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Search indexed NASA NTRS and DOE OSTI research on propulsion, heat transfer, battery materials and energy systems. Follow report and document links to the original sources.

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At least 19 records
All sourcesNASA NTRSDOE OSTI
NASA NTRS2005

Characterization of Unimorph-Membrane Microactuators and Error-Analysis of the Characterization Process

Microactuators are versatile, low-cost, low-mass electrical-mechanical devices that can be used in many applications. Microactuators consist of two electrodes sandwiching a PZT (piezo-electric) film between them. The centers of the microactuators deflect when a voltage is applied across the electrodes. In order to correctly apply this technology for use, it is important to fully characterize the actuation behavior. Measuring the deflection profile as a function of the voltage of various microactuators is crucial. This measurement process has errors associated with it, so it is being studied to determine the accuracy of the data. In certain applications, microactuators may undergo many cycles of deflection; testing various microactuators through many cycles of deflection simulates these circumstances. However, due to an unknown issue, many of the microactuators exhibit defects that cause them to fail when voltage is applied to their electrodes. These defects do not allow for the acquisition of significant deflection profiles. Vibrations are the largest cause of error in deflection measurements, and the microactuators withstand continuous cycles of deflection, yet the cause of damage is still to be determined. Future projects will be needed to characterize the deflection profiles of various microactuators and to overcome the defects in the microactuators that are currently present.

Wright, Matthew W.↗
NASA NTRS2010

Droplet microactuator system

The present invention relates to a droplet microactuator system. According to one embodiment, the droplet microactuator system includes: (a) a droplet microactuator configured to conduct droplet operations; (b) a magnetic field source arranged to immobilize magnetically responsive beads in a droplet during droplet operations; (c) a sensor configured in a sensing relationship with the droplet microactuator, such that the sensor is capable of sensing a signal from and/or a property of one or more droplets on the droplet microactuator; and (d) one or more processors electronically coupled to the droplet microactuator and programmed to control electrowetting-mediated droplet operations on the droplet actuator and process electronic signals from the sensor.

Pamula, Vamsee K.↗
NASA NTRS1993

Toward milli-Newton electro- and magneto-static microactuators

Microtechnologies can potentially push integrated electro- and magnetostatic actuators toward the regime where constant forces in the order of milli-Newton (or torques in the order of micro-Newton meter) can be generated with constant inputs within a volume of 1.0 x 1.0 x 0.02 mm with 'conventional' technology. 'Micro' actuators are, by definition, actuators with dimensions confined within a millimeter cube. Integrated microactuators based on electrostatics typically have force/torque in the order of sub-micro-Newton (sub-nano-Newton meter). These devices are capable of moving small objects at MHz frequencies. On the other hand, suppose we want to move a one cubic millimeter object around with 100 G acceleration; a few milli-Newton force will be required. Thus, milli-Newton microactuators are very desirable for some immediate applications, and it challenges micromechanical researchers to develop new process technologies, designs, and materials toward this goal.

Fan, Long-Sheng↗
NASA NTRS2008

Four-Point-Latching Microactuator

An experimental inchworm-type linear microactuator is depicted. This microactuator is a successor to one described in "MEMS-Based Piezoelectric/Electrostatic Inchworm Actuator" (NPO-30672), NASA Tech Briefs, Vol. 27, No. 6 (June 2003), page 68. Both actuators are based on the principle of using a piezoelectric transducer operated in alternation with electrostatically actuated clutches to cause a slider to move in small increments. However, the design of the present actuator incorporates several improvements over that of the previous one. The most readily apparent improvement is in geometry and, consequently, in fabrication: In the previous actuator, the inchworm motion was perpendicular to the broad faces of a flat silicon wafer on which the actuator was fabricated, and fabrication involved complex processes to form complex three-dimensional shapes in and on the wafer. In the present actuator, the inchworm motion is parallel to the broad faces of a wafer on which it is fabricated. The components needed to produce the in-plane motion are nearly planar in character and, consequently, easier to fabricate. Other advantages of the present design are described, including that the previous actuator contained two clutches (denoted 'holders' in the cited prior article), the present actuator contains four clutches. The operational sequence of the previous two-clutch actuator is similar. However, the two-clutch configuration is susceptible to tilt of the slider and a consequent large increase in drag. Hence, the primary operational advantages of the present four-point-latching design over the prior two-point-latching design are less drag and greater control robustness arising from greater stability of the orientation of the slider.

