Engineering topics

Kaiser, William J.

Publications and source records attributed to Kaiser, William J..

At least 19 records

NASA NTRS2000

High Resolution and Large Dynamic Range Resonant Pressure Sensor Based on Q-Factor Measurement

A pressure sensor has a high degree of accuracy over a wide range of pressures. Using a pressure sensor relying upon resonant oscillations to determine pressure, a driving circuit drives such a pressure sensor at resonance and tracks resonant frequency and amplitude shifts with changes in pressure. Pressure changes affect the Q-factor of the resonating portion of the pressure sensor. Such Q-factor changes are detected by the driving/sensing circuit which in turn tracks the changes in resonant frequency to maintain the pressure sensor at resonance. Changes in the Q-factor are reflected in changes of amplitude of the resonating pressure sensor. In response, upon sensing the changes in the amplitude, the driving circuit changes the force or strength of the electrostatic driving signal to maintain the resonator at constant amplitude. The amplitude of the driving signals become a direct measure of the changes in pressure as the operating characteristics of the resonator give rise to a linear response curve for the amplitude of the driving signal. Pressure change resolution is on the order of 10(exp -6) torr over a range spanning from 7,600 torr to 10(exp -6) torr. No temperature compensation for the pressure sensor of the present invention is foreseen. Power requirements for the pressure sensor are generally minimal due to the low-loss mechanical design of the resonating pressure sensor and the simple control electronics.

Gutierrez, Roman C.↗

NASA NTRS1999

Silicon bulk micromachined, symmetric, degenerate vibratorygyroscope, accelerometer and sensor and method for using the same

When embodied in a microgyroscope, the invention is comprised of a silicon, four-leaf clover structure with a post attached to the center. The whole structure is suspended by four silicon cantilevers or springs. The device is electrostatically actuated and capacitively detects Coriolis induced motions of the leaves of the leaf clover structure. In the case where the post is not symmetric with the plane of the clover leaves, the device can is usable as an accelerometer. If the post is provided in the shape of a dumb bell or an asymmetric post, the center of gravity is moved out of the plane of clover leaf structure and a hybrid device is provided. When the clover leaf structure is used without a center mass, it performs as a high Q resonator usable as a sensor of any physical phenomena which can be coupled to the resonant performance.

Tang, Tony K.↗

NASA NTRS1996

Using BEEM To Probe Strains In Semiconductors

Ballistic-electron-emission microscopy (BEEM) useful in determining strains in semiconductors under some conditions. More specifically, BEEM is variant of scanning tunneling microscopy and sensitive to electronic structure of probed material. In present approach, BEEM used to obtain data on those aspects of variations in electronic structures related to variations in strains. Then by use of mathematical modeling of relationships between electronic structures and strains, variations in strains deduced from BEEM data.

Bell, L. Douglas↗

NASA NTRS1995

Micromachined, Electrostatically Deformable Reflectors

Micromachined, closed-loop, electrostatically actuated reflectors (microCLEARs) provide relatively simple and inexpensive alternatives to large, complex, expensive adaptive optics used to control wavefronts of beams of light in astronomy and in experimental laser weapons. Micromachining used to make deformable mirror, supporting structure, and actuation circuitry. Development of microCLEARs may not only overcome some of disadvantages and limitations of older adaptive optics but may also satisfy demands of potential market for small, inexpensive deformable mirrors in electronically controlled film cameras, video cameras, and other commercial optoelectronic instruments.

Bartman, Randall K.↗

NASA NTRS1995

Tunnel effect wave energy detection

Methods and apparatus for measuring gravitational and inertial forces, magnetic fields, or wave or radiant energy acting on an object or fluid in space provide an electric tunneling current through a gap between an electrode and that object or fluid in space and vary that gap with any selected one of such forces, magnetic fields, or wave or radiant energy acting on that object or fluid. These methods and apparatus sense a corresponding variation in an electric property of that gap and determine the latter force, magnetic fields, or wave or radiant energy in response to that corresponding variation, and thereby sense or measure such parameters as acceleration, position, particle mass, velocity, magnetic field strength, presence or direction, or wave or radiant energy intensity, presence or direction.

Kaiser, William J.↗

NASA NTRS1995

Uncooled tunneling infrared sensor

An uncooled infrared tunneling sensor in which the only moving part is a diaphragm which is deflected into contact with a micromachined silicon tip electrode prepared by a novel lithographic process. Similarly prepared deflection electrodes employ electrostatic force to control the deflection of a silicon nitride, flat diaphragm membrane. The diaphragm exhibits a high resonant frequency which reduces the sensor's sensitivity to vibration. A high bandwidth feedback circuit controls the tunneling current by adjusting the deflection voltage to maintain a constant deflection of the membrane. The resulting infrared sensor can be miniaturized to pixel dimensions smaller than 100 .mu.m. An alternative embodiment is implemented using a corrugated membrane to permit large deflection without complicated clamping and high deflection voltages. The alternative embodiment also employs a pinhole aperture in a membrane to accommodate environmental temperature variation and a sealed chamber to eliminate environmental contamination of the tunneling electrodes and undesireable accoustic coupling to the sensor.

