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Results for “x-ray lithogrpahy”

Search indexed NASA NTRS and DOE OSTI research on propulsion, heat transfer, battery materials and energy systems. Follow report and document links to the original sources.

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A Compact, Fast, Wide-Field Imaging Spectrometer System

We present test results from a compact, fast (F/1.4) imaging spectrometer system with a 33 degree field of view, operating in the 450-1650 nm wavelength region with an extended response InGaAs detector array. The system incorporates a simple two-mirror telescope and a steeply concave bilinear groove diffraction grating made with gray scale x-ray lithography techniques. High degree of spectral and spatial uniformity (97%) is achieved.

diffraction grating↗