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Search indexed NASA NTRS and DOE OSTI research on propulsion, heat transfer, battery materials and energy systems. Follow report and document links to the original sources.

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At least 19 records
All sourcesNASA NTRSDOE OSTI
DOE OSTI2024

Transformer coupled toroidal wave-heated remote plasma sources operating in Ar/NF 3 mixtures

Remote plasmas are used in semiconductor device manufacturing as sources of radicals for chamber cleaning and isotropic etching. In these applications, large fluxes of neutral radicals (e.g. F, O, Cl, H) are desired with there being negligible fluxes of potentially damaging ions and photons. One remote plasma source (RPS) design employs toroidal, transformer coupling using ferrite cores to dissociate high flows of moderately high pressure (up to several Torr) electronegative gases. In this paper, results are discussed from a computational investigation of moderate pressure, toroidal transformer coupled RPS sustained in Ar and Ar/NF 3 mixtures. Operation of the RPS in 1 Torr (133 Pa) of argon with a power of 1.0 kW at 0.5 MHz and a single core produces a continuous toroidal plasma loop with current continuity being maintained dominantly by conduction current. Operation with dual cores introduces azimuthal asymmetries with local maxima in plasma density. Current continuity is maintained by a mix of conduction and displacement current. Operation in NF 3 for the same conditions produces essentially complete NF 3 dissociation. Electron depletion as a result of dissociative attachment of NF 3 and NF x fragments significantly alters the discharge topology, confining the electron density to the downstream portion of the source where the NFx density has been lowered by this dissociation.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗
DOE OSTI2020

Highly selective Si 3 N 4 /SiO 2 etching using an NF 3 /N 2 /O 2 /H 2 remote plasma. I. Plasma source and critical fluxes

Highly selective plasma etching of silicon nitride (Si 3 N 4 ), while not etching silicon dioxide (SiO 2 ), is a critical step in the fabrication of microelectronics devices. In many applications, this etching must be damage-free and isotropic, which then motivates the use of remote plasmas where the reactants interacting with the substrate are dominantly neutral species. In this paper and Paper II, mechanisms for highly selective Si 3 N 4 etching in remote plasmas are discussed based on results from experiments and simulations. It has been shown experimentally that high Si 3 N 4 /SiO 2 etch selectivity (≈380) can be achieved in the downstream effluent of an NF 3 /N 2 /O 2 /H 2 plasma. The authors found that H2 plays a principal role in the reaction mechanism as Si 3 N 4 /SiO 2 selectivity shows a sharp maximum as a function of the H2 flow rate. Based on this observation, and measured densities of F-atoms and H2 in the process chamber, a mechanism of selective Si 3 N 4 /SiO 2 etching is proposed in which HF molecules in vibrationally excited states accelerate etching reactions. A reaction mechanism for NF 3 /N 2 /O 2 /H 2 plasmas and its afterglow was developed to computationally determine the species densities and fluxes on the wafer level, validated by comparing with experimentally measured F-atom and H 2 densities. The calculated species densities and fluxes were used as input to an analytical model of Si 3 N 4 and SiO 2 etching based on the results of quantum chemistry simulations. This paper presents experimental results (etching data and species densities), the reaction mechanism for NF 3 /N 2 /O 2 /H 2 plasmas, and the results of simulations of gas phase chemistry. Quantum chemistry simulations of elementary etching reactions, description of the analytical model of Si 3 N 4 and SiO 2 etching, calculations of the etch rates, and Si 3 N 4 and SiO 2 selectivity with this model are presented in Paper II.

42 ENGINEERING↗
DOE OSTI2020

Etching of Si 3 N 4 induced by electron beam plasma from hollow cathode plasma in a downstream reactive environment

