Novel chemoresistive CH{sub 4} sensor with 10 ppm sensitivity based on multiwalled carbon nanotubes functionalized with SnO{sub 2} nanocrystals
Chemoresistive sensors based on multiwalled carbon nanotubes (MWCNTs) functionalized with SnO{sub 2} nanocrystals (NCs) have great potential for detecting trace gases at low concentrations (single ppm levels) at room temperature, because the SnO{sub 2} nanocrystals act as active sites for the chemisorption of gas molecules, and carbon nanotubes (CNTs) act as an excellent current carrying platform, allowing the adsorption of gas on SnO{sub 2} to modulate the resistance of the CNTs. However, uniform conjugation of SnO{sub 2} NCs with MWCNTs is challenging. An effective atomic layer deposition based approach to functionalize the surface of MWCNTs with SnO{sub 2} NCs, resulting in a novel CH{sub 4} sensor with 10 ppm sensitivity, is presented in this paper. Scanning electron microscopy, transmission electron microscopy (TEM), energy dispersive x-ray spectroscopy, and Raman spectroscopy were implemented to study the morphology, elemental composition, and the crystal quality of SnO{sub 2} functionalized MWCNTs. High resolution TEM images showed that the crystal quality of the functionalizing SnO{sub 2} NCs was of high quality with clear lattice fringes and the dimension almost three times smaller than shown thus far in literature. A lift-off based photolithography technique comprising bilayer photoresists was optimized to fabricate SnO{sub 2} functionalized MWCNTs-based chemoresistor sensor, which at room temperature can reliably sense below 10 ppm of CH{sub 4} in air. Such low level gas sensitivity, with significant reversible relative resistance change, is believed to be the direct result of the successful functionalization of the MWCNT surface by SnO{sub 2} NCs.