Normally-closed, leak-tight piezoelectric microvalve with ultra-high pressure upstream flow control for integrated micropropulsion
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valve MEMS micropropulsion microspacecraft microth↗
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Normally-closed, leak-tight piezoelectric microvalve under ultra-high upstream pressure for integrated mircopropulsion
This paper presents a leak-tight piezoelectric microvalve, operating at extremely high upstream pressures for microspacecraft applications.
valve MEMS micropropulsion microspacecraft microth↗
Piezoelectric bimorph-based microvavle for liquid-based micropropulsion
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valve MEMS micropropulsion microspacecraft microth↗