Nanostructured Material Sensor Processing Using Microfabrication Technology
This presentation discusses the fabrication of microsensors based based on nanomaterials and microfabrication technology. In particular, is it shown that nanostructured materials can be incorporated into standard micro fabrication techniques yielding improved alignment and electrical contact in a microsensor platform. A nano templating technique is also shown which provides sensor structures with unique properties.
chemical sensors nanostructures nanomaterials micr↗