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At least 19 records

Irradiation-induced Degradation of Surface Acoustic Wave Devices Fabricated on Bulk AlN

Here, recent work to evaluate the prospects for surface acoustic wave (SAW) devices fabricated on bulk aluminum nitride (AlN) for elevated temperature and radiation environments is reported and discussed. The design and fabrication of an array of SAW devices using commercial wafers is described, including the non-standard fabrication approach taken to overcome the stress-induced warpage of the 50 mm diameter AlN substrates. Radio frequency performance characterization of the SAW devices, with resonance frequencies ranging from 0.5 GHz to 1.5 GHz, is described. The linear temperature coefficient of frequency (TCF) near room temperature was measured and is compared to theoretical results from other investigators. Further, the effects of 8 MeV Al ion irradiation at 300°C and 500°C to damage levels of 0.01, 0.1 and 1 displacements per atom (dpa), as a proxy for neutron irradiation, was investigated. The ion irradiation damage was observed to decrease the SAW resonant frequency, and this effect is characterized and discussed. Significant degradation in the conductivity of the Ti/Al electrodes of the SAW devices was also observed and characterized. These experimental results provide a basis for further investigation of the prospects for development of SAW sensor devices in bulk AlN material for application in elevated temperature and radiation environments.

36 MATERIALS SCIENCE↗

Sensitivity measurements for a 250 MHz quartz shear-horizontal surface acoustic wave biosensor under liquid viscous loading

Surface acoustic wave (SAW) devices have been used in biochemical assays due to their high sensitivity. The device sensitivity is a function of changes in the density and viscosity of the liquid. Here, we studied the effect of fluid viscosity using a 250 MHz quartz shear-horizontal (SH)-SAW biosensor by monitoring different concentrations of binary aqueous/glycerol solutions. In this study, the sensitivity of the biosensor was determined by fitting the data to models derived from perturbation theory. Measurements in water were used as the reference. For a 0% to 50% glycerol solution, an 87°–204° separation in the phase shift was observed. The slope of the plot of the phase shift vs (ηρ)0.5 was used to indicate the sensor’s sensitivity. The sensitivity for our 250 MHz quartz SH-SAW sensors was calculated to be 3.7×10−3m2sKg. The corresponding mass sensitivity was determined to be 9.25 × 105m2Kg. The limit of detection was calculated to be 36 picograms (pg), while the limit of quantification or LOQ was calculated to be 109 pg. Traditionally, liquid phase measurements have been challenging for SAW devices because liquids dampen the vibrating sensors severely. This problem has been largely solved using a transverse (shear) wave instead of the more popular longitudinal or Rayleigh waves. Liquid measurements are now possible using transverse waves, also known as shear waves, because transverse waves are only minimally attenuated by liquids. Shear-horizontal SAW sensors (SH-SAW) show great promise as label-free biosensors because of their ability to handle liquid samples. However, the viscosity of the liquid still induces loading effects and can be measured when the liquid is loaded onto the SH-SAW propagating surface (delay line). When the liquid above the delay line is perturbed by physical or chemical changes, such as binding to a receptor, it alters the propagating acoustic wave. The SH-SAW device can measure these changes in liquid properties as a change in the wave’s phase compared to the original wave. The device’s phase shift was recorded as a function of the changes in the density and viscosity of the binary glycerol solution and used to determine the sensitivity in the linear dynamic range of responses.

Materials Science↗

Remotely powered line monitor

Improved devices, apparatuses, systems, and methods involving the use of field probes with voltage-controlled variable impedance elements and surface-launched acoustic wave devices, including surface acoustic wave (SAW) devices and SAW sensor-tag wireless interface devices to measure voltage and current in current carrying conductors (CCCs) via measurement of the electric fields and magnetic fields around said CCCs are disclosed. The devices, apparatuses, systems, and methods taught in the present invention include a remotely powered line-mounted measurement unit that requires no connection to electrical ground for operation, and that has no internal energy source, no energy harvesting or power conditioning circuitry, no discrete energy storage components, and no radio. The devices, apparatuses, systems, and methods taught in the present invention also provide for determining the phase (leading or lagging) of the current relative to the voltage in AC power systems, and also provide for measurement of temperature of the conductor.

