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At least 19 records

Study of a linear surface wave plasma source for tin removal in an extreme ultraviolet source

Tin deposition mitigation employs hydrogen radicals and ions, formed in a hydrogen plasma, to interact with tin to form tin hydride (SnH 4 ) in the gaseous state, which is then pumped away. Surface wave plasma (SWP) technology developed at Illinois generates hydrogen radicals and ions, resulting in tin etch rates that are high enough to keep extreme ultraviolet (EUV) lithographic tools clean. An advantage of an SWP antenna is the ability to generate a high density of hydrogen radicals and hydrogen ions directly at the desired etching location. In situ etching of tin enables high availability EUV tools by maintaining high reflectivity of the multilayer mirror of the collector. Additionally, the SWP is characterized with low ion energies and low electron temperature, such that the multilayer mirror does not suffer any damage from sputtering or implantation of hydrogen ions during operation. Here, experiments elucidating the fundamental processes of tin removal are conducted by varying pressure, power, surface temperature, and gas flow rate in order to observe the etch rate behavior. Our results have shown that the presence of hydrogen ions increases etch rates because ion bombardment weakens Sn–Sn bonds, which, in turn, allows for a higher rate of chemical etching by the radicals. The ion bombardment reduces the number of radicals needed to etch a single tin atom to the range of 10 2 –10 3 . The linear SWP antenna yields plasma densities on the order of 10 17 to 10 18 m -3 and radical densities on the order of 10 18 to 10 19 m -3 , allowing for greater utilization of ion etch enhancement. Etch rates of up to 200 nm/min have been achieved. The surface temperature of the samples is an important factor in the etching process such that the decrease in the surface temperature increases the etch rates and decreases the hydrogen desorption rates. In addition, a kinetic etch model is developed to explain the behavior of etch rates as a function of surface temperature. Furthermore, results from experiments performed in an Illinois NXE:3100 chamber will be discussed.

42 ENGINEERING↗

Tin removal by an annular surface wave plasma antenna in an extreme ultraviolet lithography source

Tin contamination of the collector mirror surface remains one of the crucial issues of EUV (Extreme Ultraviolet) sources, directly impacting the availability of the tool. Hydrogen plasma-based tin removal processes employ hydrogen radicals and ions to interact with tin deposits to form gaseous tin hydride (SnH 4 ), which can be removed through pumping. An annular surface wave plasma (SWP) source developed at the University of Illinois—Urbana Champaign is integrated into the cone and perimeter of the collection mirror for in situ tin removal. The SWP is characterized by high ion and radical densities, low electron temperature, and local generation where etching is needed. This method has the potential to significantly reduce downtime and increase mirror lifetime. Radical probe measurements show hydrogen radical densities in the order of 10 19 m -3 , while Langmuir probe measurements show electron temperatures of up to 6 eV and plasma densities on the order of 10 17–18 m -3 . The generated ions are essential to the tin cleaning and have sufficiently low energy to cause no damage to the collector capping layer. Tin etch rates of up to 270 nm/min were observed in a variety of experimental conditions, including various powers, pressures, flowrates, and temperatures. In conclusion, the high etch rates demonstrated in this study exceed the expected contamination rate of the EUV source.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Non‐Fermi‐Liquid Behavior of Superconducting SnH 4

Abstract The chemical interaction of Sn with H 2 by X‐ray diffraction methods at pressures of 180–210 GPa is studied. A previously unknown tetrahydride SnH 4 with a cubic structure ( fcc ) exhibiting superconducting properties below T C = 72 K is obtained; the formation of a high molecular C 2/ m ‐SnH 14 superhydride and several lower hydrides, fcc SnH 2 , and C 2‐Sn 12 H 18 , is also detected. The temperature dependence of critical current density J C (T) in SnH 4 yields the superconducting gap 2Δ(0) = 21.6 meV at 180 GPa. SnH 4 has unusual behavior in strong magnetic fields: B,T ‐linear dependences of magnetoresistance and the upper critical magnetic field B C2 (T) ∝ ( T C – T ). The latter contradicts the Wertheimer–Helfand–Hohenberg model developed for conventional superconductors. Along with this, the temperature dependence of electrical resistance of fcc SnH 4 in non‐superconducting state exhibits a deviation from what is expected for phonon‐mediated scattering described by the Bloch‐Grüneisen model and is beyond the framework of the Fermi liquid theory. Such anomalies occur for many superhydrides, making them much closer to cuprates than previously believed.

