NASA NTRS · 19830000591
Silane Pyrolysis With Silicon-Seed Aerosol
Abstract
Large silicon particles result from controlled pyrolysis of silane. Mixture of 1 percent silane in nitrogen pyrolyzed at 300 degrees C to generate aerosol of silicon seed particles.
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Flagan, R. C., Alam, M. K.. 1984-11-01. Silane Pyrolysis With Silicon-Seed Aerosol. https://ntrs.nasa.gov/citations/19830000591
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