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At least 19 records

Metal-Assisted Chemical Etching and Electroless Deposition for Fabrication of Hard X-ray Pd/Si Zone Plates

Zone plates are diffractive optics commonly used in X-ray microscopes. Here, we present a wet-chemical approach for fabricating high aspect ratio Pd/Si zone plate optics aimed at the hard X-ray regime. A Si zone plate mold is fabricated via metal-assisted chemical etching (MACE) and further metalized with Pd via electroless deposition (ELD). MACE results in vertical Si zones with high aspect ratios. The observed MACE rate with our zone plate design is 700 nm/min. The ELD metallization yields a Pd density of 10.7 g/cm 3 , a value slightly lower than the theoretical density of 12 g/cm 3 . Fabricated zone plates have a grid design, 1:1 line-to-space-ratio, 30 nm outermost zone width, and an aspect ratio of 30:1. At 9 keV X-ray energy, the zone plate device shows a first order diffraction efficiency of 1.9%, measured at the MAX IV NanoMAX beamline. With this work, the possibility is opened to fabricate X-ray zone plates with low-cost etching and metallization methods.

36 MATERIALS SCIENCE↗

Effect of tilt on circular zone plate performance

Fresnel zone plates are frequently used as focusing and imaging optics in x-ray microscopy, as they provide the ease of use of normal incidence optics. We consider here the effects of tilt misalignment on their optical performance, both in the thin optics limit and in the case of zone plates that are sufficiently thick so that volume diffraction effects come into play. Using multislice propagation, we show that simple analytical models describe the tilt sensitivity of thin zone plates and the thickness at which volume diffraction must be considered, and examine numerically the performance of example zone plates for soft x-ray focusing at 0.5 keV and hard x-ray focusing at 10 keV.

47 OTHER INSTRUMENTATION↗

Fresnel zone plate point spread function approximation for zeroth order mitigation in millimetric field of view x-ray imaging

High spatial and temporal resolution x-ray radiography images are required at the National Ignition Facility (NIF) for high-energy density experiments. One technique that is in development to achieve the required resolution uses Fresnel zone plate (FZP) optics to image an object that is backlit by an x-ray source. The multiple FZP diffraction orders do not focus on the same plane, which increases the background and reduces the contrast. Understanding the point spread function of the different diffraction orders will allow the prediction of the expected background using simulations. We find that the two-dimensional point spread function of the FZP can be approximated by the addition of a sharp Gaussian with a disk. This allowed for the estimation of the background in NIF experimental images of Rayleigh–Taylor spikes and their interpretation. An alternative design of FZP is discussed to allow the inclusion of a zeroth order blocker to reduce the background.

Do, A. (ORCID:0000000174372147)↗

Contrast optimization of Fresnel zone plate imaging

Fresnel zone plates (FZPs) are circular diffractive elements that operate as a lens for x-rays. They have gained interest in the field of laser-plasma physics due to their ability to achieve higher spatial resolution than pinholes. Their design and implementation are complicated by the fact that a significant amount of the x-rays passing through the FZP will not diffract (zeroth order) and present a background to the measurement. This background can be large and inhomogeneous depending on the geometric setup of the experiment. Furthermore, we present calculations of the diffracted (first order) and un-diffracted (zeroth order) flux profiles, which makes it possible to optimize the contrast between the first order imaging rays and the zeroth order background. Calculations for the implementation of a central block in the FZP, designed to block the zeroth from the entire field of view, are also presented.

47 OTHER INSTRUMENTATION↗

High-resolution x-ray radiography with Fresnel zone plates on the University of Rochester’s OMEGA Laser Systems

Experiments performed at the Laboratory for Laser Energetics with a continuous-wave (cw) x-ray source and on the OMEGA and OMEGA EP Laser Systems have utilized a Fresnel zone plate (FZP) to obtain x-ray images with a spatial resolution as small as ~1.5 μm. Such FZP images were obtained with a charge-coupled device or a framing camera at energies ranging from 4.5 keV to 6.7 keV using x-ray line emission from both the cw source and high-intensity, laser-beam–illuminated metal foils. In all cases, the resolution test results are determined from patterns and grids backlit by these sources. Here, the resolutions obtained are shown to be due to a combination of the spectral content of the x-ray sources and detector resolution limited by the magnification of the images (14× to 22×). High-speed framing cameras were used to obtain FZP images with frame times as short as ~30 ps. Double-shell implosions on OMEGA were backlit by laser-irradiated Fe foils, thus obtaining a framing-camera–limited, FZP-image resolution of ~3 μm–4 μm.

