An enhanced sensitivity null ellipsometry technique for studying films on substrates - Application to silicon nitride on gallium arsenide
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Alterovitz, S. A.↗
Engineering topics
Bu-Abbud, G. H.
Publications and source records attributed to Bu-Abbud, G. H..
Ellipsometric study of silicon nitride on gallium arsenide
A method for optimizing the sensitivity of ellipsometric measurements for thin dielectric films on semiconductors is described in simple physical terms. The technique is demonstrated for the case of sputtered silicon nitride films on gallium arsenide.
Alterovitz, S. A.↗