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Search indexed NASA NTRS and DOE OSTI research on propulsion, heat transfer, battery materials and energy systems. Follow report and document links to the original sources.

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At least 19 records
All sourcesNASA NTRSDOE OSTI
NASA NTRS2012

Process Sensitivity, Performance, and Direct Verification Testing of Adhesive Locking Features

Phase I: The use of adhesive locking features or liquid locking compounds (LLCs) (e.g., Loctite) as a means of providing a secondary locking feature has been used on NASA programs since the Apollo program. In many cases Loctite was used as a last resort when (a) self-locking fasteners were no longer functioning per their respective drawing specification, (b) access was limited for removal & replacement, or (c) replacement could not be accomplished without severe impact to schedule. Long-term use of Loctite became inevitable in cases where removal and replacement of worn hardware was not cost effective and Loctite was assumed to be fully cured and working. The NASA Engineering & Safety Center (NESC) and United Space Alliance (USA) recognized the need for more extensive testing of Loctite grades to better understand their capabilities and limitations as a secondary locking feature. These tests, identified as Phase I, were designed to identify processing sensitivities, to determine proper cure time, the correct primer to use on aerospace nutplate, insert and bolt materials such as A286 and MP35N, and the minimum amount of Loctite that is required to achieve optimum breakaway torque values. The .1900-32 was the fastener size tested, due to wide usage in the aerospace industry. Three different grades of Loctite were tested. Results indicate that, with proper controls, adhesive locking features can be successfully used in the repair of locking features and should be considered for design. Phase II: Threaded fastening systems used in aerospace programs typically have a requirement for a redundant locking feature. The primary locking method is the fastener preload and the traditional redundant locking feature is a self-locking mechanical device that may include deformed threads, non-metallic inserts, split beam features, or other methods that impede movement between threaded members. The self-locking resistance of traditional locking features can be directly verified during assembly by measuring the dynamic prevailing torque. Adhesive locking features or LLCs are another method of providing redundant locking, but a direct verification method has not been used in aerospace applications to verify proper installation when using LLCs because of concern for damage to the adhesive bond. The reliability of LLCs has also been questioned due to failures observed during testing with coupons for process verification, although the coupon failures have often been attributed to a lack of proper procedures. It is highly desirable to have a direct method of verifying the LLC cure or bond integrity. The purpose of the Phase II test program was to determine if the torque applied during direct verification of an adhesive locking feature degrades that locking feature. This report documents the test program used to investigate the viability of such a direct verification method. Results of the Phase II testing were positive, and additional investigation of direct verification of adhesive locking features is merited.

Golden, Johnny L.↗
NASA NTRSDate not supplied

Parameter, Post-Processing Sensitivities, and Qualification Approach of Laser Powder Bed Fusion Hydrogen Resistant Alloy NASA HR-1

Metal additive manufacturing (AM) processes are being used to enable economical manufacturing of legacy alloys as well as advancing new alloys. Laser powder bed fusion (L-PBF) is a metal AM process that has high maturity and being used to produce a variety of parts for space applications including complex propulsion components. The National Aeronautics and Space Administration (NASA) has identified the need to develop and advance new materials in unique space applications such as high-pressure hydrogen environments. NASA HR-1 is a high strength Fe-Ni based superalloy designed to resist high pressure hydrogen environment embrittlement (HEE), oxidation, and corrosion that has been successfully adapted to laser powder directed energy deposition (LP-DED). Insights gained from the NASA HR-1 development for LP-DED have guided the development process for L-PBF. However, adapting NASA HR-1 to L-PBF posed new challenges due to the distinct differences between the additive manufacturing processes. During parameter development, sensitivities were observed in post-processing that necessitated additional optimization of heat treatments. Additionally, the variations in thickness and how it influenced the microstructural response during heat treatment was characterized. Understanding these sensitivities is important to qualification of the material in a L-PBF machine. This ensures that the microstructures and properties of the material maintain consistency in production. This presentation will cover parameter development along with post-processing challenges and solutions will be discussed in addition to key material properties as it pertains to application performance and qualification per NASA-STD-6030. Improvements made by developing a derivative alloy, NASA HR-2, will be highlighted through preliminary small scale parameter development, material characterization, and initial property testing.

