Silane Pyrolysis With Silicon-Seed Aerosol
Large silicon particles result from controlled pyrolysis of silane. Mixture of 1 percent silane in nitrogen pyrolyzed at 300 degrees C to generate aerosol of silicon seed particles.
Flagan, R. C.↗
Engineering topics
Alam, M. K.
Publications and source records attributed to Alam, M. K..
Silicon production in an aerosol reactor
An aerosol reactor for the growth of large silicon particles by silane pyrolysis was shown to demonstrate the following properties: (1) generate seed particles by pyrolysis of a small amount of silane; (2) mix seed aerosol with primary silane flow, limiting number concentration such that the amount of silane is sufficient to grow the desired size of particles from the seed; and (3) react the silane at a rate which is controlled such that the seed particles scavenge the condensible vapors rapidly enough to inhibit further nucleation.
Wu, J. J.↗