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Structural Analysis of a Magnetically Actuated Silicon Nitride Micro-Shutter for Space Applications

Finite element models have been created to simulate the electrostatic and electromagnetic actuation of a 0.5gm silicon nitride micro-shutter for use in a spacebased Multi-object Spectrometer (MOS). The micro-shutter uses a torsion hinge to go from the closed, 0 degree, position, to the open, 90 degree position. Stresses in the torsion hinge are determined with a large deformation nonlinear finite element model. The simulation results are compared to experimental measurements of fabricated micro-shutter devices.

Loughlin, James P.↗

Iterative Magnetic/Structural Simulation of a MEMS Micro-shutter

A finite element model has been created that simulates the magnetic actuation of a cobalt-iron covered, 0.5micron thick, silicon nitride micro-shutter. The micro-shutter will be used as a transmissible filter in a space-based Multi-object Spectrograph (MOS). A laminated tri-pole permanent magnet is scanned across an array of shutters. The applied magnetic force twists the shutter's torsion hinge and actuates the shutter from the closed, 0 degree position, to the open, 90 degree position. A sequential analysis method was selected. This method uses the interaction between the magnetic and structural fields and is accomplished via the load vectors. The simulation results are compared to experimental measurements of fabricated micro-shutter devices.

Khaskia, Abed M.↗

Structural Analysis of a Magnetically Actuated Silicon Nitride Micro-Shutter for Space Applications

Finite element models have been created to simulate the electrostatic and electromagnetic actuation of a 0.5 micrometers silicon nitride micro-shutter for use in a spacebased Multi-object Spectrometer (MOS). The microshutter uses a torsion hinge to go from the closed, 0 degree, position, to the open, 90 degree position. Stresses in the torsion hinge are determined with a large deformation nonlinear finite element model. The simulation results are compared to experimental measurements of fabricated micro-shutter devices.

Loughlin, James P.↗

Reducing Stray Light To Characterize Nirspec Subsystems: The Focal Plane Array And Micro-Shutter Array

The James Webb Space Telescope (JWST) is an infrared, space-based telescope scheduled for launch in 2013. JWST includes four scientific instruments, including the Near Infrared Spectrometer (NIRSpec), which operates in the wavelength range from 0.6 to 5 microns. NASA/Goddard Space Flight Center (GSFC) is responsible for two NIRSpec subsystems: the detector subsystem, with its focal plane array (FPA), and the micro-shutter subsystem, with its micro-shutter array (MSA). The FPA is comprised of two side-by-side Rockwell Scientific HgCdTe 2kx2k detectors, with detectors and readout electronics optimized for low noise. The MSA is a GSFC developed micro-electro-mechanical system (MEMS) that serves as a programmable slit mask, allowing NIRSpec to obtain simultaneous spectra of >100 objects in a single field of view. We present the optical characterization test plan of the FPA. The test plan is driven by many requirements: cryogenic operating temperature, a flight-like beam shape, and multi-wavelength photon flux from 1 to 60,000 per second, thus low stray light is critical. We use commercial optical modeling software to predict stray light effects at the FPA. We also present the optical contrast test plan of the MSA. Since each individual shutter element operates in on/off fashion, the most important optical metric is contrast. The MSA structure is designed to minimize stray and scattered light, and the test setup reduces stray light such that the optical contrast requirement is met.

Connelly, Joseph A.↗

Some Aspects on the Mechanical Analysis of Micro-Shutters

An array of individually addressable micro-shutters is being designed for spectroscopic applications. Details of the design are presented in a companion paper. The mechanical design of a single shutter element has been completed. This design consists of a shutter blade suspended on a torsion beam manufactured out of single crystal silicon membranes. During operation the shutter blade will be rotated by 90 degrees out of the array plane. Thus, the stability and durability of the beams are crucial for the reliability of the devices. Structures were fabricated using focused ion beam milling in a FEI 620 dual beam machine, and subsequent testing was completed using the same platform. This allowed for short turn around times. We performed torsion and bending experiments to determine key characteristics of the membrane material. Results of measurements on prototype shutters were compared with the predictions of the numerical models. The data from these focused studies were used in conjunction with experiments and numerical models of shutter prototypes to optimize the design. In this work, we present the results of the material studies, and assess the mechanical performance of the resulting design.