47 OTHER INSTRUMENTATION↗

Fresnel zone plate development for x-ray radiography of hydrodynamic instabilities at the National Ignition Facility

The study of Rayleigh–Taylor (RT) and Richtmyer–Meshkov (RM) instabilities in a planar geometry at high energy densities at the National Ignition Facility (NIF) requires high spatial resolution imaging. We demonstrate the potential of Fresnel zone plates (FZPs) to achieve resolution that would unlock such studies. FZPs are circular aperiodic gratings that use diffraction to focus x rays and produce an image with high spatial resolution. Taking into account the NIF’s challenging environment, we have designed a specific array of five FZPs for a zinc backlighter to take a radiograph of a target with 9 keV x rays. We measured a mean resolution for the FZP of 1.9µm±0.5µm and a ±1mm depth of focus at an x-ray calibration facility as well as a 2.3µm±0.4µm resolution on a resolution wire mesh shot on the NIF. We also performed an in-depth analysis of the image quality to assess the capability to resolve the small features present in RT and RM instabilities.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

X-ray imaging of Rayleigh–Taylor instabilities using Fresnel zone plate at the National Ignition Facility

Being able to provide high-resolution x-ray radiography is crucial in order to study hydrodynamic instabilities in the high-energy density regime at the National Ignition Facility (NIF). Current capabilities limit us to about 20 μm resolution using pinholes, but recent studies have demonstrated the high-resolution capability of the Fresnel zone plate optics at the NIF, measuring 2.3 μm resolution. Using a zinc Heα line at 9 keV as a backlighter, we obtained a radiograph of Rayleigh–Taylor instabilities with a measured resolution of under 3 μm. Two images were taken with a time integrated detector and were time gated by a laser pulse duration of 600 ps, and a third image was taken with a framing camera with a 100 ps time gate on the same shot and on the same line of sight. The limiting factors on image quality for these two cases are the motion blur and the signal to noise ratio, respectively. We also suggest solutions to increase the image quality.

Do, A. (ORCID:0000000174372147)↗

Zone plate-based extreme ultraviolet mask microscope with through-pellicle imaging capability

Mirror-based and zone plate-based imaging systems are being used in actinic extreme ultraviolet (EUV) reticle review tools. With regard to zone plates, a short working distance is advantageous in terms of the required spectral bandwidth, manufacturability, and potential throughput and imaging performance. Zone plates therefore typically have a short working distance. The industry has adopted the use of an EUV pellicle to protect the photomask. Imaging photomask through-pellicle requires a working distance larger than 2.5 mm. A zone-plate-based EUV mask microscope with a 3-mm working distance has been commissioned at beamline 11.3.2 of the Advanced Light Source. Through-pellicle imaging at an exposure time of 2 s is demonstrated. The instrument achieves an image contrast of 95% on large features on a photomask with a tantalum-based absorber. Imaging down to 45-nm half pitch (mask scale) is demonstrated. A NILS of 2.55 is achieved on 60-nm half-pitch (mask scale) lines and spaces. These results demonstrate that zone-plate-based imaging systems can meet the requirements of an actinic EUV mask review tool in terms of imaging performance and throughput in an instrument compatible with EUV pellicles.