Kenny, Thomas W.↗

NASA NTRS1995

Method for fabricating semiconductor devices

A process for fabricating gold/gallium arsenide structures, in situ, on molecular beam epitaxially grown gallium arsenide. The resulting interface proves to be Ohmic, an unexpected result which is interpreted in terms of increased electrode interdiffusion. More importantly, the present invention surprisingly permits the fabrication of Ohmic contacts in a III-V semiconductor material at room temperature. Although it may be desireable to heat the Ohmic contact to a temperature of, for example, 200 degrees Centigrade if one wishes to further decrease the resistance of the contact, such low temperature annealing is much less likely to have any deleterious affect on the underlying substrate. The use of the term in situ herein, contemplates continuously maintaining an ultra-high vacuum, that is a vacuum which is at least 10.sup.-8 Torr, until after the metallization has been completed. An alternative embodiment of the present invention comprising an additional step, namely the termination of the gallium arsenide by a two monolayer thickness of epitaxial aluminum arsenide as a diffusion barrier, enables the recovery of Schottky barrier behavior, namely a rectified I-V characteristic. The present invention provides a significant breakthrough in the fabrication of III-V semiconductor devices wherein excellent Ohmic contact and Schottky barrier interfaces to such devices can be achieved simply and inexpensively and without requiring the high temperature processing of the prior art and also without requiring the use of exotic high temperature refractory materials as substitutes for those preferred contact metals such as gold, aluminum and the like.

Kaiser, William J.↗

NASA NTRS1995

Improved, Easier-To-Use Tunneling Infrared Sensors

Designs of electron-tunneling infrared sensors and micromachining processes used to fabricate them modified to increase sensitivity and to simplify operation, adjustment, and associated circuitry. Corrugations, pinholes, and standard packaging incorporated into design. Deflection voltages reduced, and thermal drifts eliminated. Performances exceed those of other commercially available, uncooled infrared sensors. Operation of sensors simplified to such extent, now feasible to ship them to nonexpert users for routine testing and evaluation in their laboratories.

Muller, Richard E.↗

NASA NTRS1995

Capacitive Position Sensor For Accelerometer

Capacitive position sensor measures displacement of proof mass in prototype accelerometer described in "Single-Crystal Springs for Accelerometers" (NPO-18795). Sensor is ultrasensitive, miniature device operating at ultra-high frequency and described in more detail in "Ultra-High-Frequency Capacitive Displacement Sensor," (NPO-18675). Advances in design and fabrication of prototype accelerometer also applicable to magnetometers and other sensors in which sensed quantities measured in terms of deflections of small springs.

Vanzandt, Thomas R.↗

NASA NTRS1995

Single-Crystal Springs For Accelerometers

Thermal noise reduced, enabling use of smaller proof masses. Spring-and-mass accelerometers in which springs made of single-crystal material being developed. In spring-and-mass accelerometer, proof mass attached to one end of spring, and acceleration of object at other end of spring measured in terms of deflection of spring, provided frequency spectrum of acceleration lies well below resonant frequency of spring-and-proof-mass system. Use of single-crystal spring materials instead of such polycrystalline spring materials as ordinary metals makes possible to construct highly sensitive accelerometers (including seismometers) with small proof masses.

Vanzandt, Thomas R.↗

NASA NTRS1995

Micro Weather Stations for Mars

A global network of weather stations will be needed to characterize the near-surface environment on Mars. Here, we review the scientific and measurement objectives of this network. We also show how these objectives can be met within the cost-constrained Mars Surveyor Program by augmenting the Mars Pathfinder-derived landers with large numbers of very small (less than 5 liter), low-mass (less than 5 kg), low-power, low-cost Mini-meteorological stations. Each station would include instruments for measuring atmospheric. pressures, temperatures, wind velocities, humidity, and airborne dust abundance. They would also include a data handling, telemetry, power, atmospheric entry, and deployment systems in a rugged package capable of direct entry and a high-impact landing. In this paper, we describe these systems and summarize the data-taking strategies and data volumes needed to achieve the surface meteorology objectives for Mars.

