Conductivity compensation in p-6H-SiC in irradiation with 8-MeV protons
Carrier removal rate (V{sub d}) in p-6H-SiC in its irradiation with 8-MeV protons has been studied. The p-6H-SiC samples were produced by sublimation in vacuum. V{sub d} was determined by analysis of capacitance-voltage characteristics and from results of Hall effect measurements. It was found that complete compensation of samples with initial value of N{sub a} - N{sub d} Almost-Equal-To 1.5 Multiplication-Sign 10{sup 18} cm{sup -3} occurs at an irradiation dose of {approx}1.1 Multiplication-Sign 10{sup 16} cm{sup -2}. In this case, the carrier removal rate was {approx}130 cm{sup -1}.