Fettig, Rainer K.↗

Technological Developments of NexGen Micro-Shutter Array (NGMSA) for the Future Habitable Worlds Observatory (HWO) Flagship Mission

We present the most up to date advancements in production, design, and performance of the NexGen Micro-Shutter Array (NGMSA) for Multi-object Spectroscopy (MOS), intended for the future Habitable Worlds Observatory (HWO) Flagship. A microshutter array functions as a programmable slit mask, to generate slits corresponding to sparsely distributed sources in the field of view of a telescope. In contrast to the magnetic/electrostatic microshutter arrays used in the James Webb Space Telescope (JWST), the NGMSA is fully operated by electrostatics, simplifying overall system. Our small pilot array proved its capability from FORTIS sounding rocket mission in 2019. As we are switching to a larger HWO flight size array process, we encounter multiple processing related issues. Also, there has been individual shutter level issue that impairs operation and performance. We will discuss those problems and strategies to overcome the challenges to achieve an on/off contrast of >1e5 with near 100% shutter operability.

Microshutter↗

Testing Microshutter Arrays Using Commercial FPGA Hardware

NASA is developing micro-shutter arrays for the Near Infrared Spectrometer (NIRSpec) instrument on the James Webb Space Telescope (JWST). These micro-shutter arrays allow NIRspec to do Multi Object Spectroscopy, a key part of the mission. Each array consists of 62414 individual 100 x 200 micron shutters. These shutters are magnetically opened and held electrostatically. Individual shutters are then programmatically closed using a simple row/column addressing technique. A common approach to provide these data/clock patterns is to use a Field Programmable Gate Array (FPGA). Such devices require complex VHSIC Hardware Description Language (VHDL) programming and custom electronic hardware. Due to JWST's rapid schedule on the development of the micro-shutters, rapid changes were required to the FPGA code to facilitate new approaches being discovered to optimize the array performance. Such rapid changes simply could not be made using conventional VHDL programming. Subsequently, National Instruments introduced an FPGA product that could be programmed through a Labview interface. Because Labview programming is considerably easier than VHDL programming, this method was adopted and brought success. The software/hardware allowed the rapid change the FPGA code and timely results of new micro-shutter array performance data. As a result, numerous labor hours and money to the project were conserved.

Rapchun, David↗

Galaxy Evolution Spectroscopic Explorer: Scientific Rationale

GESE is a mission concept consisting of a 1.5-m space telescope and UV multi-object slit spectrograph designed to help understand galaxy evolution in a critical era in the history of the universe, where the rate of star-formation stopped increasing and started to decline. To isolate and identify the various processes driving the evolution of these galaxies, GESE will obtain rest-frame far-UV spectra of 100,000 galaxies at redshifts, z approximately 1-2. To obtain such a large number of spectra, multiplexing over a wide field is an absolute necessity. A slit device such as a digital micro-mirror device (DMD) or a micro-shutter array (MSA) enables spectroscopy of a hundred or more sources in a single exposure while eliminating overlapping spectra of other sources and blocking unwanted background like zodiacal light. We find that a 1.5-m space telescope with a MSA slit device combined with a custom orbit enabling long, uninterrupted exposures (approximately 10 hr) are optimal for this spectroscopic survey. GESE will not be operating alone in this endeavor. Together with x-ray telescopes and optical/near-IR telescopes like Subaru/Prime Focus Spectrograph, GESE will detect "feedback" from young massive stars and massive black holes (AGN's), and other drivers of galaxy evolution.