Extreme ultraviolet↗

The hard x-ray nanotomography microscope at the advanced light source

Beamline 11.3.1 at the Advanced Light Source is a tender/hard (6–17 keV) x-ray bend magnet beamline recently re-purposed with a new full-field, nanoscale transmission x-ray microscope. The microscope is designed to image composite and porous materials possessing a submicrometer structure and compositional heterogeneity that determine materials’ performance and geologic behavior. The theoretical and achieved resolutions are 55 and <100 nm, respectively. The microscope is used in tandem with a <25 nm eccentricity rotation stage for high-resolution volume imaging using nanoscale computed tomography. The system also features a novel bipolar illumination condenser for the illumination of an ~100 μm spot of interest on the sample, followed by a phase-type zone plate magnifying objective of ~52 µm field of view and a phase detection ring. The zone plate serves as the system objective and magnifies the sample with projection onto an indirect x-ray detection system, consisting of a polished single crystal CsI(Tl) scintillator and a range of high-quality Plan Fluorite visible light objectives. The objectives project the final visible light image onto a water-cooled CMOS 2048 × 2048-pixel 2 detector. Here, in this paper, we will discuss the salient features of this instrument and describe early results from imaging the internal three-dimensional microstructure and nanostructure of target materials, including fiber-reinforced composites and geomaterials.

47 OTHER INSTRUMENTATION↗

Flow visualization in high-energy-density laboratory plasmas

Flow visualization is often essential for evaluating high-energy-density (HED) laboratory plasmas, examining their dynamics, and assessing design strategies. However, imaging at fine phenomenological flow scales is a major challenge. Here, a zone-plate–based radiography system tailored for applications in HED physics is demonstrated. The burst-mode radiography system combines a dual-flash laser-generated x-ray source, a high-magnification zone plate optic, and a multiple frame hybrid complementary metal-oxide-semiconductor (hCMOS) sensor for image detection. Operating at a magnification of 42 x⁠, a pair of radiographs is measured in rapid succession, each time gated by a 4.75 keV flash of x rays lasting 100 ps. The system achieves a spatial resolution below 3 μm. The potential of this approach for applications in HED physics is exemplified by observing small-scale spike morphologies at a pusher-foam interface impacted by a strong, laser-driven blast wave.

Flow instabilities↗

Development of a true single line of sight 3D hot-spot imaging for the National Ignition Facility

High resolution 3D self-emission x-ray imaging during inertial confinement fusion capsule implosion enables the measurement of the shape of the hotspot. While current 3D imaging capabilities use multiple lines of sight to perform image reconstruction, it would be highly desirable to use only one line of sight, as this would significantly reduce the number of windows in the target hohlraum and decrease their impacts on implosion symmetry. Such a goal is achievable using the zone plate coded imaging technique developed by N. M. Ceglio [Proc. SPIE 0106, 55-62 (1977)]. It consists of fielding a visible light Fresnel zone plate on shot to record a shadowgraph. Here, the image can then be reconstructed either by printing the shadowgraph on a transparent film and shining a suitable wavelength light through it or by numerical reconstruction. A new approach using numerical reconstruction is presented, and it relaxes the constraint by an order of magnitude on the optic design, thus enabling an easier fabrication process, as it allows a scaling-up of the optic dimensions. The design, fabrication process, and testing with an x-ray source of a prototype is presented. The reconstruction of an ~14.5 × 17 μm 2 broadband x-ray source was successful and shows that the performances are in line with expectation with an at least 5 mm axial resolution.

47 OTHER INSTRUMENTATION↗

Spectrally selective modulation of terahertz radiation beams

We report the results of an experimental study on the focusing of broadband terahertz (THz) radiation using lenses and Fresnel zone plates. The obtained data are compared with the results of numerical simulations. It is shown that the use of lenses for focusing THz radiation can lead to the appearance of a ring structure in the spatial distributions of its intensity. The use of Fresnel zone plates allows the spatial distribution of the THz radiation intensity to be varied at selected frequencies of the spectrum. (terahertz radiation)

72 PHYSICS OF ELEMENTARY PARTICLES AND FIELDS↗

An experimental and computational study of thin-layer Rayleigh–Taylor instability development during deceleration with and without an externally applied magnetic field