NASA HR-1↗
NASA NTRS2004

A Study of the Response of Deep Tropical Clouds to Mesoscale Processes: Sensitivities to Microphysics, Radiation, and Surface Fluxes - Part 2

The Goddard Cumulus Ensemble (GCE) model is used to examine the sensitivities of surface fluxes, explicit radiation, and ice microphysical processes on multi-day simulations of deep tropical convection over the Tropical Ocean Global Atmosphere Coupled Ocean-Atmosphere Response Experiment (TOGA COARE). The simulations incorporate large-scale advective temperature and moisture forcing, as well as large-scale momentum, that are updated every time step on a periodic lateral boundary grid. This study shows that when surface fluxes are eliminated, the mean atmosphere is much cooler and drier, convection and CAPE are much weaker, precipitation is less, and cloud coverage in stratiform regions much greater. Surface fluxes using the TOGA COARE flux algorithm are weaker than with the aerodynamic formulation, but closer to the observed fluxes. In addition, similar trends noted above for the case without surface fluxes are produced for the TOGA flux case, albeit to a much lesser extent. The elimination of explicit shortwave and longwave radiation is found to have only minimal effects on the mean thermodynamics, convection, and precipitation. However explicit radiation does have a significant impact on cloud temperatures and structure above 200 mb and on the overall mean vertical circulation. The removal of ice processes produces major changes in the structure of the cloud. Much of the liquid water is transported aloft and into anvils above the melting layer (600 mb), leaving narrow, but intense bands of rainfall in convective regions. The elimination of melting processes leads to greater hydrometeor mass below the melting layer, and produces a much warmer and moister boundary layer, leading to a greater mean CAPE. Finally, the elimination of the graupel species has only a small impact on mean total precipitation, thermodynamics, and dynamics of the simulation, but does produce much greater snow mass just above the melting layer. Some of these results differ from previous CRM studies of tropical systems, which is likely due to the type of simulated system, total time integration, and model setup.

Johnson, Daniel↗
NASA NTRS1976

Process sensitivity studies of the Westinghouse sulfur cycle for hydrogen generation

The effect of variations of acid concentration, pressure, and temperature on the thermal process efficiency of the Westinghouse sulfur cycle was examined using the HYDRGN program. Modifications to the original program were made to duplicate the process flowsheet and take into account combined cycle heat-to-work efficiencies for electrochemical work requirements, aqueous solutions, and heat-of-mixing effects. A total of 125 process variations were considered (acid concentration: 50-90 w/o; pressure: 15-750 psia; temperature: 922K - 1366K). The methods of analysis, results, and conclusions are presented.

Carty, R. H.↗
NASA NTRS1976

Process sensitivity studies of the Westinghouse Sulfur Cycle for hydrogen generation

The effect of variations of acid concentration, pressure, and temperature on the thermal process efficiency of the Westinghouse Sulfur Cycle was examined using the University of Kentucky's HYDRGN program. Modifications to the original program were made to duplicate the process flow sheet and take into account combined-cycle heat-to-work efficiencies for electrochemical work requirements, aqueous solutions, and heat-of-mixing effects. A total of 125 process variations were considered (acid concentration: 50-90 w/o; pressure: 15-750 psia; temperature: 922-1366 K (2000 F)). The methods of analysis, results, and conclusions are presented.

Carty, R.↗
NASA NTRS2016

What Controls the Vertical Distribution of Aerosol? Relationships Between Process Sensitivity in HadGEM3-UKCA and Inter-Model Variation from AeroCom Phase II

The vertical profile of aerosol is important for its radiative effects, but weakly constrained by observations on the global scale, and highly variable among different models. To investigate the controlling factors in one particular model, we investigate the effects of individual processes in HadGEM3-UKCA and compare the resulting diversity of aerosol vertical profiles with the inter-model diversity from the AeroCom Phase II control experiment. In this way we show that (in this model at least) the vertical profile is controlled by a relatively small number of processes, although these vary among aerosol components and particle sizes. We also show that sufficiently coarse variations in these processes can produce a similar diversity to that among different models in terms of the global-mean profile and, to a lesser extent, the zonal-mean vertical position. However, there are features of certain models' profiles that cannot be reproduced, suggesting the influence of further structural differences between models. In HadGEM3-UKCA, convective transport is found to be very important in controlling the vertical profile of all aerosol components by mass. In-cloud scavenging is very important for all except mineral dust. Growth by condensation is important for sulfate and carbonaceous aerosol (along with aqueous oxidation for the former and ageing by soluble material for the latter). The vertical extent of biomass-burning emissions into the free troposphere is also important for the profile of carbonaceous aerosol. Boundary-layer mixing plays a dominant role for sea salt and mineral dust, which are emitted only from the surface. Dry deposition and below-cloud scavenging are important for the profile of mineral dust only. In this model, the microphysical processes of nucleation, condensation and coagulation dominate the vertical profile of the smallest particles by number (e.g. total CN >3 nm), while the profiles of larger particles (e.g. CN>100 nm) are controlled by the same processes as the component mass profiles, plus the size distribution of primary emissions. We also show that the processes that affect the AOD-normalised radiative forcing in the model are predominantly those that affect the vertical mass distribution, in particular convective transport, in-cloud scavenging, aqueous oxidation, ageing and the vertical extent of biomass-burning emissions.

