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At least 19 records

Surface profile changes of scuffed bearing surfaces

A phase locked interference microscope capable of resolving depth differences to 30 A and planar displacements of 6000 A was constructed for the examination of the profiles of bearing surfaces without physical contact. This instrument was used to determine surface chemical reactivity by applying a drop of dilute alcoholic hydrochloric acid and measuring the profile of the solid surface before and after application of this probe. Scuffed bearing surfaces reacted much faster than unscuffed ones, but bearing surfaces which had been previously exposed to lubricants containing an organic chloride reacted much more slowly. In a separate series of experiments, a number of stainless steel plates were heated in a nitrogen atmosphere to different temperatures and their reactivity examined later at room temperature. The change of surface contour as a result of the probe reaction followed an Arrhenius type relation with respect to heat treatment temperature. This result could have implications on the scuffing mechanism.

Lauer, J. L.↗

Using High Frequency Focused Water-Coupled Ultrasound for 3-D Surface Depression Profiling

Surface topography is an important variable in the performance of many industrial components and is normally measured with diamond-tip profilometry over a small area or using optical scattering methods for larger area measurement. A prior study was performed demonstrating that focused air-coupled ultrasound at 1 MHz was capable of profiling surfaces with 25 micron depth resolution and 400 micron lateral resolution over a 1.4 mm depth range. In this article, the question of whether higher-frequency focused water-coupled ultrasound can improve on these specifications is addressed. 10 and 25 MHz focused ultrasonic transducers were employed in the water-coupled mode. Time-of-flight images of the sample surface were acquired and converted to depth / surface profile images using the simple relation (d = V*t/2) between distance (d), time-of-flight (t), and the velocity of sound in water (V). Results are compared for the two frequencies used and with those from the 1 MHz air-coupled configuration.

Roth, Don J.↗

Binary pseudo-random array standards for calibration of 3D optical surface profilers used for metrology with aspheric x-ray optics

High-accuracy surface metrology is vitally important in manufacturing ultra-high-quality free-form mirrors designed to manipulate x-ray light with nanometer-scale wavelengths. The current and potential capabilities of x˗ray mirror manufacturing are limited by inherent imperfections of the integrated metrology tools. Metrology tools are currently calibrated with super-polished flat test-standard/reference mirrors. This is acceptable for fabrication of slightly curved x-ray optics. However, for even moderately curved aspherical x-ray mirrors the flat-reference calibration is not sufficiently accurate. For micro-stitching interferometry developed for surface measurements with curved x-ray mirrors, the tool aberration errors are known to be transferred into the optical surface topography of x-ray mirrors. Our approach to improving metrology is to thoroughly calibrate the measuring tool and apply the results of the calibration to deconvolution of the measured data. Here we explore the application of a recently developed technique for calibrating the instrument transfer function (ITF) of 3D optical surface profilers to metrology with significantly curved x-ray optics. The technique, based on test standards patterned with two-dimensional (2D) binary pseudo-random arrays (BPRAs), employs the unique properties of the BPRA patterns in the spatial frequency domain. The inherent 2D power spectral density of the pattern has a deterministic white-noise-like character that allows direct determination of the ITF with uniform sensitivity over the entire spatial frequency range and field of view of an instrument. The high efficacy of the technique has been previously demonstrated in application to metrology with flat and slightly curved optics. Here, we concentrate on development of an efficient fabrication process for production of highly randomized (HR) BPRA test standards on flat and 500-mm spherical optical substrates. We also compare and discuss the results of the ITF calibration of an interferometric microscope when using the HR BPRA standards on flat and curved substrates.

Munechika, Keiko↗

New Technology-Large-Area Three- Dimensional Surface Profiling Using Only Focused Air-Coupled Ultrasound-Given 1999 R&D 100 Award

Surface topography, which significantly affects the performance of many industrial components, is normally measured with diamond-tip profilometry over small areas or with optical scattering methods over larger areas. To develop air-coupled surface profilometry, the NASA Glenn Research Center at Lewis Field initiated a Space Act Agreement with Sonix, Inc., through two Glenn programs, the Advanced High Temperature Engine Materials Program (HITEMP) and COMMTECH. The work resulted in quantitative surface topography profiles obtained using only high-frequency, focused ultrasonic pulses in air. The method is nondestructive, noninvasive, and noncontact, and it does not require light-reflective surfaces. Air surface profiling may be desirable when diamond-tip or laserbased methods are impractical, such as over large areas, when a significant depth range is required, or for curved surfaces. When the configuration is optimized, the method is reasonably rapid and all the quantitative analysis facilities are online, including two- and three-dimensional visualization, extreme value filtering (for faulty data), and leveling.

