A new thin-film microcircuit deposition mechanism
New thin film microdeposition unit for operating with various combinations of substrates, masks, and evaporation sources
VACUUM DEPOSITION↗
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Investigation of discrete component chip mounting technology for hybrid microelectronic circuits
The use of polymer adhesives for high reliability microcircuit applications is a radical deviation from past practices in electronic packaging. Bonding studies were performed using two gold-filled conductive adhesives, 10/90 tin/lead solder and Indalloy no. 7 solder. Various types of discrete components were mounted on ceramic substrates using both thick-film and thin-film metallization. Electrical and mechanical testing were performed on the samples before and after environmental exposure to MIL-STD-883 screening tests.
Caruso, S. V.↗
Thin-film chemical sensors based on electron tunneling
The physical mechanisms underlying a novel chemical sensor based on electron tunneling in metal-insulator-metal (MIM) tunnel junctions were studied. Chemical sensors based on electron tunneling were shown to be sensitive to a variety of substances that include iodine, mercury, bismuth, ethylenedibromide, and ethylenedichloride. A sensitivity of 13 parts per billion of iodine dissolved in hexane was demonstrated. The physical mechanisms involved in the chemical sensitivity of these devices were determined to be the chemical alteration of the surface electronic structure of the top metal electrode in the MIM structure. In addition, electroreflectance spectroscopy (ERS) was studied as a complementary surface-sensitive technique. ERS was shown to be sensitive to both iodine and mercury. Electrolyte electroreflectance and solid-state MIM electroreflectance revealed qualitatively the same chemical response. A modified thin-film structure was also studied in which a chemically active layer was introduced at the top Metal-Insulator interface of the MIM devices. Cobalt phthalocyanine was used for the chemically active layer in this study. Devices modified in this way were shown to be sensitive to iodine and nitrogen dioxide. The chemical sensitivity of the modified structure was due to conductance changes in the active layer.
Khanna, S. K.↗
Superconducting thin-film gyroscope readout for Gravity Probe-B
The high-resolution gyroscope readout system for the Stanford Gravity Probe-B experiment, whose purpose is to measure two general relativistic precessions of gyroscopes in earth orbit, is described. In order to achieve the required resolution in angle (0.001 arcsec), the readout system combines high-precision mechanical fabrication and measurement techniques with superconducting thin-film technology, ultralow magnetic fields, and SQUID detectors. The system design, performance limits achievable with current technology, and the results of fabrication and laboratory testing to date are discussed.
Lockhart, James M.↗
Alkali metal thermoelectric conversion (AMTEC) technology status review
AMTEC operating principles, technical problems, and recent electrode research results are briefly reviewed. The mechanisms responsible for the degradation of thin-film molybdenum electrodes are discussed, and four alternate high-power electrode compositions and morphologies are identified. Separate self-contained recirculating AMTEC cells have demonstrated 19-percent efficiency, 10,000 hr at high temperature, and multicell operation including series connection. Results of systems studies in the 0.5-100 kWe range indicate that AMTEC performance and operating characteristics make it a strong candidate for future space applications.
Bankston, C. P.↗
Reliability and engineering of thin-film photovoltaic modules
Objectives were to: examine thin-film cell attributes that influence module performance and reliability, explore the lessons and applicability of crystalline-silicon module technology to thin-film modules, review the current status of thin-film module technologies, and identify problem areas and needed research. A major need is to separate the effects and resons for reversible degradatin from nonreversible degradation. Amorphous-silicon (a-Si) reliability investigations are focusing on exploratory research investigations, accelerated Arrhenius-type testing of a-Si cells, real-time outdoor exposure testing of a-Si cells, cell failure analysis, and failure mechanism research. Studies included the reduction in strength of glass by high temperature depositions on glass and laser scribing, encapsulation materials development needs, and the testing of modules. The new materials and processes in thin-film modules will require a delinquent reliability effort, including: establishment of mechanism-specific reliability goals; quantification of mechanism parameter dependencies; prediction of expected long-term degradation; identification of cost-effective solutions; and testing and failure analysis of trial solutions.
Royal, E. L.↗
Coupling characteristics of thin-film metal-oxide-metal diodes at 10.6 microns
Direct detection experiments have demonstrated the coherent coupling of 10.6 micrometer radiation into photolithographically fabricated metal-oxide-metal tunnel junctions. A CO2 laser beam mechanically chopped at 1 KHz was focused at a variable angle of incidence with a power density of about 10 W/sq cm at the diodes. Diodes in which the junction resistance was much greater than the lead resistance displayed angular characteristics dominated by coherent antenna coupling.