24 POWER TRANSMISSION AND DISTRIBUTION↗

Link Budget Analysis of Interrogation of Surface Acoustic Wave Sensors in Metallic Tubular Structures

We report on loss mechanisms contributing to the link budget for interrogation of Surface Acoustic Wave (SAW) devices in metallic tubular structures. Impedance matching losses associated with a SAW device are minimized by design optimization and antenna coupling losses, and resulting propagation losses are measured in metallic tubular structures enabling prediction of interrogation distances with various antenna configurations.

Pingree, Richard↗

Link Budget Analysis of Interrogation of Surface Acoustic Wave Sensors in Metallic Tubular Structures

For presentation at, and publication in the proceedings of, the National Radio Science Meeting, Boulder, CO, January 9-13, 2024.In this paper, we report on loss mechanisms contributing to the link budget for interrogation of Surface Acoustic Wave (SAW) devices in metallic tubular structures. Impedance matching losses associated with a SAW device are minimized by design optimization and antenna coupling losses and resulting propagation losses are measured in metallic tubular structures enabling prediction of interrogation distances with various antenna configurations.

Pingree, Rick↗

Aerosol jet printing of piezoelectric surface acoustic wave thermometer

Abstract Surface acoustic wave (SAW) devices are a subclass of micro-electromechanical systems (MEMS) that generate an acoustic emission when electrically stimulated. These transducers also work as detectors, converting surface strain into readable electrical signals. Physical properties of the generated SAW are material dependent and influenced by external factors like temperature. By monitoring temperature-dependent scattering parameters a SAW device can function as a thermometer to elucidate substrate temperature. Traditional fabrication of SAW sensors requires labor- and cost- intensive subtractive processes that produce large volumes of hazardous waste. This study utilizes an innovative aerosol jet printer to directly write consistent, high-resolution, silver comb electrodes onto a Y-cut LiNbO 3 substrate. The printed, two-port, 20 MHz SAW sensor exhibited excellent linearity and repeatability while being verified as a thermometer from 25 to 200 ∘ C. Sensitivities of the printed SAW thermometer are $$-96.9\times 1{0{}^{-6}}^{\circ }$$ − 96.9 × 1 0 − 6 ∘ C −1 and $$-92.0\times 1{0{}^{-6}}^{\circ }$$ − 92.0 × 1 0 − 6 ∘ C −1 when operating in pulse-echo mode and pulse-receiver mode, respectively. These results highlight a repeatable path to the additive fabrication of compact high-frequency SAW thermometers.

46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND ↗

Enhancement of Photoemission on p-Type GaAs Using Surface Acoustic Waves

We demonstrate that photoemission properties of p-type GaAs can be altered by surface acoustic waves (SAWs) generated on the GaAs surface due to dynamical piezoelectric fields of SAWs. Multiphysics simulations indicate that charge-carrier recombination is greatly reduced, and electron effective lifetime in p-doped GaAs may increase by a factor of 10× to 20×. It implies a significant increase, by a factor of 2× to 3×, of quantum efficiency (QE) for GaAs photoemission applications, like GaAs photocathodes. Conditions of different SAW wavelengths, swept SAW intensities, and varied incident photon energies were investigated. Essential steps in SAW device fabrication on a GaAs substrate are demonstrated, including deposition of an additional layer of ZnO for piezoelectric effect enhancement, measurements of current–voltage (I–V) characteristics of the SAW device, and ability to survive high-temperature annealing. Results obtained and reported in this study provide the potential and basis for future studies on building SAW-enhanced photocathodes, as well as other GaAs photoelectric applications.

