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Lee, Dennis T.

Publications and source records attributed to Lee, Dennis T..

Cryogenic Reduction of Surface-Bound HKUST-1Crystallites

HKUST-1 is a canonical Cu-based metal-organic framework (MOF) with potential roles in catalysis. A convenient hydroxy double salt templating synthesis was used to produce a thin layer of HKUST-1 crystallites amenable to surface science spec-troscopies under controlled conditions. To study the nature of the Cu sites, N2 and CO2 were adsorbed at cryogenic tempera-tures as passive probe molecules for Cu2+ sites. CO, which is commonly used as a probe molecule of both Cu2+ and Cu1+ sites in porous materials, was found to be a non-innocent probe molecule that reduces the Cu2+ and forms CO2. Isotopically labeled 13CO confirmed the Cu2+ reduction and CO oxidation. The results offer a way to tune Cu oxidation states in HKUST-1, even in the cryogenic temperature regime.

37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CH↗

Modification of ZIF‐8 Membranes for Gas Separation Using X‐ray Radiation

Abstract We report an X‐ray radiation‐induced modification of the structure and gas permeation behavior of ZIF‐8 membranes. With 300 min irradiation time, CO 2 permeance decreases by only 9 %, while N 2 and CH 4 permeances reduce by 75 and 65 %, respectively, leading to 3.7‐ and 2.6‐fold enhancements in ideal selectivity for CO 2 /N 2 and CO 2 /CH 4 .

Lee, Dennis T.↗

Modification of ZIF‐8 Membranes for Gas Separation Using X‐ray Radiation

Here, we report an X-ray radiation-induced modification of the structure and gas permeation behavior of ZIF-8 membranes. With 300 min irradiation time, CO 2 permeance decreases by only 9 %, while N 2 and CH 4 permeances reduce by 75 and 65 %, respectively, leading to 3.7- and 2.6-fold enhancements in ideal selectivity for CO 2 /N 2 and CO 2 /CH 4 .

ZIF-8 membranes↗

ZIF-8 Vibrational Spectra: Peak Assignments and Defect Signals

In this study, Zeolitic Imidazolate Framework-8 (ZIF-8) is a promising material for gas separation applications. It also serves as a prototype for numerous ZIFs, including amorphous ones, with a broader range of possible applications, including sensors, catalysis, and lithography. It consists of zinc coordinated with 2-methylimidazolate (2mIm) and has been synthesized with methods ranging from liquid-phase to solvent-free synthesis, which aim to control its crystal size and shape, film thickness and microstructure, and incorporation into nanocomposites. Depending on the synthesis method and post-synthesis treatments, ZIF-8 materials may deviate from the nominal defect-free ZIF-8 crystal structure due to defects like missing 2mIm, missing zinc, and physically adsorbed 2mIm trapped in the ZIF-8 pores, which may alter its performance and stability. Infra-red (IR) spectroscopy has been used to assess the presence of defects in ZIF-8 and related materials. However, conflicting interpretations by various authors persist in the literature. Here, we systematically investigate ZIF-8 vibrational spectra by combining experimental IR spectroscopy and first-principles molecular dynamics simulations, focusing on assigning peaks and elucidating the spectroscopic signals of putative defects present in ZIF-8 material. We attempt to resolve conflicting assignments from the literature and to provide a comprehensive understanding of the vibrational spectra of ZIF-8 and its defect-induced variations, aiming towards more precise quality control and design of ZIF-8-based materials for emerging applications.

36 MATERIALS SCIENCE↗

Zinc‐Imidazolate Films as an All‐Dry Resist Technology

Here, motivated by the drawbacks of solution phase processing, an all‐dry resist formation process is presented that utilizes amorphous zinc‐imidazolate (aZnMIm) films deposited by atomic/molecular layer deposition (ALD/MLD), patterned with electron beam lithography (EBL), and developed by novel low temperature (120 °C) gas phase etching using 1,1,1,5,5,5‐hexafluoroacetylacetone (hfacH) to achieve well‐resolved 22 nm lines with a pitch of 30 nm. The effects of electron beam irradiation on the chemical structure and hfacH etch resistance of aZnMIm films are investigated, and it is found that electron irradiation degrades the 2‐methylimidazolate ligands and transforms aZnMIm into a more dense material that is resistant to etching by hfacH and has a C:N:Zn ratio effectively identical to that of unmodified aZnMIm. These findings showcase the potential for aZnMIm films to function in a dry resist technology. Sensitivity, contrast, and critical dimensions of the patterns are determined to be 37 mC cm −2 , 0.87, and 29 nm, respectively, for aZnMIm deposited on silicon substrates and patterned at 30 keV. This work introduces a new direction for solvent‐free resist processing, offering the prospect of scalable, high‐resolution patterning techniques for advanced semiconductor fabrication processes.