75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND↗

Non-noble metal based metallization systems

The results of efforts to produce a nonsilver metallization system for silicon photovoltaic cells are given. The system uses a metallization system based on molybdenum, tin, and titanium hydride. The initial work in this system was done using the MIDFILM process. The MIDFILM process attains a line resolution comparable to photoresist methods with a process related to screen printing. The surface to be processed is first coated with a thin layer of photopolymer material. Upon exposure to ultraviolet light through a suitable mask, the polymer in the non-pattern area crosslinks and becomes hard. The unexposed pattern areas remain tacky. The conductor material is then applied in the form of a dry mixture of metal which adheres to the tacky pattern area. The assemblage is then fired to ash the photopolymer and sinter the conductor powder.

Garcia, A., III↗

Development of metallization process: FSA project, cella and module formation research area

The optimization, evaluation, and demonstration of a novel metallization applied by a screen printing process is examined. Based on previous results of High Resolution, Low Cost Solar Cell Contact Development, a paste consisting of molybdenum, tin, and titanium hydride was selected as the promising composition. No satisfactory cells were made using any of the molybdenum/tin pastes used as a complete replacement for conventional silver pastes. The major problem is the inability to form a bond between the pastes and silicon that withstands soldering.

Garcia, A., III↗

Degradation behavior at elevated temperature of LaNisub5-xSnsubxHsubz for x between 0.20 and 0.25

Systematic studies of the hydriding behavior of LaNi(sub 5-x)Sn(sub x)H(sub z) alloys with tin contents in the range between 0.20 and 0.25 have revealed changes in the pressure-composition-temperature (PCT) isotherms measured after heating the hydrides above 450 K. These changes are indications of degradation processes and increased disorder within the alloy structure.

metal hydrides gas gap heat switches hydrogen stor↗

Electrocatalytic Hydrogen Evolution at Full Atomic Utilization over ITO-Supported Sub-nano-Pt n Clusters: High, Size-Dependent Activity Controlled by Fluxional Pt Hydride Species

A combination of density functional theory (DFT) and experiments with atomically size-selected Pt n clusters deposited on indium-tin oxide (ITO) electrodes was used to examine the effects of applied potential and Pt n size on the electrocatalytic activity of Pt n (n = 1, 4, 7, 8) for the hydrogen evolution reaction (HER). Activity is found to be negligible for isolated Pt atoms on ITO, increasing rapidly with Pt n size, such that Pt 7 /ITO and Pt 8 /ITO have roughly double the activity per Pt atom compared to atoms in the surface layer of polycrystalline Pt. Both DFT and experiment find that hydrogen under-potential deposition (H upd ) results in Pt n /ITO (n = 4, 7, 8) adsorbing ~2 H atoms/Pt atom at the HER threshold potential, equal to ca. double the Hupd observed for Pt bulk or nanoparticles. Here, the cluster catalysts under electrocatalytic conditions are hence best described as a Pt hydride compound, significantly departing from a metallic Pt cluster. The exception is Pt 1 /ITO, where H adsorption at the HER threshold potential is energetically unfavorable. Theory combines global optimization with grand canonical approaches for the influence of potential, uncovering that several metastable structures contribute to HER, changing with the applied potential. It is hence critical to include reactions of the ensemble of energetically accessible Pt n H x /ITO structures to correctly predict the activity vs. Pt n size and applied potential. For the small clusters, spillover of H ads from the clusters to the ITO support is significant, resulting in a competing channel for loss of H ads , particularly at slow potential scan rates.