Wang, S. Y.↗
Coupling of radiation into thin film modes by means of localized plasma resonances
The interaction between the surface plasmon mode that propagates at a metal dielectric interface and the localized plasma resonances (LPR) is investigated experimentally in Ag-island films. A stair-stepped sample geometry comprising a glass substrate, a continuous 50-nm Ag film, an LiF spacer film of thickness d = 5-60 nm, and an Ag-island film of mass thickness 3 nm is used in near-normal-reflectivity and plasmon-propagation-constant (k) determinations. The results are presented graphically and discussed. The overall shape of the reflectivity curves is found to be characteristic of Ag films, but with a dip at about 400 nm (corresponding to the absorption resonance of the island film) which is most pronounced with d = 25 nm. It is inferred that the island resonances are strongly coupled to a continuous-film dissipative mechanism at this d value. This inference is supported by the fact that the variation in k, correctd for LiF effects and plotted as a function of d, is greatest at around d = 25 nm. The implications of this finding for broad-band coupling into a thin-film mode, LPR enhancement of waveguide nonlinear effects, and new surface-enhanced-Raman-scattering geometries are indicated.
Holland, W. R.↗
The SNS Josephson junction with a third terminal
Discussion of the operating characteristics of a three-terminal thin-film SNS Josephson junction whose diameter is much greater than the electron pair coherence length in the N metal. It is shown that a junction of this type is essentially a two-terminal device even though the third terminal of the junction supplies the control current. The mechanism underlying this finding is discussed.
Prans, G. P.↗
Long-lived thermal control materials for high temperature and deep space applications
Considerable effort has been put into developing thermal-control materials for the Galileo space-craft. This paper presents a summary of these findings to date with emphasis on requirements, testing and results for the post-Challenger Galileo mission. Polyimide film (Kapton), due to its inherent stability in vacuum, UV, and radiation environments, combined with good mechanical properties over a large temperature range, has been the preferred substrate for spacecraft thermal control materials. Composite outer layers, using Kapton substrates, can be fabricated to meet the requirements of severe space environments. Included in the processing of Kapton-based composite outer layers can be the deposition of metal oxide, metallic and/or polymeric thin-film coatings to provide desirable electrical, optical and thermo-optical properties. In addition, reinforcement of Kapton substrates with fabrics and films is done to improve mechanical properties. Also these substrates can be filled with varying amounts of carbon to achieve particular electrical properties. The investigation and material development reported on here has led to improved thermo-gravimetric stability, surface conductivity, RF transparency, radiation and UV stability, flammability and handle-ability of outer layer thermal control materials for deep space and near-sun spacecraft. Designing, testing, and qualifying composite thermal-control film materials to meet the requirements of the Galileo spacecraft is the scope of this paper.
Whitt, Robin↗
Boundary-layer stability analysis of Langley Research Center 8-foot LFC experimental data
An analytical study of linear-amplifying instabilities of a laminar boundary layer as found in the experimental data of the LaRC/8-foot laminar-flow control (LFC) experiment was completed and the results are presented. The LFC airfoil used for this experiment was a swept, supercritical design which removed suction air through spanwise slots. The amplification of small disturbances by linear processes on a swept surface such as this can be due to either Tollmien-Schlichting (TS) and/or crossflow (CF) mechanisms. This study consists of the examination of these two instabilities by both the commonly used incompressible (SALLY and MARIA) analysis and the more involved compressible (COSAL) analysis. A wide range of experimental test conditions with variations in Mach number, Reynolds number, and suction distributions were available for this study. Experimentally determined transition locations were found from thin-film techniques and were used to correlate the n-factors at transition for the range of test cases.
Berry, Scott↗
Crystalline-silicon reliability lessons for thin-film modules
Key reliability and engineering lessons learned from the 10-year history of the Jet Propulsion Laboratory's Flat-Plate Solar Array Project are presented and analyzed. Particular emphasis is placed on lessons applicable to the evolving new thin-film cell and module technologies and the organizations involved with these technologies. The user-specific demand for reliability is a strong function of the application, its location, and its expected duration. Lessons relative to effective means of specifying reliability are described, and commonly used test requirements are assessed from the standpoint of which are the most troublesome to pass, and which correlate best with field experience. Module design lessons are also summarized, including the significance of the most frequently encountered failure mechanisms and the role of encapsulant and cell reliability in determining module reliability. Lessons pertaining to research, design, and test approaches include the historical role and usefulness of qualification tests and field tests.