dust↗
DOE OSTI2024

Direct Metallization with Reactive Inks – Assessment of Reliability and Process Sensitivities

This project will reduce silver consumption in photovoltaic cells by a factor of almost ten – from 95 mg/cell (the median across technologies) to 10 mg/cell. To achieve this goal, we will replace screen-printed silver pastes with contact dispensed reactive inks that produce lower resistivity metallizations at lower temperatures and with thinner films. This project will generate the understanding necessary to scale this reactive ink technology from the bench-scale to commercial throughputs. Specifically, it will combine fundamental understanding on physics and chemistries involved in contact printing of reactive inks with detailed performance and reliability studies to quantify how tightly processing parameters need to be controlled in order to reliably metallize high efficiency solar cells at commercial throughputs of 36,000 cells/hour.

14 SOLAR ENERGY↗
NASA NTRS2001

Modeling of Convective-Stratiform Precipitation Processes: Sensitivity to Partitioning Methods and Numerical Advection Schemes

Six different convective-stratiform separation techniques, including a new technique that utilizes the ratio of vertical and terminal velocities, are compared and evaluated using two-dimensional numerical simulations of a tropical [Tropical Ocean Global Atmosphere Coupled Ocean-Atmosphere Response Experiment (TOGA COARE)] and midlatitude continental [Preliminary Regional Experiment for STORM-Central (PRESTORM)] squall line. The simulations are made using two different numerical advection schemes: 4th order and positive definite advection. Comparisons are made in terms of rainfall, cloud coverage, mass fluxes, apparent heating and moistening, mean hydrometeor profiles, CFADs (Contoured Frequency with Altitude Diagrams), microphysics, and latent heating retrieval. Overall, it was found that the different separation techniques produced results that qualitatively agreed. However, the quantitative differences were significant. Observational comparisons were unable to conclusively evaluate the performance of the techniques. Latent heating retrieval was shown to be sensitive to the use of separation technique mainly due to the stratiform region for methods that found very little stratiform rain. The midlatitude PRESTORM simulation was found to be nearly invariant with respect to advection type for most quantities while for TOGA COARE fourth order advection produced numerous shallow convective cores and positive definite advection fewer cells that were both broader and deeper penetrating above the freezing level.

Lang, Steve↗
NASA NTRS2001

Modeling of Convective-Stratiform Precipitation Processes: Sensitivity to Partitioning Methods

Six different convective-stratiform separation techniques, including a new technique that utilizes the ratio of vertical and terminal velocities, are compared and evaluated using two-dimensional numerical simulations of a tropical [Tropical Ocean Global Atmosphere Coupled Ocean Atmosphere Response Experiment (TOGA COARE)] and midlatitude continental [Preliminary Regional Experiment for STORM-Central (PRESTORM)] squall line. Comparisons are made in terms of rainfall, cloud coverage, mass fluxes, apparent heating and moistening, mean hydrometeor profiles, CFADs (Contoured Frequency with Altitude Diagrams), microphysics, and latent heating retrieval. Overall, it was found that the different separation techniques produced results that qualitatively agreed. However, the quantitative differences were significant. Observational comparisons were unable to conclusively evaluate the performance of the techniques. Latent heating retrieval was shown to be sensitive to the use of separation technique mainly due to the stratiform region for methods that found very little stratiform rain.