37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CH↗

Moessbauer studies on LaNi(4.7)Sn(0.3) and its hydride

Moessbauer measurements were made on LaNi(4.7)Sn(0.3) at room and liquid nitrogen temperatures. Experimental data yielded a singlet at room temperature and a doublet at liquid-nitrogen temperature. Spectra of the hydrided sample yielded a doublet at liquid-nitrogen temperature with an increase in the quadrupole splitting compared to the unhydrided spectra, but no change in the isomer shift. These data indicate that there is no significant interaction between the tin and the hydrogen. The magnetic character remained the same down to liquid-nitrogen temperature as evidenced by the Moessbauer data. X-ray diffraction measurements on the hydride showed an expanded lattice with the same structure as found for the unhydrided sample. A decrease in particle size was observed upon hydriding.

Oliver, F. W.↗

Degradation behavior of LaNi(sub 4.87)Sn(sub 0.22)H(sub x) at elevated temperature

Partial substitution of tin for nickel in the LaNi(sub 5) alloy greatly enhances the stability and durability of the hydride phase during both gas phase and electrochemical cycling. Effects observed included reduction in hydrogen storage capacity, decreases in the plateau pressures, increased slopes of the plateaus, and smaller hysteresis ratios.

metal hydrides hydrogen storage↗

Tritium adsorption and absorption on (100) and (001) surfaces of pure and tin defective zirconium

Zirconium alloys such as zircaloy-4 are used as tritium (T) getter materials in tritium-producing burnable absorber rods (TPBARs) due to their ability to capture T, thereby forming metal hydrides. Developing an understanding of T adsorption onto zircaloy prior to diffusion into the subsurface is relevant for rational tritium getter and TPBAR design, to improve material properties for nuclear applications. Herein, density functional theory calculations revealed the preferred binding sites for T adsorption on Zr(001) and Zr(100). The energy barriers of T transfer, along the surface and from the surface to the subsurface were computed. The adsorption properties of Zr(001) were found to be superior to those of Zr(100). Surface tin impurities were found to strongly repel T. The presence of subsurface and surface tin resulted in higher absorption energy barriers for both the forward and reverse processes. Based on the calculated energy barriers, a surface to surface T diffusion coefficient of 9.53 × 10 -10 m 2 s -1 is expected for pristine Zr(001). Finally, a surface to subsurface T diffusion coefficient on the order of 10 -13 m 2 s -1 is predicted in pristine Zr, decreasing to 10 -19 m 2 s -1 for the transfer with a subsurface tin impurity.

37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CH↗

BISON BWR Fuel Modeling Capability: Material Models (FY2020)

Until this year the BISON fuel performance code has been developed primarily for pressurized water reactor (PWR), accident tolerant fuel (ATF), and advanced reactor (e.g., tri-structural isotropic (TRISO), metallic) analyses. The main focus of this work is to develop and document required material models that would aid predicting cladding failure with a specific hydride distribution to be investigated for boiling water reactor (BWR) applications in the next fiscal year. In terms of materials, the primary differences between a BWR and PWR is the use of gadolinia doping of the UO 2 fuel, the use of Zircaloy-2 for the cladding, and the addition of a liner on the inner surface of the cladding for improved pellet-clad mechanical interaction (PCMI)performance. The liner is typically made of pure zirconium or a lower tin content zirconium alloy (e.g. Zr-0.3%Sn). This work details the development and documentation of material and behavioral models for BWR analysis such as the addition of material and behavior models for gadolinia doped UO 2 , pure zirconium, Zr-0.3%Sn, and Zircaloy-2 as well as the ease-of-use additions to allow internal meshing capabilities to include liners. Another important aspect affecting cladding performance is hydrogen diffusion and hydride precipitation in the cladding. A model was added previously for non-lined, homogeneous claddings. In this work, instructions are provided on how to apply the model to BWR liner cladding. Representative experimental values are provided for the hydrogen diffusion parameters and precipitation-dissolution kinetics for typical liner materials of interest.