77 NANOSCIENCE AND NANOTECHNOLOGY↗

CFD Simulation of the Dosing Behavior within the Atomic Layer Deposition Feeding System

The effective operation of atomic layer deposition (ALD) feeding system is the premise of realizing specific ALD processes. In the present work, a detailed computational fluid dynamics (CFD) model of the feeding system has been developed and validated, which accounts for the roles of ALD valves and manifolds. A numerical simulation of the compressible fluid flow and heat/mass transfer within the feeding system was conducted. The dosing amounts and the spatiotemporal distributions of the precursors can be accurately predicted using the CFD model, as validated by experimental results. Different precursors, operating conditions, and structures of the feeding system were simulated and analyzed to examine the operating flexibility of the feeding system. The simulation results can be adopted as the upstream boundary conditions for simulations of the ALD process in the reaction chamber. The substrate-scale simulation indicates that the effect of the feeding system on the film deposition is highly related to the surface kinetics of ALD. The present work can serve as a guide for the development and optimization of different ALD-based processes via proper operation and even the design of the feeding system.

37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CH↗

Twin suppression effect of dihydroxy-benzene isomers during the secondary growth of b -oriented zeolite MFI nanosheet films

In this study, the presence of MFI twin crystals on b-axis oriented zeolite MFI nanosheet films was suppressed by adding dihydroxy-benzene isomers in the synthesis mixture. The resulting nanosheet films exhibit good intergrowth and a small grain thickness of 30–45 nm within a relatively short synthesis time (hours). The possible twin suppression mechanisms for the three isomers are discussed.

37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CH↗

Modeling of deposit formation in mesoporous substrates via atomic layer deposition: Insights from pore‐scale simulation

Atomic layer deposition (ALD) has been a promising technique in fabricating membranes and tuning their properties with a precision at the atomic level. Fabrication of zeolitic imidazolate framework (ZIF) membranes using the ligand-induced permselectivation (LIPS) method starts with the formation of an oxide in a mesoporous substrate by ALD and is followed by the transformation of this oxide to ZIF using imidazolate vapor treatment. The objective of the ALD step is to block the mesopores with a thin deposit, that is, one with small penetration depth and small thickness on the top surface of the substrate. Unlike typical ALD on nonporous substrates, where all available sites react per ALD cycle, thin deposit formation in a mesoporous substrate requires that only a small fraction of the available deposition sites (i.e., close to the substrate surface) is subjected to ALD. Consequently, reactant dosing and duration of pulses are important process variables which, together with diffusion and reaction kinetics determine the deposit structure. Quantitative understanding of the interplay of these variables and phenomena can enable the rational design of ALD within mesoporous substrates. Here, we extend our earlier modeling effort considering the coexistence of ALD both inside the pores and on the external surface of the substrate. Finite-volume based models were developed and validated to simulate the two distinct modes of deposition cycle by cycle. The total mass uptake of the substrate with ALD cycles can be predicted using the combined surface deposition and pore reaction–diffusion models as affirmed by in situ quartz crystal microbalance experimental data. The ALD reactor model combined with the deposition model can accurately capture the number of ALD cycles needed to block the pores of the substrate. Based on the model, we designed a modified ALD process and examined the performance of the corresponding LIPS membranes. Furthermore, the present modeling work provides a new understanding of the deposit formation via ALD within mesoporous substrates for a variety of membrane applications.

atomic layer deposition↗

Zeolitic Imidazolate Framework Membranes: Novel Synthesis Methods and Progress Toward Industrial Use

In the last decade, zeolitic imidazolate frameworks (ZIFs) have been studied extensively for their potential as selective separation membranes. In this review, we highlight unique structural properties of ZIFs that allow them to achieve certain important separations, like that of propylene from propane, and summarize the state of the art in ZIF thin-film deposition on porous substrates and their modification by postsynthesis treatments. We also review the reported membrane performance for representative membrane synthesis approaches and attempt to rank the synthesis methods with respect to potential for scalability. To compare the dependence of membrane performance on membrane synthesis methods and operating conditions, we map out fluxes and separation factors of selected ZIF-8 membranes for propylene/propane separation. Finally, we provide future directions considering the importance of further improvements in scalability, cost effectiveness, and stable performance under industrially relevant conditions.