Lang, S. E.↗
NASA NTRS2003

Comment on 'Modeling of Convective-Stratiform Precipitation Processes: Sensitivity to Partitioning Methods' by Matthias Steiner

Despite the obvious notion that the presence of hail or graupel is a good indication of convection, the model results show this does not provide an objective benchmark partly due to the unrealistic presence of small amounts of hail or graupel throughout the anvil in the model but mainly because of the significant amounts of hail or graupel, especially in the tropical TOGA COARE simulation, in the transition zone. Without use of a "transition" category, it is open to debate as how this region should best be defined, as stratiform or as convective. So, the presence of significant hail or graupel contents in this zone significantly degrades its use an objective benchmark for convection. The separation algorithm comparison was done in the context of a cloud-resolving model. These models are widely used and serve a variety of purposes especially with regard to retrieving information that cannot be directly measured by providing synthetic data sets that are consistent and complete. Separation algorithms are regularly applied in these models. However, as with any modeling system, these types 'of models are constantly being improved to overcome any known deficiencies and make them more accurate representations of observed systems. The presence of hail and graupel in the anvil and the bias towards heavy rainfall rates are two such examples of areas that need improvement. Since, both of these can effect the perceived performance of the separation algorithms, the Lang et al. (2003) study did not want to overstate the relative performance of any specific algorithms.

Lang, Steve↗
NASA NTRS1984

Encapsulation materials research

Encapsulation materials for solar cells were investigated. The different phases consisted of: (1) identification and development of low cost module encapsulation materials; (2) materials reliability examination; and (3) process sensitivity and process development. It is found that outdoor photothermal aging devices (OPT) are the best accelerated aging methods, simulate worst case field conditions, evaluate formulation and module performance and have a possibility for life assessment. Outdoor metallic copper exposure should be avoided, self priming formulations have good storage stability, stabilizers enhance performance, and soil resistance treatment is still effective.

Willis, P. B.↗
NASA NTRS2004

Tropical Convective Responses to Microphysical and Radiative Processes: A Sensitivity Study With a 2D Cloud Resolving Model

Prognostic cloud schemes are increasingly used in weather and climate models in order to better treat cloud-radiation processes. Simplifications are often made in such schemes for computational efficiency, like the scheme being used in the National Centers for Environment Prediction models that excludes some microphysical processes and precipitation-radiation interaction. In this study, sensitivity tests with a 2D cloud resolving model are carried out to examine effects of the excluded microphysical processes and precipitation-radiation interaction on tropical thermodynamics and cloud properties. The model is integrated for 10 days with the imposed vertical velocity derived from the Tropical Ocean Global Atmosphere Coupled Ocean-Atmosphere Response Experiment. The experiment excluding the depositional growth of snow from cloud ice shows anomalous growth of cloud ice and more than 20% increase of fractional cloud cover, indicating that the lack of the depositional snow growth causes unrealistically large mixing ratio of cloud ice. The experiment excluding the precipitation-radiation interaction displays a significant cooling and drying bias. The analysis of heat and moisture budgets shows that the simulation without the interaction produces more stable upper troposphere and more unstable mid and lower troposphere than does the simulation with the interaction. Thus, the suppressed growth of ice clouds in upper troposphere and stronger radiative cooling in mid and lower troposphere are responsible for the cooling bias, and less evaporation of rain associated with the large-scale subsidence induces the drying in mid and lower troposphere.

Li, Xiao-Fan↗
DOE OSTI2022

Investigation of Ga 2 O 3 as a new transparent conductive oxide for photovoltaics applications

