Engineering topics
Publications and source records attributed to Hirleman, E. D..
The development of photomask reticle calibration standards for single particle instruments is discussed. The calibration method studied involves the use of photomask reticles where the particle artifacts are actually disks of chrome thin film in the clear field reticles produced by photolithography and etching processes. Consideration is given to various aspects of theory, design, and performance.
The performance of ten laser diffraction particle sizing instruments (Malvern models 2200 and 2600) has been evaluated using a synthetic particle size reference standard in a round-robin test at nine independent laboratories. A calibration reticle consisting of a two-dimensional array of opaque, circular particle images photoetched in chrome thin film deposited on a glass substrate was used as the reference. Mean diameters (e.g., D32) for the reticle measured by the ten unmodified instruments varied by 27 percent. In contrast, data from six instruments with individually calibrated photodetector correction factors demonstrated much better agreement and were within 2.6 percent of the actual reticle properties.
The response characteristics of laser diffraction particle sizing instruments were studied theoretically and experimentally. In particular, the extent of optical sample volume and the effects of receiving lens properties were investigated in detail. The experimental work was performed with a particle size analyzer using a calibration reticle containing a two-dimensional array of opaque circular disks on a glass substrate. The calibration slide simulated the forward-scattering characteristics of a Rosin-Rammler droplet size distribution. The reticle was analyzed with collection lenses of 63 mm, 100 mm, and 300 mm focal lengths using scattering inversion software that determined best-fit Rosin-Rammler size distribution parameters. The data differed from the predicted response for the reticle by about 10 percent. A set of calibration factor for the detector elements was determined that corrected for the nonideal response of the instrument. The response of the instrument was also measured as a function of reticle position, and the results confirmed a theoretical optical sample volume model presented here.