The importance of mitigating the Rayleigh–Taylor instability (RTI) in inertial confinement fusion (ICF) is critical to successfully achieve high gain fusion yield. Consequently, understanding the seed mechanisms of RTI and the potential evolution of RTI in ICF relevant conditions is crucial. Single feature perturbations consistently demonstrate non-linear RTI evolution, for which an experimental platform on OMEGA-EP is developed. Manufacturing defects introduced into the target design require exploration of unanticipated changes to RTI development and an identification of targets that will still render quantifiable physics results. Consequently, it is presented that the inherent 3D nature of experimental targets necessitates 3D modeling for accurate design work and predictive modeling of experimental targets, especially when high resolution imaging diagnostics, like Fresnel Zone Plates, are utilized. A study of the morphology of the RTI evolution due to changing initial conditions and the presence of an externally applied magnetic field are also explored. Experimental data show thin-layer RTI morphology comparable to resistive magneto hydrodynamic 3D results. A discussion on the impacts of an externally applied magnetic field makes the case for continued efforts to observe a magnetic field's impact on RTI morphology.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Fast X-ray Nanotomography with Sub-10 nm Resolution as a Powerful Imaging Tool for Nanotechnology and Energy Storage Applications

In the last decade, transmission X-ray microscopes (TXMs) have come into operation in most of the synchrotrons worldwide. They have proven to be outstanding tools for non-invasive ex and in situ 3D characterization of materials at the nanoscale across varying range of scientific applications. However, their spatial resolution has not improved in many years, while newly developed functional materials and microdevices with enhanced performances exhibit nanostructures always finer. Here, optomechanical breakthroughs leading to fast 3D tomographic acquisitions (85 min) with sub-10 nm spatial resolution, narrowing the gap between X-ray and electron microscopy, are reported. These new achievements are first validated with 3D characterizations of nanolithography objects corresponding to ultrahigh-aspect-ratio hard X-ray zone plates. Then, this powerful technique is used to investigate the morphology and conformality of nanometer-thick film electrodes synthesized by atomic layer deposition and magnetron sputtering deposition methods on 3D silicon scaffolds for electrochemical energy storage applications.

36 MATERIALS SCIENCE↗

InAs Terahertz Metalens Emitter for Focused Terahertz Beam Generation

Metasurfaces have opened doors to combining multiple photonic functionalities in a single compact device. In particular, the ability to generate short terahertz (THz) pulses with precise wavefront engineering in a single THz metasurface redefined the role metasurfaces can play in THz systems. Here, an InAs metalens emitter which generates and focuses a THz pulse beam is demonstrated using a 130 nm thick InAs metasurface designed as a binary‐phase Fresnel zone plate. The THz beam is focused to a spot of ≈430 μm at 1 THz with a short focal length of 5 mm and large numerical aperture of 0.5. Nanoscale InAs Mie resonators comprising the metasurface enable THz generation with an amplitude as high as 20 times compared to plasmonic THz emitters and several times compared to a 1 mm thick ZnTe crystal. This InAs metasurface emitter provides a new paradigm for designing THz imaging, spectroscopy, and communication systems, where THz beam generation and shaping are performed with a single device without compromising the generation efficiency, while eliminating losses and avoiding limitations of phase matching of conventional nonlinear optics approaches.

47 OTHER INSTRUMENTATION↗

Multi-beam X-ray ptychography for high-throughput coherent diffraction imaging

X-ray ptychography is a rapidly developing coherent diffraction imaging technique that provides nanoscale resolution on extended field-of-view. However, the requirement of coherence and the scanning mechanism limit the throughput of ptychographic imaging. Herein, we propose X-ray ptychography using multiple illuminations instead of single illumination in conventional ptychography. Multiple locations of the sample are simultaneously imaged by spatially separated X-ray beams, therefore, the obtained field-of-view in one scan can be enlarged by a factor equal to the number of illuminations. We have demonstrated this technique experimentally using two X-ray beams focused by a house-made Fresnel zone plate array. Two areas of the object and corresponding double illuminations were successfully reconstructed from diffraction patterns acquired in one scan, with image quality similar with those obtained by conventional single-beam ptychography in sequence. Multi-beam ptychography approach increases the imaging speed, providing an efficient way for high-resolution imaging of large extended specimens.

47 OTHER INSTRUMENTATION↗