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Tuning of MEMS Devices using Evolutionary Computation and Open-loop Frequency Response

We propose a tuning method for MEMS gyroscopes based on evolutionary computation that has the capacity to efficiently increase the sensitivity of MEMS gyroscopes through tuning and, furthermore, to find the optimally tuned configuration for this state of increased sensitivity. The tuning method was tested for the second generation JPL/Boeing Post-resonator MEMS gyroscope using the measurement of the frequency response of the MEMS device in open-loop operation.

evolvable hardware↗

Evolutionary Computation Applied to the Tuning of MEMS Gyroscopes

We propose a tuning method for MEMS gyroscopes based on evolutionary computation to efficiently increase the sensitivity of MEMS gyroscopes through tuning and, furthermore, to find the optimally tuned configuration for this state of increased sensitivity. The tuning method was tested for the second generation JPL/Boeing Post-resonator MEMS gyroscope using the measurement of the frequency response of the MEMS device in open-loop operation.

evolvable hardware↗

Combining Multiple Gyroscope Outputs for Increased Accuracy

A proposed method of processing the outputs of multiple gyroscopes to increase the accuracy of rate (that is, angular-velocity) readings has been developed theoretically and demonstrated by computer simulation. Although the method is applicable, in principle, to any gyroscopes, it is intended especially for application to gyroscopes that are parts of microelectromechanical systems (MEMS). The method is based on the concept that the collective performance of multiple, relatively inexpensive, nominally identical devices can be better than that of one of the devices considered by itself. The method would make it possible to synthesize the readings of a single, more accurate gyroscope (a virtual gyroscope) from the outputs of a large number of microscopic gyroscopes fabricated together on a single MEMS chip. The big advantage would be that the combination of the MEMS gyroscope array and the processing circuitry needed to implement the method would be smaller, lighter in weight, and less power-hungry, relative to a conventional gyroscope of equal accuracy. The method (see figure) is one of combining and filtering the digitized outputs of multiple gyroscopes to obtain minimum-variance estimates of rate. In the combining-and-filtering operations, measurement data from the gyroscopes would be weighted and smoothed with respect to each other according to the gain matrix of a minimum- variance filter. According to Kalman-filter theory, the gain matrix of the minimum-variance filter is uniquely specified by the filter covariance, which propagates according to a matrix Riccati equation. The present method incorporates an exact analytical solution of this equation.

Bayard, David S.↗

Continuous Tuning and Calibration of Vibratory Gyroscopes

A method of control and operation of an inertial reference unit (IRU) based on vibratory gyroscopes provides for continuously repeated cycles of tuning and calibration. The method is intended especially for application to an IRU containing vibratory gyroscopes that are integral parts of microelectromechanical systems (MEMS) and that have cloverleaf designs, as described in several previous NASA Tech Briefs articles. The method provides for minimization of several measures of spurious gyroscope output, including zero-rate offset (ZRO), angle random walk (ARW), and rate drift. These benefits are afforded both at startup and thereafter during continuing operation, in the presence of unknown rotation rates and changes in temperature. A vibratory gyroscope contains a precision mechanically resonant structure containing two normal modes of vibration nominally degenerate in frequency and strongly coupled via a Coriolis term. In the case of the cloverleaf design MEMS gyro, these normal modes of vibration are plate rocking modes. The rocking motion of the plate is described by giving two angles, theta(sub 1) and theta(sub 2). A proof mass consisting of a post orthogonal to the plate ensures a high degree of Coriolis coupling of vibratory energy from one mode into the other under inertial rotation. The plate is driven and sensed capacitively across a few-microns-wide gap, and the normal mode frequencies can be tuned electrostatically by DC voltages applied across this gap. In order to sense rotation, the resonator plate is caused to rock in the theta(sub 1) direction, then any small motions in the theta(sub 2) direction are sensed, rebalanced, and interpreted as inertial rotation. In this scenario, the "drive" has been assigned to the theta(sub 1) direction, and the "sense" has been assigned to the theta(sub 2) direction.

