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Results for “VACUUM GAUGE”

Search indexed NASA NTRS and DOE OSTI research on propulsion, heat transfer, battery materials and energy systems. Follow report and document links to the original sources.

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At least 19 records
All sourcesNASA NTRSDOE OSTI
NASA NTRS2008

Carbon Nanotube Vacuum Gauges Utilizing Long, Dissipative Tubes

CNT Vacuum Gauges: a) have a broad range of pressure response from 760 - 10(exp -6) Torr. b) have current changes approx. 100's nA in high vacuum regime (10(exp -6) Torr) and sensitivity increases with power and substrate removal. c) have a negative dR/dT (TCR negative) where a thermal hopping energy E(sub a) was determined to be approx. 40 meV. d) have compatible fabrication requirements for their integration with micromachined structures. e) can be operated at low power (nW - micro-W). f) have an active device region footprint of < 10 sq microns. g) are non-intrusive due to small size and passive operation.

nanotube sensors↗
NASA NTRS1990

Vacuum-Gauge Connection For Shipping Container

External connector enables measurement of vacuum in stored part. Remote-readout connector added to shipping container and connected to thermo-couple vacuum gauge in vacuum-insulated cryogenic line packed in container. Enables monitoring of condition of vacuum without opening container.

Henry, Robert H.↗
NASA NTRS2011

High-Sensitivity, Broad-Range Vacuum Gauge Using Nanotubes for Micromachined Cavities

A broad-range vacuum gauge has been created by suspending a single-walled carbon nanotube (SWNT) (metallic or semiconducting) in a Schottky diode format or in a bridge conductor format, between two electrically charged mesas. SWNTs are highly sensitive to molecular collisions because of their extremely small diameters in the range of 1 to 3 nanometers. The measurement parameter will be the change in conductivity of SWNT due to decreasing rate of molecular collisions as the pressure inside a chamber decreases. The rate of heat removal approaches a saturation limit as the mean free path (m.f.p.) lengths of molecules increase due to decreasing pressure. Only those sensing elements that have a long relaxation time can produce a measureable response when m.f.p. of molecules increases (or time between two consecutive collisions increases). A suspended SWNT offers such a capability because of its one-dimensional nature and ultrasmall diameter. In the initial approach, similar architecture was used as that of a SWNT-Schottky diode that has been developed at JPL, and has its changing conductivity measured as the test chamber is pumped down from atmospheric pressure to high vacuum (10(exp -7) Torr). Continuous response of decreasing conductivity has been measured as a function of decreasing pressure (SWNT is a negative thermal coefficient material) from atmosphere to less than 10(exp -6) Torr. A measureable current change in the hundreds of nA range has been recorded in the 10(exp -6) Torr regime.

Manohara, Harish↗
NASA NTRS2008

Low Power, Wide Dynamic Range Carbon Nanotube Vacuum Gauges

This slide presentation presents carbon nanotube vacuum pressure sensor gauges that operate at low power and exhibit a wide-dynamic range based on microelectromechanical systems (MEMS) technology. The fabrication facility, and the formation process are shown. Pressure sensitivity was found to increase rapidly as the bias power was increased. In addition, by etching part of the thermal SiO2 beneath the tubes and minimizing heat conduction through the substrate, pressure sensitivity was extended toward lower pressures. Results are compared to a conventional thin film meander resistor, which was fabricated and whose pressure response was also measured for comparative purposes.

JEOL E-beam aligner↗
NASA NTRS1973

Investigation of the sensitivity of ionization-type vacuum gauges

A quantitative analysis of a large and representative sample of available data has been made to determine the best criteria for predicting the relative sensitivities of ionization-type vacuum gauges to different gases. The molecular property of the gas that correlates best with relative sensitivity is the ionization cross section (eV). For high-pressure ionization gauges, a cross section evaluated at 2/3 of the accelerating potential of the gauge is the best choice. For Bayard-Alpert and triode gauges, any of three choices are of approximately equal value. These are 100 eV cross section values, maximum cross section value for each gas, and a cross section evaluated at 2/3 of the accelerating potential for each gauge. For the Alphatron gauge, cross section values in the range 5000-10,000 eV provide the best correlation.

Holanda, R.↗
NASA NTRS1967

Ultrahigh vacuum gauge having two collector electrodes

A gauge for measuring ultrahigh vacuums with great accuracy is described. It provides a means for ionizing the gas whose pressure is being measured, and consists of a collector electrode, a suppressor, radiation shielding, and a second collector.

Torney, F. L., Jr.↗