Toda, Risaku↗
NASA NTRS1996

The Role of Piezoceramic Microactuation for Future JPL Missions

The overall objective of the proposed effort is to develop a flexible microactuator based on tailored films of lead lanthanum zirconate titanate, PLZT (deposited on flexible substrates) and to demonstrate a multifold enhancement in its force/discplacement capabilities, compared to those of the current state-of-the-art actuators based on bulk ceramic materials.

microactuators flexible microactuators piezocerami↗
NASA NTRS1997

Optical Microactuation in Piezoceramics

Optically/electrically operable flexible film microactuators that can offer upto two orders higher efficiency of photonic to mechanical conversion compared to ceramic actuators are conceptualised.

Piezoceramics↗
NASA NTRS1998

Optical Microactuation in Piezoceramics

Optically/electrically operable flexible film microactuators that can offer up to two orders higher efficiency of photonic to mechanical conversion compared to ceramic actuators are conceptualized.

Piezoceramic↗
NASA NTRS1993

Microactuator production via high aspect ratio, high edge acuity metal fabrication technology

LIGA is a procession sequence which uses x-ray lithography on photoresist layers of several hundred micrometers to produce very high edge acuity photopolymer molds. These plastic molds can be converted to metal molds via electroplating of many different metals and alloys. The end results are high edge acuity metal parts with large structural heights. The LIGA process as originally described by W. Ehrfeld can be extended by adding a surface micromachining phase to produce precision metal parts which can be assembled to form three-dimensional micromechanisms. This process, SLIGA, has been used to fabricate a dynamometer on a chip. The instrument has been fully implemented and will be applied to tribology issues, speed-torque characterization of planar magnetic micromotors and a new family of sensors.

Guckel, H.↗
NASA NTRS1997

Design of a Minimum Surface-Effect Tendon-Based Microactuator for Micromanipulation

A piezoelectric (PZT) stack-based actuator was developed to provide a means of actuation with dynamic characteristics appropriate for small-scale manipulation. In particular, the design incorporates a highly nonlinear, large-ratio transmission that provides approximately two orders of magnitude motion amplification from the PZT stack. In addition to motion amplification, the nonlinear transmission was designed via optimization methods to distort the highly non-uniform properties of a piezoelectric actuator so that the achievable actuation force is nearly constant throughout the actuator workspace. The package also includes sensors that independently measure actuator output force and displacement, so that a manipulator structure need not incorporate sensors nor the associated wires. Specifically, the actuator was designed to output a maximum force of at least one Newton through a stroke of at least one millimeter. For purposes of small-scale precision position and/or force control, the actuator/sensor package was designed to eliminate stick-slip friction and backlash. The overall dimensions of the actuator/sensor package are approximately 40 x 65 x 25 mm.

Goldfarb, Michael↗
NASA NTRS1999

Scaling Laws of Microactuators and Potential Applications of Electroactive Polymers in MEMS

Besides the scale factor that distinguishes the various species, fundamentally biological muscles changes little between species, indicating a highly optimized system. Electroactive polymer actuators offer the closest resemblance to biological muscles, however besides the large actuation displacement these materials are falling short with regards to the actuation force. As improved materials are emerging it is becoming necessary to address key issues such as the need for effective electromechanical modeling and guiding parameters in scaling the actuators. In this paper, we will review the scaling laws for three major actuation mechanisms that are of relevance to micro electromechanical systems: electrostatic actuation, magnetic actuation, thermal bimetallic actuation, and piezoelectric actuation.

