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Search indexed NASA NTRS and DOE OSTI research on propulsion, heat transfer, battery materials and energy systems. Follow report and document links to the original sources.

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NASA NTRS1999

Nonlinear Effects in Single-Pass ICRF Heating

The Variable Specific Impulse Magnetoplasma Rocket (VASIMR) concept employs Ion Cyclotron Resonant Frequency (ICRF) heating as the main power deposition mechanism. Since the ions accelerate to the full energy in a single pass through the cyclotron resonance, their response to the RF-field will be essentially nonlinear - hence the motivation to amend the commonly used linear approach to the problem. In a collisionless plasma, the energy gain of an accelerated ion is limited by the time the particle spends at the resonance. This time is affected by: (1) incident flow velocity, (2) longitudinal grad B force, (3) ambipolar electric field, and (4) ponderomotive force of the RF-field. Our analysis shows that the grad B force is the dominant factor at low to moderate levels of RF-power. We present nonlinear scaling for the energy gain and the absorption efficiency with RF-power and plasma parameters. We also demonstrate that the nonlinear regime exhibits a steep decrease in the plasma density at the resonance.

Arefiev, A. V.↗

NASA NTRS2000

Langmuir Probe Measurements of Inductively Coupled Plasmas in CF4/Ar/O2 Mixtures

Fluorocarbon gases, such as CF4, and their mixtures are widely used in contemporary low-pressure and high-density plasma processing techniques. In such plasmas Langmuir probe is one of the most commonly employed diagnostic techniques to obtain electron number density (ne), electron temperature (Te), electron energy distribution function (EEDF), mean electron energy (Ee), ion number density (ni), and plasma potential (Vp). In this paper we report probe data for planar inductively coupled plasmas in CF4/O2/Ar mixtures. By varying the relative concentrations in the mixture, radial profiles of ne, ni, Te, Ee, Vp, EEDF were measured in the mid-plane of the plasma at 10 mTorr and 20 mTorr of gas pressures, and 200 W and 300 W of RF powers. Data show that ne and ni decrease with increase of CF4 content and decrease of gas-pressure but they increase with increase of RF-power, whereas Vp increases with decrease of gas-pressure and remains independent of RF-power. However, they all peak at the center of the plasma and decrease towards the edge while Te follows the other way and increases a little with increase of power. The measured EEDFs exhibit Druyvesteyn-like distribution at all pressures and powers. Data are analyzed and will be presented.

Rao, M. V. V. S.↗

DOE OSTI2024

Investigating instabilities in magnetized low-pressure capacitively coupled RF plasma using particle-in-cell (PIC) simulations

The effect of a uniform magnetic field on particle transport in low-pressure radio frequency (RF) capacitively coupled plasma (CCP) has been studied using a particle-in-cell model. Three distinct regimes of plasma behavior can be identified as a function of the magnetic field. In the first regime at low magnetic fields, asymmetric plasma profiles are observed within the CCP chamber due to the effect of $\overrightarrow{E}$ × $\overrightarrow{B}$ drift. As the magnetic field increases, instabilities develop and form self-organized spoke-shaped structures that are distinctly seen within the bulk plasma closer to the sheath. In this second regime, the spoke-shaped coherent structures rotate inside the plasma chamber in the -$\overrightarrow{E}$ × $\overrightarrow{B}$ direction, where $\overrightarrow{E}$ × $\overrightarrow{B}$ are the DC electric and magnetic field vectors, respectively, and the DC electric field exists in the sheath and pre-sheath regions. The spoke rotation frequency is in the megahertz range. As the magnetic field strength increases further, the rotating coherent spokes continue to exist near the sheath. The coherent structures are, however, accompanied by new small-scale incoherent structures originating and moving within the bulk plasma region away from the sheath. This is the third regime of plasma behavior. The threshold values of the magnetic field between these regimes were found not to vary with changing plasma reactor geometry (e.g., area ratio between ground and powered electrodes) or the use of an external capacitor between the RF-powered electrode and the RF source. The threshold values of the magnetic field between these regimes shift toward higher values with increasing gas pressure. Analysis of the results indicates that the rotating structures are due to the lower hybrid instability driven by density gradients and electron-neutral collisions. This paper provides guidance on the upper limit of the magnetic field for instability-free operation in low-pressure CCP-based semiconductor deposition and etch systems that use the external magnetic field for plasma uniformity control.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

DOE OSTI2023

Superbolts: The Most Powerful Optical Signals Generated by Lightning [Slides]

The most powerful optical lightning events are termed “superbolts." Superbolts can arise from physical lightning phenomena or radiative transfer effects. The most intense superbolts are caused by long-horizontal “megaflashes” in stratiform clouds that are particularly effective optical emitters. The scale, intensity, and rarity of superbolts and megaflashes make them difficult to observe. RF-powerful events recently labeled “superbolts” are a different phenomenon.