An etching system based on the interaction of electrons extracted from a direct current (DC) hollow-cathode (HC) Ar plasma and injected towards a Si3N4 covered silicon substrate located in the downstream reactive environment created by an additional remote CF 4 /O 2 plasma source was developed and evaluated. By controlling the properties of the injected beam electrons, this approach allows to deliver energy to a surface functionalized by exposure to reactive species, and initiate surface etching. The energy of the primary beam electrons is controlled by the acceleration voltage relative to the HC discharge. Ar atoms flow from the high-pressure HC discharge into the low pressure downstream reactive environment in the process chamber. For an acceleration voltage greater than the ionization potential of Ar and/or process gas species, the energetic primary beam electrons produce a secondary plasma in the process chamber, and can also cause additional dissociation. We have characterized the properties of the secondary plasma and also surface etching of Si 3 N 4 as a function of process parameters, including acceleration voltage (0-80 V), discharge current of the HC discharge (1-2 A), pressure (3.5-20 mTorr), source to substrate distance (1.5 to 5 cm), and feed gas composition (20% and 80% O2 in CF 4 /O 2 ). The electron energy probability function (EEPF) measured with a Langmuir probe about 2.5 cm below the extraction ring suggests several major groups of electrons for this situation, including high energy primary beam electrons with an energy that varies as the acceleration voltage is changed and low energy electrons produced by beam electron-induced ionization of the Ar gas in the process chamber. When a remote CF 4 /O 2 plasma is additionally coupled to the process chamber, Si 3 N 4 surfaces can be functionalized, and by varying the energy of the beam electrons, Si 3 N 4 etching can be induced by electron-neutral synergy effect with plasma-surface interaction. For conditions without beam electron injection, the remote plasma etching rate (ER) of Si 3 N 4 depends strongly on the O 2 concentration in the CF 4 /O 2 processing gas mixture and can be suppressed for O 2 -rich process conditions by the formation of a SiONF passivation layer on the Si 3 N 4 surface. The combination of the HC electron beam source with the remote plasma source (HCEB-RP) makes it possible to induce Si 3 N 4 etching for O 2 -rich remote plasma conditions where remote plasma by itself produces negligible Si 3 N 4 etching. The electron enhanced etching of Si 3 N 4 depends strongly on O 2 /CF 4 mixing ratio reflecting changing arrival rates of O and F species at the surface. Optical emission spectroscopy was used to estimate the ratio of gas phase F and O densities and found to be controlled by the gas mixing ratio and independent of HC EB operating conditions. At this time the detailed sequence of events operative in the etching mechanism is unclear. While the increase of the electron energy is ultimately responsible for initiating surface etching, at present we cannot rule out a role of ions from the simultaneously produced secondary plasma in plasma surface interaction mechanisms.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗
DOE OSTI2021

Compact, portable, laser induced fluorescence diagnostic for laboratory plasma sources

As diagnostic groups are increasingly called upon to participate in experimental campaigns at remote facilities, there is a need to develop portable versions of plasma diagnostic systems. One such diagnostic is laser induced fluorescence (LIF). Here, we describe a portable LIF apparatus that eliminates the need for an optical table, beam splitters, and an optical chopper. All of the light exiting the laser system is coupled through optical fibers to the experiment and housekeeping diagnostics. Here, the collected light is coupled through an optical fiber as well. A key feature is modulation of the tapered amplifier current instead of physical modulation of the laser output. Using this portable LIF system, measurements of ion temperature, ion flow, and relative metastable ion density are reported for two different remote experiments.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗
NASA NTRS2004

Evidence for Hot Plasma after CME events from Remote and In Situ Observations

We present here evidence for highly ionized Fe observed both in the corona, in the aftermath of a CME, and, after propagation, {\it in situ}. The apparent source temperature is $>$6 MK. To our knowledge, this is the first time that such an unambiguous identification has been made. This detection complements studies correlating other properties of plasma observed {\it in situ} to the same properties of the same plasma remotely observed at its source in the corona.

Poletto, G.↗
DOE OSTI2020

Electron beam injection from a hollow cathode plasma into a downstream reactive environment: Characterization of secondary plasma production and Si 3 N 4 and Si etching

A material etching system was developed by combining beam electron injection from a direct current (DC) hollow-cathode (HC) electron source with the downstream reactive environment of a remote CF 4 /O 2 low temperature plasma. The energy of the injected beam electrons is controlled using an acceleration electrode biased positively relative to the HC Argon discharge. For an acceleration voltage greater than the ionization potential of Ar, the extracted primary electrons can produce a secondary plasma in the process chamber. We characterized the properties of the secondary plasma by performing Langmuir probe measurements of the electron energy probability function (EEPF) 2.5 cm below the extraction ring. The data indicate the existence of two major groups of electrons, including electrons with a primary beam electron energy which varies as the acceleration voltage is varied, along with low energy electrons produced by ionization of the Ar gas atoms in the process chamber by the injected beam electrons. When combining the HC Ar beam electron with a remote CF 4 /O 2 electron cyclotron wave resonance (ECWR) plasma, the EEPF of both the low energy plasma electron and beam electron components decreases. Additionally, we studied surface etching of Si3N4 and poly-crystalline Si (poly-Si) thin films as a function of process parameters, including the acceleration voltage (0-70 V), discharge current of the HC discharge (1-2 A), pressure (2- 100 mTorr), source to substrate distance (2.5 to 5 cm), and feed gas composition (with or without CF 4 /O 2 ). The direction of the incident beam electrons was perpendicular to the surface. Si 3 N 4 and poly-crystalline silicon etching are seen and indicate an electronneutral synergy effect. No/little remote plasma spontaneous etching was observed for the conditions used in this study, and the etching is confined to the substrate area irradiated by the injected beam electrons. The electron etched Si 3 N 4 surface etching rate profile distribution is confined within a ~30 mm diameter circle, which is slightly broader than the area for which poly-Si etching is seen, and coincides closely with the spatial profile of beam electrons as determined by the Langmuir probe measurements. The magnitude of poly-Si etching rate is by a factor of two times smaller than the Si 3 N 4 etching rate. In this paper, we discuss possible explanations of the data and the role of surface charging.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗
NASA NTRS1983