11 NUCLEAR FUEL CYCLE AND FUEL MATERIALS↗

Preliminary Conceptual Design of Nuclear Thermal Rocket Reactor Cores Using Ceramic Fuels with Beryllium or Composite Neutron Moderators

Herein several preliminary conceptual designs of nuclear thermal rocket reactor cores are presented that use tin-bonded monolithic ceramic [mononitride (UN), monocarbide (UC), and uranium dioxide (UO 2 )] fuel plates or pins with molybdenum-tungsten alloy clad. Neutron moderation is provided by a block of Be metal or composite materials using metal hydrides such as ZrH 1.6 or YH 1.6 with different matrices (MgO or Be). Mainly high-assay low-enriched uranium is considered, but highly enriched uranium is also assessed for a few configurations. Nominal core thermal power is 300 MW corresponding to about 66 kN (15 klbf) of thrust, and with minimal modifications, 500 MW may be possible (25 klbf of thrust). Depending on the configurations, the amount of 235 U needed for criticality is 30 to 90 kg, and reactor weight is 2.5 to 3.8 tonnes.

22 GENERAL STUDIES OF NUCLEAR REACTORS↗

Study of Tritium Diffusivity in Pure and Sn-Defective Zr: A First-Principles Density Functional Theory Approach

Zirconium alloys (e.g., zircaloy-4) are used as tritium ( 3 H) getter materials in tritium-producing burnable absorber rods (TPBARs) owing to their ability to capture 3 H and chemically convert them into metal hydrides. Understanding of 3 H diffusion mechanisms in zircaloy is crucial for the optimal design of material performance in nuclear technology. Here, for this work, we perform first-principles density functional theory calculations to study the 3 H diffusion mechanism in pure and impure Zr with a low concentration of tin (Sn) atoms to determine the impact of the presence of Sn on the movement of 3 H atoms through the material. First, we calculated the diffusion barriers for 3 H in pure Zr by taking different migration pathways. We then introduced a low concentration of Sn impurity and systematically explored the impurity effect on the diffusion barriers for 3 H. Using our calculated diffusion energy barriers, we further obtained the diffusion coefficients and analyzed the results by comparing them with the experimental and previously calculated values. A diffusion coefficient of the order of 10 –8 m 2 /s is predicted. We also found that the presence of a Sn impurity could reduce the diffusivity up to 4 orders of magnitude. In conclusion, our results could serve as guidelines for further experimental investigations.

37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CH↗

In Silico Optimization of Organic–Inorganic Hybrid Perovskites for Photocatalytic Hydrogen Evolution Reaction in Acidic Solution

We previously reported the atomistic reaction mechanism for the photocatalytic hydrogen evolution reaction (HER) on the CH 3 NH 3 PbI 3 organic-inorganic hybrid perovskites based on quantum mechanics (QM) calculations of the transition state barriers, including several layers of explicit acidic solvent. Here we extend these studies using in silico optimization to discover additional promising photocatalysts. We consider replacing • Pb with Sn, • I with Br, and • CH3NH3 cation with several organic cations, including NH 2 (CH)NH 2 cation as the photocatalyst for HER. We compared the activation barriers and reaction energies for each case. In our previous studies, we found that both H atoms of the H 2 product are extracted from surface organic cations with protons from the solution migrating along Grotthuss water chains to replace the H of the organic cations. This two-step reaction mechanism involves formation of an intermediate lead hydride bond, with the lead atoms and the surface organic cations both playing essential roles. Among the perovskites investigated here, we predict that NH 2 (CH)NH 2 PbI 3 exhibits the best HER performance with a predicted 10-fold improvement in the reaction rate compared to CH 3 NH 3 PbI 3 . We also suggest that the lead-free tin-iodide perovskites might exhibit a rate comparable to that of lead-iodide perovskites with the same organic cations. However, replacing iodine by bromine significantly increases the activation barrier. We find for these lead-iodide perovskites, the increased proton affinity of the surface organic cations enhances the photocatalytic efficiency, with NH 2 (CH)NH 2 the best case examined.