54 ENVIRONMENTAL SCIENCES↗

NASA NTRS2000

Mass Spectrometric and Langmuir Probe Measurements in Inductively Coupled Plasmas in Ar, CHF3/Ar and CHF3/Ar/O2 Mixtures

Absolute fluxes and energy distributions of ions in inductively coupled plasmas of Ar, CHF3/Ar, and CHF3/Ar/O2 have been measured. These plasmas were generated in a Gaseous Electronics Conference (GEC) cell modified for inductive coupling at pressures 10-50 mTorr and 100-300 W of 13.56 MHz radio frequency (RF) power in various feedgas mixtures. In pure Ar plasmas, the Ar(+) flux increases linearly with pressure as well as RF-power. Total ion flux in CHF3 mixtures decreases with increase in pressure and also CHF3 concentration. Relative ion fluxes observed in the present studies are analyzed with the help of available cross sections for electron impact ionization and charge-exchange ion-molecule reactions. Measurements of plasma potential, electron and ion number densities, electron energy distribution function, and mean electron energy have also been made in the center of the plasma with a RF compensated Langmuir probe. Plasma potential values are compared with the mean ion energies determined from the measured ion energy distributions and are consistent. Electron temperature, plasma potential, and mean ion energy vary inversely with pressure, but increase with CHF3 content in the mixture.

Kim, J. S.↗

NASA NTRS1998

Ion Energy Distributions and their Relative Abundance in Inductively Coupled Plasmas

Study of kinetics of ions and neutrals produced in high density inductively coupled plasma (ICP) discharges is of great importance for achieving a high degree of plasma assisted deposition and etching. In this paper, we present the ion energy distributions (IEDs) of various ions arriving at the grounded lower electrode. The ions were energy as well as mass analyzed by a combination of electrostatic analyzer-quadrupole mass spectrometer for pure Ar and CF4/Ar mixtures. The measurements have been made at gas pressures ranging from 30 to 100 mTorr. In addition, the IEDs were measured when the wafer-supporting electrode was also rf-powered and the effect of the self-bias was observed in the energy distributions of ions. The shapes of the IEDs are discussed an related to the sheath properties and measured electrical waveforms, as a function of pressure and applied power. Relative ion intensities were obtained by integration of each ion kinetic energy distribution function over its energy range.

Kim, J. S.↗

DOE OSTI2021

Design and optimization of the RF input-coupler for a low-frequency, split-coaxial RFQ

The Isotope Decay-At-Rest experiment (IsoDAR) is a proposed underground experiment which is expected to be a definitive search for sterile neutrinos. In order to be decisive within 5 years, high rates of neutrinos must be produced, by impinging a 10 mA continuous wave proton beam at 60 MeV on a high power target. Due to space restrictions, a compact cyclotron was chosen as an accelerator to produce this driver beam. To overcome space charge limitations during injection, H 2 + ions are accelerated and later stripped into protons by means of a carbon foil. IsoDAR uses an especially designed low-frequency (32.8 MHz) split-coaxial Radio-Frequency Quadrupole (RFQ) to effectively bunch H 2 + ions before injecting them into this cyclotron. The RFQ will be embedded vertically in the cyclotron yoke, facilitating a very compact design. This puts stringent limits on RFQ size, type, and accessibility. Here, we present the design and optimization of the low-frequency (32.8 MHz) RF input-coupler for the IsoDAR RFQ. The design is challenging due to the necessarily small diameter of the RFQ (28 cm) and the split-coaxial type, as well as limited access to the RFQ. We have determined the optimal position and shape for the coupler, leading to a low power consumption of < 6 kW for an inter-vane voltage of 22 kV. Finally, the highest calculated fields are safely below the Kilpatrick limit for this structure.

43 PARTICLE ACCELERATORS↗