digital micro-mirror device (DMD)↗

SMD Technology Highlights

Seven technology highlights from the Science Mission Directorate (SMD) Astrophysics, Planetary Science, Heliophysics, and Biological and Physical Sciences, and Earth Science divisions are featured: 1. Technology using precisely controlled ultraviolet light source that to suppress electrostatic noise in gravitational wave observatories 2. New micro-shutter technology that will enable space telescopes to perform spectroscopy on a large number of objects simultaneously 3. An optical seismometer that is micro-fabricated, easy to manufacture, immune to radiation damage, and operates with low power consumption to characterize ice sheets and mantle on icy worlds 4. Rediscovering the lost art of fluxgate magnetometer cores 5. Innovative technology to measure muscle strength of worms in space to prepare astronauts for future missions 6. A new state-of-the-art sensor and satellite platform to enable continued monitoring of Earth’s radiant energy system 7. Novel Algorithms to merge ground- and space-based data to forecast air pollution events

ultraviolet↗

Fabrication of MEMS-Based Microshutter Arrays for Optical Transmission Selection

A MEMS-based programmable aperture mask is under development at the NASA Goddard Space Flight Center. Termed the Microshutter (u-shutter) Array, the device will be used to control the transmission of light, with both high efficiency and contrast, to a multi-object spectrometer on the James Webb Space Telescope. Fabrication of the p-shutter array employs several novel designs and processing techniques. The current generation of micro-shutters consists of 128x64 pixel arrays with unit cell dimensions of 100x200 microns. Shutters are patterned in silicon nitride and sit on a 100 micron silicon frame that is DRIE etched below each shutter. The front and back sides of the device are shown. A magnetic cobalt-iron alloy patterned on top of the shutter allows it to be actuated 90 degrees out-of-plane, into the frame, by an external magnetic field. An electrode on the shutter and a vertical electrode on the sidewall of the frame, approximately 90pm deep, allow them to be electrostatically latched in their rotated position. The vertical electrode is deposited and patterned on the backside of the frame in a single step using a directionally controlled evaporation. Individual addressing of shutters for electrostatic latching is accomplished via a crosspoint addressing scheme, with no on-chip active components. A portion of an array with shutters in the open, latched, and closed positions is shown. Light loss at shutter edges is minimized by an overhanging aluminum light-shield that is anchored to the frame. A photoresist sacrificial layer is used to raise the light-shield up and over the 2 micron gap that surrounds each pixel. After completion, arrays are subjected to life cycle, environmental and optical testing. Fabricated devices have survived 10(exp 6) actuation cycles at both room and cryogenic temperatures and a 14g rms launch-simulation test. Optical testing has shown contrast measurements between open and closed shutters up to 10000:1.

Lynch, Bernard A.↗

FEM and Multiphysics Applications at NASA/GSFC

FEM software available to the Mechanical Systems Analysis and Simulation Branch at Goddard Space Flight Center (GSFC) include: 1) MSC/Nastran; 2) Abaqus; 3) Ansys/Multiphysics; 4) COSMOS/M; 5) 'Home-grown' programs; 6) Pre/post processors such as Patran and FEMAP. This viewgraph presentation provides additional information on MSC/Nastran and Ansys/Multiphysics, and includes screen shots of analyzed equipment, including the Wilkinson Microwave Anistropy Probe, a micro-mirror, a MEMS tunable filter, and a micro-shutter array. The presentation also includes information on the verification of results.

Loughlin, James↗

Applications of ANSYS/Multiphysics at NASA/Goddard Space Flight Center

This viewgraph presentation reviews some of the uses that the ANSYS/Multiphysics system is used for at the NASA Goddard Space Flight Center. Some of the uses of the ANSYS system is used for is MEMS Structural Analysis of Micro-mirror Array for the James Web Space Telescope (JWST), Micro-shutter Array for JWST, MEMS FP Tunable Filter, AstroE2 Micro-calorimeter. Various views of these projects are shown in this presentation.