Hayworth, Ken↗

Temperature Variation Analysis of the STIM300 Inertial Measurement Unit

A key navigation instrument found on most autonomous and semi-autonomous platforms is the inertial measurement unit (IMU). This type of sensor is a combination of microelectromechanical systems (MEMS) that provide inertial information to the navigation system. Typical MEMS hardware include a gyroscope and an accelerometer (for rates and accelerations, respectively) within a single platform. The Near Earth Asteroid (NEA) Scout mission, slated to launch in October of 2018 (Author’s note: NEA Scout ultimately launch on November 16, 2022), carries an on-board IMU from Sensonor. This particular model has yet to see spaceflight, and questions about its on-orbit reliability remain. Dynamic tests were produced in the summer of 2016 by a visiting faculty member from Arkansas Tech University, Daniel Bullock. During these experiments, concerns about the noise characteristics of the sensor were raised, specifically relating to how temperature fluctuations affected the unit. It was found that the IMU took an extended period of time before reaching an internal steady state temperature. These tests often displayed large temperature variations, making the calculation of noise characteristics, such as bias drift, difficult to attribute entirely to noise. Static and dynamic tests were re-performed under more stringent constraints on temperature. Tests reported herein conclude that the IMU is adequately capable of providing inertial information for the NEA Scout mission.

Ivan Rodrigues Bertaska↗

Making Precise Resonators for Mesoscale Vibratory Gyroscopes

An alternative approach to the design and fabrication of vibratory gyroscopes is founded on the use of fabrication techniques that yield best results in the mesoscopic size range, which is characterized by overall device dimensions of the order of a centimeter. This approach stands in contradistinction to prior approaches in (1) the macroscopic size range (the size range of conventional design and fabrication, characterized by overall device dimensions of many centimeters) and (2) the microscopic size range [the size range of microelectromechanical systems (MEMS), characterized by overall device dimensions of the order of a millimeter or less]. The mesoscale approach offers some of the advantage of the MEMS approach (sizes and power demands smaller than those of the macroscale approach) and some of the advantage of the macroscale approach (the possibility of achieving relative dimensional precision greater than that of the MEMS approach). Relative dimensional precision is a major issue in the operation of a vibratory gyroscope. The heart of a vibratory gyroscope is a mechanical resonator that is required to have a specified symmetry in a plane orthogonal to the axis about which rotation is to be measured. If the resonator could be perfectly symmetrical, then in the absence of rotation, a free vibration of the resonator could remain fixed along any orientation relative to its housing; that is, the gyroscope could exhibit zero drift. In practice, manufacturing imprecision gives rise to some asymmetry in mass, flexural stiffness or dissipation, resulting in a slight drift or beating motion of an initial vibration pattern that cannot be distinguished from rotation. In the mesoscale approach, one exploits the following concepts: For a given amount of dimensional error generated in manufacturing, the asymmetry and hence the rate-of-rotation drift of the gyroscope can be reduced by increasing the scale. The decrease in asymmetry also reduces coupling of vibrations to the external environment. Mechanical thermal noise and electronic measurement noise and drift can also be reduced by increasing the size of the resonator and its associated sensors.

