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Search indexed NASA NTRS and DOE OSTI research on propulsion, heat transfer, battery materials and energy systems. Follow report and document links to the original sources.
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Chemical etching for automatic processing of integrated circuits is discussed. The wafer carrier and loading from a receiving air track into automatic furnaces and unloading onto a sending air track are included.
Chemical vapor deposition for automatic processing of integrated circuits including the wafer carrier and loading from a receiving air track into automatic furnaces and unloading on to a sending air track is discussed. Passivation using electron beam deposited quartz is also considered.
Statistical methods for inventory boundary determination and data compression in automatic processing of multispectral scanner remote sensor earth observations from aircraft and spacecraft
A totally automated facility for semiconductor oxidation and diffusion was developed using a state-of-the-art diffusion furnace and high temperature grown oxides. Major innovations include: (1) a process controller specifically for semiconductor processing; (2) an automatic loading system to accept wafers from an air track, insert them into a quartz carrier and then place the carrier on a paddle for insertion into the furnace; (3) automatic unloading of the wafers back onto the air track, and (4) boron diffusion using diborane with plus or minus 5 percent uniformity. Processes demonstrated include Wet and dry oxidation for general use and for gate oxide, boron diffusion, phosphorous diffusion, and sintering.
Statistical decision theory for automatic classification of multiple spectral image points
Reviewing research on processing data from multispectral band scanners for agricultural applications
There are no author-identified significant results in this report.
There are no author-identified significant results in this report.
There are no author-identified significant results in this report.
There are no author-identified significant results in this report.
There are no author-identified significant results in this report.
Automatic data processing system for reduction of radiosonde data
Automatic data processing for photographic photometry in spectrographic analysis
Performance characteristics for automatic data processing equipment for ERTS
Automatic control systems and electric measurement of nonelectric quantities in data processing related to theoretical considerations, space flights, and production engineering
Automatic data processing system for pulse code modulation and pulse position modulation telemetry of sounding rockets
This study was undertaken with the intent of elucidating the forest mapping capabilities of ERTS-1 MSS data when analyzed with the aid of LARS' automatic data processing techniques. The site for this investigation was the Great Dismal Swamp, a 210,000 acre wilderness area located on the Middle Atlantic coastal plain. Due to inadequate ground truth information on the distribution of vegetation within the swamp, an unsupervised classification scheme was utilized. Initially pictureprints, resembling low resolution photographs, were generated in each of the four ERTS-1 channels. Data found within rectangular training fields was then clustered into 13 spectral groups and defined statistically. Using a maximum likelihood classification scheme, the unknown data points were subsequently classified into one of the designated training classes. Training field data was classified with a high degree of accuracy (greater than 95 percent), and progress is being made towards identifying the mapped spectral classes.