This small innovation project intended to leverage recent activity and advances in ultrawide-bandgap oxide power electronics toward the investigation of Ga 2 O 3 as a transparent conductive oxide (TCO) for use in photovoltaics (PV). Ga 2 O 3 ’s theoretical advantage over incumbent TCOs is its very large bandgap of 4.8 eV, ensuring optical transparency of photons with λ ≥ 260 nm, effectively the full terrestrial solar spectrum. At the time of proposal writing, literature on Ga 2 O 3 as a TCO/optical material was relatively sparse — what little existed was focused on for UV sensors and/or emitters, with none related to PV. As such, this project was intended to help determine the potential of Ga 2 O 3 as a PV-oriented TCO by investigating its deposition using tools common to the PV and electronics industries — atomic layer deposition (ALD) and RF sputtering (RS), both of which are already used in PV manufacturing — and its resultant optical and electronic properties. Final project goals were to test its application to Si and III-V solar cells. Controllable film thickness and excellent uniformity was established for both methods deposition methods, with ALD providing higher precision for thinner films and RS more effective for growing thicker films. The as-deposited films were found to be amorphous in nature. Spectroscopic ellipsometry (SE) confirmed bandgaps of at least 4.8 eV and non-parasitic absorption across both AM0 and AM1.5G spectra; a refractive index approaching the expected value of 1.8 was also observed, with some degree of tunability based on process parameters. Using this initial optical data, a transfer matrix model, which interfaces with in-house EQE and LIV models, was developed to simulate Ga 2 O 3 optical effects on various solar cells, included potential in antireflection coatings (ARCs). Despite promising optical properties, the resultant resistivity / conductivity metrics did not meet expectations, regardless of deposition process. Although thick RS-deposited films, using both undoped and 1 at% Ge (n-type) doped sintered targets — demonstrated high net carrier concentrations (via C-V), and low specific resistance Ohmic contacts were demonstrated, transmission line measurements (TLM) showed very high resistivity. Further analysis indicated high vertical film conductivity, but very low lateral conductivity. Deeper characterization revealed a relatively high density of nano/microcrystalline inclusions that were ostensibly the source of the vertical conductivity, with the amorphous matrix serving as an effective insulator (likely due to high concentrations of electronic trap states). Despite extensive work to increase film polycrystallinity — demonstrated via high temperature annealing — sufficient lateral conductivity for TCO use was not achieved. The final phase of the project shifted focus toward investigation of ALD-deposited Ga 2 O 3 ’s potential as a passivant and/or passivating contact for both Si and III-V solar cells, with expectation of performance similar to Al 2 O 3 . However, initial rounds of testing using our baseline ALD process yielded minimal (but not quite zero) passivation of both GaInP and Si surfaces. Dielectric passivation is well-known to be highly process sensitive; given the unoptimized nature of the process used, this work was deemed inconclusive. The final outlook with respect to feasibility of Ga 2 O 3 as a PV-oriented TCO is, ultimately, still uncertain. The work performed in this project confirmed the optical properties and deposition methods, but the achieved electrical properties do not meet technological needs; literature reports in recent years are somewhat inconsistent and potentially untrustworthy, but generally appear to be in line with our results. At the very least it is clear that, should Ga 2 O 3 still be under consideration for PV TCO and/or selective contact applications, a significant amount of optimization and study is still needed.

14 SOLAR ENERGY↗
DOE OSTI2021

Improved Understanding of Coupled Water and Carbon Cycle Processes through Machine Learning Approaches

Focal Area(s): This white paper addresses how explainable machine learning (ML) algorithms can improve insights gained from complex data (Focal Area 3). We will also address how ML approaches related to sensor compression and low energy AI hardware can be used for efficient data acquisition (Focal Area 1). Science Challenge: We will focus on the coupled water cycle and carbon cycle processes in terrestrial ecosystems and terrestrial-aquatic interfaces. Thus, our approaches will be centered around several data-model integration challenges indicated in EESD strategic plans for two science focus areas: Terrestrial Ecosystem Science and Hydrobiogeochemistry. We can use AI to correct systematic model errors due to biases in either data or model structure/processes. Error patterns in model predictions usually vary by region, model, season etc. But there are systematic patterns in them. e.g., soil moisture tends to be overestimated in the arid western continental United States underestimated in wetter eastern USA; some land surface models tend to underestimate moisture in wet seasons and overestimate in dry seasons. Moreover, the consequences of extreme events (e.g., drought, extreme flooding, storm surges associated with tropical storms, hurricanes) on carbon cycle processes are not well represented in ecosystem and Earth system models. Redox-sensitive processes (e.g., rapid oxidation/reduction of iron and other redox-sensitive elements in soil microsites subjected to fluctuated hydrology) in terrestrial-aquatic interfaces further challenge model predictions of hot-spots (and hot-moments) due to poor understanding of underlying mechanisms. Thus, AI/ML approaches can be used to learn patterns in the data and model errors and use them to build model equations and correct process-based model errors.

54 ENVIRONMENTAL SCIENCES↗
DOE OSTI2024

Sensitivity Analysis of Irradiated Fueled Experiments using the MOOSE Framework [Slides]

Modeling and simulation (M&S) methods are able to predict uncertainties in experimental parameters (e.g., power and fission density) during irradiation. A shortfall exists in predicting how sensitive some of the parameters will behave during the experimental process. Sensitivity and Uncertainty Quantification (SUQ) is critical in support of qualification and licensing reactor fuels. The application of a method to quantify the uncertainty in these experiments is critical to the prediction of their performance. In this work, we propose the use of a polynomial chaos expansion (PCE) method to quantify the sensitive parameters in these simulations and, in an extension, their experimental surrogates. We propose to perform M&S using PCE uncertainty quantification on a previously irradiated fueled experiment in order to provide a validation case for Griffin and expand its use as a verification and validation (V&V) tool for experiments with a neutronics component. Griffin is an advanced, deterministic neutronics analysis code built using the MOOSE (multiphysics object-oriented simulation environment) framework which can provide state-of-the-art neutronic analysis on M&S of experiments. We will use the stochastic tools module (STM) in MOOSE to provide PCE uncertainty quantification on the proposed experimental setup. Idaho National Laboratory (INL) does not yet have an in-house developed code with V&V approval for experiments performed on-site; this work would provide a necessary addition of support for experiments performed at INL. The Nuclear Regulatory Commission (NRC) has explicitly requested uncertainties in calculated values such as fuel power and burnup, and the development of this capability would benefit the relationship between INL and the NRC.

