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DOE OSTI · 21510123

N- and P-Type Cluster Source

Horsky, Thomas N·Hahto, Sami K·McIntyre, Edward K·Sacco, Jr, George P
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Abstract

We describe our newest ClusterIon registered source, and show detailed data for B{sub 18}H{sub x}{sup +}, C{sub 7}H{sub 7}{sup +}, C{sub 16}H{sub x}{sup +}, P{sub 4}{sup +}, and As{sub 4}{sup +} beams. These species are derived from both low-temperature solids and gaseous sources. 2D beam profiles are presented, along with mass spectra, beam current performance, and long-term beam reproducibility. The data were collected using the injection stage of a commercial ion implanter equipped with a 120 degree analyzer magnet. Beam profiles at magnet entrance and exit planes were produced using a specially designed 2D profiler. Beam currents were measured after mass analysis using a Faraday cup over an effective energy range of 200 eV to 10 keV.

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43 PARTICLE ACCELERATORS75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITYBEAM CURRENTSBEAM MONITORSBEAM PROFILESBEAMSCHARGED PARTICLESCURRENTSENERGY RANGEEQUIPMENTEV RANGEEV RANGE 100-1000FARADAY CUPSION BEAMSION IMPLANTATIONION PAIRSION SOURCESIONIZATION CHAMBERSIONSKEV RANGEKEV RANGE 01-10MAGNETSMASSMASS SPECTRAMEASURING INSTRUMENTSMOLECULAR IONSMONITORSRADIATION DETECTORSSOLIDSSPECTRA

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Horsky, Thomas N, Hahto, Sami K, McIntyre, Edward K, Sacco, Jr, George P. 2011-01-07. N- and P-Type Cluster Source. https://doi.org/10.1063/1.3548447

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