Loughlin, Jim↗

Radiation Test Results for a MEMS Microshutter Operating at 60 K

The James Webb Space Telescope (JWST), the successor to the Hubble Space Telescope, is due to be launched in 2013 with the goal of searching the very distant Universe for stars that formed shortly after the Big Bang. Because this occurred so far back in time, the available light is strongly red-shifted, requiring the use of detectors sensitive to the infrared portion of the electromagnetic spectrum. HgCdTe infrared focal plane arrays, cooled to below 30 K to minimize noise, will be used to detect the faint signals. One of the instruments on JWST is the Near Infrared Spectrometer (NIRSPEC) designed to measure the infrared spectra of up to 100 separate galaxies simultaneously. A key component in NIRSPEC is a Micro-Electromechanical System (MEMS), a two-dimensional micro-shutter array (MSA) developed by NASA/GSFC. The MSA is inserted in front of the detector to allow only the light from the galaxies of interest to reach the detector and to block the light from all other sources. The MSA will have to operate at 30 K to minimize the amount of thermal radiation emitted by the optical components from reaching the detector array. It will also have to operate in the space radiation environment that is dominated by the MSA will be exposed to a large total ionizing dose of approximately 200 krad(Si). Following exposure to ionizing radiation, a variety of MEMS have exhibited performance degradation. MEMS contain moving parts that are either controlled or sensed by changes in electric fields. Radiation degradation can be expected for those devices where there is an electric field applied across an insulating layer that is part of the sensing or controlling structure. Ionizing radiation will liberate charge (electrons and holes) in the insulating layers, some of which may be trapped within the insulating layer. Trapped charge will partially cancel the externally applied electric field and lead to changes in the operation of the MEMS. This appears to be a general principle for MEMS. Knowledge of the above principle has raised the concern at NASA that the MSA might also exhibit degraded performance because, i) each shutter flap is a multilayer structure consisting of metallic and insulating layers and ii) the movement of the shutter flaps is partially controlled by the application of an electric field between the shutter flap and the substrate (vertical support grid). The whole mission would be compromised if radiation exposure were to prevent the shutters from opening and closing properly. energetic ionizing particles. Because it is located A unique feature of the MSA is that, as outside the spacecraft and has very little shielding, previously mentioned, it will have to operate at temperatures near 30 K. To date, there are no published reports on how very low temperatures (- 30K) affect the response of MEMS devices to total ionizing dose. Experiments on SiO2 structures at low temperatures (80 K) indicate that the electrons generated by the ionizing radiation are mobile and will move rapidly under the application of an external electric field. Holes, on the other hand, that would normally move in the opposite direction through the SiO2 via a "thermal hopping" process, are effectively immobile at low electric fields as they are trapped close to their generation sites. However, for sufficiently large electric fields (greater than 3 MV/cm) holes are able to move through the SiO2. The larger the field, the more rapidly the holes move. The separation of the electrons and holes leads to a reduced electric field within the insulating layer. To overcome this reduction in electric field, a greater external voltage will have to be applied that alters the normal operation of the device. This report presents the results of radiation testing of the MSA at 60 K. The temperature was higher than the targeted temperature because of a faulty electrical interconnect on the test board. Specifically, our goal was to determine whether the MSA would function propey after a TID of 200 krad(Si).

Rapchun, David A.↗

Elastic Distribution of Microshutters, Measurements Obtainable on James Web Space Telescope

Spectrographic astronomy measurements in the near-infrared region will be done by functional two-dimensional microshutter arrays that are being fabricated at the NASA Goddard Space Flight Center for the James Webb Space Telescope (JWST). These micro-shutter arrays will represent the first mission-critical MEMS devices to be flown in space. JWST will use microshutter arrays to select focal plane object. 2-D programmable aperture masks of more than 200,000 elements select such space object. The use of silicon wafer material promises high efficiency and high contrast. Microshutter operation temperature is around 35K. Microshutter arrays are fabricated as close-packed silicon nitride membranes with a unit cell size of 105 x 204 micrometers. A layer of magnetic material is deposited onto each shutter. Individual shutters are equipped with a torsion flexure. Reactive ion etching (RIE) releases the shutters so they can open up to 90 degrees using the torsion flexure. Shutter rotation is initiated into a silicon support structure via an external magnetic field. Two electrically independent aluminum electrodes are deposited, one onto each shutter and another onto the support structure side-wall, permitting electrostatic latching and 2-D addressing to hold specific shutters open via external electronics.