Yang, Eui-Hyeok↗

Semiautonomous Avionics-and-Sensors System for a UAV

Unmanned Aerial Vehicles (UAVs) autonomous or remotely controlled pilotless aircraft have been recently thrust into the spotlight for military applications, for homeland security, and as test beds for research. In addition to these functions, there are many space applications in which lightweight, inexpensive, small UAVS can be used e.g., to determine the chemical composition and other qualities of the atmospheres of remote planets. Moreover, on Earth, such UAVs can be used to obtain information about weather in various regions; in particular, they can be used to analyze wide-band acoustic signals to aid in determining the complex dynamics of movement of hurricanes. The Advanced Sensors and Electronics group at Langley Research Center has developed an inexpensive, small, integrated avionics-and-sensors system to be installed in a UAV that serves two purposes. The first purpose is to provide flight data to an AI (Artificial Intelligence) controller as part of an autonomous flight-control system. The second purpose is to store data from a subsystem of distributed MEMS (microelectromechanical systems) sensors. Examples of these MEMS sensors include humidity, temperature, and acoustic sensors, plus chemical sensors for detecting various vapors and other gases in the environment. The critical sensors used for flight control are a differential- pressure sensor that is part of an apparatus for determining airspeed, an absolute-pressure sensor for determining altitude, three orthogonal accelerometers for determining tilt and acceleration, and three orthogonal angular-rate detectors (gyroscopes). By using these eight sensors, it is possible to determine the orientation, height, speed, and rates of roll, pitch, and yaw of the UAV. This avionics-and-sensors system is shown in the figure. During the last few years, there has been rapid growth and advancement in the technological disciplines of MEMS, of onboard artificial-intelligence systems, and of smaller, faster, and smarter wireless telemetry systems. The major attraction of MEMS lies in orders-of-magnitude reductions of power requirements relative to traditional electronic components that perform equivalent functions. In addition, the compactness of MEMS, relative to functionally equivalent traditional electronics systems, makes MEMS attractive for UAV applications. Recent advances in MEMS have made it possible to produce pressure, acceleration, humidity, and temperature sensors having masses in subgram range and possessing sensitivities and accuracies comparable to those of larger devices.

Shams, Qamar↗

Isolated post resonator mesogyroscope

A new symmetric vibratory gyroscope principle has been devised in which a central post proof mass is counter-rocked against an outer sensing plate such that the motion is isolated from the gyroscope case. Prototype gyroscopes have been designed and fabricated with micromachined silicon at mesoscale (20-cm resonator width), vs. microscale (e.g., 2-mm resonator width) to achieve higher sensitivity and machined precision. This novel mesogyro design arose out of an ongoing technical cooperation between JPL and Boeing begun in 1997 to advance the design of micro-inertial sensors for low-cost space applications. This paper describes the theory of operation of the mesogyro and relationships with other vibratory gyroscopes, the mechanical design, closed loop electronics design, bulk silicon fabrication and packaged gyroscope assembly and test methods. The initial packaged prototype test results are reported for what is believed to be the first silicon mesogyroscope.

mesogyroscope↗

A Highly Miniaturized Inertial Grade Gyroscope for Space Applications

The evolution of inertial grade gyroscopes for space applications represents well over 50 years of technology development and an investment of hundreds of millions of dollars. The workhorse product which represents the current state-of-the art for commercially available high performance devices is the Litton-Hemishperical Resonator Gyro (HRG) Inertial Measurement Unit (IMU). This product has a performance figure of merit of 0.003 deg/hr bias drift, a volume of 567 cubic inches, weighs 19 pounds, draws about 30 watts and costs over $1 million each. Clearly devices of this magnitude are not conducive to the minimized mass, volume, power, and cost constraints of outer planet missions. An approach to breaking these potential barriers is the use of Microelectromechanical Systems (MEMS) based inertial devices. Although substantially reduced in size, mass power and cost, this approach has produced devices in the tactical performance range of greater than 1 deg/hour bias drift. This level of performance satisfies the preponderance of high market volume requirements such as automotive and tactical munitions but does not meet the limited market quantity requirements for the high precision space based market. Because of the very limited size of the space based market, there is little economic incentive for commercial fabricators of tactical grade devices to address the necessary performance improvements. The Jet Propulsion Laboratory (JPL) in conjunction with Boeing Space Systems (BSS) is addressing this void to satisfy our mutual requirements in this area. The project objective to is to achieve 0.01 deg/hr performance in an IMU which is less than 10 cubic inches in volume, weighs less than 0.5 pounds, draws less than 1 watt and is available in volume production for less than $2500. Reductions of this magnitude will be mission enabling capabilities for a variety of anticipated outer planet mission attributes such as autonomous control and docking, formation flying and robotic outposts. The improved performance will be realized using improved relative precision fabrication, enhanced vibratory drive and sense designs, and statistical data analysis.

Wiberg, D. V.↗