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At least 19 records

Electron-Beam Deposition of Superconducting Molybdenum Thin Films for the Development of Mo/Au TES X-Ray Microcalorimeter

We are exploring the properties of electron-beam evaporated molybdenum thin films on silicon nitride coated silicon wafers at substrate temperatures between room temperature and 650 C. The temperature dependence of film stress, transition temperature, and electrical properties are presented. X-ray diffraction measurements are performed to gain information on molybdenum crystallite size and growth. Results show the dominant influence of the crystallite size on the intrinsic properties of our films. Wafer-scale uniformity, wafer yield, and optimal thermal bias regime for TES fabrication are discussed.

Microcalorimeter↗

Thin film molybdenum silicide as potential temperature sensors for turbine engines

Temperature measurements of Mo-Si-based thin-film resistance thermometers were studied. Annealing in an argon ambient at a temperature above 1000 C for at least 1 h is required to form the stable tetragonal MoSi2 phase. With a crack-free 2-micron-thick AlN barrier layer on top, a sensor was tested up to 1200 C. The resistivity vs temperature characteristic shows the room temperature resistivity and temperature coefficient of resistivity (TCR) of the sensor to be approximately 350 microohm and 0.01195 K, respectively. No film adhesion problems were observed for at least four testing cycles.

Ho, C. H.↗

Soft x ray optics by pulsed laser deposition

A series of molybdenum thin film depositions by PLD (Pulsed Laser Deposition) have been carried out, seeking appropriate conditions for multilayer fabrication. Green (532 nm) and UV (355 nm) light pulses, in a wide range of fluences, were used. Relatively large fluences (in comparison with Si) are required to cause evaporation of molybdenum. The optical penetration depths and reflectivities for Mo at these two wavelengths are comparable, which means that results should be, and do appear to be similar for equal fluences. For all fluences above threshold used, a large number of incandescent particles is ejected by the target (either a standard Mo sputtering target or a Mo sheet were tried), together with the plasma plume. Most of these particles are clearly seen to bounce off the substrate. The films were observed with light microscopy using Nomarski and darkfield techniques. There is no evidence of large debris. Smooth films plus micron-sized droplets are usually seen. The concentration of these droplets embedded in the film appears not to vary strongly with the laser fluence employed. Additional characterization with SEM and XRD is under way.

Fernandez, Felix E.↗

Alkali metal thermoelectric converter (AMTEC) electrode lifetime studies

Experimental studies are being conducted at JPL to identify long life, high area power density electrodes for AMTEC. Power versus time measurements are being made in a demountable electrode test cell and, for longer term experiments, a self-contained recirculating cell. The experimental apparatus and procedures are described in detail. The results show that thin film molybdenum electrodes can be designed to produce power near 0.5 W/sq cm for over two hundred hours. Also, platinum/tungsten electrodes exhibit power densities that are stable near 0.5 W/sq cm. If the performance of these electrodes is verified for longer periods (thousands of hours), then practical AMTEC systems will be possible.

Bankston, C. Perry↗

Alkali metal thermoelectric conversion (AMTEC) technology status review

AMTEC operating principles, technical problems, and recent electrode research results are briefly reviewed. The mechanisms responsible for the degradation of thin-film molybdenum electrodes are discussed, and four alternate high-power electrode compositions and morphologies are identified. Separate self-contained recirculating AMTEC cells have demonstrated 19-percent efficiency, 10,000 hr at high temperature, and multicell operation including series connection. Results of systems studies in the 0.5-100 kWe range indicate that AMTEC performance and operating characteristics make it a strong candidate for future space applications.

Bankston, C. P.↗

Physical properties of thin-film field emission cathodes with molybdenum cones

Field emission cathodes fabricated using thin-film techniques and electron beam microlithography are described, together with effects obtained by varying the fabrication parameters. The emission originates from the tip of molybdenum cones that are about 1.5 micron tall with a tip radius around 500 A. Such cathodes have been produced in closely packed arrays containing 100 and 5000 cones as well as singly. Maximum currents in the range 50-150 microamp per cone can be drawn. Life tests with the 100-cone arrays drawing 2 mA total emission (or 3 A per sq cm) have proceeded in excess of 7000 hr with about a 10% drop in emission current. Studies are presented of the emission characteristics and current fluctuation phenomena. It is tentatively concluded that the emission arises from only one or a few atomic sites on the cone tips.

Spindt, C. A.↗

Recent advances in Alkali Metal Thermoelectric Converter (AMTEC) electrode performance and modeling

The Alkali Metal Thermoelectric Converter (AMTEC) is a direct energy conversion device, utilizing a high sodium vapor pressure or activity ratio across a beta-double prime-alumina solid electrolyte (BASE). This paper describes progress on the remaining scientific issue which must be resolved to demonstrate AMTEC feasibility for space power systems: a stable, high power density electrode. Two electrode systems have recently been discovered at JPL that now have the potential to meet space power requirements. One of these is a very thin sputtered molybdenum film, less than 0.5 micron thick, with overlying current collection grids. This electrode has experimentally demonstrated stable performance at 0.4-0.5 W/sq cm for hundreds of hours. Recent modeling results show that at least 0.7 W/sq cm can be achieved. The model of electrode performance now includes all loss mechanisms, including charge transfer resistances at the electrode/electrolyte interface. A second electrode composition, cosputtered platinum/tungsten, has demonstrated 0.8 W/sq cm for 160 hours. Systems studies show that a stable electrode performance of 0.6 W/sq cm will enable high efficiency space power systems.