Kletetschka, Gunther↗

Building the James Webb Space Telescope

The James Webb Space Telescope is the scientific successor to the Hubble and Spitzer Space Telescopes. It will be a large (6.6m) cold (50K) telescope launched into orbit around the second Earth-Sun Lagrange point. It is a partnership of NASA with the European and Canadian Space Agencies. JWST will make progress In almost every area of astronomy, from the first galaxies to form in the early universe to exoplanets and Solar System objects. Webb will have four instruments: The Near-Infrared Camera, the Near-Infrared multi-object Spectrograph, and the Near-Infrared Imager and Slitless Spectrograph will cover the wavelength range 0.6 to 5 microns, while the Mid-Infrared Instrument will do both imaging and spectroscopy from 5 to 28.5 microns. The observatory Is confirmed for launch in 2018; the design is complete and it is in its construction phase. Innovations that make JWST possible include large-area low-noise infrared detectors, cryogenic ASICs, a MEMS micro-shutter array providing multi-object spectroscopy, a non-redundant mask for interferometric coronagraphy and diffraction-limited segmented beryllium mirrors with active wavefront sensing and control. Recent progress includes the completion of the mirrors, the delivery of the first flight instruments and the start of the integration and test phase.

Gardner, Jonathan P.↗

UV Capabilities of the CETUS Multi-Object Spectrometer (MOS) and NUV/FUV Camera

The Cosmic Evolution Through UV Spectroscopy (CETUS) concept enables parallel observations by the UV multiobject spectrometer (MOS) and near-UV/far-UV camera which operate simultaneously but independently with their separate field of views. The near-UV MOS can target up to 100 objects at a time without confusion with nearby sources or background zodiacal light. This multiplexing will allow over 100,000 galaxies to be observed over a typical mission lifetime. The MOS includes a next-generation micro-shutter array (NGMSA), an efficient aspheric Offner-like spectrometer design with a convex grating, and nanotube light traps for suppressing unwanted wavelengths. The NUV/FUV Camera has the capability to image in a range of sub-bands from 115-400 nm at the same time the MOS is operating at 180-350 nm. The UV camera has a similar Offner-like relay, selectable filters, and two separate detectors to optimize observing in either the far-UV (115-175 nm) or the near-UV (180-400 nm) utilizing a CsI Micro-Channel Plate detector (MCP) and a CCD respectively.

The Cosmic Evolution Through UV Spectroscopy (CETU↗

Optical Design for CETUS a Wide-Field 1.5-m Aperture UV Payload Being Studied for a NASA Probe Class Mission Study

As part of a study funded by NASA headquarters, we are developing a probe-class mission concept called the Cosmic Evolution through UV Spectroscopy (CETUS). CETUS includes a 1.5-m aperture diameter telescope with a large field of view (FOV). CETUS includes three scientific instruments: a far ultraviolet (FUV) and near ultraviolet (NUV) imaging camera (CAM); a NUV multiobject spectrograph (MOS); and a dual-channel point/slit spectrograph (PSS) in the Lyman ultraviolet (LUV), FUV, and NUV spectral regions. The large FOV three-mirror anastigmatic (TMA) optical telescope assembly (OTA) simultaneously feeds the three separate scientific instruments. That is, the instruments view separate portions of the TMA image plane, enabling parallel operation by the three instruments. The field viewed by the MOS, whose design is based on an Offner-type spectrographic configuration to provide wide FOV correction, is actively configured to select and isolate numerous field sources using a next-generation micro-shutter array. The two-channel CAM design is also based on an Offner-like configuration. The PSS performs high spectral resolution spectroscopy on unresolved objects over the NUV region with spectral resolving power, R ~ 40,000, in an echelle mode. The PSS also performs long-slit imaging spectroscopy at R ~ 20,000 in the LUV and FUV spectral regions with two aberration-corrected, blazed, holographic gratings used in a Rowland-like configuration. The optical system also includes two fine guidance sensors, and wavefront sensors that sample numerous locations over the full OTA FOV. In-flight wavelength calibration is performed by a wavelength calibration system, and flat-fielding is also performed, both using in-flight calibration sources. We describe the current optical design of CETUS and the major trade studies leading to the design.

space sensors↗