37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CH↗

Interfacial Charge Transfer Pathways in Photoelectrochemical H 2 Evolution by a Single-Component Molecular Catalyst on a Conductive Metal Oxide

Dye-sensitized photoelectrosynthesis cells traditionally combine a photosensitizing dye to harvest light and a catalyst to generate chemical fuels on a semiconductor. Here, in this work, a photoactive catalyst capable of both light absorption and fuel formation, [Cp*Ir(4,4′-Y 2 -bpy)Cl][Cl] (Cp* = pentamethylcyclopentadienyl, bpy = 2,2′-bipyridine, Y = CH 2 PO 3 H 2 ), is anchored to a mesoporous tin-doped indium oxide (ITO) electrode and facilitates photoelectrochemical H 2 evolution in water without the need for additional photosensitizers or sacrificial reductants. Spectroelectrochemistry indicates a single-site H 2 evolution mechanism involving charge injection to ITO, in contrast to the bimetallic mechanism observed in solution. Cyclic voltammetry and variable-potential chronoamperometry under illumination probe competing pathways via interfacial electron transfer between the Ir hydride excited state and the conductive ITO electrode. A Marcus theory framework provides reorganization energies for competing interfacial electron transfer pathways from potential-dependent quantum yield measurements. The light-driven H 2 evolution catalysis on conducting oxide proceeds with high Faradaic efficiency and current densities comparable to photoelectrodes utilizing p-type semiconductors. By uncovering the principal electron transfer pathways that govern photocatalytic efficiency, this study establishes design principles for hybrid molecular photoelectrocatalysts.

catalysts↗

The Mechanical Response of High Burnup 17x17 PWR Fuel Rods Under Bending

As a part of the US Department of Energy Office of Nuclear Energy High Burnup Spent Fuel Data Project, Oak Ridge National Laboratory has performed 4pt-bend tests on a series of 17x17 PWR fuel rods that were discharged with rod average burnups between 50 and 60 GWd/MTU. The rods include four different kinds of fuel cladding: standard Zircaloy-4 (Zirc-4), low-tin (LT) Zirc-4, ZIRLO, and M5. Six rods of each type (combining Zirc-4 and LT Zirc-4 as one type) were tested to failure at room temperature and 200 oC. Three of each type experienced a full-length heat treatment cycle from RT to 400 oC to RT with an 8 hr soak at 400 oC to simulate the expected limiting vacuum drying condition, which potentially induces hydride reorientation and causes some annealing of irradiation damage in the cladding. Overall, the fuel rods show significant capacity to deflect in bending and exhibit non-linear deformation before failing. The calculated failure strains range from 1.5% to 3.8%. The simulated vacuum drying heat treatment had the largest effect on fuel rods with ZIRLO and M5 cladding. In both cases the heat treatment caused increases in the plastic strain at failure, suggesting some annealing of irradiation damage is occurring. The finite element modeling of the 4pt bending test assume the pellet is a collection of pellet wedge pieces. The results for the Zircaloy-4 rods suggest that the pellets are bonded to the cladding and friction controls the relative motion of the pellet wedge pieces.

Cantonwine, Paul↗

Electron-phonon coupling strength from ab initio frozen-phonon approach

In this work, we propose a fast method for high-throughput screening of potential superconducting materials. The method is based on calculating metallic screening of zone-center phonon modes, which provides an accurate estimate for the electron-phonon coupling strength. This method is complementary to the recently proposed Rigid Muffin Tin (RMT) method, which amounts to integrating the electronphonon coupling over the entire Brillouin zone (as opposed to the zone center), but in a relatively inferior approximation. We illustrate the use of this method by applying it to MgB 2 , where the high-temperature superconductivity is known to be driven largely by the zone-center modes, and compare it to a sister compound AlB 2 . We further illustrate the usage of this descriptor by screening a large number of binary hydrides, for which accurate first-principle calculations of electron-phonon coupling have been recently published. Together with the RMT descriptor, this method opens a way to perform initial high-throughput screening in search of conventional superconductors via machine learning or data mining.

36 MATERIALS SCIENCE↗