37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CH↗

An Impedance-Loaded Surface Acoustic Wave Corrosion Sensor for Infrastructure Monitoring

Passive surface acoustic wave (SAW) devices are attractive candidates for continuous wireless monitoring of corrosion in large infrastructures. However, acoustic loss in the aqueous medium and limited read range usually create challenges in their widespread use for monitoring large systems such as oil and gas (O&G) pipelines, aircraft, and processing plants. This paper presents the investigation of impedance-loaded reflective delay line (IL-RDL) SAW devices for monitoring metal corrosion under O&G pipeline-relevant conditions. Specifically, we studied the effect of change in resistivity of a reflector on the backscattered signal of an RDL and investigated an optimal range through simulation. This was followed by the experimental demonstrations of real-time monitoring of Fe film corrosion in pressurized (550 psi) humid CO 2 conditions. Additionally, remote monitoring of Fe film corrosion in an acidic solution inside a 70 m carbon steel pipe was demonstrated using guided waves. This paper also suggests potential ways to improve the sensing response of IL-RDLs.

47 OTHER INSTRUMENTATION↗

Gas sensor and method of optimizing an array of gas sensors

A gas sensor (100,200) includes at least one sensor device including a surface acoustic wave (SAW) device (110) or a quartz crystal microbalance (QCM) device (210), and a layer of metal organic framework (MOF) material (120,220) disposed on each of the at least one sensor device. The at least one sensor device is structured to sense a change in mass of the MOF material.

Wilmer, Christopher E.↗

Thermal Modulation of Gigahertz Surface Acoustic Waves on Lithium Niobate

Surface-acoustic-wave (SAW) devices have a wide range of applications in microwave signal processing. Microwave SAW components benefit from higher quality factors and much smaller crosstalk when compared to their electromagnetic counterparts. Efficient routing and modulation of SAWs are essential for building large-scale and versatile acoustic wave circuits. Here, we demonstrate integrated thermoacoustic modulators using two SAW platforms: bulk lithium niobate and thin-film lithium niobate on sapphire. In both approaches, the gigahertz-frequency SAWs are routed by integrated acoustic waveguides, while on-chip microheaters are used to locally change the temperature, and thus, control the phase of the SAW. Using this approach, we achieve phase changes of over 720° with the responsibility of 2.6°/mW for bulk lithium niobate and 0.52°/mW for lithium niobate on sapphire. Furthermore, we demonstrate amplitude modulation of SAWs using acoustic Mach-Zehnder interferometers. Our thermoacoustic modulators can enable reconfigurable acoustic signal processing for next-generation wireless communications and microwave systems.

42 ENGINEERING↗

Removal of Non-Specifically Bound Proteins Using Rayleigh Waves Generated on ST-Quartz Substrates

Label-free biosensors are plagued by the issue of non-specific protein binding which negatively affects sensing parameters such as sensitivity, selectivity, and limit-of-detection. In the current work, we explore the possibility of using the Rayleigh waves in ST-Quartz devices to efficiently remove non-specifically bound proteins via acoustic streaming. A coupled-field finite element (FE) fluid structure interaction (FSI) model of a surface acoustic wave (SAW) device based on ST-Quartz substrate in contact with a liquid loading was first used to predict trends in forces related to SAW-induced acoustic streaming. Based on model predictions, it is found that the computed SAW body force is sufficient to overcome adhesive forces between particles and a surface while lift and drag forces prevent reattachment for a range of SAW frequencies. We further performed experiments to validate the model predictions and observe that the excitation of Rayleigh SAWs removed non-specifically bound (NSB) antigens and antibodies from sensing and non-sensing regions, while rinsing and blocking agents were ineffective. An amplified RF signal applied to the device input disrupted the specific interactions between antigens and their capture antibody as well. ST-quartz allows propagation of Rayleigh and leaky SH-SAW waves in orthogonal directions. Thus, the results reported here could allow integration of three important biosensor functions on a single chip, i.e., removal of non-specific binding, mixing, and sensing in the liquid phase.

