NASA NTRS · 19830056400
An enhanced sensitivity null ellipsometry technique for studying films on substrates - Application to silicon nitride on gallium arsenide
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Alterovitz, S. A., Bu-Abbud, G. H., Woollam, J. A., Liu, D. C.. 1983-03-01. An enhanced sensitivity null ellipsometry technique for studying films on substrates - Application to silicon nitride on gallium arsenide. https://ntrs.nasa.gov/citations/19830056400
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