Liu, Chang↗
NASA NTRS2004

Electrochemical and Hydrodynamic Interferences on the Performances of an Oxygen Microsensor with Built-in Electrochemical Microactuator

A concept of novel electrochemical in situ self-calibration technique for an oxygen microsensor has been proposed to devise a convenient calibration method without an externally coupled apparatus. Systemic investigations on the influences of various electrochemical (pH) and hydrodynamic (solution stirring) conditions on the proposed microsensor performances are presented. The results suggest that: 1) The calibrating microenvironments can be manipulated with carefully engineered sensor designs and optimized generating signals; 2) The external oxygen permeable membrane is needed to minimize the electrochemical and hydrodynamic interferences.

Kim, Chang-Soo↗
NASA NTRS1996

Piezoceramic Microactuation for Robotic Space Exploration

From overview: Current approach for realization of small vehicles is evolutionary: through the miniaturization1 of existing wheeled/legged vehicles based on state of the art in miniature actuators and motors. However, such miniaturization does not lend itself to cost reduction concomitant with the size reduction because cost of the individual mobility components goes up by an order of magnitude or more for such miniature motors etc. which often need to be precisely hand assembled. An alternate approach with significant potential advantages, especially when traversing unusual and difficult terrain such as loose granular surfaes, is to imitate the mobility attributes of insects.

vehicles artificial insects advanced mobility↗
NASA NTRS2001

A-site- and/or B-site-modified PbZrTiO3 materials and (Pb, Sr, Ca, Ba, Mg) (Zr, Ti, Nb, Ta)O3 films having utility in ferroelectric random access memories and high performance thin film microactuators

A modified PbZrTiO.sub.3 perovskite crystal material thin film, wherein the PbZrTiO.sub.3 perovskite crystal material includes crystal lattice A-sites and B-sites at least one of which is modified by the presence of a substituent selected from the group consisting of (i) A-site substituents consisting of Sr, Ca, Ba and Mg, and (ii) B-site substituents selected from the group consisting of Nb and Ta. The perovskite crystal thin film material may be formed by liquid delivery MOCVD from metalorganic precursors of the metal components of the thin film, to form PZT and PSZT, and other piezoelectric and ferroelectric thin film materials. The thin films of the invention have utility in non-volatile ferroelectric memory devices (NV-FeRAMs), and in microelectromechanical systems (MEMS) as sensor and/or actuator elements, e.g., high speed digital system actuators requiring low input power levels.

Roeder, Jeffrey F.↗
NASA NTRS2004

A-SITE-AND/OR B-SITE-MODIFIED PBZRTIO3 MATERIALS AND (PB, SR, CA, BA, MG) (ZR, TI,NB, TA)O3 FILMS HAVING UTILITY IN FERROELECTRIC RANDOM ACCESS MEMORIES AND HIGH PERFORMANCE THIN FILM MICROACTUATORS

A modified PbZrTiO.sub.3 perovskite crystal material thin film, wherein the PbZrTiO.sub.3 perovskite crystal material includes crystal lattice A-sites and B-sites at least one of which is modified by the presence of a substituent selected from the group consisting of (i) A-site substituents consisting of Sr, Ca, Ba and Mg, and (ii) B-site substituents selected from the group consisting of Nb and Ta. The perovskite crystal thin film material may be formed by liquid delivery MOCVD from metalorganic precursors of the metal components of the thin film, to form PZT and PSZT, and other piezoelectric and ferroelectric thin film materials. The thin films of the invention have utility in non-volatile ferroelectric memory devices (NV-FeRAMs), and in microelectromechanical systems (MEMS) as sensor and/or actuator elements, e.g., high speed digital system actuators requiring low input power levels.

Roeder, Jeffrey F.↗