59 BASIC BIOLOGICAL SCIENCES↗

Low-phase-noise surface-acoustic-wave oscillator using an edge mode of a phononic band gap

Low-phase-noise microwave-frequency integrated oscillators provide compact solutions for various applications in signal processing, communications, and sensing. Surface acoustic waves (SAWs), featuring orders-of-magnitude shorter wavelength than electromagnetic waves at the same frequency, enable integrated microwave-frequency systems with much smaller footprint on chip. SAW devices also allow higher-quality (Q) factors than electronic components at room temperature. Here, we demonstrate a low-phase-noise gigahertz-frequency SAW oscillator on 128°Y-cut lithium niobate, where the SAW resonator occupies a footprint of 0.05 mm 2 . Leveraging phononic crystal band-gap-edge modes to balance between Q factors and insertion losses, our 1-GHz SAW oscillator features a low phase noise of -132.5 dBc/Hz at a 10-kHz offset frequency and an overlapping Hadamard deviation of 6.5 × 10 -10 at an analysis time of 64 ms. The SAW resonator-based oscillator holds high potential in developing low-noise sensors and acousto-optic integrated circuits.

42 ENGINEERING↗

Multiphysics modeling of printed surface acoustic wave thermometers

Surface acoustic wave (SAW) transducers are a class of sensors and actuators that operate on the fundamental principle of piezoelectricity. Aerosol jet printing and other additive manufacturing techniques have resulted in the low-cost fabrication of low-power and small-footprint SAW devices that are suitable for sensing in high-temperature and radioactive environments. In this work, we developed a series of temperature-dependent finite element models for a SAW transducer consisting of printed silver interdigitated transducers (IDTs) deposited onto piezoelectric lithium niobate. Modeling accuracy was evaluated experimentally from room temperature to 200 °C using an aerosol-jet-printed SAW thermometer. A time-domain study enabled visualization of the wave propagation and successfully guided the denoising of the scattering parameter measurement. Additionally, frequency-domain models using traditional modal analysis or the unique port boundary condition feature in COMSOL Multiphysics accurately predicted the temperature-driven natural frequency drift in the SAW thermometer. The finite element models developed in this study serve to facilitate the computer-aided design of future SAW transducers for applications in harsh environments.

47 OTHER INSTRUMENTATION↗

Overcoming the Intrinsic Limitations of Fast Charging Lithium‐Ion Batteries Using Integrated Acoustic Streaming

A lithium‐ion battery's maximum charge rate and energy density are intrinsically limited by the ion diffusion rate in the electrolyte. Most research focuses on materials science solutions to this problem, with gradual improvement over the years. A mechanical solution is proposed to integrate an MHz‐order frequency surface acoustic wave (SAW) device into an existing 1.8 Ah multilayered Li‐ion pouch cell to enhance the ion diffusion rate and the overall battery performance. Both the charging rate and cycling lifetime are improved from SAW. At a 6C (10 min) charge and C/3 discharge rate, typical of electric vehicle applications, integrating SAW into the Li‐ion cell doubles the energy density and maintains at least 72% of the battery's initial capacity after 2000 cycles. Moreover, using SAW quantifiably reduces battery degradation in these conditions as determined by optical imaging, scanning electron microscopy, X‐ray diffraction, and neutron diffraction. The use of SAW appears to offer a method to avoid undesirable Li metal plating on the graphite anode during charging, and leads to a much longer battery lifetime and good charge capacity, all despite rapid charging.

Huang, An↗

An 860 MHz Wireless Surface Acoustic Wave Sensor with a Metal-Organic Framework Sensing Layer for CO2 and CH4

Wireless and passive surface acoustic wave (SAW) devices with nanoporous metal-organic framework (MOF) sensing layers are attractive gas sensors for applications in many fields such as energy industries and air pollution control. Here, we report on enhancing the sensitivity and detection limit of zeolitic imidazolate framework-8 (ZIF-8) MOF-coated SAW reflective delay line mass sensors by increasing the operating frequency for sensitive detection of carbon dioxide (CO2) and methane (CH4) at ambient conditions. In particular, we show at least four times higher sensitivity of an 860 MHz (4-μm periodicity) SAW reflective delay line coated with a 240 nm thick ZIF-8 compared to the sensitivity of a 430 MHz (8-μm periodicity) otherwise identical sensor device to the targeted gases. The detection limits of the higher frequency wireless devices for CO2 and CH4 were estimated to be 0.91 vol-% and 7.01 vol-%, respectively. The enhanced sensitivity for higher frequency devices is explained in terms of the frequency dependent acoustic wave energy confinement.

