Engineering topics
Publications and source records attributed to Todd, G..
An Auger electron spectroscopy (AES) system which has a submicron analysis capability is described. The system provides secondary electron imaging, as well as micro- and macro-area AES. The resolution of the secondary electron image of an oxidized Al contact pad on a charge-coupled device chip indicates a primary beam size of about 1000 A. For Auger mapping, a useful resolution of about 4000 A is reported
Silver and gold were evaporated up to several monolayers in thickness onto W single-crystal surfaces of the 110 and 100 plane types in the temperature range between 300 and 1300 K. The mode of growth and the structure of the layers were studied by Auger electron spectroscopy and low-energy electron diffraction. The results are compared with thermal desorption spectroscopy data and work-function change measurements. They show certain similarities but also some striking differences between the two systems Ag/W and Au/W as well as a strong crystallographic anisotropy of adsorption and condensation.
After a short review of experimental methods used to determine desorption energies and frequencies the assumptions underlying the theoretical analysis of experimental data are discussed. Recent experimental results on the flash desorption of Cu, Ag, and Au from clean, well characterized W (110) and (100) surfaces are presented and analyzed in detail with respect to the coverage dependence. The results obtained clearly reveal the limitations of previous analytical methods and of the experimental technique per se (such as structure and phase changes below and in the temperature region in which desorption occurs).
An experimental Auger microprobe system is described which incorporates a field-emission electron gun and total beam currents in the nanoampere range. The distinguishing characteristics of this system include a large multistation UHV specimen chamber, pulse counting and fully digital Auger signal-processing techniques, and digital referencing methods to eliminate the effects of beam instabilities. Some preliminary results obtained with this system are described, and it is concluded that field-emission electron sources can be used for high-resolution Auger electron spectroscopy with primary-beam spots of less than 100 nm and beam currents of the order of 1 nA.
The adsorption and condensation of Cu up to several monolayers in thickness on tungsten 110 and 100 single-crystal surfaces are studied by combining low-energy electron diffraction, Auger electron spectroscopy, thermal desorption spectroscopy, work-function measurements, and quartz microbalance thickness measurements in one experimental system. The results show drastic differences in the evolution of the structure, work function, and desorption behavior between 110 and 100 surfaces. These differences are understandable in terms of the atomic roughness of the surfaces.