The ISPM unified radio and plasma wave experiment

Hardware for the International Solar Polar Mission (ISPM) Unified Radio and Plasma (URAP) wave experiment is presented. The URAP determines direction and polarization of distant radio sources for remote sensing of the heliosphere, and studies local wave phenomena which determine the transport coefficients of the ambient plasma. Electric and magnetic field antennas and preamplifiers; the electromagnetic compatibility plan and grounding; radio astronomy and plasma frequency receivers; a fast Fourier transformation data processing unit waveform analyzer; dc voltage measurements; a fast envelope sampler for the solar wind, and plasmas near Jupiter; a sounder; and a power converter are described.

Stone, R. G.↗
NASA NTRS1984

An experimental study of laser supported hydrogen plasmas

The rudiments of a rocket thruster which receives its enthalpy from an energy source which is remotely beamed from a laser is described. An experimental study now partially complete is discussed which will eventually provide a detailed understanding of the physics for assessing the feasibility of using hydrogen plasmas for accepting and converting this energy to enthalpy. A plasma ignition scheme which uses a pulsed CO2 laser has been developed and the properties of the ignition spark documented, including breakdown intensities in hydrogen. A complete diagnostic system capable of determining plasma temperature and the plasma absorptivity for subsequent steady state absorption of a high power CO2 laser beam are developed and demonstrative use is discussed for the preliminary case study, a two atmosphere laser supported argon plasma.

Vanzandt, D. M.↗
NASA NTRS2003

Near-source and Remote Observations of Kilometric Continuum Radiation from Multispacecraft Observations

[I] Kilometric continuum (KC) radiation was first identified from Geotail plasma wave observations. Past authors have shown that this emission has a frequency range that overlaps that of the auroral kilometric radiation (AKR) but is characterized by a fine structure of narrow-bandwidth, linear features that have nearly constant or drifting frequency. This fine structure is distinct from that of AKR. KC also apparently has a distinct source region probably associated with the low-latitude inner magnetosphere, consistent with direction-finding and ray-tracing results. We present new high-resolution electric and magnetic field observations of KC obtained by the Polar plasma wave instrument in the near-source region. These observations show intense electrostatic and less intense electromagnetic emissions near the magnetic equator at the plasmapause. Simultaneously, Geotail, located at 20 to 30 RE in radial distance, observes KC in the same frequency range. These data support a possible mode-conversion source mechanism near a region of high-density gradient. High-resolution data obtained from wideband receivers on board both Polar and Cluster show closely spaced bands of emission near the magnetic equator that may be due to many nearby independent sources of EM emission perhaps associated with density fluctuations or cavities in the plasmasphere.

Menietti, J. D.↗
NASA NTRS1992

The Unified Radio and Plasma wave investigation

The scientific objectives of the Ulysses Unified Radio and Plasma wave (URAP) experiment are twofold: (1) the determination of the direction, angular size, and polarization of radio sources for remote sensing of the heliosphere and the Jovian magnetosphere and (2) the detailed study of local wave phenomena, which determine the transport coefficients of the ambient plasma. A brief discussion of the scientific goals of the experiment is followed by a comprehensive description of the instrument. The URAP sensors consist of a 72.5 m electric field antenna in the spin plane, a 7.5-m electric field monopole along the spin axis of a pair of orthogonal search coil magnetic antennas. The various receivers, designed to encompass specific needs of the investigation, cover the frequency range from dc to 1 MHz. A relaxation sounder provides very accurate electron density measurements. Radio and plasma wave observations are shown to demonstrate the capabilities and limitations of the URAP instruments: radio observations include solar bursts, auroral kilometric radiation, and Jovian bursts; plasma waves include Langmuir waves, ion acousticlike noise, and whistlers.

