N- and P-Type Cluster Source
We describe our newest ClusterIon registered source, and show detailed data for B{sub 18}H{sub x}{sup +}, C{sub 7}H{sub 7}{sup +}, C{sub 16}H{sub x}{sup +}, P{sub 4}{sup +}, and As{sub 4}{sup +} beams. These species are derived from both low-temperature solids and gaseous sources. 2D beam profiles are presented, along with mass spectra, beam current performance, and long-term beam reproducibility. The data were collected using the injection stage of a commercial ion implanter equipped with a 120 degree analyzer magnet. Beam profiles at magnet entrance and exit planes were produced using a specially designed 2D profiler. Beam currents were measured after mass analysis using a Faraday cup over an effective energy range of 200 eV to 10 keV.
43 PARTICLE ACCELERATORS↗