Roth, Don J.↗

Multi-pitch nano-accuracy surface profiler for strongly curved X-ray mirror metrology

We present our recent research and development effort on the Multi-Pitch Nano-accuracy Surface Profiler (MPNSP). This metrology instrument is developed to characterize strongly curved X-ray mirrors proposed to achieve diffraction-limited soft X-ray focusing for scientific applications at the synchrotron beamlines. The measurement process consists of forward-and-backward scans on the test mirror surface along its tangential direction at multiple pitch angles. Our research and development in this work aim to take the challenge of measuring strongly curved X-ray mirrors with a typical total slope range ≳10 mrad, while maintaining the Root Mean Square (RMS) value of measurement repeatability and self-consistency at 50 nrad RMS level. We first introduce the mechanical design, followed by a brief review of the mathematical model and the optimization algorithm for the MPNSP technique. By detecting the rotation axis of the mirror pitch with a machine vision approach, we can determine and then reduce the vertical distance between the pitch rotation axis and the test mirror surface to a sub-mm level. In addition, we describe a practical data acquisition procedure for strongly curved X-ray mirrors with a total slope range larger than the slope measuring range of the autocollimator used in the instrument. As a result, the proposed MPNSP measurements with different mirror orientations achieve remarkable self-consistency and reproducibility of < 50 nrad RMS in slope and < 0.5 nm RMS in height.

42 ENGINEERING↗

An error analysis of the recovery capability of the relative sea-surface profile over the Puerto Rican trench from multi-station and ship tracking of GEOS-2

Error analyses were performed to examine the height error in a relative sea-surface profile as determined by a combination of land-based multistation C-band radars and optical lasers and one ship-based radar tracking the GEOS 2 satellite. It was shown that two relative profiles can be obtained: one using available south-to-north passes of the satellite and one using available north-to-south type passes. An analysis of multi-station tracking capability determined that only Antigua and Grand Turk radars are required to provide satisfactory orbits for south-to-north type satellite passes, while a combination of Merritt Island, Bermuda, and Wallops radars provide secondary orbits for north-to-south passes. Analysis of ship tracking capabilities shows that high elevation single pass range-only solutions are necessary to give only moderate sensitivity to systematic error effects.

Stanley, H. R.↗

Carbon Nanotube Scanning Probe for Surface Profiling of DUV and 193 nm Photoresist Pattern

The continual scaling down of semiconductors to 100 nm and below necessitates a characterization technique to resolve high aspect ratio features in the nanoscale regime. This paper reports the use of atomic force microscope coupled with high aspect ratio multi-walled carbon nanotube scanning probe tip for the purpose of imaging surface profile of photoresists. Multi-walled carbon nanotube tips used in this work are 5-10 nm in diameter and about a micron long. Their exceptional mechanical strength and ability to reversibly buckle enable to resolve steep, deep nanometer-scale features. Images of photoresist patterns generated by 257 nm interference lithography as well as 193 nm lithography are presented to demonstrate multi-walled carbon nanotube scanning probe tip for applications in metrology.

Nguyen, Cattien V.↗

Skylab radar altimeter - Short-wavelength perturbations detected in ocean surface profiles

Short-wavelength anomalies in sea surface topography, caused by the gravitational effects of major ocean bottom topographic features, have been detected by the radar altimeter aboard Skylab. Some features, such as deep ocean trenches, seamounts, and escarpments, displace the ocean surface by as much as 15 meters over 100-kilometer wavelengths. This experiment demonstrates the potential of satellite altimetry for determining the ocean geoid and for mapping major features of the ocean bottom.

Leitao, C. D.↗

Cylindrical surface profile and diameter measuring tool and method

A tool is shown having a cross beam assembly made of beams joined by a center box structure. The assembly is adapted to be mounted by brackets to the outer end of a cylindrical case. The center box structure has a vertical shaft rotatably mounted therein and extending beneath the assembly. Secured to the vertical shaft is a radius arm which is adapted to rotate with the shaft. On the longer end of the radius arm is a measuring tip which contacts the cylindrical surface to be measured and which provides an electric signal representing the radius of the cylindrical surface from the center of rotation of the radius arm. An electric servomotor rotates the vertical shaft and an electronic resolver provides an electric signal representing the angle of rotation of the shaft. The electric signals are provided to a computer station which has software for its computer to calculate and print out the continuous circumference profile of the cylindrical surface, and give its true diameter and the deviations from the ideal circle.