Stone, R. G.↗
NASA NTRS2020

NASA Next-Generation Sensing Technologies for Earth & Planetary Science

Dr. Ved Chirayath's seminar will highlight new sensing technologies and airborne platforms he is developing for Earth & Space Science as director of the NASA Silicon Valley Laboratory for Advanced Sensing. His talk will feature recent work on Fluid Lensing, the first remote sensing technology capable of imaging through ocean waves in 3D at sub-cm resolutions, MiDAR, a next-generation active hyperspectral remote sensing and optical communications instrument, airborne gas sensing of multipollutant combustion sources, and a plasma actuated unmanned aerial vehicle (UAV) that utilized high-voltage dielectric discharge devices to achieve the first plasma controlled flight in history.Fluid Lensing and the NASA FluidCam instrument have been used extensively to provide distortion-free 3D multispectral imagery from UAVs of shallow marine systems around the world. MiDAR is being deployed on aircraft and underwater remotely operated vehicles (ROVs) as a new method to remotely sense living and nonliving structures in extreme environments as an analog for future Ocean Worlds robotic exploration missions. Finally, Chirayath will present preliminary results from NeMO-Net, a supercomputer-based neural network that uses a citizen science video game for global multimodal coral reef benthic habitat mapping, fusing remote sensing data from Fluid Lensing, MiDAR, NASA's Earth Observing System, and commercial satellites, to better understand the present and past dynamics of shallow marine systems. Together, these maturing technologies present promising new ways in which to explore terrestrial, marine, and aerial systems on Earth, and, ultimately, aid in the search for extraterrestrial life within our solar system and beyond.

Chirayath, Ved↗
NASA NTRS1987

An experimental study of laser-supported plasmas for laser propulsion: Center director's discretionary fund project DFP-82-33

The rudiments of a rocket thruster, which receives its enthalpy from an energy source which is remotely beamed from a laser, is described. An experimental study, now partially complete, is discussed which will eventually provide a detailed understanding of the physics for assessing the feasibility of using hydrogen plasmas for accepting and converting this energy to enthalpy. A plasma ignition scheme which uses a pulsed CO2 laser was develped and the properites of the ignition spark documented, including breakdown intensities in hydrogen. A complete diagnostic system capable of determining plasma temperature and the plasma absorptivitiy for subsequent steady-state absorption of a high power CO2 laser beam are developed and demonstrative use is discussed for the preliminary case study, a two atmosphere laser supported argon plasma.

Eskridge, R. H.↗
NASA NTRS2004

X-ray Probes of Magnetospheric Interactions with Jupiter's Auroral zones, the Galilean Satellites, and the Io Plasma Torus

Remote observations with the Chandra X-ray Observatory and the XMM-Newton Observatory have shown that the Jovian system is a source of x-rays with a rich and complicated structure. The planet's polar auroral zones and its disk are powerful sources of x-ray emission. Chandra observations revealed x-ray emission from the Io Plasma Torus and from the Galilean moons Io, Europa, and possibly Ganymede. The emission from these moons is certainly due to bombardment of their surfaces of highly energetic protons, oxygen and sulfur ions from the region near the Torus exciting atoms in their surfaces and leading to fluorescent x-ray emission lines. Although the x-ray emission from the Galilean moons is faint when observed fiom Earth orbit, an imaging x-ray spectrometer in orbit around these moons, operating at 200 eV and above with 150 eV energy resolution, would provide a detailed mapping (down to 40 m spatial resolution) of the elemental composition in their surfaces. Here we describe the physical processes leading to x-ray emission fiom the surfaces of Jupiter's moons and the instrumental properties, as well as energetic ion flux models or measurements, required to map the elemental composition of their surfaces. We discuss the proposed scenarios leading to possible surface compositions. For Europa, the two most extreme are (1) a patina produced by exogenic processes such as meteoroid bombardment and ion implantation, and (2) upwelling of material fiom the subsurface ocean. We also describe the characteristics of X - m , an imaging x-ray spectrometer under going a feasibility study for the JIM0 mission, with the ultimate goal of providing unprecedented x-ray studies of the elemental composition of the surfaces of Jupiter's icy moons and Io, as well as of Jupiter's auroral x-ray emission.