Ross, Ronald G., Jr.↗
Thin-film light-intensity measurement strain-analysis technique.
The optical response to loading of a thin metallic film deposited on a low-modulus structural substrate is studied theoretically and experimentally. Two types of optical properties called total and central-image transmittance (or reflectance) are shown to be related to the mechanical state of the substrate. Empirical optical-mechanical relationships are proposed between these optical properties and the substrate strain field of a general plane-stress problem. A technique based on wrinkle and microfracture patterns is described for determining principal directions of strain. Experimental results for uniaxially loaded specimens show that it is possible to obtain a nearly linear relationship between transmittance and strain for certain materials combinations.
Williams, J. G.↗
Thin-film diffusion brazing of titanium alloys
A thin film diffusion brazing technique for joining titanium alloys by use of a Cu intermediate is described. The method has been characterized in terms of static and dynamic mechanical properties on Ti-6Al-4V alloy. These include tensile, fracture toughness, stress corrosion, shear, corrosion fatigue, mechanical fatigue and acoustic fatigue. Most of the properties of titanium joints formed by thin film diffusion brazing are equal or exceed base metal properties. The advantages of thin film diffusion brazing over solid state diffusion bonding and brazing with conventional braze alloys are discussed. The producibility advantages of this process over others provide the potential for producing high efficiency joints in structural components of titanium alloys for the minimum cost.
Mikus, E. B.↗
Thin-film scintillators for extended ultraviolet /UV/ response silicon detectors
The preparation and radiometric properties of silicon detectors coated with fluorescent thin films are described. The films are deposited from solutions of clear plastics, such as acrylic resins, polyvinyl toluene or polystyrene, and of organic laser dyes in a common solvent. They are optically clear, mechanically and chemically stable, yet easily applied and removed. Multiple doped films of a few microns thickness exhibit broad-band absorption from less than 250 nm to about 450 nm and narrow band emissions with peaks ranging from 380 nm to 600 nm. Internal quantum efficiencies are close to 100 percent and fluorescence decay times are in the nanosecond range. When deposited on optically denser media, a large fraction of the fluorescent emission is trapped in the substrate. Silicon photodiodes coated with multiple doped films exhibit high external quantum efficiencies and virtually flat photon response in the near UV.
Viehmann, W.↗
Thin-film coatings
Thin, adherent, high density films are discussed with respect to their application in two plasma physics techniques (ion plating and sputtering). The operation of each technique is described as well as what surfaces can be coated, and what kind of materials can be applied. The effects of these films on the mechanical properties of solid surfaces are also discussed.
Buckley, D. H.↗
Transparent conductive coatings
Thin film transparent conductors are discussed. Materials with electrical conductivity and optical transparency are highly desirable in many optoelectronic applications including photovoltaics. Certain binary oxide semiconductors such as tin oxide (SnO2) and indium oxide (In2O3) offer much better performance tradeoff in optoelectronics as well as better mechanical and chemical stability than thin semitransparent films. These thin-film transparent conductors (TC) are essentially wide-bandgap degenerate semiconductors - invariably n-type - and hence are transparent to sub-bandgap (visible) radiation while affording high electrical conductivity due to the large free electron concentration. The principal performance characteristics of TC's are, of course, electrical conductivity and optical transmission. The TC's have a refractive index of around 2.0 and hence act as very efficient antireflection coatings. For using TC's in surface barrier solar cells, the photovoltaic barrier is of utmost importance and so the work function or electron affinity of the TC is also a very important material parameter. Fabrication processes are discussed.
Ashok, S.↗
Reliability and Engineering of Thin-Film Photovoltaic Modules. Research forum proceedings
A Research Forum on Reliability and Engineering of Thin Film Photovoltaic Modules, under sponsorship of the Jet Propulsion Laboratory's Flat Plate Solar Array (FSA) Project and the U.S. Department of Energy, was held in Washington, D.C., on March 20, 1985. Reliability attribute investigations of amorphous silicon cells, submodules, and modules were the subjects addressed by most of the Forum presentations. Included among the reliability research investigations reported were: Arrhenius-modeled accelerated stress tests on a Si cells, electrochemical corrosion, light induced effects and their potential effects on stability and reliability measurement methods, laser scribing considerations, and determination of degradation rates and mechanisms from both laboratory and outdoor exposure tests.
Ross, R. G., Jr.↗