Currie, James R.↗

Cylindrical surface profile and diameter measuring tool and method

A tool is shown having a cross beam assembly (15) made of beams (18, 19, 20, 21) joined by a center box structure (23). The assembly (15) is adapted to be mounted by brackets (16) to the outer end of a cylindrical case (11). The center box structure (23) has a vertical shaft (25) rotatably mounted therein and extending beneath the assembly (15). Secured to the vertical shaft (25) is a radius arm (28) which is adapted to rotate with shaft (25). On the longer end of the radius arm (28) is a measuring tip (30) which contacts the cylindrical surface to be measured and which provides an electric signal representing the radius of the cylindrical surface from the center of rotation of the radius arm (28). An electric servomotor (49) rotates the vertical shaft (25) and an electronic resolver (61) provides an electric signal representing the angle of rotation of the shaft (25). The electric signals are provided to a computer station (73) which has software for its computer to calculate and print out the continuous circumference profile of the cylindrical surface, and give its true diameter and the deviations from the ideal circle.

Currie, James R.↗

On th meridional surface profile of the Gulf Stream at 55 deg W

Nine-month records from nine inverted echo sounders (IESs) are analyzed to describe the mean baroclinic Gulf Stream at 55 deg W. IES acoustic travel times are converted to thermocline depth which is optimally interpolated. Kinematic and dynamic parameters (Gulf Stream meridional position, velocity, and vorticity) are calculated. Primary Gulf Stream variabiltiy is attributed to meandering and and changes in direction. A mean, stream-coordinate (relative to Gulf Stream instantaneous position and direction) meridional profile is derived and compared with results presented by other investigators. The mean velocity is estimated at 0.84 m/s directed 14 deg to the right eastward, and the thermocline (12 c) drops 657 m (north to south), corresponding to a baroclinic rise of the surface of 0.87 m. The effect of Gulf Stream curvature on temporal mean profiles is found to be unimportant and of minimal importance overall. The derived, downstream current profile is well represented by a Gaussian function and is about 190 km wide where it crosses zero. Surface baroclinic transport is estimated to be 8.5 x 10(exp 4) sq m/s, and maximum shear (flanking the maximum) is 1.2 x 10(exp -5). Results compare well with other in situ observational results from the same time period. On the other hand, analyses (by others) of concurrent satellite altimetry (Geosat) suggest a considerable narrower, more intense mean Gulf Stream.

Hallock, Zachariah R.↗

Binary pseudo-random array standards for calibration of 3D optical surface profilers used for metrology with significantly curved x-ray optics

High-accuracy metrology is vitally important in manufacturing ultra-high-quality free-form mirrors designed to manipulate X-ray light with nanometer-scale wavelengths. The current capabilities and possibility for improvements in X-ray mirror manufacturing are limited by inherent imperfections of the integrated metrology tools. In the case of Fizeau interferometry, metrology tools are currently calibrated with super-polished flat test-standard/reference mirrors. This is acceptable for measuring slightly curved X-ray optics. However, for even moderately curved aspherical X-ray mirrors the flat-reference calibration is not sufficiently accurate and stitching Fizeau interferometer-based surface metrology is used to mitigate the problem. But still, the retrace and aberration errors, as well as the limited spatial resolution, described with the instrument transfer function (ITF), can be transferred into the optical surface topography of X-ray mirrors obtained in stitching metrology. For ITF calibration, we have developed an original technique, based on test standards structured as two-dimensional (2D) highly-randomized (HR) binary pseudo-random arrays (BPRAs). The technique employs the unique properties of the HR BPRA patterns in the spatial frequency domain., i.e. the inherent 2D power spectral density of the HR BPRA pattern has a deterministic white-noise-like character that allows direct determination of the ITF with uniform sensitivity over the entire spatial frequency range and field-of-view of an instrument. Here, we explore technological, metrological, and analytical aspects essential for calibration of the retrace and aberration errors of Fizeau interferometers using different types of tilted test samples, including a super-polished reference mirror for the re-trace calibration and the uniformly redundant array (URA) BPRA standards for the geometrical distortion (aberration) calibration. While the first method was previously demonstrated by researchers at DIAMOND Light Source, a method based on the URA BPRA is described and demonstrated here for the first time. We outline the design and fabrication process used in fabrication of URA BPRA test standards, and present the results of application of the URA BPRA standards demonstrating the high efficacy of our approach to geometrical distortion calibration of Fizeau interferometers. We also discuss the possible sources of unexpected peculiarities of the systematic errors, including an astigmatic character of the retrace error, observed with Fizeau interferometers at the Advanced Light Source X-Ray Optics Laboratory.

Munechika, Keiko↗