Elsner, R. F.↗
NASA NTRS1991

The energetic ion signature of an O-type neutral line in the geomagnetic tail

An energetic ion signature is presented which has the potential for remote sensing of an O-type neutral line embedded in a current sheet. A source plasma with a tailward flowing Kappa distribution yields a strongly non-Kappa distribution after interacting with the neutral line: sharp jumps, or ridges, occur in the velocity space distribution function f(nu-perpendicular, nu-parallel) associated with both increases and decreases in f. The jumps occur when orbits are reversed in the x-direction: a reversal causing initially earthward particles (low probability in the source distribution) to be observed results in a decrease in f, while a reversal causing initially tailward particles to be observed produces an increase in f. The reversals, and hence the jumps, occur at approximately constant values of perpendicular velocity in both the positive nu parallel and negative nu parallel half planes. The results were obtained using single particle simulations in a fixed magnetic field model.

Martin, R. F., Jr.↗
NASA NTRS1995

Surface conversion techniques for low energy neutral atom imagers

This investigation has focused on development of key technology elements for low energy neutral atom imaging. More specifically, we have investigated the conversion of low energy neutral atoms to negatively charged ions upon reflection from specially prepared surfaces. This 'surface conversion' technique appears to offer a unique capability of detecting, and thus imaging, neutral atoms at energies of 0.01 - 1 keV with high enough efficiencies to make practical its application to low energy neutral atom imaging in space. Such imaging offers the opportunity to obtain the first instantaneous global maps of macroscopic plasma features and their temporal variation. Through previous in situ plasma measurements, we have a statistical picture of large scale morphology and local measurements of dynamic processes. However, with in situ techniques it is impossible to characterize or understand many of the global plasma transport and energization processes. A series of global plasma images would greatly advance our understanding of these processes and would provide the context for interpreting previous and future in situ measurements. Fast neutral atoms, created from ions that are neutralized in collisions with exospheric neutrals, offer the means for remotely imaging plasma populations. Energy and mass analysis of these neutrals provides critical information about the source plasma distribution. The flux of neutral atoms available for imaging depends upon a convolution of the ambient plasma distribution with the charge exchange cross section for the background neutral population. Some of the highest signals are at relatively low energies (well below 1 keV). This energy range also includes some of the most important plasma populations to be imaged, for example the base of the cleft ion fountain.

Quinn, J. M.↗
NASA NTRS2005

X-Ray Probes of Jupiter's Auroral Zones, Galilean Moons, and the Io Plasma Torus

Remote observations from the Earth orbiting Chandra X-ray Observatory and the XMM-Newton Observatory have shown the the Jovian system is a rich and complex source of x-ray emission. The planet's auroral zones and its disk are powerful sources of x-ray emission, though with different origins. Chandra observations discovered x-ray emission from the Io plasma torus and from the Galilean moons Io, Europa, and possibly Ganymede. The emission from the moons is due to bombardment of their surfaces by highly energetic magnetospheric protons, and oxygen and sulfur ions, producing fluorescent x-ray emission lines from the elements in their surfaces against an intense background continuum. Although very faint when observed from Earth orbit, an imaging x-ray spectrometer in orbit around the icy Galilean moons would provide a detail mapping of the elemental composition in their surfaces. Here we review the results of Chandra and XMM-Newton observations of the Jovian system and describe the characteristics of X-MIME, an imaging x-ray spectrometer undergoing study for possible application to future missions to Jupiter such as JIMO. X-MIME has the ultimate goal of providing detailed high-resolution maps of the elemental abundances of the surfaces of Jupiter's icy moons and Io, as well as detailed study of the x-ray mission from the Io plasma torus, Jupiter's auroral zones, and the planetary disk.

Elsner, R. F.↗
NASA NTRS1995

The solar wind in the third dimension

For many years, solar-wind physicists have been using plasma and field data acquired near the ecliptic plane together with data on the scintillation of radio sources and remote sensing of structures in the solar corona to estimate the properties of the high-latitude solar wind, Because of the highly successful Ulysses mission, the moment of truth is now here. This talk summarizes the principal differences between the high and low latitude solar winds at the declining phase of the solar-activity cycle and between the Ulysses observations and expectations.

Neugebauer, M.↗
NASA NTRS1995

The Solar Wind in the Third Dimension

For many years, solar-wind physicists have been using plasma and field data acquired near the ecliptic plane together with data on the scintillation of radio sources and remote sensing of structures in the solar corona to estimate the properties of the high-latitude solar wind. Because of the highly successful Ulysses mission, the moment of truth is now here. This talk summarizes the principal differences between the Ulysses observations and expectations.

Solar↗