11 NUCLEAR FUEL CYCLE AND FUEL MATERIALS↗
DOE OSTI2025

Formation trajectories of solution-processed perovskite thin films from mixed solvents

The engineering of mixed-solvent formulations and their evaporation conditions are key to reproducible perovskite coatings for high-performance photovoltaics. Here, we report a lumped-parameter evaporation model to predict the evolution of a perovskite ink liquid film over time (solvent ratio, solute concentration, and film thickness). The drying-rate model is validated via in situ film-thickness measurements, and the predicted transient liquid film state is mapped as a process path. These methods allow for the prediction of process sensitivity to local environmental factors and the understanding and visualization of a broader processing parameter space enabled through the coupling of process and ink engineering. Process maps are applied to create a new framework for scalable perovskite coating development with a goal of improving the reproducibility and transferability of perovskite fabrication. This approach is demonstrated with blade-coated FA 0.83 Cs 0.17 PbI 3 photovoltaic devices, improving the photovoltaic conversion efficiency from 17.5% ± 1.7% to 20.3% ± 0.6%.

14 SOLAR ENERGY↗
NASA NTRS1977

Automated array assembly task, phase 1

State-of-the-art technologies applicable to silicon solar cell and solar cell module fabrication were assessed. The assessment consisted of a technical feasibility evaluation and a cost projection for high volume production of solar cell modules. Design equations based on minimum power loss were used as a tool in the evaluation of metallization technologies. A solar cell process sensitivity study using models, computer calculations, and experimental data was used to identify process step variation and cell output variation correlations.

Carbajal, B. G.↗
NASA NTRS1994

A combined electron beam/optical lithography process step for the fabrication of sub-half-micron-gate-length MMIC chips

Advanced radar and communication systems rely heavily on state-of-the-art microelectronics. Systems such as the phased-array radar require many transmit/receive (T/R) modules which are made up of many millimeter wave - microwave integrated circuits (MMIC's). The heart of a MMIC chip is the Gallium Arsenide (GaAs) field-effect transistor (FET). The transistor gate length is the critical feature that determines the operating frequency of the radar system. A smaller gate length will typically result in a higher frequency. In order to make a phased array radar system economically feasible, manufacturers must be capable of producing very large quantities of small-gate-length MMIC chips at a relatively low cost per chip. This requires the processing of a large number of wafers with a large number of chips per wafer, minimum processing time, and a very high chip yield. One of the bottlenecks in the fabrication of MIMIC chips is the transistor gate definition. The definition of sub-half-micron gates for GaAs-based field-effect transistors is generally performed by direct-write electron beam lithography (EBL). Because of the throughput limitations of EBL, the gate-layer fabrication is conventionally divided into two lithographic processes where EBL is used to generate the gate fingers and optical lithography is used to generate the large-area gate pads and interconnects. As a result, two complete sequences of resist application, exposure, development, metallization and lift-off are required for the entire gate structure. We have baselined a hybrid process, referred to as EBOL (electron beam/optical lithography), in which a single application of a multi-level resist is used for both exposures. The entire gate structure, (gate fingers, interconnects and pads), is then formed with a single metallization and lift-off process. The EBOL process thus retains the advantages of the high-resolution E-beam lithography and the high throughput of optical lithography while essentially eliminating an entire lithography/metallization/lift-off process sequence. This technique has been proven to be reliable for both trapezoidal and mushroom gates and has been successfully applied to metal-semiconductor and high-electron-mobility field-effect transistor (MESFET and HEMT) wafers containing devices with gate lengths down to 0.10 micron and 75 x 75 micron gate pads. The yields and throughput of these wafers have been very high with no loss in device performance. We will discuss the entire EBOL process technology including the multilayer resist structure, exposure conditions, process sensitivities, metal edge definition, device results, comparison to the standard gate-layer process, and its suitability for manufacturing.

Sewell, James S.↗