Crisp, David↗

NASA NTRS1994

High performance miniature hygrometer and method thereof

An uncoated interdigitated transducer is cooled from a temperature above the dew point to a temperature below the dew point, while a parameter of a signal of the transducer is measured. The reduction in temperature causes a monotonic change in transducer signal because that signal is sensitive primarily to the water loading of the transducer surface as water forms on that surface due to the reduction in temperature. As the dew point is approached with temperature reduction, the slope of the curve of transducer signal with respect to temperature, remains relatively constant. However, as the dew point is reached the slope of that curve increases and because of changes in the structure of the water layer on the surface of the transducer, at the dew point the transducer responds with a clear shift in the rate at which the transducer signal changes. The temperature at which the second derivative of signal vs. temperature peaks can be readily used to identify with extreme accuracy, the precise dew point. The measurement technique employed by the present invention is relatively immune to surface contamination which remains significantly unchanged during the brief measurement period.

VanZandt, Thomas R.↗

NASA NTRS1994

Dual-Element Tunneling Accelerometer

Improved micromachined tunneling accelerometer contains two deflecting transducer elements: One an elastically supported proof mass having relatively low resonant frequency; other cantilever tunneling transducer that tracks displacement of proof mass and has relatively high resonant frequency ({sup a} 10 kHz). Deflection voltage generated by circuit like described in "Wideband Feedback Circuit for Tunneling Sensor" (NPO-18866). Accelerometers of this type suited for underwater acoustic measurements, detecting vibrations associated with malfunctions in vehicles, detecting seismic signals, monitoring and controlling vibrations in structures, and other applications.

Kaiser, William J.↗

NASA NTRS1994

Wideband Feedback Circuit For Tunneling Sensor

Improved feedback circuit designed for use in controlling tunneling displacement transducer. Features include stability and nearly flat frequency response up to 50 kHz. Transducer could be that in scanning tunneling microscope, or any of micromachined electromechanical transducers described in "Micromachined Electron-Tunneling Infrared Detectors" (NPO-18413), "Micromachined Tunneling Accelerometer" (NPO-18513), and "Improved Electromechanical Infrared Sensor" (NPO-18560).

Kaiser, William J.↗

NASA NTRS1994

Improved Electromechanical Infrared Sensor

Proposed electromechanical infrared detector improved version of device described in "Micromachined Electron-Tunneling Infrared Detectors" (NPO-18413). Fabrication easier, and undesired sensitivity to acceleration reduced. In devices, diaphragms and other components made of micromachined silicon, and displacements of diaphragms measured by electron tunneling displacement transducer {see "Micromachined Tunneling Accelerometer" (NPO-18513)}. Improved version offers enhanced frequency response and less spurious response to acceleration.

Kenny, Thomas W.↗

NASA NTRS1994

High-Performance Miniature Hygrometer

Relatively inexpensive hygrometer that occupies volume less than 4 in.(3) measures dewpoints as much as 100 degrees C below ambient temperatures, with accuracy of 0.1 degrees C. Field tests indicate accuracy and repeatability identical to those of state-of-the-art larger dewpoint hygrometers. Operates up to 100 times as fast as older hygrometers, and offers simplicity and small size needed to meet cost and performance requirements of many applications.

Van Zandt, Thomas R.↗

NASA NTRS1994

Ultra-High-Frequency Capacitive Displacement Sensor

Improved class of compact, high-resolution capacitive displacement sensors operates at excitation frequency of 915 MHz and measures about 7.5 by 4 by 2 centimeters. Contains commercially available 915-MHz oscillator and transmission-line resonator. Resonator contains stripline inductor in addition to variable capacitor. Ultrahigh excitation frequency offers advantages of resolution and frequency response. Not deleteriously affected by mechanical overdriving, or contact between electrodes.

Vanzandt, Thomas R.↗

NASA NTRS1994

Uncooled tunneling infrared sensor

An uncooled infrared tunneling sensor in which the only moving part is a diaphragm which is deflected into contact with a micromachined silicon tip electrode prepared by a novel lithographic process. Similarly prepared deflection electrodes employ electrostatic force to control the deflection of a silicon nitride, flat diaphragm membrane. The diaphragm exhibits a high resonant frequency which reduces the sensor's sensitivity to vibration. A high bandwidth feedback circuit controls the tunneling current by adjusting the deflection voltage to maintain a constant deflection of the membrane which would otherwise change deflection depending upon incident infrared radiation. The resulting infrared sensor will meet or exceed the performance of all other broadband, uncooled, infrared sensors and can be miniaturized to pixel dimensions smaller than 100 .mu.m. The technology is readily implemented as a small-format linear array suitable for commercial and spacecraft applications.

Kenny, Thomas W.↗