Fabrication and Characterization of Superconducting NbN Nanowire Single Photon Detectors
This viewgraph presentation describes the fabrication of large area superconducting Niobium Nitride nanowire single photon detectors. The topics include: 1) Introduction and Motivation; 2) Operation of SNSPD Detectors; 3) NbTiN Deposition; 4) Fabrication Details; 5) Backside Coupled SNSPD; 6) Measurement Apparatus; 7) Electrical Response of a 15x15 micrometer SNSPD to 1064nm radiation; 8) Detector Efficiency vs Bias Current; 9) Interarrival Time Plot; 10) Detector Linearity; and 11) Conclusion.