Chemistry↗

In Situ Tracking of Nonthermal Plasma Etching of ZIF-8 Films

Surface characterization is critical for understanding the processes used for preparing catalysts, sorbents, and membranes. Nonthermal plasma (NTP) is a process that achieves high reactivity at low temperatures and is used to tailor the surface properties of materials. In this work, we combine the capabilities of infrared reflection absorption spectroscopy (IRRAS) with NTP for the in situ interrogation of zeolitic imidazolate framework-8 (ZIF-8) thin films to probe modifications in the material induced by oxygen and nitrogen plasmas. The IRRAS measurements in oxygen plasma reveal etching of organic ligands with sequential removal of the methyl group and imidazole ring and with the formation of carbonyl moieties (C═O). In contrast, nitrogen plasma induces mild etching and grafting of nitrile groups (−C≡N). Scanning electron microscopy imaging shows that oxygen plasma, at prolonged times, significantly degrades the ZIF-8 film at the grain boundaries. Treatment of ZIF-8 membranes using mild plasma conditions yields a fivefold enhancement for H 2 /N 2 and CO 2 /CH 4 ideal selectivities and an eightfold enhancement for CO 2 /N 2 ideal selectivity. Additionally, the new tools described here can be used for spectroscopic in situ tracking of plasma-induced chemistry on thin films in general.

IRRAS↗

Solvent-free bottom-up patterning of zeolitic imidazolate frameworks

Patterning metal-organic frameworks (MOFs) at submicrometer scale is a crucial yet challenging task for their integration in miniaturized devices. Here we report an electron beam (e-beam) assisted, bottom-up approach for patterning of two MOFs, zeolitic imidazolate frameworks (ZIF), ZIF-8 and ZIF-67. A mild pretreatment of metal oxide precursors with linker vapor leads to the sensitization of the oxide surface to e-beam irradiation, effectively inhibiting subsequent conversion of the oxide to ZIFs in irradiated areas, while ZIF growth in non-irradiated areas is not affected. Well-resolved patterns with features down to the scale of 100 nm can be achieved. This developer-free, all-vapor phase technique will facilitate the incorporation of MOFs in micro- and nanofabrication processes.

77 NANOSCIENCE AND NANOTECHNOLOGY↗

ZIF‐8 Membrane Permselectivity Modification by Manganese(II) Acetylacetonate Vapor Treatment

Abstract Vapor‐phase treatment of ZIF‐8 membranes with manganese(II) acetylacetonate (Mn(acac) 2 ) allows permselectivity tuning. Propylene/propane selectivity increases from 31 to 210 after the Mn(acac) 2 treatment at 165 °C for 30 min, while selectivities increase from 14.6 to 242 for H 2 /CH 4 , from 2.9 to 38 for CO 2 /CH 4 , from 2.4 to 29 for CO 2 /N 2 , and from 2.9 to 7.5 for O 2 /N 2 , after Mn(acac) 2 treatment at 175 °C for 30 min. Stable equimolar propylene/propane mixture selectivity of 165 at ambient temperature and 4 bar equimolar feed with a propylene flux of 8.3×10 −4 mol m −2 s −1 is established. A control experiment excludes thermal treatment alone causing these changes. XPS analysis reveals the presence of Mn(acac) 2 on the outer surface of the vapor‐treated ZIF‐8 membranes while no other changes are detectable by X‐ray diffraction and infrared spectroscopy.

Hayashi, Mikio↗

ZIF‐8 Membrane Permselectivity Modification by Manganese(II) Acetylacetonate Vapor Treatment

Vapor-phase treatment of ZIF-8 membranes with manganese(II) acetylacetonate (Mn(acac) 2 ) allows permselectivity tuning. Propylene/propane selectivity increases from 31 to 210 after the Mn(acac) 2 treatment at 165 °C for 30 min, while selectivities increase from 14.6 to 242 for H 2 /CH 4 , from 2.9 to 38 for CO 2 /CH 4 , from 2.4 to 29 for CO 2 /N 2 , and from 2.9 to 7.5 for O 2 /N 2 , after Mn(acac) 2 treatment at 175 °C for 30 min. Stable equimolar propylene/propane mixture selectivity of 165 at ambient temperature and 4 bar equimolar feed with a propylene flux of 8.3×10 −4 mol m −2 s −1 is established. Furthermore, a control experiment excludes thermal treatment alone causing these changes. XPS analysis reveals the presence of Mn(acac) 2 on the outer surface of the vapor-treated ZIF-8 membranes while no other changes are detectable by X-ray diffraction and infrared spectroscopy.

77 NANOSCIENCE AND NANOTECHNOLOGY↗