impurity-induced texturing, with emphasis on recent developments. Particular attention is given to the texturing accompanying deposition of an impurity material onto a solid surface while simultaneously etching the surface with an ion beam. A description of experimental considerations is provided, and a thermal-diffusion model is discussed along with the development of sputter cones, and aspects of impact-enhanced surface diffusion.

Robinson, R. S.↗
NASA NTRS2000

Research Activities at Plasma Research Laboratory at NASA Ames Research Center

In order to meet NASA's requirements for the rapid development and validation of future generation electronic devices as well as associated materials and processes, enabling technologies are being developed at NASA-Ames Research Center using a multi-discipline approach. The first step is to understand the basic physics of the chemical reactions in the area of plasma reactors and processes. Low pressure glow discharges are indispensable in the fabrication of microelectronic circuits. These plasmas are used to deposit materials and also etch fine features in device fabrication. However, many plasma-based processes suffer from stability and reliability problems leading to a compromise in performance and a potentially increased cost for the semiconductor manufacturing industry. Although a great deal of laboratory-scale research has been performed on many of these processing plasmas, little is known about the gas-phase and surface chemical reactions that are critical in many etch and deposition processes, and how these reactions are influenced by the variation in operating conditions. Such a lack of understanding has hindered the development of process models that can aid in the scaling and improvement of plasma etch and deposition systems. Our present research involves the study of such plasmas. An inductively-coupled plasma (ICP) source in place of the standard upper electrode assembly of the Gaseous Electronics Conference (GEC) radio-frequency (RF) Reference Cell is used to investigate the discharge characteristics. This ICP source generates plasmas with higher electron densities and lower operating pressures than obtainable with the original parallel-plate version of the GEC Cell. This expanded operating regime is more relevant to new generations of industrial plasma systems being used by the microelectronics industry. The research goal is to develop an understanding of the physical phenomena involved in plasma processing and to measure much needed fundamental parameters, such as gas phase and surface reaction rates, species concentration, temperature, ion energy distribution, and electron number density.

Sharma, S. P.↗
NASA NTRS2002

Robust Low Cost Liquid Rocket Combustion Chamber by Advanced Vacuum Plasma Process

Next-generation, regeneratively cooled rocket engines require materials that can meet high temperatures while resisting the corrosive oxidation-reduction reaction of combustion known as blanching, the main cause of engine failure. A project was initiated at NASA-Marshal Space Flight Center (MSFC) to combine three existing technologies to build and demonstrate an advanced liquid rocket engine combustion chamber that would provide a 100 mission life. Technology developed in microgravity research to build cartridges for space furnaces was utilized to vacuum plasma spray (VPS) a functional gradient coating on the hot wall of the combustion liner as one continuous operation, eliminating any bondline between the coating and the liner. The coating was NiCrAlY, developed previously as durable protective coatings on space shuttle high pressure fuel turbopump (HPFTP) turbine blades. A thermal model showed that 0.03 in. NiCrAlY applied to the hot wall of the combustion liner would reduce the hot wall temperature 200 F, a 20% reduction, for longer life. Cu-8Cr-4Nb alloy, which was developed by NASA-Glenn Research Center (GRC), and which possesses excellent high temperature strength, creep resistance, and low cycle fatigue behavior combined with exceptional thermal stability, was utilized as the liner material in place of NARloy-Z. The Cu-8Cr-4Nb material exhibits better mechanical properties at 650 C (1200 F) than NARloy-Z does at 538 C (1000 F). VPS formed Cu-8Cr-4Nb combustion chamber liners with a protective NiCrAlY functional gradient coating have been hot fire tested, successfully demonstrating a durable coating for the first time. Hot fire tests along with tensile and low cycle fatigue properties of the VPS formed combustion chamber liners and witness panel specimens are discussed.

Holmes, Richard↗