Bankston, C. P.↗

Improving the Visible and Infrared Contrast Ratio of Microshutter Arrays

Three device improvements have been developed that dramatically enhance the contrast ratio of microshutters. The goal of a microshutter is to allow as much light through as possible when the shutters are in the open configuration, and preventing any light from passing through when they are in the closed position. The ratio of the transmitted light that is blocked is defined here as the contrast ratio. Three major components contribute to the improved performance of these microshutters: 1. The precise implementation of light shields, which protect the gap around the shutters so no light can leak through. It has been ascertained that without the light shield there would be a gap on the order of 1 percent of the shutter area, limiting the contrast to a maximum of 100. 2. The precise coating of the interior wall of each microshutter was improved with an insulator and metal using an angle deposition technique. The coating prevents any infrared light that finds an entrance on the surface of the microshutter cell from being emitted from a sidewall. Since silicon is in effect transparent to any light with a wavelength longer than .1 micrometer, these coatings are essential to blocking any stray signals when the shutters are closed. 3. A thin film of molybdenum nitride (MoN) was integrated onto the surface of the microshutter blade. This film provides the majority of light blockage over the microshutter and also ensures that the shutter can be operated over a wide temperature range by maintaining its flatness. These improvements were motivated by the requirements dictated by the James Webb Space Telescope NIRSpec instrument. The science goals of the NIRSpec require observing some of the very faintest objects in a given field of view that also may contain some very bright objects. To observe the faint objects, the light from the bright objects - which could be thousands of times brighter - must be completely blocked. If a closed microshutter is even slightly transmissive, a very bright object will still transmit a small signal, which can be larger than a signal from a very faint object transmitted through an open shutter. Since this situation can completely corrupt the results, it was necessary that the closed shutters be able to attenuate light by at least a factor of 2,000. There currently exist four flight-quality microshutter arrays that have been fully or are currently undergoing testing and the results support that the three improvements described above have successfully led to contrast levels greater than 50,000 in over 99 percent of the microshutters at an operating temperature of 35 K. Applications for these high-contrast microshutters are in the photomask generation and stepper equipment used to make integrated circuits and microelectromechanical (MEMS) devices. Since microshutters are a reconfigurable optical element, their versatility in these industries provides an improvement over printed masks and fixed projection alignment systems.

Jhabvala, Murzy↗

Materials Development for Auxiliary Components for Large Compact Mo/Au TES Arrays

We describe our current fabrication process for arrays of superconducting transition edge sensor microcalorimeters, which incorporates superconducting Mo/Au bilayers and micromachined silicon structures. We focus on materials and integration methods for array heatsinking with our bilayer and micromachining processes. The thin superconducting molybdenum bottom layer strongly influences the superconducting behavior and overall film characteristics of our molybdenum/gold transition-edge sensors (TES). Concurrent with our successful TES microcalorimeter array development, we have started to investigate the thin film properties of molybdenum monolayers within a given phase space of several important process parameters. The monolayers are sputtered or electron-beam deposited exclusively on LPCVD silicon nitride coated silicon wafers. In our current bilayer process, molybdenum is electron-beam deposited at high wafer temperatures in excess of 500 degrees C. Identifying process parameters that yield high quality bilayers at a significantly lower temperature will increase options for incorporating process-sensitive auxiliary array components (AAC) such as array heat sinking and electrical interconnects into our overall device process. We are currently developing two competing technical approaches for heat sinking large compact TES microcalorimeter arrays. Our efforts to improve array heat sinking and mitigate thermal cross-talk between pixels include copper backside deposition on completed device chips and copper-filled micro-trenches surface-machined into wafers. In addition, we fabricated prototypes of copper through-wafer microvias as a potential way to read out the arrays. We present an overview on the results of our molybdenum monolayer study and its implications concerning our device fabrication. We discuss the design, fabrication process, and recent test results of our AAC development.