Devkota, Jagannath↗

Correlation of Surface Acoustic Wave (SAW) force myography sensor output with elbow joint torque

Accurate assessment of skeletal muscle forces and net joint torque is essential for preventing fatigue-related injuries, optimizing physical training, and monitoring disease progression in neuromuscular conditions. However, existing joint torque evaluation techniques are hindered by limited portability and high operational costs, confining their use to controlled laboratory or clinical settings. Despite substantial advances in wearable joint torque estimation systems, ongoing challenges such as power constraints, bulky wired setups, and susceptibility to environmental or motion artifacts underscore the urgent need for truly batteryless, wireless solutions deployable in real-world settings. This paper proposes a novel surface acoustic wave (SAW)-based force myography (FMG) system for noninvasive measurement of joint torque, validated against a gold-standard electromechanical dynamometer. The approach uses a single SAW sensor embedded in an armband to detect volumetric biceps brachii changes, with a second-order polynomial mapping sensor output and elbow angle to torque. Seven participants were tested in both isometric (15°–90°) and isokinetic (10°/s and 20°/s) supinated elbow flexion tasks. Under isometric conditions, subject-specific calibration achieved a normalized root-mean-square error (NRMSE) of 13.6% ± 6.0% and R 2 = 0.834 ± 0.180, while a group-level model yielded 14.4% ± 6.8% and 0.808 ± 0.208, respectively. For isokinetic trials, the group model produced an NRMSE of 24.1% ± 6.6% at 10°/s and 24.9% ± 08.9% at 20°/s, highlighting the feasibility of using a single-sensor SAW-FMG setup across different speeds. Because SAW devices support wireless, battery-free operation, the proposed system offers a pathway to portable, real-time monitoring for sports medicine, rehabilitation, and clinical diagnostics.

36 MATERIALS SCIENCE↗

Static Strain Modelling, Calibration, and Measurements for High-Temperature Wireless SAW Resonator Operation

Static strain measurements are relevant for Integrated System Health Monitoring of civil structures, aircrafts, power plants and advanced manufacturing equipment, with implications for safety, process efficiency, and maintenance costs. Wireless strain sensing is highly desirable where the presence of wires poses significant safety concerns, increases maintenance, and thus overall costs, or where they are not feasible, such as in applications which contain moving parts. This paper presents wireless interrogation of surface acoustic wave resonators (SAWRs) fabricated on langasite (LGS) along Euler angles (0°, 138.5°, 32.9°) and aimed at the detection of static strain at hightemperature (HT, above 100°C). Both commercial HT strain gauges and finite element analysis (FEA Abaqus software) were used and compared for SAWR strain calibration from room temperature (RT) to HT. In addition, this work investigated a compromise between high temperature operation vs. sensitivity based on the thickness of ceramic adhesive used. For instance, a reduction in the adhesive thickness from about 150 μm to 135 μm, resulted in a 39% increase in sensitivity at RT. It was also observed that the sensitivity dropped up to 34% from RT to 200°C. Furthermore, wireless operation, calibration, and increase in sensitivity constitute important advances in the use of LGS SAW devices to monitor static stress in high-temperature harsh environments.

42 ENGINEERING↗

Conducting metal oxides integrated with the surface acoustic wave (SAW) sensor platform

One or more embodiments relates a single port surface acoustic wave sensor (SAW) device adapted for use in a wide range of operational temperatures and gas phase chemical species. The device includes a piezoelectric crystal substrate; at least one interdigitated electrode/transducer (IDT) positioned on the piezoelectric crystal substrate; and at least one conducting metal oxide film positioned on the piezoelectric crystal substrate and in communication with at least the IDT.

Ohodnicki, Jr., Paul R.↗