Finkbeiner, F. m.↗

High-Power Ion Thruster Technology

Performance data are presented for the NASA/Hughes 30-cm-diam 'common' thruster operated over the power range from 600 W to 4.6 kW. At the 4.6-kW power level, the thruster produces 172 mN of thrust at a specific impulse of just under 4000 s. Xenon pressure and temperature measurements are presented for a 6.4-mm-diam hollow cathode operated at emission currents ranging from 5 to 30 A and flow rates of 4 sccm and 8 sccm. Highly reproducible results show that the cathode temperature is a linear function of emission current, ranging from approx. 1000 C to 1150 C over this same current range. Laser-induced fluorescence (LIF) measurements obtained from a 30-cm-diam thruster are presented, suggesting that LIF could be a valuable diagnostic for real-time assessment of accelerator-arid erosion. Calibration results of laminar-thin-film (LTF) erosion badges with bulk molybdenum are presented for 300-eV xenon, krypton, and argon sputtering ions. Facility-pressure effects on the charge-exchange ion current collected by 8-cm-diam and 30-cm-diam thrusters operated on xenon propellant are presented to show that accel current is nearly independent of facility pressure at low pressures, but increases rapidly under high-background-pressure conditions.

Beattie, J. R.↗

Component test results from the bearing life improvement program for the Space Shuttle Main Engine oxidizer turbopumps

Interim results from a component test program to improve ball bearing life in the Space Shuttle Main Engine oxygen turbopumps are presented. Two specific bearing applications, using liquid oxygen as the bearing coolant, are addressed. The first, the thrust bearing of the low pressure pump, operates at relatively slow speed with predominantly axial load and little temperature rise in the bulk coolant. Testing has demonstrated a very significant reduction in bearing wear by increasing the bearing internal clearance. Heat generation data was obtained that indicates heavy, intermittent cage-to-ball contact occurs, providing a possible explanation for the observed wear. The second application is the turbine end bearings of the high pressure pump. These bearings operate at high speed and load with the possibility of significant coolant vaporization. Tests on production bearings and bearings having modified internal clearance and curvature yielded scattered but generally poor lives. A dramatic improvement was achieved by coating the standard cage with a thin film of fluorinated ethylene propylene and 15 percent molybdenum disulfide. Very promising results have also been obtained by replacing the standard balls with ones made of silicon nitride, especially in combination with the coated cage.

Keba, John E.↗

Efficient solar cells by space processing

Thin films of electron beam evaporated silicon were deposited on molybdenum, tantalum, tungsten and molybdenum disilicide under ultrahigh vacuum conditions. Mass spectra from a quadrapole residual gas analyzer were used to determine the partial pressure of 13 residual gases during each processing step. Surface contamination and interdiffusion were monitored by in situ Auger electron spectrometry. The presence of phosphorus in the silicon was responsible for attaining elevated temperatures with silicide formations. Heteroepitaxial silicon growth was sensitive to the presence of oxygen during deposition, the rate and length of deposition as well as the substrate orientation.

Schmidt, F. A.↗

Effects of electrostatic rocket material deposited on solar cells.

If solar arrays on solar-electric spacecraft protrude into the exhaust hemisphere of the electric thrusters, they will receive fluxes (usually small) of both propellant and accelerator grid atoms. Unlike propellants, grid materials have low vapor pressures and will not reevaporate. An analysis is presented of degradation in the optical, thermal, and electrical performance of solar cells resulting from thin deposits of grid material (aluminum and molybdenum) on various array surfaces. The classical optical theory of thin films, heat balance equations, and a typical relationship for solar cell efficiency vs temperature are used to compute curves showing optical properties, temperature, and power output as functions of film thickness. The results compare favorably with available experimental data. It is shown that a few monolayers of metal deposition on the illuminated surface will seriously degrade cell performance. A means of estimating the arrival rate of these materials is provided.

Kemp, R. F.↗

Performance and impedance studies of thin, porous molybdenum and tungsten electrodes for the alkali metal thermoelectric converter

Columnar, porous, magnetron-sputtered molybdenum and tungsten films show optimum performance as alkali metal thermoelectric converter electrodes at thicknesses less than 1.0 micron when used with molybdenum or nickel current collector grids. Power densities of 0.40 W/sq cm for 0.5-micron molybdenum films at 1200 K and 0.35 W/sq cm for 0.5-micron tungsten films at 1180 K were obtained at electrode maturity after 40-90 h. Sheet resistances of magnetron sputter deposited films on sodium beta-double-prime-alumina solid electrolyte (BASE) substrates were found to increase very steeply as thickness is decreased below about 0.3-double-prime 0.4-micron. The ac impedance data for these electrodes have been interpreted in terms of contributions from the bulk BASE and the porous electrode/BASE interface. Voltage profiles of operating electrodes show that the total electrode area, of electrodes with thickness less than 2.0 microns, is not utilized efficiently unless a fairly fine (about 1 x 1 mm) current collector grid is employed.

Wheeler, B. L.↗

Superconductivity in thin films of the Mo-Re system.

A series of Mo-Re alloy films has been prepared by sputtering from a composite molybdenum and rhenium cathode. These films were deposited in an ultra-high purity environment onto sapphire substrates which were held at temperatures ranging from 400 to 1300 C. Maximum transition temperatures observed were 15 K which is significantly greater than the highest reported bulk values. Critical current and field characteristics also were found to be considerably greater in the films compared to corresponding bulk samples. Upper critical fields of over 100 kOe were measured. These enhanced properties are discussed in relation to the structural characteristics of the sputtered films.

Gavaler, J. R.↗